fabrication of mems pressure sensor for lab course e3222

Ngày tải lên: 19/06/2014, 10:20

... Sensors and Actuators B 101 (2004) 107–111 Wet process-based fabrication of WO 3 thin film for NO 2 detection Yong-Gyu Choi, Go Sakai, Kengo Shimanoe, Noboru Yamazoe ∗ Department of Materials ... separation between electrodes) under the rotation speed of 1500rpm. The obtained thin film of WO 3 ·2H 2 O was calcined at 300 ◦ C for 2 h for conversion of WO 3 ·2H 2 O to WO 3 as well as sintering. Gas ... tungsten oxide sensor for detection of ammonia in air, Chem. Lett. (1992) 639. [3] M. Ando, S. Suto, T. Suzuki, T. Tsuchida, C. Nakayama, N. Miura, N. Yamazoe, H 2 S and CH 3 SH sensor using a thick film of...

Ngày tải lên: 20/03/2014, 13:11

Ngày tải lên: 21/06/2014, 08:20

Ngày tải lên: 13/11/2014, 08:38

... would easily allow an upscale of the possible substrate to 6”-wafer size. Thus our fabrication procedure might be the technology of choice for the controlled fabrication of SnO 2 - nanowires as gas ... our fabrication procedure might be the technology of choice for the controlled fabrication of SnO 2 -nanowires on a wafer scale. TEM-analysis has revealed the single crystalline character of ... SnO 2 -nanowire sensor to a real-world device is focused on improvement of sensor selectivity and on specific control of nanowire growth. Both issues will be tackled by means of our fabrication...

Ngày tải lên: 05/05/2014, 15:26

... evaluate performance, fabrication and testing. Reviews of the modeling and test results enable optimization of the performance of the MEMS device. Fig. 1-6. A typical approach to MEMS application ... complexity of the design, it’s often difficult to predict the performance of MEMS devices intuitively. In these cases computer simulations may provide a means to study the performance of MEMS devices ... pressure of the fluid. This pressure was solved from Navier- Stokes equations by setting the membrane displacement as one of its boundary conditions. Therefore, the behavior of the PIPH is a set of...

Ngày tải lên: 10/04/2013, 13:48

... conformation of UhpC with no requirement for translocation of substrate. We compared the effects of site-specific mutations of the UhpC protein on both the transport and sensing functions of this ... mutagenesis. For maximal efficiency a cell fully expresses the proteins required for transport only when the substrate of that transport system is available in the medium. The presence of low levels of ... few molecules of substrate changes the conformation of UhpC and that this change is required for UhpC to initiate the transcription of the uhpT gene. Alternatively, the binding of Glc6P could...

Ngày tải lên: 08/03/2014, 08:20

... nature? What accounts for the structure and evolution of the universe, and what is its future? These questions are ripe for a new phase of investigation for a range of reasons. For decades, physicists ... transform our understanding of the origin of matter and energy and the ongoing evolution of the universe. The limitations of the Standard Model are evident, for example, when trying to account for ... general theory of relativity in 1916, he devoted much of his scientific work to a problem that consumed him until the end of his life in 1955: the unifi- cation of the fundamental forces of nature,...

Ngày tải lên: 14/03/2014, 10:20

... semiconductive wires are formed. The application of these wires was recently demonstrated for the fabrication of electrodes for thin lithium-ion batteries [38]. The binding of gold to the viruses ... a relatively low cost. One of the early applications of DNA for the forma- tion of nanowires, in 1998, involved the metallization of dsDNA between two electrodes to form conductive silver nanowire ... templates for nanowire fabrication FEBS Journal 274 (2007) 317322 ê 2006 The Author Journal compilation ê 2006 FEBS 319 MINIREVIEW Use of biomolecular templates for the fabrication of metal nanowires Ehud...

Ngày tải lên: 16/03/2014, 12:20

... Simulation of the electrostatic field distribution in the cross section of the c-Si substrate with a uniform line of charge of 34nC on the top surface. A dc voltage of 1V and an ac voltage of 0 V ... the baseline of 5% over a 20min timeline. For acetonitrile and chloroform, the re- sponse is not reversible therefore the same sensor could not be tested but the reproducibility of the response ... as a function of the dielectric constant for chloroform, acetone, ethanol and acetonitrile. M. Archer et al. / Sensors and Actuators B 106 (2005) 347–357 351 Fig. 5. Simulation of the electric...

Ngày tải lên: 16/03/2014, 15:23

... values (TLV) for NO 2 and NO are 3 and 25 ppm, respectively [5]. Therefore, a NO x sensor requires high sensitivity for detecting low concentration of gases. Another enormous driving force for developing ... atmosphere of 40 ppm NO in air. 3.2. Screening 1% doped WO 3 sensors After the đrst report of using WO 3 -based sensor for NO analysis, Yamazoe and co-workers [9] carried out extensive screening of the ... may somehow interfere with the main pathway for a current ¯ow through the sensor particles in this particular sensor. Studies of electrical conductivity of WO 3 have been extensively carried out...

Ngày tải lên: 19/03/2014, 16:47

... Mendeleyev University of Chemi- cal Technology of Russia in 1964. He is a professor, head of the Department of Physical Chemistry of Sensor Materials in the N.S. Kurnakov Institute of Gen- eral and ... development of thick film materials for tin dioxide based gas sensors enabled the fabrication of sensitive and relatively selective gas sensors. However, long-term stability of the sensors remains ... with the solution of ethyl cellulose in terpineol to form printable ink. The ink was deposited on sensor microheater platform, dried for 15 min at 150 ◦ C and annealed at 700 ◦ C for 15 min to reach...

Ngày tải lên: 19/03/2014, 16:47

... heated at 700 ◦ C for 4 h in open air, resulting in formation of arrays of LSCO nanotubes in the inside of the pores of the AAO template. 2.4. Characterization The morphologies of the LSCO nanowires ... fields of interest are nanomaterials Xing-Zhong Zhao received his PhD in physics at University of Science and Technology of Beijing in China (1989) and presently is a professor in Depart- ment of ... Depart- ment of Physics of Wuhan University. His current fields of interest are Lab on a Chip. W. Liu et al. / Sensors and Actuators B 134 (2008) 62–65 63 Fig. 1. Apparatus for gas sensing test. =1−...

Ngày tải lên: 20/03/2014, 13:04

... the presence of chloroform. The sensitivity of PANI to chloroform was similar to that previously reported for bulk PANI [19]. The response to toluene was greater than that for chloroform. Toluene, ... higher. Both sensors had relatively rapid responses, with the response to the chloroform being stronger and faster in the nanofiber sensor. The response of the sensors to chlo- roform was modeled ... (1). b Time required for the signal to reach 90% of its final value, the total change of (1 − I ∞ ). Fig. 3. Sensor responses of bulk and nanofiber-based sensors to chloroform vapor. The curves...

Ngày tải lên: 20/03/2014, 13:05

... voltage of sensor was 5V. 3.1.3. Sensor response to NH 3 Table 2 shows the highest values of sensor s response to NH 3 at room temperature. From Table 2, we can see that the most respon- sive sensor ... The electrical resistance of a sensor was measured in sample gases and also in air. The transformational relation between the resistance (R) of a sensor and the output voltage of the sampling resistor ... the baseline resistance of the sensor in dry air and R g is the resistance value in the presence of a gas to be measured. To examine reproducibility of the sensor response, the sensor was exposed...

Ngày tải lên: 20/03/2014, 13:06

... lập trái ngược nhau (F-4) OUT1: Nó sẽ OFF, khi nó vượt quá St1. OUT2: Nó sẽ OFF, khi nó vượt quá St2. Mode 2 ngõ ra độc lập chéo nhau (F-5) OUT1: Nó sẽ OFF, khi nó nhỏ hơn St1. OUT2: Nó sẽ...

Ngày tải lên: 10/04/2014, 20:11

... most of the samples are cubic in nature. The broadening of peaks is indicative of small particle size. The sizes have been computed busing Dubey-Scherrer formula and obtained in the range of ... voltages, saturation of EL intensity occurs for lower concentrations of nanocrystalline loading. This shows that such composites can be easily used for EL devices with advantage of better flexibility ... Fabrication of ZnS:Cu/PVA nanocomposite electroluminescence devices for flat panel displays Sakshi Sahare 1 , S. J. Dhoble 2* , Pranav Singh 1 , Meera Ramrakhiani 1 1 Department of...

Ngày tải lên: 28/04/2014, 10:50

Ngày tải lên: 11/06/2014, 12:29

Ngày tải lên: 18/06/2014, 22:20