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1.3 APPLICATION AREAS FOR SMART
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Smart Material Systems and MEMS - Vijay K. Varadan Part 1 pot
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18 Smart Material Systems and MEMS
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Smart Material Systems and MEMS - Vijay K. Varadan Part 2 pot
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sensors MEMS and Smart Devices, John Wiley & Sons, Ltd,
London, UK (20 02) .
11. V .K. Varadan, X. Jiang and V.V. Varadan, Microstereolitho-
graphy and ... Equations (2. 28) and (2. 34) then
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Smart Material Systems and MEMS - Vijay K. Varadan Part 3 pot
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Smart Material Systems and MEMS - Vijay K. Varadan Part 4 pot
... pp.
361–366 (1998).
10. V .K. Varadan and V.V. Varadan, ‘Microsensors, microelec-
tromechanical systems (MEMS) and electronics for smart
structures and systems , Smart Materials and Structures, 9,
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Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan
# 2006 John Wiley &a...
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Smart Material Systems and MEMS - Vijay K. Varadan Part 7 ppt
... the top and
Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan
# 2006 John Wiley & Sons, Ltd. ISBN: 0-4 7 0-0 936 1 -7
7. 9 SPECTRAL ... 68.9 67. 7
3 (torsion) 186 .7 1 87. 7
4 (bending) 279 .6 239.1
204 Smart Material Systems and MEMS
Here, we see that some of the coefficients asso...
Smart Material Systems and MEMS - Vijay K. Varadan Part 8 pot
... displace-
ment. Substituting Equation (8. 98) into Equations (8. 79),
(8. 82), (8. 86), (8. 88) , we can get the mass matrix, all the
relevant stiffness matrices and the load vector due to the
magnetic ... Equation (8. 77) in
terms of the nodal magnetic degrees of freedom, for
which the second part of Equation (8. 91) is used, and
2 08 Smart Material Systems and MEMS
where:...
Smart Material Systems and MEMS - Vijay K. Varadan Part 9 pdf
... tip
response.
252 Smart Material Systems and MEMS
Part 4
Fabrication Methods and Applications
Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan
# ... methacrylate) E-beam and
X-ray
Negative Kodak 747 Optical
Negative Dichloropropyl acrylate X-ray
and gylcidyl metha-
crylate-co-ethyl acryla...
Smart Material Systems and MEMS - Vijay K. Varadan Part 10 ppsx
... long-term
Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan
# 2006 John Wiley & Sons, Ltd. ISBN: 0-4 7 0-0 936 1-7
of a reliable ... microstructures with high-aspect-
ratios and even 3-D features [60]. Micro-electroplating
can be divided into two major categories: through-
mask-plating (or thr...
Smart Material Systems and MEMS - Vijay K. Varadan Part 11 potx
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Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan
# 2006 John Wiley & Sons, Ltd. ISBN: 0-4 7 0-0 936 1-7
adhesion ... O’Neal, S. Singh and W.D. Brown,
‘Packaging and integration of MEMS and related
microsystems for system-on-a-package (SOP)’ in Pro-
ceedings of the SPIE Sympos...
Smart Material Systems and MEMS - Vijay K. Varadan Part 12 ppsx
... form or thin-film form. With the
availability of RF technology, wireless MEMS devices
Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan
# ... mA–4mA
Magneto-mechanical coupling
constant 15 Â 10
À6
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352 Smart Material Systems and MEMS
11. M.Cole, G. Sehra, J.W. Gardner, and V .K. Varadan,...
Smart Material Systems and MEMS - Vijay K. Varadan Part 13 ppt
... (1997).
16. V .K. Varadan, Smart Electronics, Eds. V .K. Varadan, 2448,
SPIE Press, Bellingham, WA, USA (1995).
17. V .K. Varadan and P.J. McWhorter, Smart Electronics and
MEMS, Eds. V .K. Varadan and P. ... Serial
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Smart Material Systems and MEMS - Vijay K. Varadan Part 14 doc
... stress, 314, 322
Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan
# 2006 John Wiley & Sons, Ltd. ISBN: 0-4 7 0-0 936 1-7
Etching, ... between the longitudinal and transverse components at the fuselage interface for
y ẳ 90
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394 Smart Material Systems and MEMS
piezofiber, 212
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