fabrication of mems cantilever

... evaluate performance, fabrication and testing. Reviews of the modeling and test results enable optimization of the performance of the MEMS device. Fig. 1-6. A typical approach to MEMS application ... complexity of the design, it’s often difficult to predict the performance of MEMS devices intuitively. In these cases computer simulations may provide a means to study the performance of MEMS devices ... piezoelectric MEMS inkjet has the advantages of lower power consumption, lower voltage operation and relatively larger driving force. Based on the primary design and fabrication of piezoelectric MEMS...

Ngày tải lên: 10/04/2013, 13:48

Ngày tải lên: 27/07/2014, 22:21

... agglomeration (merging of two particles into one), breakage (division of one particle to two) as well as nucleation of particles of size r ≥0 and particle feed and removal. The rate of change of the continuous-phase variables ... is the subject of Chaps. 7 through 9. Position control of MEMS actuators is presented in Chap. 7, closed-loop operation of precision MEMS gyroscopes is covered in Chap. 8, and the control of particle ... (e.g., a MEMS accelerometer). Other examples of micro- and nanosystems include nanomechanical resonators, cell micromanipulators, and nanofabrication tools. Clearly this is a diverse group of systems,...

Ngày tải lên: 05/03/2014, 11:20

... work. Reference 1. Marc Madou, Fundamentals of Microfabrication. CRC Press, 1997. 2. Chien-Hung Ho and Wensyang Hsu. Experimental Investigation of an Embedded Root Method for Stripping SU-8 ... SU8-50 ldNi nickel sulfamate electrolyte. The value of applied current density was in the range of 1-10ASD. Temperature of 52 o C and pressure of 4Kg/cm 2 would help to make a better interface ... removal of SU8 after electroplating, the root technique and the selection of right ratio between SU8 mold and nickel structure thicknesses have been implemented. The evaluated temperature of 52 o C...

Ngày tải lên: 05/03/2014, 14:20

... application of these wires was recently demonstrated for the fabrication of electrodes for thin lithium-ion batteries [38]. The binding of gold to the viruses followed by reduction of the cobalt ... formation of ordered metallic assemblies at the nano-scale have involved the strepavidin protein array of a 2D array of biotinylated DNA, followed by metallization of the array [17]. Use of the ... D (2005) Structure of the cross- beta spine of amyloid-like fibrils. Nature 435, 773–778. 25 Inouye H, Sharma D, Goux WJ & Kirschner DA (2006) Structure of core domain of fibril-forming PHF...

Ngày tải lên: 16/03/2014, 12:20

... Fabrication of a porous polyimide membrane using a silicon nanowire array as a template Woong Kim ⁎ , Myung-Ki Lee Department of Materials Science and Engineering, ... polyimide membr ane intact, XeF 2 etching was c arried out over 5 0–200 cy cles of exposure t o 4 Torr of XeF 2 and 2 Torr of N 2 for 60 s . Polyimide membr anes were e ither detached from silicon ... be adjusted by simply altering the amount of solution applied. About 5–10 μl of polyimide solution was found to be appropriate for a silicon substrate of 0.5 by 0.5 cm. Substrates treated with...

Ngày tải lên: 16/03/2014, 15:10

... Publishers All rights reserved Printed in the United States of America Journal of Nanoscience and Nanotechnology Vol. 10, 4259–4265, 2010 Fabrication of Free Standing Anodic Titanium Oxide Membranes with ... morphology of the top- surface TiO 2 membrane. The image clearly reveals that the entire surface of the ATO layer is covered with a layer of nanowires, which is attributed to the long time split of the ... (anodization ∗ Author to whom correspondence should be addressed. of a Ti sheet). Typically, the template-directed synthesis method involves the fabrication of a nanoporous template, backfilling with the TiO 2 precursors,...

Ngày tải lên: 19/03/2014, 16:48

... the preparation of ordered array of multicomponent nanowires. The basis of sol–gel processing is the hydrolysis of a solution of precursor molecules to obtain first a suspension of colloidal particles ... few highlights of vapor phase synthesis. A detailed discussion on this topic is not within the scope of this paper. The demonstration of growth of single crystalline nanowires of numerous semiconducting ... the growth of Bi 2 S 3 nanorods by microwave irradiation of formaldehyde solution of bismuth nitrate and thiorea through the formation of bismuth thiorea complexes [91]. Nanostructures of CuS including...

Ngày tải lên: 19/03/2014, 16:48

... oxidation of aluminum by means of such a self-organization method, yielding highly ordered arrays of nanoholes several hundreds down to several tens of nanometers in size. This paper is an overview of ... Tempera- ture and size dependence of magnetic properties show no indication of superparamagnetic effects down to a wire diameter of 9 nm. For a nanomagnet array density of above 1 terabit/in 2 , a ... redeposition of nonvolatile mate- rials on the sidewall of nanoholes. For instance, the initial porous alumina hole size of 45 nm was reduced to 13 nm Si holes when a higher aspect ratio of porous alumina...

Ngày tải lên: 19/03/2014, 16:48

... the thickness of the porous nanochannels from a hundred of nanometers to a hundred of micrometers. 1,4 Such easy control ability of the pore diameter and the thickness makes the PAA one of the interesting ... anodization of the aluminum templates of v arious shapes and dimensions, (b) etching of the initially produc ed a lumina layer, (c) second anodization of the aluminum template s, a nd (d) formation of ... nanochannel array with an average pore diameter of 60 nm and a pore density of ~1 ì 10 10 /cm 2 in all directions. Anodization of the aluminum wire with a diameter of 1 mm also produced the transparent...

Ngày tải lên: 20/03/2014, 13:05

... type of vapor and sensor used. Shown in Fig. 3 are the responses of the sensors to chloroform vapor, plot- ted in terms of the normalized current (I norm (t), current/current at the beginning of ... vapor of interest (i.e., I ∞ = I norm (t) when t= ∞). The results of the fitting to the model are also shown in the curves. In the case of chloroform, the I ∞ is rather high. The results of the ... the presence of chloroform. The sensitivity of PANI to chloroform was similar to that previously reported for bulk PANI [19]. The response to toluene was greater than that for chloroform. Toluene,...

Ngày tải lên: 20/03/2014, 13:05

... 107–111 Wet process-based fabrication of WO 3 thin film for NO 2 detection Yong-Gyu Choi, Go Sakai, Kengo Shimanoe, Noboru Yamazoe ∗ Department of Materials Science, Faculty of Engineering Sciences, ... obtained was 450 nm in mean thickness. The film was a slim pack of square plates, each of which was a stack of thin lamellar crystals of WO 3 . The device was sensitive enough to detect 50 ppb NO 2 in ... of crystalline WO 3 ·2H 2 O of about 30 nm in size. The content of WO 3 ·2H 2 O in the sol was set to be 5mass% on the WO 3 basis unless otherwise noted. PEG with aver- age molecular weight of...

Ngày tải lên: 20/03/2014, 13:11

... 200W 200W VNU Journal of Science, Mathematics - Physics 25 (2009) 185-189 185 Research, design and fabrication of a high-power combiner using Wilkinson bridge of L-band Dang Thi Thanh ... Duong 2 1 Faculty of Physics, College of Science, Vietnam National University Hanoi 2 Research Center Electronics and Telecommunication, College of Technology, VNU 3 Department of Science and ... Journal of Science, Mathematics - Physics 25 (2009) 185-189 186 Generally, Wilkinson power divider can have any number of output ports. A basic three port Wilkinson power divider of port...

Ngày tải lên: 22/03/2014, 11:20

... most of the samples are cubic in nature. The broadening of peaks is indicative of small particle size. The sizes have been computed busing Dubey-Scherrer formula and obtained in the range of ... variation of EL brightness by increasing the loading in the nanocomposite (ZnS:Cu/PVA). It can be seen that at higher voltages, saturation of EL intensity occurs for lower concentrations of nanocrystalline ... Fabrication of ZnS:Cu/PVA nanocomposite electroluminescence devices for flat panel displays Sakshi Sahare 1 , S. J. Dhoble 2* , Pranav Singh 1 , Meera Ramrakhiani 1 1 Department of...

Ngày tải lên: 28/04/2014, 10:50

... would easily allow an upscale of the possible substrate to 6”-wafer size. Thus our fabrication procedure might be the technology of choice for the controlled fabrication of SnO 2 - nanowires as gas ... our fabrication procedure might be the technology of choice for the controlled fabrication of SnO 2 -nanowires on a wafer scale. TEM-analysis has revealed the single crystalline character of ... in detail. Control of SnO 2 -nanowire growth is also based on the two-step fabrication technology. In case of our fabrication procedure the nanowires grow only in the regions of the nanocrystalline...

Ngày tải lên: 05/05/2014, 15:26

... bonding of glass and polymer, and IR laser bonding can be used for microbonding on local areas of MEMS devices. A diffuser micropump was fabricated as a demonstration of laser fabri- cation of polymer ... at a laser power intensity of 0.42 W/mm 2 . FIG. 8. Photograph of laser bonded samples: ͑a͒ a top view of a bonded spot and ͑b͒ circular bonding. FIG. 9. ͑a͒ Schematic of the pump in a top view, ... aid of the heat transfer model described above, are necessary to further improve the IR bonding technique. IV. EXAMPLE OF A LASER-MACHINED MICROSYSTEM: A DIFFUSION MICROPUMP Fabrication of microscale...

Ngày tải lên: 06/05/2014, 08:53

Ngày tải lên: 06/05/2014, 08:53

Ngày tải lên: 06/05/2014, 08:55

Ngày tải lên: 06/05/2014, 08:55

Ngày tải lên: 27/05/2014, 20:57