... 48 4- 4 88 intrinsic capacitances, 47 7 -4 84 on-chip, 47 7 -4 8 1 off-chip, 48 1 -4 84 current method, 44 8 -4 52 split C-V method, 45 2 -4 57 saturation voltage, 47 2 -4 77 inversion layer mobility: 582 ... length: 48 9 -4 91 current methods, 45 8 -4 67 capacitance method, 46 8 -4 70 effective channel width, 47 0 -4 72 flat band voltage, 44 5 gate current, 41 0 -4 12 gate overlap capacitances, 48 4- 4 88 intrinsic ... profile: C-V method (MOS capacitor), 42 8 -4 34 C-V method (MOSFET) , 43 4- 4 36 DC method (MOSFET) , 43 6 -4 38 four-point probe method, 42 7 spreading resistance method, 42 8 SIMS method, 42 8 optical...