Quang phổ Laser - Dùng phổ Raman và phổ phát quang nghiên cứu ảnh hưởng của tỉ lệ khí oxy và sự ủ nhiệt đối với màng TiO2 chế tạo bằng phương pháp phún xạ magnetron phản ứng

Quang phổ Laser DÙNG PHỔ RAMAN VÀ PHỔ QUANG PHÁT QUANG NGHIÊN CỨU ẢNH HƯỞNG CỦA TỈ LỆ KHÍ OXY VÀ SỰ Ủ NHIỆT ĐỐI VỚI MÀNG TIO 2 CHẾ TẠO BẰNG PP PHÚN XẠ MAGNETON PHẢN ỨNG [...]... crystalline phase _ For the as-deposited and 350 °C annealed samples, the PL signal is very weak due to the poor crystallinity PL spectra of titanium oxide films at 3 FO2% and post-annealed at RT, 350 °C , 550 °C , and 750 °C for 2 min in air CONCLUSION The oxygen flow ratios during deposition and post-annealed temperatures result in the evolution of phase formation of the films The XRD and Raman results indicate... 396 and 639 cm−1 and rutile peaks at 449 and 612 cm−1 _ The rutile peaks decrease with increasing oxygen flow ratio _ The intensity of anatase peak decreaseswith increasing oxygen flow ratio due to the reduction of film thickness Raman spectra of titanium oxide films formed at 3, 6, 10 and 15 FO2% and post-annealed at 750 °C for 2 min in air RESULTS AND DISCUSSION _ The intensity of anatase peaks at 396... 750°C, especially for anatase peaks Raman spectra of titaniumoxide films at 3 FO2% and postannealed at RT, 350 °C , 550 °C , and 750 °C for 2 min in air RESULTS AND DISCUSSION The relationship between the crystalline structure and PL behaviors of titanium oxides Laser excitation: 325 nm, at the room temperature _ The weak shoulder peak at 650 nm is induced from the laser source _ An asymmetrical wide... formation of the films The XRD and Raman results indicate that the 3 FO2% film is formed of a mixed phase of anatase and rutile, and the specimens of 10 FO2%, and 15 FO2% are the single-phase anatase after 550–750 °C annealing The as-deposited TiOx films and those annealed at 350 °C are all amorphous because of no distinct diffraction peak The minimum thermal annealing temperature necessary to stimulate the... at 650 nm is induced from the laser source _ An asymmetrical wide FWHM peak in visible region is observed at the 3 FO2% sample PL spectra of titanium oxide films formed at 3, 6, 10 and 15 FO2% and post-annealed at 750 °C for 2 min in air RESULTS AND DISCUSSION _ The wide peak is merged from two different TiOx peaks _ The curve can be fitted into two Gaussian peaks at 486 nm (2,55eV) and 588 nm(2,11eV) . Quang phổ Laser DÙNG PHỔ RAMAN VÀ PHỔ QUANG PHÁT QUANG NGHIÊN CỨU ẢNH HƯỞNG CỦA TỈ LỆ KHÍ OXY VÀ SỰ Ủ NHIỆT ĐỐI VỚI MÀNG TIO 2 CHẾ TẠO BẰNG PP PHÚN XẠ MAGNETON PHẢN ỨNG