| Tài liệu tham khảo |
Loại |
Chi tiết |
| [2] – N.Yazdi, F.Ayazi and K.Najafi, “ Micromachined inertial sensors”, Proc.IEEE,86,1998,1640 – 1659 |
Sách, tạp chí |
| Tiêu đề: |
Micromachined inertial sensors”, "Proc.IEEE |
|
| [3] – Kai liu, Weiping Zhang, Wenyuan Chen, Kai Li, Fuyan Dai, Feng Cui, Xiaosheng Wu, Gaoyin Ma and Qijun Xiao, “The development of micro- gyrocopes technology”, J.Micromech, Microeng, 19(2009) 113001 (29pp) |
Sách, tạp chí |
| Tiêu đề: |
The development of micro-gyrocopes technology”, "J.Micromech, Microeng |
|
| [4] – J.Berstein, S.cho,A.T.King,A.Kourepenis,P.Maciel and M.Weinberg, “ A micromachined comb – drive tuning fork rate gyrocopes”, Proc,IEEE microelectromechanical Systems, Fort Lauderdale, FL,1993,143 – 148 |
Sách, tạp chí |
| Tiêu đề: |
A micromachined comb – drive tuning fork rate gyrocopes” |
|
| [5] – F.Ayazi and K.Najafi, “ Design and fabrication of a high performance polysilicon vibrating ring gyrocopes”, Proc,IEEE microelectromechanical Systems Workshop(MEMS98),Heideberg, Germany, 1998, 621 – 626 |
Sách, tạp chí |
| Tiêu đề: |
Design and fabrication of a high performance polysilicon vibrating ring gyrocopes” |
|
| [6] – A.Selvakumar and K.Najafi, “ High density vertical comb array microactuators fabricated using a novel bulk/ poly – silicon trench refill technology”, Tech. Dig. Solid – State sensor and Actuator Workshop, Hilton Head Island, SC,USA,1994, 138 – 141 |
Sách, tạp chí |
| Tiêu đề: |
High density vertical comb array microactuators fabricated using a novel bulk/ poly – silicon trench refill technology” |
|
| [7] – Nishad Patil, “Design and analysis of MEMS angular rate sensors”, A thesis submitted for Degree of Master of Science (engineering) in the Faculty of Engineering, Indian institute of science, Bangalore – 560-012 |
Sách, tạp chí |
| Tiêu đề: |
Design and analysis of MEMS angular rate sensors” |
|
| [8] – Pham Hong Phuc, “Study on Micro transportation Systems Based on Electrostatic Actuators Utilizing MEMS Technology” , PhD.Thesis, The Institute of Electrical Engineers of Japan |
Sách, tạp chí |
| Tiêu đề: |
Study on Micro transportation Systems Based on Electrostatic Actuators Utilizing MEMS Technology” |
|
| [9] – W.C Tang, T.Nguyen and R.T Howe, “ Laterally driven polysilicon resonators”,Proc,IEEE microelectromechanical Systems Workshop (MEMS89), 1989, 53 – 59 |
Sách, tạp chí |
| Tiêu đề: |
Laterally driven polysilicon resonators” |
|
| [11] – M.Kranz, “ Design, simulation and implementation of two novel micromechanical vibratory rate gyrocopes” , Mater’s thesis, Carnegie Mellon University, 1998 |
Sách, tạp chí |
| Tiêu đề: |
Design, simulation and implementation of two novel micromechanical vibratory rate gyrocopes” |
|
| [13] – Alper SE and Akin T 2000 A planar Gyroscopes using a standard surface micromechanical process 14 th European conf. on solid state Transducer pp 387 – 90 |
Sách, tạp chí |
|
| [14] – Sharma A, Zaman F M and Amini B V 2004 A high Q in plan SOI tuning fork gyroscopes Proc. IEEE 1 467 – 70 |
Sách, tạp chí |
|
| [15] – Putty M W and Najafi K 1994 A micromachined vibrating ring gyrocscopes Micro Electro Mechanical Systems, MEMS’95 Proc. IEEE pp213 -20 |
Sách, tạp chí |
| Tiêu đề: |
Micro Electro Mechanical Systems, MEMS’95 Proc. IEEE |
|
| [16] – Ayazi F and Najafi K 2001 A HARPSS polysilicon vibrating ring gyroscopes Microelectromech. Syst. 10 169 – 79 |
Sách, tạp chí |
| Tiêu đề: |
Microelectromech. Syst |
|
| [17] – He G and Najafi K 2002 A single crystal silicon vibrating ring gyrocopes 15 th IEEE Int. Conf. on Micro Electro Mechanical Systems pp 718 - 21 |
Sách, tạp chí |
| Tiêu đề: |
15"th" IEEE Int. Conf. on Micro Electro Mechanical Systems |
|
| [18] – Juneau T, Pisano A P and Smith J H 1997 Dual axis operation of a micromachined rate gyroscopes Solid – State Sensor and Actuator 2 833 – 6 [19] – Cenk Acar , Four Degrees of Freedom Micromachined Gyrocopes, Microsystems Laboratory Technical Report, 23 October 2001 |
Sách, tạp chí |
| Tiêu đề: |
Solid – State Sensor and Actuator 2 833 – 6 "[19] – Cenk Acar , Four Degrees of Freedom Micromachined Gyrocopes |
|
| [12] - Greiff P, Boxenhorn B and King T 1991 Silicon monolithic micromechanical gyrocopes Solid state sensor and Actuators,Transducer’91 pp966-8 |
Khác |
|