modeling and simulation of the capacitive acceleration sensor

COVER

TABLE OF CONTENTS

Abbreviation

List of Tables

List of Figures

Foreword

CHAPTER 1 INTRODUCTION

1.1 Overview of MEMS

1.2 Silicon Micro Accelerometers

1.2.1 Electromechanical Accelerometers

1.2.2 Piezoelectric Accelerometers

1.2.3 Piezoresistive Accelerometers

1.2.4 Electrostatic Accelerometers

1.2.5 Resonant Accelerometers

1.3 MEMS Modeling and Simulation

CHAPTER 2 ACCELEROMETER: FROM THEORY TO DESIGN

2.1 Operational Principles

2.1.1 Open-Loop Design

2.1.2 Force-Balance Design

2.1.3 Comparisons

2.2 Capacitive Accelerometer

2.2.1 Position Measurement with Capacitance

2.2.2 Noise Analysis

CHAPTER 3 MODELING AND SIMULATION OF THE ACCELEROMETER

3.1 Overview o f SUGAR

3.2 Nodal Analysis Approach

3.2.1 A simple example of the MEMS structure

3.2.2 Linear Beam Model

3.2.3 Nonlinear Beam Model

3.2.4 Nonlinear Gap Model

3.2.5 Gap Model with Contact Forces

3.3 Simulation Program based on SUGAR

3.4 Simulation Results

3.4.1 Single Capacitive Accelerometer

3.4.2 Differential Capacitive Accelerometer with a Single Beam

3.4.3 Differential Capacitive Accelerometer with Two Symmetric Beams

3.4.4 Two Parallel Beams Accelerometer

3.4.5 Four Symmetric Beams Accelerometer

3.5 Experimental Calibration Set-up and Experimental Results

3.5.1 Fabricated Sensor and Calibration Set-up

3.6 Comparison o f the simulation and experimental results

CHAPTER 4 CONCLUSIONS

4.1 Concluding Remarks

4.2 Future Work

4.3 List of Publications

REFERENCE

APPENDIX