... (SNMS)” is in use. The transformation of raw spectral or image intensities into meaningful concentrations is still challenging. Silicon Carbide – Materials, Processing and Applications in Electronic ... ISSN 0038-1101 Silicon Carbide – Materials, Processing and Applications in Electronic Devices 542 ERDA, XPS and nano-indentation measurements. Microchim. Acta., Vol. 156 , No.1-2, (April ... 0257-8972 Silicon Carbide – Materials, Processing and Applications in Electronic Devices 540 Schonfelder, H., Aldinger, E., Riedel, R. (1993). Silicon carbonitrides - A novel class of materials, ...