| Tài liệu tham khảo |
Loại |
Chi tiết |
| [1] Nguyễn Quang Long, “Nghiên cứu chế tạo cảm biến quán tính sử dụng cấu trúc răng lược trên cơ sở công nghệ MEMS,” – Luận Văn Thạc sĩ Khoa học, Viện ITIM Đại Học Bách Khoa Hà Nội, 2012 |
Sách, tạp chí |
| Tiêu đề: |
Nghiên cứu chế tạo cảm biến quán tính sử dụng cấu trúc răng lược trên cơ sở công nghệ MEMS |
|
| [2] Cenk Acar and Andrei Shkel, “MEMS Vibratory Gyroscopes Structural Approaches to Improve Robustness,” University of California, June 2008 |
Sách, tạp chí |
| Tiêu đề: |
MEMS Vibratory Gyroscopes Structural Approaches to Improve Robustness |
|
| [3] C. Acar, A. Shkel. Design Concept and Preliminary Experimental Demonstration of MEMS Gyroscopes with 4-DOF “Master-Slave ” Architecture. SPIE Conference on Smart Electron-ics and MEMS, March 2002 |
Sách, tạp chí |
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| [5] M. D. Pottenger, “Design of Micromachined Inertial Sensors,” PhD. Dissertation, Univ. of California, 2001 |
Sách, tạp chí |
| Tiêu đề: |
Design of Micromachined Inertial Sensors |
|
| [6] J. E. D. Williams, “From Sails to Satellites: The Origin and Development of Navigational Science,” New York, Oxford University Press, 1994 |
Sách, tạp chí |
| Tiêu đề: |
From Sails to Satellites: The Origin and Development of Navigational Science |
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| [7] S. E. Alper, “Silicon Surface Micromachined Gyroscopes Using MEMS Technology,” M.S. Thesis, Middle East Technical Univ, 2000 |
Sách, tạp chí |
| Tiêu đề: |
Silicon Surface Micromachined Gyroscopes Using MEMS Technology |
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| [8] K. Kumar, N. Barbour, and J. M. Elwell, “Emerging Low(er) Cost Inertial Sensors,” Proc. AIAA GN&C Conf., pp. 11-24, August 1992 |
Sách, tạp chí |
| Tiêu đề: |
Emerging Low(er) Cost Inertial Sensors |
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| [9] M. Kraft, “Micromachined Inertial Sensors: The State of the Art and a Look into Future,” IMC Measurement and Control, Vol. 33 No. 6, pp. 164-168, 2000 |
Sách, tạp chí |
| Tiêu đề: |
Micromachined Inertial Sensors: The State of the Art and a Look into Future |
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| [10] N. Yazdi, F. Ayazi, and K. Najafi, “Micromachined Inertial Sensors,” Proc. of the IEEE, Vol. 86, No 8, pp. 1640-1659, August 1998 |
Sách, tạp chí |
| Tiêu đề: |
Micromachined Inertial Sensors |
|
| [11] H. Kulah, “Closed-Loop Electromechanical Sigma-Delta Microgravity Accelerometers,” PhD. Dissertation, Univ. of Michigan, 2003 |
Sách, tạp chí |
| Tiêu đề: |
Closed-Loop Electromechanical Sigma-Delta Microgravity Accelerometers |
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| [12] J. Dosher and C. Kitchin, “Monitoring Machine Vibration with Micromachined Accelerometers,” Sensors 14(5), pp. 33-34, May 1997 |
Sách, tạp chí |
| Tiêu đề: |
Monitoring Machine Vibration with Micromachined Accelerometers |
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| [13] P. F. Man, and C. H. Mastrangelo, “Surface micromachined shock sensor for impact detection,” Tech. Digest of IEEE Solid-State Sensors and Actuator Workshop (Hilton Head’94), pp.156-159, 1994 |
Sách, tạp chí |
| Tiêu đề: |
Surface micromachined shock sensor for impact detection |
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| [14] R. S. Seeley, “Micromachines Rev Up for Fast Growth,” Electronic Business Today, pp- 33-38, April 1996 |
Sách, tạp chí |
| Tiêu đề: |
Micromachines Rev Up for Fast Growth |
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| [15] R. F. Yazıcıoğlu, “Surface Micromachined Capacitive Accelerometers Using MEMS Technology,” M.S. Thesis, Middle East Technical Univ. ,2003. 132 |
Sách, tạp chí |
| Tiêu đề: |
Surface Micromachined Capacitive Accelerometers Using MEMS Technology |
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| [16] N. Barbour, G. Schmidt, “Inertial Sensor Technology Trends,” Workshop on Autonomous Underwater Vehicles, pp.55-62, 1998 |
Sách, tạp chí |
| Tiêu đề: |
Inertial Sensor Technology Trends |
|
| [17] R. L. Craik and C. A. Oatis (Eds.), “Gait Analysis: Theory and Applications,” Mosby, 1995 |
Sách, tạp chí |
| Tiêu đề: |
Gait Analysis: Theory and Applications |
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| [18] K. Miller, D. Hendelman, C. Baggett, E. Debold, and P. Freedson, “Validation of Accelerometry to Assess Moderate Intensity Physical Activity in the Field,”Medicine & Science in Sports & Exercise, 31(5), pp.43, May 1999 |
Sách, tạp chí |
| Tiêu đề: |
Validation of Accelerometry to Assess Moderate Intensity Physical Activity in the Field |
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| [19] W. Kuehnel and S. Sherman, “A surface micromachined silicon accelerometer with on-chip detection circuitry,” Sensors and Actuators Vol. A-45, pp. 7-16, 1994 |
Sách, tạp chí |
| Tiêu đề: |
A surface micromachined silicon accelerometer with on-chip detection circuitry |
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| [20] S. J. Sherman, W. K. Tsang, T. A. Core, R. S. Payne, D. E. Quinn, K. H. L. Chau, J. A. Farash, and S. K. Baum, “A Low Cost Monolithic Accelerometer:Product/Technology Update,” Techncal Digest International Electron Devices Meeting, pp.501-504, 1992 |
Sách, tạp chí |
| Tiêu đề: |
A Low Cost Monolithic Accelerometer: "Product/Technology Update |
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| [22] G. He and K. Najafi, “A Single-Crystal Silicon Vibrating Ring Gyroscope,” Proc. IEEE Micro Electro Mechanical Systems Workshop (MEMS’02), pp. 718- 721,January 2002 |
Sách, tạp chí |
| Tiêu đề: |
A Single-Crystal Silicon Vibrating Ring Gyroscope |
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