Smart Material Systems and MEMS - Vijay K. Varadan Part 1 pot

... (Webster’s) dictionary meanings of these terms [1]: Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan # 2006 John Wiley & Sons, ... AB n1 A ỵbyproduct 2:20ị 30 Smart Material Systems and MEMS 1.3 APPLICATION AREAS FOR SMART SYSTEMS Developments in the areas of smart materials and...

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... constant 11 .7 — 16 .3 12 Young’s modulus (GPa) 19 0 16 1 —— 18 Smart Material Systems and MEMS 2 Processing of Smart Materials 2 .1 INTRODUCTION Smart microsystems are a collection of microsensors and actuators ... 5350 5 316 Melting point (  C) 14 10 — 937 12 38 Electrical conductivity (10 3 ÂS/cm) 4 Â 10 À3 13 Â 10 À5 $10 À5 Energy band gap (eV) 1. 1 1...

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... V .K. Varadan and O.O. Awadelkarim, Micro- sensors MEMS and Smart Devices, John Wiley & Sons, Ltd, London, UK (20 02) . 11. V .K. Varadan, X. Jiang and V.V. Varadan, Microstereolitho- graphy and ... Equations (2. 28) and (2. 34) then yields: R p ẳ k p ẵM FI abs k t 1 =2 2:35ị and by using Equation (2. 22) , the expression for R p becomes: R p ẳ k p ẵM FI 0 1 10 edc...

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... Q 13 D 2 2 ỵ Q 13 D 2 3 4:1 03 s 2 ẳ s D 12 T 1 ỵ s D 11 T 2 ỵ s D 13 T 3 ỵ Q 13 D 2 1 ỵ Q 33 D 2 2 ỵ Q 13 D 2 3 4:104ị s 3 ẳ s D 13 T 1 ỵ s D 13 T 2 ỵ s D 33 T 3 ỵ Q 13 D 2 1 ỵ Q 13 D 2 2 ỵ Q 33 D 2 3 4:105ị s 4 ẳ ... 4Q 44 T 4 D 3 4:101ị E 3 ẳ D 3 P 2ị 0 e 0 e T 33 ị 2 ae T 33 ị 2 w q 4Q 44 T 5 D 1 4Q 44 T 4 D 2 2Q 33 T 3 D 3 2Q 13...

Ngày tải lên: 10/08/2014, 02:21

... pp. 361–366 (1998). 10. V .K. Varadan and V.V. Varadan, ‘Microsensors, microelec- tromechanical systems (MEMS) and electronics for smart structures and systems , Smart Materials and Structures, 9, 953–972 ... u t i e i Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan # 2006 John Wiley &a...

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... k sn 2 ịik n o n 2 I 1 A 55 B 55 A 55 k n 2 rk sn 2 k n 2 k Ln k Bn 2 s 1 s 2 k sn ik n s 1 2 1 k sn 2 k n 2 k Bn 4 iB 55 B 13 ịk n 2 A 55 i A 13 A 33 k n o n 2 I 1 A 33 B 55 A 33 k n 2 iB 55 B 13 ịk n 2 A 33 o n 2 I 2 A 33 ... as: s xx s yy s zz t yz t xz t xy 8 > > > > > > < > > > > > > : 9 > > > > > > = &g...

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... as: e xx e yy e zz g xy g yz g zx 8 > > > > > > > > < > > > > > > > > : 9 > > > > > > > > = > > > > > > > > ; ẳ @ @x 00 0 @ @y 0 00 @ @z @ @y @ @x 0 0 @ @z @ @y @ @z 0 @ @x 2 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 4 3 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 5 u v w 8 > < &...

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... the top and Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan # 2006 John Wiley & Sons, Ltd. ISBN: 0-4 7 0-0 936 1 -7 7. 9 SPECTRAL ... 68.9 67. 7 3 (torsion) 186 .7 1 87. 7 4 (bending) 279 .6 239.1 204 Smart Material Systems and MEMS Here, we see that some of the coefficients asso...

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... displace- ment. Substituting Equation (8. 98) into Equations (8. 79), (8. 82), (8. 86), (8. 88) , we can get the mass matrix, all the relevant stiffness matrices and the load vector due to the magnetic ... Equation (8. 77) in terms of the nodal magnetic degrees of freedom, for which the second part of Equation (8. 91) is used, and 2 08 Smart Material Systems and MEMS where:...

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... tip response. 252 Smart Material Systems and MEMS Part 4 Fabrication Methods and Applications Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan # ... methacrylate) E-beam and X-ray Negative Kodak 747 Optical Negative Dichloropropyl acrylate X-ray and gylcidyl metha- crylate-co-ethyl acryla...

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... long-term Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan # 2006 John Wiley & Sons, Ltd. ISBN: 0-4 7 0-0 936 1-7 of a reliable ... microstructures with high-aspect- ratios and even 3-D features [60]. Micro-electroplating can be divided into two major categories: through- mask-plating (or thr...

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... is used to Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan # 2006 John Wiley & Sons, Ltd. ISBN: 0-4 7 0-0 936 1-7 adhesion ... O’Neal, S. Singh and W.D. Brown, ‘Packaging and integration of MEMS and related microsystems for system-on-a-package (SOP)’ in Pro- ceedings of the SPIE Sympos...

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... form or thin-film form. With the availability of RF technology, wireless MEMS devices Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan # ... mA–4mA Magneto-mechanical coupling constant 15 Â 10 À6 mm=A 352 Smart Material Systems and MEMS 11. M.Cole, G. Sehra, J.W. Gardner, and V .K. Varadan,...

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... (1997). 16. V .K. Varadan, Smart Electronics, Eds. V .K. Varadan, 2448, SPIE Press, Bellingham, WA, USA (1995). 17. V .K. Varadan and P.J. McWhorter, Smart Electronics and MEMS, Eds. V .K. Varadan and P. ... Serial CONNECTOR CONNECTOR CONNECTOR LEVEL TRANSLATOR SIGNAL CONDITIONING BOOT FLASH UART MUX + ADC CLOCK ADSP-2181 DSP 8 CHANNEL SERIAL DAC SIGNAL CONDITIONING 33 8...

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... stress, 314, 322 Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan # 2006 John Wiley & Sons, Ltd. ISBN: 0-4 7 0-0 936 1-7 Etching, ... between the longitudinal and transverse components at the fuselage interface for y ẳ 90 . 394 Smart Material Systems and MEMS piezofiber, 212 sensors...

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