fabrication of mems devices

... complexity of the design, it’s often difficult to predict the performance of MEMS devices intuitively. In these cases computer simulations may provide a means to study the performance of MEMS devices ... Role of numerical simulation A typical approach to MEMS application from concept to devices can be shown in Fig. 1-6. The approach consists of several steps such as specifications of MEMS device, ... evaluate performance, fabrication and testing. Reviews of the modeling and test results enable optimization of the performance of the MEMS device. Fig. 1-6. A typical approach to MEMS application...

Ngày tải lên: 10/04/2013, 13:48

Ngày tải lên: 28/04/2014, 10:50

Ngày tải lên: 06/05/2014, 08:53

Ngày tải lên: 27/07/2014, 22:21

Ngày tải lên: 26/11/2013, 13:24

Ngày tải lên: 11/12/2013, 23:57

Ngày tải lên: 12/12/2013, 00:03

... MB of data, or about 70 minutes of audio. ã Once data is written to a standard CD-ROM disk, the data cannot be altered or overwritten. Optical Storage Devices - Other Optical Storage Devices ã A ... New PCs feature hard disks with capacities of 10 GB and higher. lesson 9 Review ã List four types of magnetic and four types of optical storage devices. ã Identify three common uses for ... reflected back. This represents a bit value of 0 (off). A land reflects light back to its source, representing a bit value of 1 (on). Magnetic Storage Devices - Formatting ã Before a magnetic...

Ngày tải lên: 16/02/2014, 08:20

... agglomeration (merging of two particles into one), breakage (division of one particle to two) as well as nucleation of particles of size r ≥0 and particle feed and removal. The rate of change of the continuous-phase variables ... is the subject of Chaps. 7 through 9. Position control of MEMS actuators is presented in Chap. 7, closed-loop operation of precision MEMS gyroscopes is covered in Chap. 8, and the control of particle ... (e.g., a MEMS accelerometer). Other examples of micro- and nanosystems include nanomechanical resonators, cell micromanipulators, and nanofabrication tools. Clearly this is a diverse group of systems,...

Ngày tải lên: 05/03/2014, 11:20

... work. Reference 1. Marc Madou, Fundamentals of Microfabrication. CRC Press, 1997. 2. Chien-Hung Ho and Wensyang Hsu. Experimental Investigation of an Embedded Root Method for Stripping SU-8 ... SU8-50 ldNi nickel sulfamate electrolyte. The value of applied current density was in the range of 1-10ASD. Temperature of 52 o C and pressure of 4Kg/cm 2 would help to make a better interface ... removal of SU8 after electroplating, the root technique and the selection of right ratio between SU8 mold and nickel structure thicknesses have been implemented. The evaluated temperature of 52 o C...

Ngày tải lên: 05/03/2014, 14:20

... compensation devices according to the changing of loads. The controlling of compensation devices could be implemented by power electronics structures controlling the firing angle of thyristor. ... 2001. VNU Journal of Science, Mathematics - Physics 25 (2009) 77-82 77 Application of power electronic components to control parameters and switching of compensation devices on power networks ... terminals of appliances such as fans, air-conditioners, refrigerators, Neon tubes are even lower because of consuming a lot of reactive power. Therefore, not only the compensation devices should...

Ngày tải lên: 05/03/2014, 14:20

... application of these wires was recently demonstrated for the fabrication of electrodes for thin lithium-ion batteries [38]. The binding of gold to the viruses followed by reduction of the cobalt ... formation of ordered metallic assemblies at the nano-scale have involved the strepavidin protein array of a 2D array of biotinylated DNA, followed by metallization of the array [17]. Use of the ... D (2005) Structure of the cross- beta spine of amyloid-like fibrils. Nature 435, 773–778. 25 Inouye H, Sharma D, Goux WJ & Kirschner DA (2006) Structure of core domain of fibril-forming PHF...

Ngày tải lên: 16/03/2014, 12:20

... Fabrication of a porous polyimide membrane using a silicon nanowire array as a template Woong Kim ⁎ , Myung-Ki Lee Department of Materials Science and Engineering, ... polyimide membr ane intact, XeF 2 etching was c arried out over 5 0–200 cy cles of exposure t o 4 Torr of XeF 2 and 2 Torr of N 2 for 60 s . Polyimide membr anes were e ither detached from silicon ... be adjusted by simply altering the amount of solution applied. About 5–10 μl of polyimide solution was found to be appropriate for a silicon substrate of 0.5 by 0.5 cm. Substrates treated with...

Ngày tải lên: 16/03/2014, 15:10

... Publishers All rights reserved Printed in the United States of America Journal of Nanoscience and Nanotechnology Vol. 10, 4259–4265, 2010 Fabrication of Free Standing Anodic Titanium Oxide Membranes with ... morphology of the top- surface TiO 2 membrane. The image clearly reveals that the entire surface of the ATO layer is covered with a layer of nanowires, which is attributed to the long time split of the ... nanofibers, nanoribbons and nanowires, are expected to play important roles in the fabrication of functional nanodevices. 1 Recently, special interest has been focused on TiO 2 nanostructures, which...

Ngày tải lên: 19/03/2014, 16:48

... the preparation of ordered array of multicomponent nanowires. The basis of sol–gel processing is the hydrolysis of a solution of precursor molecules to obtain first a suspension of colloidal particles ... few highlights of vapor phase synthesis. A detailed discussion on this topic is not within the scope of this paper. The demonstration of growth of single crystalline nanowires of numerous semiconducting ... the growth of Bi 2 S 3 nanorods by microwave irradiation of formaldehyde solution of bismuth nitrate and thiorea through the formation of bismuth thiorea complexes [91]. Nanostructures of CuS including...

Ngày tải lên: 19/03/2014, 16:48

... oxidation of aluminum by means of such a self-organization method, yielding highly ordered arrays of nanoholes several hundreds down to several tens of nanometers in size. This paper is an overview of ... Tempera- ture and size dependence of magnetic properties show no indication of superparamagnetic effects down to a wire diameter of 9 nm. For a nanomagnet array density of above 1 terabit/in 2 , a ... redeposition of nonvolatile mate- rials on the sidewall of nanoholes. For instance, the initial porous alumina hole size of 45 nm was reduced to 13 nm Si holes when a higher aspect ratio of porous alumina...

Ngày tải lên: 19/03/2014, 16:48

... the thickness of the porous nanochannels from a hundred of nanometers to a hundred of micrometers. 1,4 Such easy control ability of the pore diameter and the thickness makes the PAA one of the interesting ... anodization of the aluminum templates of v arious shapes and dimensions, (b) etching of the initially produc ed a lumina layer, (c) second anodization of the aluminum template s, a nd (d) formation of ... nanochannel array with an average pore diameter of 60 nm and a pore density of ~1 ì 10 10 /cm 2 in all directions. Anodization of the aluminum wire with a diameter of 1 mm also produced the transparent...

Ngày tải lên: 20/03/2014, 13:05

... type of vapor and sensor used. Shown in Fig. 3 are the responses of the sensors to chloroform vapor, plot- ted in terms of the normalized current (I norm (t), current/current at the beginning of ... vapor of interest (i.e., I ∞ = I norm (t) when t= ∞). The results of the fitting to the model are also shown in the curves. In the case of chloroform, the I ∞ is rather high. The results of the ... the presence of chloroform. The sensitivity of PANI to chloroform was similar to that previously reported for bulk PANI [19]. The response to toluene was greater than that for chloroform. Toluene,...

Ngày tải lên: 20/03/2014, 13:05

... 107–111 Wet process-based fabrication of WO 3 thin film for NO 2 detection Yong-Gyu Choi, Go Sakai, Kengo Shimanoe, Noboru Yamazoe ∗ Department of Materials Science, Faculty of Engineering Sciences, ... obtained was 450 nm in mean thickness. The film was a slim pack of square plates, each of which was a stack of thin lamellar crystals of WO 3 . The device was sensitive enough to detect 50 ppb NO 2 in ... microstructure of WO 3 -based devices, i.e. the shape, size and stacking of WO 3 particles included, by these methods. Recently, we reported that an aqueous colloidal dispersion (sol) of WO 3 ·2H 2 O...

Ngày tải lên: 20/03/2014, 13:11

... 200W 200W VNU Journal of Science, Mathematics - Physics 25 (2009) 185-189 185 Research, design and fabrication of a high-power combiner using Wilkinson bridge of L-band Dang Thi Thanh ... Duong 2 1 Faculty of Physics, College of Science, Vietnam National University Hanoi 2 Research Center Electronics and Telecommunication, College of Technology, VNU 3 Department of Science and ... Journal of Science, Mathematics - Physics 25 (2009) 185-189 186 Generally, Wilkinson power divider can have any number of output ports. A basic three port Wilkinson power divider of port...

Ngày tải lên: 22/03/2014, 11:20