Tài liệu MEMS R&D @ Intel docx

1 MEMS R&D @ Intel MEMS R&D @ Intel Sunlin Sunlin Chou Chou Senior Vice President & General Manager Senior Vice President & General Manager Technology & Manufacturing Group Technology & Manufacturing Group Intel Corporation Intel Corporation April 25, 2001 April 25, 2001 2 THE MEMS MICROCOSM: Foundries Kip Crosby http://www.forbes.com/asap/2001/0402/056a.html A shakeout looms for the makers of MEMS. … Maybe then an Intel will emerge. Forbes ASAP 04.02.01 The Amazing, Incredible Shrinking Future! Michael S. Malone http://www.forbes.com/asap/2001/0402/060.html Bomb-detecting inchworms, pint-size space probes, and retinal implants. A roundup of the coolest wee wonders coming soon to a doctor's office – or cell phone – near you. MEMS: M MEMS: M icro icro E E lectro lectro - - M M echanical echanical S S ystems ystems Source: Forbes 3 MEMS R&D @ Intel MEMS R&D @ Intel Ÿ Ÿ Started in 1999 Started in 1999 Ÿ Ÿ Is a “seed” activity Is a “seed” activity Ÿ Ÿ Is decentralized Is decentralized Ÿ Ÿ Has Intel Capital as partner Has Intel Capital as partner Ÿ Ÿ Involves cooperation with other companies Involves cooperation with other companies Ÿ Ÿ Uses Intel’s silicon technology expertise Uses Intel’s silicon technology expertise Ÿ Ÿ Is relevant to Intel’s businesses Is relevant to Intel’s businesses $/Year: $/Year: ~ 10 ~ 10 10 10 Risk Risk Taking: Taking: Evaluate options, Evaluate options, look externally look externally Focus choices, Focus choices, synchronize, synchronize, integrate integrate Copy exactly, Copy exactly, ramp rapidly ramp rapidly ~ 10 ~ 10 8 8 ~ 10 ~ 10 9 9 High High Moderate Moderate Low Low Intel’s Technology Pipeline Intel’s Technology Pipeline Manufacturing Manufacturing Research Research Development Development $/Year: $/Year: ~ 10 ~ 10 10 10 Risk Risk Taking: Taking: Evaluate options, Evaluate options, look externally look externally Focus choices, Focus choices, synchronize, synchronize, integrate integrate Copy exactly, Copy exactly, ramp rapidly ramp rapidly ~ 10 ~ 10 8 8 ~ 10 ~ 10 9 9 High High Moderate Moderate Low Low Intel’s Technology Pipeline Intel’s Technology Pipeline Manufacturing Manufacturing Research Research Development Development MEMS 6 Intel’s Decentralized R&D Structure Intel’s Decentralized R&D Structure Intel Intel Architecture Labs Architecture Labs Technology & Technology & Research Labs Research Labs Semiconductor Technology Internet Ecosystems IA Capabilities Technology & Technology & Manufacturing Group Manufacturing Group 7 8 9 Universities Universities Consortia Consortia Nat’l Labs Nat’l Labs Suppliers Suppliers Customers Customers Intel’s Decentralized R&D Network Intel’s Decentralized R&D Network Intel R&D Intel R&D IC Portfolio IC Portfolio Co’s Co’s 10 Intel Intel Capital Capital Intel Capital Supports R&D Intel Capital Supports R&D Intel Intel R&D R&D Seed Funds [...].. .Intel Capital Supports R&D Intel R&D Tech Tech Tools Mat’ls IC Portfolio Company A Capital Intel Capital 11 Intel Capital Supports R&D Intel R&D Product Customer Tech Collateral Product IC Portfolio Company B Intel Capital Capital 12 Intel Capital Supports R&D Intel R&D Product Customer Tech Tech Tools Mat’ls IC Portfolio Company A Capital Tech Seed Funds Intel Capital Collateral... enhancement 18 Moore’s Law Applies to ICs & MEMS Benefits of Scaling Integrated MEMS Circuits Devices Compactness Functionality Speed Energy efficiency Reliability Low cost 19 Summary: MEMS R&D @ Intel Ÿ Is Intel s decentralized R&D at work – Efficient use of internal/external resources Ÿ Is facilitated by Intel Capital – Seed funding, cooperative innovation Ÿ Uses Intel s silicon technology expertise –... of MEMS Airbag deployment MEMS accelerometer Stability Control System MEMS micro-gyro MEMS Pressure Sensor 14 Future Potential Uses of MEMS Antennas Color bi-stable display Micro-switches Tunable capacitors and inductors Tunable filters Directional microphone 15 Potential for Chip Cooling, BioMEMS Micro-fluidics devices fabricated at Intel Micro-refrigerator (Research at Stanford University) 16 MEMS: ... Micro-refrigerator (Research at Stanford University) 16 MEMS: Sized for Mature Si Technology 80µm Human Hair Intel MEMS Device Cantilever 1µm 0.03µm Intel s 30nm Transistor Cantilever beams for RF Resonator 17 Intel has Technology Base for MEMS Ÿ Analytical and chip debug technology suitable for rapid MEMS prototyping – Laser etching – Focused-Ion-Beam Milling Ÿ Silicon process technology – Lithography,... technology expertise – Rapid prototyping with existing tools Ÿ Is relevant to Intel s current businesses – Wireless, chip cooling applications Ÿ Opens options for integrating Si ICs and MEMS – Expands benefits from Moore’s Law 20 Q&A For information on Intel' s silicon technology, please visit the new Silicon Showcase at www .intel. com/research/silicon 21 22 . you. MEMS: M MEMS: M icro icro E E lectro lectro - - M M echanical echanical S S ystems ystems Source: Forbes 3 MEMS R&D @ Intel MEMS R&D @ Intel. Reliability Low cost 20 Summary: MEMS R&D @ Intel Summary: MEMS R&D @ Intel Ÿ Ÿ Is Intel s decentralized R&D at work Is Intel s decentralized R&D