Nghiên cứu giải pháp bù sai số cho máy đo tọa độ dạng cầu trục

I HC QUC GIA TP HCM TRNG I HC BCH KHOA NGHIấN CU GII PHP B SAI S CHO MY O TA DNG CU TRC LUN N TIN S K THUT Tp H Chớ Minh nm 2016 I HC QUC GIA TP HCM TRNG I HC BCH KHOA NGHIấN CU GII PHP B SAI S CHO MY O TA DNG CU TRC Cụng ngh ch to mỏy Chuyờn ngnh: Mó s chuyờn ngnh: 62520401 Phn bin c lp 1: Phn bin c lp 2: Phn bin 1: Phn bin 2: Phn bin 3: NGI HNG DN KHOA HC PGS TS Thỏi Th Thu H Tp H Chớ Minh nm 2016 i LI CAM OAN Tụi xin cam oan õy l cụng trỡnh nghiờn cu ca riờng tụi Cỏc kt qu nghiờn cu v cỏc s liu trỡnh by Lun ỏn ny c thc hin ti Phũng Thit k ca cụng ty TNHH Tõn Hnh v Phũng Thớ nghim o lng Khoa C khớ Trng i hc Bỏch khoa i hc Quc gia Tp H Chớ Minh l hon ton trung thc, cha tng c cụng b ti bt c õu v ti bt c cụng trỡnh no khỏc Tp H Chớ Minh ngy thỏng nm 2015 Tỏc gi Phm Hng Thanh ii LI CM T Trong quỏ trỡnh thc hin lun ỏn ny, tụi ó nhn c s giỳp tn tỡnh, hiu qu ca cỏc quý thy cụ v cỏc bn ng nghip Tụi xin chõn thnh cm t: + Cụ hng dn khoa hc Cụ PGS TS Thỏi Th Thu H ó hng dn lun ỏn tn tỡnh, khoa hc Thit ngh lun ỏn s khụng th hon thnh nu thiu s hng dn ca quý cụ + Cụ GS TS Ngụ Kiu Nhi + Thy PSG TS Trn Thiờn Phỳc + Thy PGS TS Phm Huy Hong + Thy PGS TS Nguyn Hu Lc + Thy PGS TS Nguyn Tin Th ó giỳp v phng phỏp lun, cỏc ý kin úng gúp v cỏc ti liu hu ớch lun ỏn c hon thnh + Thy PGS TS Phm Ngc Tun + Thy TS Trn Nguyờn Duy Phng ó cho cỏc úng gúp hu ớch v to iu kin thun li lun ỏn c trỡnh by ti cỏc bui sinh hot hc thut ca b mụn + Thy PGS.TS ng Vn Nghỡn + Thy PGS TS Trn Doón Sn + Cụ TS H Th Thu Nga + Thy TS Bựi Trng Hiu + Thy TS Trn Anh Sn + Thy TS Tụn Thin Phng + Thy TS Lờ ỡnh Tuõn + Thy TS Vừ Tng Quõn Cựng cỏc quý thy cụ khỏc ó úng gúp hu ớch lun ỏn c hon thnh + Th.S Hunh Quang + KS Trn Quang Phc ó giỳp hon thnh vic thc nghim kim chng mụ hỡnh bự sai s iii TểM TT LUN N Lun ỏn Nghiờn cu gii phỏp bự sai s cho mỏy o ta dng cu trc c trỡnh by chng u tiờn, tỏc gi gii thiu v mỏy o ta sau ú tỡm hiu s cp thit ca lun ỏn, h thng li cỏc cụng trỡnh nghiờn cu cú liờn quan n lnh vc ny v ngoi nc t ú t cỏc nhim v c th ca Lun ỏn Xu hng hon thin mỏy múc, thit b l nõng cao nng sut v cht lng, mỏy o ta cng khụng nm ngoi quy lut ú nõng cao nng sut o cn phi tng tc di chuyn ca mỏy cng gn tc gii hn cng tt Khi tng tc di chuyn, cú s thay i ca tc u dũ, lc quỏn tớnh xut hin v tỏc ng n cỏc b phn mỏy nh khõu v khp (c bit l khp) Khp c to thnh t cỏc m khớ liờn kt gia khõu mang (khõu cú gn cỏc m khớ) v khõu dn hng, c tớnh lm vic ca cỏc m khớ l luụn cú dao ng nờn cú lc quỏn tớnh tỏc dng cỏc khp s chuyn v v lm gim chớnh xỏc ca mỏy Vic gim tc di chuyn o mõu thun vi xu hng tng nng sut ca mỏy o ta vỡ vy thc t l mun tng nng sut thỡ cn phi o vi tc di chuyn cao, lỳc ny chờnh lch gia tc di chuyn v tc o ln, dn n xut hin gia tc v lc quỏn tớnh Da trờn vic phõn tớch cỏc gii phỏp v thit k, ch to, s dng vt liu, iu khin, bự sai s ca cỏc nghiờn cu ó cụng b, tỏc gi ó la chn gii phỏp hiu chnh sai s ci thin chớnh xỏc ca mỏy o ta T vic phõn tớch cỏc nguyờn nhõn gõy chuyn v ca khõu v khp dn n sai s ca mỏy o ta v nh hng ca cỏc chuyn v ny n chớnh xỏc ca mỏy o, tỏc gi chn thnh phn chuyn v cn c nghiờn cu l chuyn v khp Trong ni dung chng tỏc gi thc hin nghiờn cu cỏc thnh phn chuyn v khp bng cỏc cm bin o dch chuyn lp trờn cỏc khõu mang trờn cỏc trc ca mỏy, xut gii phỏp xõy dng hm biu din cỏc thnh phn chuyn v khp theo phng phỏp quy hoch thc nghim yu t ton phn Ni dung chng l tin hnh xõy dng mụ hỡnh toỏn hc bự sai s cho mỏy o ta dng cu trc Chng tin hnh thc nghim kim tra ỏnh giỏ trờn mỏy o ta trc v sau bự sai s Phn cui l nhng kt lun v hng phỏt trin ca lun ỏn iv SUMMARY The thesis of Research the error compensation solution for the bridge coordinate measuring machine is presented in four chapters First, the Coordinate Measuring Machine is introduced next the thesiss materiality is surveyed then literature overview of reseearches that concerning this field is summarized, from that specific tasks of the thesis are determined Trends finishing machinery and equipment is to improve productivity and quality, coordinate measuring machine isnt out of this rule To improve productivity traverse speed of the machine should be increased as close as possible speed limit When measuring at hight speed (there is rate of change), inertial forces appear and bring about CMMs components, such as links, joints (especially joints) to be impacted Joints are prismatic formed from air bearings that mounted between the carriage and the slideway Because of the air bearings property, joints are deformed under inertial forces The deceleration measurements contradict trend productivity growth of coordinate measuring machines so must accept the fact that the acceleration caused by hight travelling speed Based on analyses of the design, manufacture and use of materials, control, error compensation of the researches were published, an error compensation solution was chosen to improve the accuracy of CMMs The component of joints deformation were determined to be studied by investigating the sources which affect and cause the error of coordinate measuring machines In chapter the component deformations of jointsre studied with some displacement measurement laser sensors (ZX LD30V ) attached on the carrige and a solution was suggested to build the regression equations which describes the joints deformation by using empirical method Chapter deals with the building of the mathematical model to compensate errors and a mathematical model for coordinate measuring machines is presented Some experimental researches have been carried out to evaluate the accuracy of the coordinate measuring machine before and after it was compensated errors in chapter At last this thesis will be completed by conclusions and recommendations given in the last section v MC LC Trang Li cam oan i Li cm t ii Túm tt lun ỏn iii Mc lc v Danh mc mt s kớ hiu v ch vit tt x Danh mc cỏc bng xii Danh mc cỏc hỡnh v v th xvi CHNG TNG QUAN V MY O TA 1.1 Gii thiu chung v mỏy o ta 1.1.1 Cu trỳc ca mỏy o ta 1.1.2 ng dng ca mỏy o ta 1.1.3 Cỏc ngun gõy sai s trờn mỏy o ta 1.1.4 Cỏc loi sai s trờn mỏy o ta 1.2 Cỏc hng nghiờn cu trờn th gii v nc v mỏy o ta 1.2.1 Cỏc nghiờn cu trờn th gii gim sai s, tng tc di chuyn, tng tin cy ca mỏy o ta 1.2.2 Cỏc nghiờn cu nc gim sai s, tng tc di chuyn, tng tin cy ca thit b o núi chung, mỏy o ta núi riờng 15 1.2.3 S thay i tc o lm suy gim chớnh xỏc ca mỏy o ta 17 1.3 Tớnh cp thit ca lun ỏn 17 1.4 Nhim v ca lun ỏn 18 1.5 Mc ớch nghiờn cu 18 1.6 Ni dung nghiờn cu 19 1.7 í ngha khoa hc v thc tin ca lun ỏn 19 Kt lun chng 20 vi CHNG NGHIấN CU CHUYN V CA KHP TRấN MY O TA KHI Cể LC QUN TNH TC NG 2.1 Kt cu ca mỏy o ta dng cu trc 21 2.2 Khp trờn mỏy o ta 22 3.2.1 Mụ hỡnh khp trt 22 2.2.2 Cỏc khp trờn mỏy o ta dng cu trc 23 2.2.3 Cỏc thnh phn chuyn v trờn khp 24 2.3 Chuyn v ca khp trờn mỏy o 30 2.3.1 Phõn tớch chuyn v ca khp trờn trc Y 30 2.3.2 Quan h gia lc quỏn tớnh v thnh phn chuyn v khp 38 2.4 Xỏc nh quy lut bin i ca cỏc chuyn v khp chu lc quỏn tớnh 42 2.4.1 Cỏc thnh phn chuyn v 42 2.4.2 B trớ cỏc cm bin o chuyn v khp 43 2.4.3 Chn cm bin o chuyn v cho cỏc khp 45 2.4.4 Tin hnh thc nghim 50 2.4.5 Xỏc nh quy lut chuyn v khp 52 Kt lun chng 64 vii CHNG XY DNG Mễ HèNH TON HC B SAI S CHO MY O TA DNG CU TRC 3.1 Mụ hỡnh ng hc ca mỏy khụng cú sai s tỏc ng 65 3.1.1 Xõy dng h quy chiu cho mỏy o ta 65 3.1.2 Mụ hỡnh ng hc ca mỏy o ta dng cu trc 66 3.2 Mụ hỡnh ng hc ca mỏy o cú sai s tỏc ng 68 3.2.1 Xỏc nh ma trn bin i DH 6S t h ta B6 sang h ta B5 68 3.2.2 Xỏc nh ma trn bin i DH 4S t h ta B4 sang h ta B3 69 S 3.2.3 Xỏc nh ma trn bin i DH t h ta B2 sang h ta B1 70 3.3 Mụ hỡnh bự sai s cho mỏy o ta dng cu trc 72 3.3.1 Trng hp khụng bự sai s 72 3.3.2 Trng hp cú bự sai s 72 3.3.3 Xõy dng mụ hỡnh bự sai s cho mỏy o ta 73 3.3.4 Cỏc giai on bự sai s cho mỏy o ta 77 3.3.5 Xõy dng gii thut v phn mm bự sai s cho mỏy o ta 79 Kt lun chng 85 CHNG NGHIấN CU THC NGHIM NH GI CHNH XC CA KT QU O SAU KHI B SAI S CHO MY O TA 4.1 Gii thiu mỏy o ta c bự sai s 86 4.2 Chn phng phỏp kim tra cho mỏy o to , cỏc bc thc hin o kim tra ỏnh giỏ chớnh xỏc 86 4.2.1 Mc ớch 86 4.2.2 Cỏc phng phỏp kim tra chớnh xỏc cho mỏy o ta 87 4.2.3 Cỏc bc thc hin o kim tra chớnh xỏc 88 4.3 Thit b, vt mu dựng kim tra chớnh xỏc 88 viii 4.3.1 Vt mu dựng kim tra chớnh xỏc 88 4.3.2 Quy trỡnh o kim tra chớnh xỏc 89 4.4 o cỏc cn mu trờn mỏy o ta cha c bự sai s 90 4.4.1 o chiu di cỏc cn mu theo phng AB (Phng trc X) 90 4.4.2 o chiu di cỏc cn mu theo phng CD (Phng trc Y) 93 4.4.3 o chiu di cỏc cn mu mt XY (Phng EF) 95 4.4.4 o cỏc cn mu mt phng XZ (Phng GH) 97 4.4.5 o cỏc cn mu mt phng YZ (Phng IJ) 98 4.4.6 o cỏc cn mu theo phng MN 100 4.4.7 o cỏc cn mu theo phng PQ 102 4.5 o cỏc cn mu trờn mỏy o ta ó c bự sai s 104 4.5.1 o chiu di cỏc cn mu theo phng trc X (Phng AB) 104 4.5.2 o chiu di cỏc cn mu theo phng trc Y (Phng CD) 105 4.5.3 o chiu di cỏc cn mu theo phng EF (Mt phng XY) 107 4.5.4 o cỏc cn mu theo phng GH (Mt phng XZ) 109 4.5.5 o cỏc cn mu theo phng IJ (Mt phng YZ) 110 4.5.6 o cỏc cn mu theo phng MN 112 4.5.7 o cỏc cn mu theo phng PQ 114 4.5.8 So sỏnh kt qu o ca mỏy trc bự sai s, sau bự sai s vi tiờu chun ISO 10360 116 Kt lun chng 118 KT LUN V PHNG HNG PHT TRIN CA TI Kt lun 119 Hng phỏt trin ca lun ỏn 120 -1164.5.8 So sỏnh kt qu o ca mỏy trc bự sai s, sau bự sai s vi tiờu chun ISO 10360-2 4.5.8.1 o chiu di cỏc cn mu theo phng AB (Phng trc X) Bng 4.72 Giỏ tr mu nhn c theo phng trc X trc v sau bự sai s Cỏc kớch thc (mm) Mỏy cha bự sai s (mm) Mỏy ó bự sai s (mm) Tiờu chun ISO (mm) 100,007 200,007 300,008 400,009 500,012 100,003 200,003 300,004 400,004 500,005 1000,0034 2000,0038 3000,0042 4000,0046 1000,0002 2000,00025 3000,0003 4000,00035 5000,0004 5000,0050 4.5.8.2 o chiu di cỏc cn mu theo phng CD (theo phng trc Y) Bng 4.73 Giỏ tr mu nhn c theo phng trc Y trc v sau bự sai s Cỏc kớch thc (mm) Mỏy cha bự sai s (mm) Mỏy ó bự sai s (mm) Tiờu chun ISO (mm) 1000,0002 2000,00025 3000,0003 4000,00035 100,008 200,009 300,009 400,012 100,003 200,003 300,004 400,004 1000,0034 2000,0038 3000,0042 4000,0046 5000,0004 500,013 500,005 5000,0050 4.5.8.3 o chiu di cỏc cn mu theo phng EF (trong mt XY) Bng 4.74 Giỏ tr mu nhn c theo phng EF trc v sau bự sai s Cỏc kớch thc (mm) Mỏy cha bự sai s (mm) Mỏy ó bự sai s (mm) Tiờu chun ISO (àm) 1000,0002 2000,00025 3000,0003 4000,00035 100,008 200,009 300,009 400,012 100,003 200,003 300,004 400,004 1000,0034 2000,0038 3000,0042 4000,0046 5000,0004 500,013 500,005 5000,0050 Lun ỏn tin s k thut -1174.5.8.4 o cỏc cn mu theo phng GH (trong mt phng XZ) Bng 4.75 Giỏ tr mu nhn c theo phng GH trc v sau bự sai s Cỏc kớch thc (mm) Mỏy cha bự sai s (mm) Mỏy ó bự sai s (mm) Tiờu chun ISO (àm) 100,007 200,008 300,009 400,011 500,012 100,003 200,003 300,004 400,004 500,005 1000,0034 2000,0038 3000,0042 4000,0046 5000,0050 1000,0002 2000,00025 3000,0003 4000,00035 5000,0004 4.5.8.5 o cỏc cn mu theo phng IJ (mt phng YZ) Bng 4.76 Giỏ tr mu nhn c theo phng IJ trc v sau bự sai s Cỏc kớch thc (mm) 1000,0002 2000,00025 3000,0003 4000,00035 5000,0004 Mỏy cha bự sai s (mm) 100,008 200,009 300,010 400,011 500,012 Mỏy ó bự sai s (mm) 100,003 200,003 300,004 400,004 500,005 Tiờu chun ISO (àm) 1000,0034 2000,0038 3000,0042 4000,0046 5000,0050 4.5.8.6 o cỏc cn mu theo phng MN Bng 4.77 Giỏ tr mu nhn c theo phng MN trc v sau bự sai s Cỏc kớch thc (mm) Mỏy cha bự sai s (mm) Mỏy ó bự sai s (mm) Tiờu chun ISO (àm) 100,008 200,009 300,010 400,011 500,012 100,003 200,003 300,004 400,004 500,005 1000,0034 2000,0038 3000,0042 4000,0046 5000,0050 1000,0002 2000,00025 3000,0003 4000,00035 5000,0004 4.5.8.7 o cỏc cn mu theo phng PQ Bng 4.78 Giỏ tr mu nhn c theo phng PQ trc v sau bự sai s Cỏc kớch thc (mm) Mỏy cha bự sai s (mm) Mỏy ó bự sai s (mm) Tiờu chun ISO (àm) 100,007 200,008 300,009 400,010 500,012 100,003 200,003 300,004 400,004 500,005 1000,0034 2000,0038 3000,0042 4000,0046 5000,0050 1000,0002 2000,00025 3000,0003 4000,00035 5000,0004 Lun ỏn tin s k thut -118Kt lun chng Kt qu tin hnh thc nghim hiu chnh chớnh xỏc cho mỏy o ta 3D CNC (mỏy c ch to Vit Nam) cho thy: Mỏy cha c bự sai s: Khi ln lt o cỏc cn mu vi tc di chuyn cao (tc di chuyn ca u dũ Vy= 55mm/s, gia tc trng hp ny l 450mm/s2) nh hng ca chuyn v cỏc khp nờn cỏc kt qu o chiu di ca cỏc cn mu u b tỏc ng, vớ d o cỏc cn mu theo ng chộo PQ + Cỏc kớch thc chiu di thu c ca cỏc cn mu u b sai s, sai s nh nht m : 100,007; 200,008; 300,009; 400,010; 500,012mm + Kớch thc cn mu cng di thỡ kt qu o cng kộm chớnh xỏc vi cn mu cú chiu di 100mm sai s l 7m , cn mu di 500mm sai s l 12m Mỏy ó c bự sai s: o cỏc cn mu vi cựng iu kin nh trng hp cha bự sai s, kớch thc ca cỏc mu thu c m bo chớnh xỏc theo cỏc tiờu chun: + Yờu cu chớnh xỏc ca mỏy c thit k: L /100m + Theo tiờu chun VDI/VDE 2617, ASME B89.4.1: 5L /1000m + ISO 10360-2: L / 250m +JIS: 2,9 4L /1000 m Nh vy, phn mm bự sai s c xõy dng ó loi b c cỏc sai s chuyn v ca khp gõy v lm mỏy o ta t c chớnh xỏc theo yờu cu Kt qu ny ó c Trung tõm tiờu chun o lng cht lng thuc Cc tiờu chun o lng cht lng kim tra xỏc nhn (ph lc 18) Lun ỏn tin s k thut KT LUN V PHNG HNG PHT TRIN CA TI -119Cú nhiu ngun gõy sai s nh hng n chớnh xỏc ca kt qu o trờn mỏy o ta , mt cỏc ngun ú l dao ng lc quỏn tớnh Cỏc mỏy o ta (c mỏy mi v mỏy c) cú xu hng gim chớnh xỏc tng tc di chuyn m bo nng sut Khi tng tc di chuyn (chờnh lch gia tc di chuyn v tc o tng), lc quỏn tớnh xut hin v tỏc ng n cỏc b phn mỏy nh khõu v khp (c bit l khp) Khp c to thnh t cỏc m khớ liờn kt gia khõu mang v khõu dn, c tớnh lm vic ca cỏc m khớ l luụn cú dao ng nờn cú lc quỏn tớnh tỏc dng cỏc khp s chuyn v v lm gim chớnh xỏc ca mỏy m bo chớnh xỏc ca mỏy cn nghiờn cu gii phỏp bự sai s, chng ny s túm tt cỏc kt qu ó c thc hin lun ỏn v xut hng nghiờn cu tip theo Kt lun Tt c cỏc kiu mỏy o ta dự c thit k kộm cng vng (tay o ngang, cụng xụn) hay c thit k cng vng (nh l cỏc kiu khung dn v cu trc) cng s chu cỏc thnh phn chuyn v khp ln cú lc quỏn tớnh cỏc trc ln Cỏc chuyn v khp ny truyn n v trớ ca u dũ thụng qua cu trỳc ng hc ca mỏy v gõy sai s Da trờn vic phõn tớch cỏc gii phỏp v thit k, ch to, s dng vt liu, iu khin, bự sai s ca cỏc nghiờn cu ó cụng b, tỏc gi ó la chn gii phỏp hiu chnh chớnh xỏc cho mỏy o ta nhm loi b nh hng ca cỏc thnh phn chuyn v khp lc quỏn tớnh gõy Cỏc kt qu ó t c lun ỏn: Lun ỏn ó trỡnh by ngun gc gõy thnh phn chuyn v dn n sai s ca mỏy o ta , phõn tớch nh hng ca cỏc thnh phn chuyn v n chớnh xỏc ca mỏy o t ú la chn thnh phn chuyn v cn c nghiờn cu l thnh phn chuyn v khp Tin hnh nghiờn cu cỏc thnh phn chuyn v khp bng cỏc cm bin o dch chuyn lp trờn cỏc khõu mang trờn cỏc trc ca mỏy, tỏc gi xut gii phỏp xõy dng hm biu din cỏc thnh phn chuyn v khp theo phng phỏp quy hoch thc nghim yu t ton phn Lun ỏn tin s k thut -1203 Da trờn cu trỳc ca mỏy o ta 3D CNC, tỏc gi ó xõy dng mụ hỡnh toỏn hc chuyn mt im t h ta u dũ v h ta ca mỏy hai trng hp khụng cú chuyn v khp v cú chuyn v khp Lun ỏn ó xõy dng c mụ hỡnh toỏn hc bự sai s thnh phn chuyn v khp ca mỏy o ta gõy ra, t ú mt gii thut v phn mm cng ó c xõy dng thc hin bự sai s cho mỏy Thc nghim kim tra cho thy: phn mm bự sai s ó c bn loi b c thnh phn chuyn v cỏc khp v mỏy cú chớnh xỏc t c theo tiờu chun ca th gii Phng phỏp bự ny cú th ỏp dng cho cỏc mỏy m kt cu cú s dng cỏc m khớ Mt s im mi ca lun ỏn: + Tỏc gi ó xut gii phỏp v tin hnh nghiờn cu cỏc thnh phn chuyn v khp (c coi l thnh phn thụng s ngu nhiờn) bng phng phỏp quy hoch thc nghim + Tỏc gi ó xõy dng mt mụ hỡnh toỏn hc bự sai s hỡnh hc thụng s ng lc hc gõy (thnh phn chuyn v khp) + Tỏc gi ó xõy dng c quy trỡnh calip bng phn mm cho mỏy o ta dng cu trc ú l: xỏc nh chuyn v khp, o chuyn v khp v t ú hiu chnh chớnh xỏc cho mỏy Hng phỏt trin ca lun ỏn Gii phỏp bự sai s cho mỏy o ta dng cu trc ó c xõy dng cú th c xem xột ỏp dng cho cỏc dng mỏy o ta khỏc hay cỏc thit b m kt cu cú s dng cỏc m khớ thun tin cho vic biu din v thc hin bự sai s, mi quan h gia cỏc chuyn v khp cú lc quỏn tớnh tỏc ng cú th c nghiờn cu cú th biu din tt c cỏc chuyn v khp theo mt hm Lun ỏn tin s k thut DANH MC CC CễNG TRèNH CễNG B BI BO KHOA HC Thỏi Th Thu H, Phm Hng Thanh Xỏc nh tc thớch hp o hay dũ nhanh trờn mỏy o ta dng cu trc, Tp C khớ Vit Nam s 6, 6/2012 Thỏi Th Thu H, Phm Hng Thanh Influence of acceleration on the CMMs accuracy in fast measuring, Tp Science & Technology Development, Vol 15, No.K1, 2012 Thỏi Th Thu h, Phm Hng Thanh Nghiờn cu xõy dng mụ hỡnh bự sai s ng lc hc cho mỏy o to dng cu trc ch to ti Vit nam, Chuyờn san K thut K&TH, s 8, tr 18-25, thỏng 12/2013 Thỏi Th Thu h, Phm Hng Thanh Research the variation of dynamic error at the bridge coordinate measuring machines prismatic joints made in Vietnam, Chuyờn san K thut K&TH, s 9, tr 66-71, thỏng 4/2014 HI NGH TRONG NC Thỏi Th Thu H, Phm Hng Thanh, Nghiờn cu hin tng dao ng ca m khớ trờn mỏy o ta , K yu Hi ngh C hc ton quc, H Ni, 2012 Thỏi Th Thu H, Phm Hng Thanh, Mt s kt qu ca ti Nghiờn cu gii phỏp bự sai s cho mỏy o ta dng cu trc, K yu Hi ngh Khoa hc k thut o lng ton quc ln th VI, H Ni, 5/2015 HI NGH NC NGOI Thỏi Th Thu H, Phm Hng Thanh, Application of air bearings in manufacturing three-dimensional coordinate measuring machines, 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