Document Revision History: Dimension 3100 Manual Revision Date Section(s) Affected Ref. DCR Approval B 06/01/00 All. 313 A. Varbel A 08/25/97 Released. N/A M. Leilani Copyright © 2000 Digital Instruments Veeco Metrology Group All rights reserved. Dimension TM 3100 Manual Version 4.43B 004-320-000 (standard) 004-320-100 (cleanroom) Rev. B Dimension 3100 Manual TOC-1 Dimension 3100 Manual Table of Contents List of Figures LOF-1 Chapter 1 System Overview 1-1 1.1 Overview . . . . . . . . . . . . . . . . . . . . . . . . . .1-1 1.2 How to Reach Digital Instruments Veeco .1-2 1.3 System Overview . . . . . . . . . . . . . . . . . . .1-3 1.3.1 Dimension 3100 SPM Features . . . . . . . . 1-3 1.4 Control Station Overview . . . . . . . . . . . . .1-5 1.4.1 Input and Display Devices . . . . . . . . . . . . 1-5 1.4.2 Computer . . . . . . . . . . . . . . . . . . . . . . . . . 1-6 1.4.3 NanoScope IIIa Controller . . . . . . . . . . . 1-7 1.4.4 Dimension 3100 Controller . . . . . . . . . . . 1-8 1.5 Dimension 3100 SPM Overview . . . . . .1-10 1.5.1 Dimension 3100 Microscope Electronics Box 1-10 1.5.2 Optics and Motors Overview . . . . . . . . . 1-11 1.5.3 Stage System . . . . . . . . . . . . . . . . . . . . . 1-12 1.5.4 Dimension SPM Head . . . . . . . . . . . . . . 1-12 1.5.5 Cantilever Holder . . . . . . . . . . . . . . . . . 1-16 1.5.6 Video Zoom Microscope . . . . . . . . . . . . 1-19 1.6 Sample Size & Handling . . . . . . . . . . . .1-20 1.7 Facilities Specifications . . . . . . . . . . . . .1-20 1.8 Applications . . . . . . . . . . . . . . . . . . . . . .1-21 1.9 Maintenance and Troubleshooting . . . . .1-21 . Group All rights reserved. Dimension TM 310 0 Manual Version 4. 43B 0 04- 320-000 (standard) 0 04- 320 -10 0 (cleanroom) Rev. B Dimension 310 0 Manual TOC -1 Dimension 310 0 Manual Table of Contents . . . 1- 8 1. 5 Dimension 310 0 SPM Overview . . . . . .1- 10 1. 5 .1 Dimension 310 0 Microscope Electronics Box 1- 10 1. 5.2 Optics and Motors Overview . . . . . . . . . 1- 11 1. 5.3 Stage. .1- 3 1. 3 .1 Dimension 310 0 SPM Features . . . . . . . . 1- 3 1 .4 Control Station Overview . . . . . . . . . . . . .1- 5 1 .4. 1 Input and Display Devices . . . . . . . . . . . . 1- 5 1 .4. 2