Chế tạo thiết bị đánh giá độ bền màng dày bằng mũi rạch

CHE TAO THIET BI DANH GIA DO BEN M A N G D A Y B A N G M O I R A C H Le Quang Trd "\ Ngiiyin Van Vinh ^\ Nguy in Thi Phirong Med *^ "^ P5- El6- Tong cue Hdu can- Ki thiicit- Bg Cong An ''^ Bg mon Ca chinh xdc & Quang hge, Vi^n Ca khi, Dgi hge Bdch khoa Hd ngi Tom tdt: Bdi bdo trinh bdy cdc ket qud nghien ciru che tgo thiet bi ddnh gid ben mdng ddy theo phuang phdp rgch- cdt ddnh gid tong hgp ben cua mdng ddy diing cdc dung cu cdt ggt kim logi Ket qud nghien cuu che tgo thiet bi gom: die tgo ddu mid rgch, he thdng ca dien vd phdn mem dieu khien chuyen dgng rgch cdt bdng mdy tinh vd mgt sd ket qud thue nghiem Abstract: In this paper present the researching results and fabrication scratch- tester device for measuring adhesion of thick film on cutting tool The result of fabrication include: manufacturing stylus, automatic system for device controlled by computer and some result of experiment f ^ ' \ w r y y * f \ f I Gidi thieu Cong nghe mang mdng hinh thdnh di vdo phuc vu kT thudt va ddi sdng ngudi da md mdt ki nguyen mdi khoa hge kT thudt, sdn phdm ciia nganh cdng nghiep ndy co mat hdu het cdc trang thiet bi, cac Idp phu cd the la de trang trf, tang ben, vi hoa cdc sdn phdm cdng kenh Trong khoa hge kT thudt Idp phii cd vai trd rdt quan trgng nhu viec thu nhd tdng W f w hieu suat cua cdc chip may tfnh (mgt nganh cdng nghiep thay ddi toan bd the gidi quan cua ngudi), cdc sdn phdm phyc vu cong nghiep vii tru, ndng lugng mat trdi, cdc chi tiet chju dieu kien 1dm viec khdc nghiet nhu dyng cu cat, ddu phun, ddu dot Tdm quan trgng cua mang mdng khong the phii nhdn vide danh gid kiem sodt chdt lugng cua chiing cang la mdt vdn de cdn quan tdm nhdm ddm bdo hieu qud sdn sudt ciing nhu su dung Trong qua trinh kiem tra chdt lugng mdng mdng xdc dinh co tfnh la mdt dieu kien bet sue w r r ' quan trgng vi co tfnh quyet dinh rat Idn den vai tro cua Idp ma cho chi tiet Mdt chi tieu ddnh gia quan trgng cd y nghTa bao qudt chfnh Id viec xac dinh bam dfnh cua mang len chi tidt ma Dieu dac biet cd y nghTa ddi vdi nhung chi tiet dugc phu dd nang cao tuoi thg 1dm viec co Phuong phap rach Idn ddu tien su dyng de nghien ciiu dfnh bam cua cac loai mang mdng chd tao cdc chi tidt quang nhu Idp phii kim loai tren bd mat dd thuy tinh, kim loai (mang quang bgc) Nhd khoa hoc Mathews (1974) da sir dung phuang >\,-C7\" l5?^Pi wo"- .30- •to Hinh I: Nguyen ly thiet bi rgch da dirffc dang kiphdt minh 127 phap liich tic danh [lii'i biim dfnh ciia Idp phii bae lien thep hoae ddng Thici bi n.ich dugc hiii nhii khoa hoc Allan llmoyse vii Hunu- juc su diing kf philt minli ngiiy Ihiing 12 n;lm 2007 ma sd [IS 7_^()2831 B2 Thidt bi duoc md tii nhu binh dau muj rach 15 dudi uic dung ciui luc tiic dung theo phuang 45 sc lao \ct rach Idn miiu rach 25 MOi rach ddng ihdi chuyen ddng thco hai phiro'ng 45 v;i 40 lie ihong dau rach cd the dich chuydn tren he thdng dan hudng Uio chuyen dong gdm c;ic true dan 65 vii vitme bi 70 Hidn nay, tai Vici Nam chuii cd ca sd nghien ciru, che lao nao nghien ciru chd tao thiet bi xac dinh ca Ifnh niiing mdng thco nguyen ly trdn Nhdm tiic gi;i manh diin nghien ciru chd tao thiet bi rach mdt phiin mong mudn diinh giii dugc ciic chi tidu ca tfnh ciia mang mdng phuc vu cdng tac nghien ciru vii siin xuat ciic loai miing II Nguyen ly hoat dong thiet bj rach Phuong phiip rach la phuong phap dung mpt mui nhgn tidu chuan rach Idn be mat m ^ can Xiic dinh bam dfnh, vet rach dugc tao tren be mat Idp phu dudi tdc dung tdng ddn cua luc den phat hidn sir bdc tach Vide xac dinh su bdc tdch cd thd dya vao vide quan sat tren cac kfnh hiln vi hoae thdng qua cac tfn hieu x;ic djnh sidu dm hodc lyc ma sat trdn ddu miii rach Lvc Co tfnh ciia mang mdng phu thudc vdo vdt lieu chd tao mang va Idp d§ dugc ma mang Ddi vdi Idp mang mdm tren ndn cd Cling cao ban thi lyc cdt tdi ban cd thd rach be mat Idp phii z phu thudc vdo dde tinh nen va lyc ma sat trdn ddu miii rach ban kinh miii rach R xdc dinh bdi Ldp pi MQi rach _ L v c ma sit B y" • p kAH Z = ^- y.^' [F: K-y- •: '- :,'J'."\ • • ^ - ^ '•'f ••' » ' r ã Chuyen dô5ng cua mau tl"di2i Nguyen ly thiet bi rgch Ban kfnh tai didm tidp xiic A= (Lc/ H)^^^,L luc tdi han, H la cirng cua vdt lieu Idp ndn vd k la hdng sd bidn thien khodng 0,2 va 1,0 iTn^ sudt tmgt tdi ban gia tdng nhu gia tdng dg cimg Idp ndn dieu thfch hgp vdi thf nghiem mdn Ddi vdi nhirng loai mdng cirng phu trdn Idp dd cirng tuong duong pha hiiy cua Idp vat lieu phu cd the xdc djnh thdng qua irng sudt udn, keo vd irng suat gay nut theo dang chdm l/ng sudt udn tdi han Ob xac djnh bdi cdng thirc: ^t 128 = \.22.E.( t^ \-vR) Hinh 3: Vit rgch tren nin vdt lieu mdng cimg v Trong dd £ va c la sual Young va sual (he sd) Poisson ciia Idp phu t la day lap phii va R la biin kfnh ciia ciic khu vuc bidn dang (vimg 1dm) U'ng sudt keo Oi, la irng suat sinh lap mang bj keo Ididi Idp ndn xac djnh bdi: Vdi Ri la ban kfnh cong ciia mat ' phan gidi cong va t la day Idp phu Khi cdc vet rach niit di tmgt lyc nen xdy bdc tdch mat phan gidi Cac iing suat ludng cyc cdn thiet de gay mit chem Ow, xdc djnh bdi: 'ã^s _4Ê^^ ô^w = {i-v,.)AJ Trong dd G^ Id ndng lugng phd hiiy Idp phii vd X la ehidu rdng khu vyc nut vd chem U'ng suat luong cyc tao cac manh •vyn.Osp sau vet nut di tmgt xdy xac djnh bdi : I ^ P = Trong dd G, la ty Id thoat ndng lugng bien dang (ung sudt) tir mdt vet nut khu vyc mat phan gidi (vf du nhu ndng lugng pha hiiy mat phan gidi) dieu dd, mdt tmdng hgp ly tudng, cd the lap phuong trinh vdi ndng lugng rach nut Idp ndn y, va vi vay Id bam dinh ca ban W f Dya vao cac quan he ung suat d tren vdi vet rach thu dugc thdng qua cac qud trinh rach c6 the xdc dinh dugc co tinh cua Idp phii III Thiet ke che tao thiet bi rach * * D$ng CO * De ddm bdo tfnh ndng boat dgng cua thiet bi can cd cac co cau tmyen chuyen dgng cho ban mdy vd dau miii rach, he thdng cam bien dich chuyen, cdm bien lyc tac dyng, he thong tao ap lyc eho miii rach, he thdng cdc mach dieu khidn Viec thiet kd thiet bi chia lam hai phdn Idn Thiet kd he thdng co khf - Thidt ke he thdng mach didu khidn vd lap trinh B$ ph$n Uo iplUcP Itdu thi nghilm RIH Cociug&b^do D^ngco B9 phin tfo di chuyIn cho miu Hinh 4: Nguyen ly thiet bi rgch duac che tgo 129 IV Ket quii biin hum Sau UL'hicn ciru ihiel kc che lao ihicl hi rach dat dugc mdi sd chi lieu ki thual sau: Do tkiy many ui 0-^20///// Chii}u diiy riich luO- 100 mm Luc rach Ion nhiil la 60N, Do phan yiai cam bidn luc dat 0.02 N Thue hicn dugc che dd thco hai chicu thuan nghjch Dihu khicn loc dp ddng ca thco ydu ciui Phiin mem then khidn vii giao dipn de sir dung Hinh 5: Thiit hi rgch die tgo dirge ddt tgi phdng thi nghiem DH Bach khoa Hd ngi Hinh Mui rach duoc che tao theo tieu chuan voi ban kinh dau mui R= 200 \xm, g6c (f dinh 120 ° 130 !SS • "'•.••i^S-'ira?"*';''>'i" • 'Si" •VTS! :'"t!:ft!' y< '-1 "".'•,•- 'A" i., ii ~~T" •:> J n i^li_J 0' »•"•'•' f , ('11 -J £ , J ^ tl' —— f CJpI -c J? I'l"" —rf- • C M - •uw r Cr-*^ rv|uoc |• 99 on J Clt! o:: c:* •• - - M7 -^ r'l ii •:t«fi I ft - Komi Hinh Giao dien tren may tinh viet bang ngon ngu VB6 phuc vu dieu khien va hien thj ket qua Mau 2500 2000 Q < 1500 U 1000 0>0>»0«i00m 500 ^,-*>-; %j£^i^AiJ^ 1 r— Khoang each rach (mm) Hlnh 8: Mot kit qua thir nghiem cua thilt bj rach tren mui dao hpp kim co phii Nitorit Titan Vdi kdt qua thu dugc cd the xdc djnh dugc thdi didm bdc tdch Idp phii ciing nhu lyc bdc tdch tir dd cd the so sdnh dugc co tinh cua cdc Idp phu V Kit luan ^ Thidt bj dugc chd tao da budc ddu thir dugc mdt sd mdu Ddm bdo nguyen ly chung r X ' > cua nguyen tac xdc djnh co tfnh ciia Idp phii bdng phuang phap rach He thdng mach dieu khien, phdn mdm didu khidn dd sir dung tmc quan giiip cho vide do, ghi nhdn, luu kdt qua dd dang, cdc sd lieu dugc ghi lai trdn tep tin dudi ".txt" do cd the trich ddn ket qua xir ly trdn cac phan mdm khac Cac phan mem dugc vidt trdn Visual C va Visual Basic giiip cho viec hoan thien kd thira ciia cdc nghien cuu tidp theo de dang ban 131 Ciic kel quii budc diiu cd the giiip so ,s;uih giua ciic mau do, kdt qua tin cay dugc Thdng qua \ioc che liio va ihir nghicni thiet hi ciic li'ic giii nhan ihdy cdn cd mdt sd nghien ciru siiu ho'n de hoiin thien thiol bi nhu ,s;iu: Cdn ch(} lao dugc cam hicn lire ci) phiin giai, dn djnh tdt ban Thiet kc bd phan gia luc d;im biio ydu c;iu liim vide ciia thiet bj do.Vide sir dung phuang phiip gia luc dii ch6 lao gap phiii kho khan vice dn djnh iip luc cung nhu tao luc dii Idn, dam bao kfn khft Se hoan thien ban neu thiet bj dugc Irang bi thdm kfnh hidn vi 40- 200X Giiip quan sat diem dau cham mui rach va linh trang vet rach tdt hon Tai lieu tham khao [1] R J Good, ''Theory of cohesive vs adhesive separation in an adhering system,"J Adhes., 4, 133-154(1972) [2] J Abn, K L Mittal, and R H McQueen, "Hardness and adhesion of filmed structures as determined by the scratch technique," ASTM STP 640 Philadelphia: American Society for Testing and Materials, 1978, pp 134-157 [3] Leon I Maissel and Reinhard giang, "Handboock of Thin Film Technology" McGrawHill Bock Company" 1996 [4] Nguyen Thj Phuang Mai ''Cdng nghe chdn khong- cong nghe mdng mong", Bdi gidng ndm 2005, 2008 [5] Trdn Dinh Tudng " Cong nghe mdng mdng", Nhd xudt bdn KHKT, nam 2002 132