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CRYSTALLINE SILICON – PROPERTIES AND USES Edited by Sukumar Basu Crystalline Silicon – Properties and Uses Edited by Sukumar Basu Published by InTech Janeza Trdine 9, 51000 Rijeka, Croatia Copyright © 2011 InTech All chapters are Open Access articles distributed under the Creative Commons Non Commercial Share Alike Attribution 3.0 license, which permits to copy, distribute, transmit, and adapt the work in any medium, so long as the original work is properly cited. After this work has been published by InTech, authors have the right to republish it, in whole or part, in any publication of which they are the author, and to make other personal use of the work. Any republication, referencing or personal use of the work must explicitly identify the original source. Statements and opinions expressed in the chapters are these of the individual contributors and not necessarily those of the editors or publisher. No responsibility is accepted for the accuracy of information contained in the published articles. The publisher assumes no responsibility for any damage or injury to persons or property arising out of the use of any materials, instructions, methods or ideas contained in the book. Publishing Process Manager Iva Lipovic Technical Editor Teodora Smiljanic Cover Designer Jan Hyrat Image Copyright Cray Photo, 2010. Used under license from Shutterstock.com First published July, 2011 Printed in Croatia A free online edition of this book is available at www.intechopen.com Additional hard copies can be obtained from orders@intechweb.org Crystalline Silicon – Properties and Uses, Edited by Sukumar Basu p. cm. ISBN 978-953-307-587-7 free online editions of InTech Books and Journals can be found at www.intechopen.com Contents Preface IX Chapter 1 Amorphous and Crystalline Silicon Films from Soluble Si-Si Network Polymers 1 Michiya Fujiki and Giseop Kwak Chapter 2 Study of SiO 2 /Si Interface by Surface Techniques 23 Constantin Logofatu, Catalin Constantin Negrila, Rodica V. Ghita, Florica Ungureanu, Constantin Cotirlan, Cornelui Ghica Adrian Stefan Manea and Mihai Florin Lazarescu Chapter 3 Effect of Native Oxide on the Electric Field-induced Characteristics of Device-quality Silicon at Room Temperature 43 Khlyap Halyna, Laptev Viktor, Pankiv Lyudmila and Tsmots Volodymyr Chapter 4 Structure and Properties of Dislocations in Silicon 57 Manfred Reiche and Martin Kittler Chapter 5 High Mass Molecular Ion Implantation 81 Bill Chang and Michael Ameen Chapter 6 Infrared Spectroscopic Ellipsometry for Ion-Implanted Silicon Wafers 105 Bincheng Li and Xianming Liu Chapter 7 Silicon Nanocrystals 121 Hong Yu, Jie-qiong Zeng and Zheng-rong Qiu Chapter 8 Defect Related Luminescence in Silicon Dioxide Network: A Review 135 Roushdey Salh VI Contents Chapter 9 Silicon Nanocluster in Silicon Dioxide: Cathodoluminescence, Energy Dispersive X-Ray Analysis and Infrared Spectroscopy Studies 173 Roushdey Salh Chapter 10 Nanocrystalline Porous Silicon 219 Sukumar Basu and Jayita Kanungo Chapter 11 Nanocrystalline Porous Silicon: Structural, Optical, Electrical and Photovoltaic Properties 251 Ma.Concepción Arenas, Marina Vega, OmarMartínez and Oscar H. Salinas Chapter 12 Porous Silicon Integrated Photonic Devices for Biochemical Optical Sensing 275 Ilaria Rea, Emanuele Orabona, Ivo Rendina and Luca De Stefano Chapter 13 Life Cycle Assessment of PV systems 297 Masakazu Ito Chapter 14 Design and Fabrication of a Novel MEMS Silicon Microphone 313 Bahram Azizollah Ganji Chapter 15 Global Flow Analysis of Crystalline Silicon 329 Hiroaki Takiguchi and Kazuki Morita Preface The importance of crystalline silicon and the emergence of nanocrystalline material are heading towards miniaturization of silicon based devices. The entire device technology is getting a radical transformation through bottom up approach and corresponding increase in density of integration that is a challenge in processes and materials via top down approach. The availability of macro-micro-nano phases of silicon is a boom to the silicon based technology for the third generation electronic and optoelectronic devices and their integration for ICs, solar cells, sensors and biomedical devices. So, it can be said that silicon is the heart of both modern & future technology. The crystalline silicon is a store house of developing innumerable human friendly technology. For example, the evolution of green energy to avoid the global contamination from petroleum and its related products is possible only by silicon and silicon related devices. The rich abundance of silicon in nature and its minimum toxic property is a distinct commercial advantage over other synthetic materials. An extensive research & development on silicon materials and devices is a continuing process to study & clearly understand the fundamental changes in the crystalline structure and the defect states with the decrease of the crystallite dimensions from macro to nano sizes. The quantization effect in silicon that has already revealed some interesting properties needs further investigations for more vital information. Along with the theory more advanced experimental techniques are to be employed for this purpose. The book ‘Crystalline Silicon: Properties and Uses’ presents fifteen chapters in all with the examples of different forms of silicon material, their properties and uses. Formation of silicon thin films through solution route via organic precursors has been described in Chapter 1. The modern techniques to study the oxide –silicon interface in different crystalline forms have been highlighted in chapter 2 and the behaviour of the native oxide on silicon has been demonstrated in chapter 3 of this book. Chapter 4 deals with the characterizations of dislocations in silicon in an elaborate fashion. Doping of silicon by high mass molecular ion implantation is treated in detail and an ellipsometric investigation of doping by ion implantation is discussed in chapters 5 and 6 respectively. Silicon nanocrystals, in general, are presented in chapter 7.The cathodoluminescent characterization of silicon nanoclusters in silicon dioxide has been discussed in depth in two chapters e.g. chapters 8 and 9. Nanocrystalline porous silicon, a novel material for nano-electronic, optoelectronic and sensor applications are X Preface presented in three chapters (10, 11 & 12) that cover different novel methods of preparations, structural & optical properties and porous silicon integrated photonic devices for bio-applications. Chapter 13 has been devoted to silicon based photovoltaic solar cells and their life cycle assessment. The use of silicon based MEMS devices in the microphone technology is an interesting addition to this book and the details are dealt in chapter 14. The commercial aspects of the availability & consumption of silicon on global perspective have been taken into consideration in chapter 15. In fact, this book presents different basic and applied aspects of crystalline silicon. It is a unique combination of conventional and novel approaches to understand the behaviour of silicon in different crystalline states for potential applications in the present scenario and in near future. The valuable contributions of the renowned researchers from different parts of the globe working on various aspects of crystalline silicon are magnificent and deserve great appreciations. It is once again proved that knowledge knows no bounds. The credit goes to the entire InTech publishing group members for their tireless efforts to work on this project to publish the book in time. The editorial assistance of the process manager, Ms. Iva Lipovic needs special mention for the success of this book project. The help of Dr. (Ms.) Jayita Kanungo, the research associate of Jadavpur University, India is sincerely appreciated. Prof. Sukumar Basu IC Design & Fabrication Centre, Dept. of Electronics and Telecommunication Engineering, Jadavpur University, India [...]... circles and dotted lines are experimental and calculated weight values for elemental Si, respectively 6 Crystalline Silicon – Properties and Uses Fig 4 Scanning electron microscope (SEM) images of n-propyl SNP pyrolyzed at 900 °C in a N2 atmosphere (scale bars: left, 100 m, and right, 1 m) Fig 5 Surface analysis of n-BSNP and n-propyl SNP by SEM and energy dispersive X-ray spectroscopy (EDS) before and. .. films were removed from the 4 Crystalline Silicon – Properties and Uses glove box and sealed using a hand-burner using vacuum techniques (0.3 Torr by rotary pump or 5 x 10-5 Torr by a Pfeiffer turbo molecular pump) For pyrolysis experiments and photoluminescence (PL)/PL excitation (PLE) measurements, the glass tubes were placed into a housing made of an aluminum block and then onto a digitally-controlled... which is deposited using a highly dangerous SiH 4– Si2H6 chemical vapor deposition (CVD) process 1.1 Physical and chemical approaches for controlling the band gap of crystalline silicon There are many types of Si-based materials ranging from zero-dimensional (0D) nanocrystalline silicon (nc-Si) and nanoparticles, one-dimensional (1D) polysilane and nanowire, and two-dimensional (2D) Si-skeletons, including... 24, 237 9–2 381 22 Crystalline Silicon – Properties and Uses Takeda, K.; Teramae, H & Matsumoto, N (1986) Electronic structure of chainlike polysilane Journal of the American Chemical Society, Vol 108, No 26, 818 6–8 190 Takeda, K & Shiraishi, K (1989) Electronic structure of Si-skeleton materials Physical Review B, Vol 39, No 15, 1102 8–1 1037 Takeda, K & Shiraishi, K (1993) Electronic structure of silicon- oxygen... reported Dimensionality and Eg (eV) (Brus, 1994; Takeda & Shiraishi, 1989) 4Aelements C Si Ge Sn Pb 3D 5.5 (IG) 1.1 (IG) 0.7 (IG) 0.1 ~0 2D 1D – 2.3 (IG and DG) 1.8 (IG and DG) – – ~8 ~4 (DG) ~4 (DG) ~ 3 (DG) – Table 1 Schematic concept of skeleton dimensionality and elements DG: Direct gap, IG: Indirect gap Solution processing of metal chalcogenide semiconductors to fabricate stable and highperformance... polymer, (SiH2)n, at 30 0–5 50 °C in an oxygen-free glove box (Shimoda et al., 2006) This hydrogenated polysilane was produced by a four-step synthesis, including a photo-induced ring-opening process, using diphenyldichlorosilane as a starting material (Scheme 4) 8 Crystalline Silicon – Properties and Uses 2 A new family of silicon network polymers as a precursor for c-Si, a-Si, and other Si-based materials... temperatures 10 Crystalline Silicon – Properties and Uses When the virgin films were treated at 300 °C for 90 min, the PL band was shifted slightly to green, corresponding to a peak maximum at 520 nm Conversely, when the freshly-prepared films were treated at 350 °C, 400 °C, and 450 °C for 90 min, the PL wavelength was progressively red-shifted to orange at 580 nm, to red at 640 nm, and to deep-red... extremely high F of 2 0–2 5% and a short lifetime of ~5 nsec, probably due to the presence of siloxene-like, multi-layered Si-sheet structures En = 2/2m•(/na)2, purely electronic transitions with n (1) 12 Crystalline Silicon – Properties and Uses En = (n + 1/2) , purely vibronic transitions with n (2) The PL (excited at 360 nm), PL excitation (PLE, monitored at 540 nm), and UV-visible absorption... the pyrolysis process; under these 16 Crystalline Silicon – Properties and Uses conditions, n-BSNP reveals a very brilliant green-colored PL band at 540 nm (2.30 eV) (Fig 14) (Fujiki et al., 2009) This result differs from that of a previous report of green PL from poly(n-hexylgermyne) (Kishida et al., 1994) Fig 14 Photographs (left) and PL spectra (right) of n-BSNP and n-BGNP films excited at 365 nm at... Saito, and Shin-ichi Hososhima for their helpful discussions and contributions 18 Crystalline Silicon – Properties and Uses 5 References Alivisatos, A P (1996) Perspectives on the physical chemistry of semiconductor nanocrystals The Journal of Physical Chemistry, Vol 100, No 31, 13226-13239 Bianconi, P A.; Schilling, F C & Weidman, T W (1989) Ultrasound-mediated reductive condensation synthesis of silicon- silicon-bonded . CRYSTALLINE SILICON – PROPERTIES AND USES Edited by Sukumar Basu Crystalline Silicon – Properties and Uses Edited by Sukumar Basu. The book Crystalline Silicon: Properties and Uses presents fifteen chapters in all with the examples of different forms of silicon material, their properties and uses. Formation of silicon. Crystalline Silicon – Properties and Uses 2 Brus, 1994; Alivisatos, 1996) and experimentally explored as follows: (a) 0D and 1D materials as visible-near IR emitters, including nc-Si and