Volume 05 - Surface Engineering Part 11 pdf

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Society of Vacuum Coaters 33rd Ann Tech Conf Proc.,

Coatings on Glass,Procedures in Experimental Physics,

Trans 9th AVS Symposium,

Society of Vacuum Coaters 33rd Ann Tech Conf.,

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•

Trang 5

Condensation and Evaporation of Solids,

Thin Solid Films,

Society of Vacuum Coaters 34th Ann Tech Conf Proc.,

Trans 7th Ann AVS Symp.,

Trang 6

•• o•••

Thin Film Processes,

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Table 1 Elemental sputtering yields for 500 eV ions

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Physics of Thin Films,

Advances in Electronics and Electron Physics,

Proc 9th Int Vacuum Congress and 5th Int Conf on Solid Surfaces

Handbook of Thin Film Technology,

Deposition Technologies for Thin Films and Coatings,

Thin Film Technology,

Handbook of Ion Beam Processes,

Handbook of Plasma Processing Technology,J Vac Sci Technol.,

J Vac Sci Technol.,

J Vac Sci Technol A,

J Vac Sci Technol.,Thin Film Processes,

Trang 15

Surf Coat Technol.,Metalloberfläche,

Surf Coat Technol.,

Thin Solid Films,

Trang 21

Handbook of Thin Film Technology,

Deposition Technologies for Thin Films and Coatings,

Thin Film Technology,

Handbook of Ion Beam Processes,

Handbook of Plasma Processing Technology,Deposition Technologies for Thin Films and Coatings,Glow Discharge Process,

Thin Solid Films,

Thin Solid Films,Physical Vapor Deposition,

Thin Solid Films,

Handbook of Plasma Processing Technology,

Handbook of Plasma Processing,Glow Discharge Processes,

Trang 22

J Vac Sci Technol.,J Vac Sci Technol.,

J Vac Sci Technol.,J Vac Sci Technol.,J Vac Sci Technol.,

Carbon,Thin Solid Films,

J Vac Sci Technol A,Vacuum,Surf Coat Technol.,J Vac Sci Technol.,J Vac Sci Technol A,

J Vac Sci Technol A,Handbook of Plasma Processing Technology,Thin Film Processes,

Beam Modification of Materials,Ion Beam Assisted Film Growth,J Vac Sci Technol A,J Vac Sci Technol A,

Vacuum,

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Vacuum,

Surf Coat Technol.,Surf Coat Technol.,

Appl Phys Lett.,

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μMetalloberfläche,NJ Appl Phys.,Thin Solid Films,

Thin Solid Films,

Thin Solid Films,Thin Solid Films,

Int Congress and Exposition

Thin Solid Films,Thin Solid Films,

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plasma-based ion plating

vacuum-based ion plating

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ion platingsputter ion plating reactive ion plating chemical ion platingalternating ion plating arc ion plating

Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition and Surface Interactions,

Deposition Processes for Films and Coatings,Ion Plating Technology Developments and Applications,

J Vac Sci Technol.,Vacuum,

J Vac Sci Technol A,Phys Rev.,

Trang 33

•••••Film Porosity.•••••

Ion Bombardment Modification of Surfaces Fundamentals and Applications,

Deposition Technologies for Films and Coatings,

Plasma Etching: An Introduction,J Vac Sci Technol B,

Adhesion Measurement of Thin Films, Thick Films, and Bulk Coatings,

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Vacuum,Thin Solid Films,Vacuum,Solid State Electron.,Vacuum,Surf Coat Technol.,J Electrochem Soc.,J Vac Sci Technol.,

Thin Solid Films,

J Vac Sci Technol A,Trans Soc Auto Eng.,

Appl Surf Sci.,J Vac Sci Technol A,

J Vac Sci Technol B,

J Vac Sci Technol B,Solid State Technol.,

J Appl Phys.,Thin Solid Films,

Microelectron Manuf Test.,Thin Solid Films,

J Appl Phys.,

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Thin Solid Films,

J Vac Sci Technol.,Adhesion in Solids,J Vac Sci Technol A,Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition and Surface Interactions,

Appl Surf Sci.,

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Trang 38

plasma arc.

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Vac Sci Technol.,

Thin Solid Films,

J Appl Phys.,

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J Vac Sci Technol.,Solid State Technol.,

Society of Vacuum Coaters 14th Ann Tech Conf Proc.,J Vac Sci Technol.,

Met Finish.,

J Vac Sci Technol A,IEEE Trans Plas Sci.,

8th Conf Tube Technology,

Trang 45

J Vac Sci Technol A,Thin Solid Films,

Nucl Instrum Method Phys Res B,Plat Surf Finish.,J Electrochem Technol.,

Society of Vacuum Coaters 35th Ann Tech Conf Proc.,

Thin Solid Films,

Trang 46

Thin Solid Films,•••••••••••••••

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•••• xyxy• xy•••••

J Vac Sci Technol.,Surf Coat Technol.,

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ER E

RE

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r.

S.

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•

Int Mater Rev.,Mater Sci Rep.,Crit Rev in Surf Chem.,

J Vac Sci Technol A,J Vac Sci Technol A,J Appl Phys.,

Mater Sci Eng A,

Mater Sci Eng A,Nucl Instrum Methods Phys Res B,

J Mater Sci.,

Progress in Optics,

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μ o o

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R,R

Table 1 Three modes of film formation for ion-beam-assisted deposition (IBAD)

VaporIon or ion/gasFilm

Mode 1: IBAD

Mode 2: IBAD (Compound synthesis)

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TemperatureMaterialMethodEvaporantIonEnergy, eVR Gas°C°FCommentsRefTable 3 Typical values of ion-beam-assisted deposition process variablesVariableValueμμ

Int Mater Rev.,

J Vac Sci Technol A,J Vac Sci Technol A,J Appl Phys.,

Appl Phys Lett.,J Appl Phys.,

Trang 65

Thin Solid Films,Proc SPIE,Proc SPIE,Appl Opt.,Appl Opt.,Nucl Instrum Methods Phys Res B,Appl Opt.,J Vac Sci Technol A,

J Vac Sci Technol A,Appl Surf Sci.,

J Appl Phys.,Appl Opt.,

Proc SPIE,J Vac Sci Technol A,

Thin Solid Films,Proc SPIE,Appl Opt.,Appl Opt.,Proc SPIE,Appl Opt.,Appl Opt.,

Thin Solid Films,

Thin Solid Films,Appl Opt.,

Nucl Instrum Methods Phys Rev B,

Nucl Instrum Methods Phys Res B,

Nucl Instrum Methods Phys Res B,Nucl Instrum Methods Phys Res.,

Trang 66

Proc Mater Res Soc Symp.,

Nucl Instrum Methods Phys Res B,Proc Mater Res Soc Symp.,

Jpn J Appl Phys.,

Nucl Instrum Meth Phys Res B,

J Mater Res.,

Nucl Instrum Methods Phys Res B,Surf Coat Technol.,

Mater Sci Eng A,Mater Sci Eng A,

J Appl Phys.,

Nucl Instrum Methods Phys Res B,Nucl Instrum Methods Phys Res B,

J Appl Phys.,

Proc Mater Res Soc Symp.,Nucl Instrum Methods Phys Res B,

Nucl Instrum Methods Phys Res B,Mater Sci Eng A,

Trang 67

Thin Solid Films,Appl Opt.,J Vac Sci Technol A,MRS Bull.,J Appl Phys.,Jpn J Appl Phys.,Surf Coat Technol.,Nucl Instrum Methods Phys Res B,J Vac Sci Technol A,

J Vac Sci Technol A,Proc Mater Res Soc Symp.,Surf Coat Technol.,

Vacuum,

Nucl Instrum Methods Phys Res B,Surf Coat Technol.,

Nucl Instrum Methods Phys Rev B,Nucl Instrum Methods Phys Res B,

Nucl Instrum Methods Phys Res B,Proc Mater Res Soc Symp.,

Proc Mater Res Soc Symp.,Appl Opt.,

Phys Rev B,Thin Solid Films,

Trang 69

Int Mater Rev.,Mater Sci Rep.,Crit Rev in Surf Chem.,

Mater Sci Eng A,

J Appl Phys.,

Vacuum,

Nucl Instrum Methods Phys Rev B,Proc Mater Res Soc Symp.,

Proc Mater Res Soc Symp.,Appl Opt.,

Phys Rev B,Thin Solid Films,

Ion Beam Modification of Insulators,Thin Solid Films,

Phys Rev B,

Trang 71

o

Trang 72

Int Mater Rev.,Mater Sci Eng A,

J Appl Phys.,

Surf Coat Technol.,Surf Coat Technol.,

Surf Coat Technol.,J Vac Sci Technol A,

Nucl Instrum Methods Phys Res B,Appl Opt.,

Mater Sci Eng.,J Mater Res.,

Trang 73

Handbook of Plasma Processing Technology Fundamentals, Etching, Deposition, and Surface Interactions,

Trang 74

Bulg J Phys.

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μ

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Surf Coat Technol.,Handbook of Plasma Processing Technology Fundamentals, Etching, Deposition, and Surface Interactions,

IEEE Trans Plasma Sci.,

Plasma Phys and Contrl Fus.,

Thin Solid Films,Sov Phys.-Tech Phys.,

High Temp.,

Sov Tech Phys Lett.,

Instrum Exp Tech.,Instrum Exp Tech.,

Vak.-Tech.,J Vac Sci Technol.,

Trang 79

μ

Surf Coat Technol.,J Vac Soc Tech.,

Trang 80

Ion Implantation,

Surface Alloying by Ion, Electron, and Laser Beams,

Proceedings of the Fourth International Conference on Ion Beam Modification of Materials,Ion Implantation and Ion Beam Processing of Materials,

Trang 81

R

∆R

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μμ

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Nucl Instrum and Methods in Phys Res.,

Rev Sci Instruments,Technology Today,

J Applied Phys.,J Vac Sci and Technol B,

Trang 89

≥

Proceedings of the Fourth International Conference on Ion Beam Modification of Materials,Ion Implantation and Ion Beam Processing of Materials,

Trang 90

Annual Review of Material Science,Ion Implantation and Ion Beam Processing of Materials,

J Amer Ceram Soc.,

Surface Alloying by Ion, Electron, and Laser Beams,Nucl Instr Methods,

Mater Sci and Eng A,

Nucl Instrum and Methods in Phys Res.,Journal of Physics E: Scientific Instruments,

Rev Sci Instruments,J Vac Sci Technol A,

Trang 92

General Electric Rev.,High Temp.-High Press.,

Mech Eng.,Trans Amer Electrochem Soc.,

Metal Treatment and Drop Forging,Anti-Corros Methods Mater.,

Thin Solid Films,Mater Sci Tech.,

Arch Eisenhüttenwes.,

Thin Solid Films,Oxid Met.,

Electrodeposition and Surface Treatment,Metallurgical and Ceramic Coatings,

Trang 93

X X

i

DiPiPii∆ i

Trang 98

∆G

Metallurgical and Ceramic Coatings,J Electrochem Soc.,

Thin Solid Films,

Thin Solid Films,Chemical Vapor Deposition,

J Electrochem Soc.,

Trang 99

Trans Met Soc AIME,J Iron Steel Inst.,

Trang 102

Oxid Met.,

Electrodeposition and Surface Treatment,Metallurgical and Ceramic Coatings,

High Temperature Protective Coatings,Oxid Met.,Trans Met Soc AIME,Met Trans A,Electrochem Tech.,Trans ASME,

Coatings for High Temperature Applications,

High Temperature Protective Coatings,et al.,

J Met.,

Trang 104

Table 2 Examples of pack mixes/sources and processing parameters for various coatings on nickel and cobalt superalloys

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High Temperature Protective Coatings,

Trans ASME,Mater Eval.,

et al., Proceedings of Steam and Combustion Turbine Blading Workshop,Mater Sci Eng.,

Mater Sci Tech.,

Trang 107

Mater Sci Tech.,

Oxid Met.,Mater Sci Tech.,

Trang 108

Table 3 Partial list of commercial applications of pack cementation aluminizing

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•

≥μ

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MRS Bull.,

Mat Res Soc Proc.,Laser Ablation: Mechanisms and Applications,

Z Phys B,Appl Optics,Effects of High Power Radiation,

Thin Solid Films,

J Solid State Comm.,J Chem Phys.,

J Vac Sci Tech.,J Vac Soc Technol.,

Appl Phys Lett.,

Trang 118

vvmvkT

vm v vkT

Effects of High Power Radiation,Processing of Advanced Materials,

CRC Crit Rev Solid State Mat Sci.,J Appl Phys.,Appl Phys Lett.,Proc SPIE,J Appl Phys.,The Physics of Fluids,Laser Ablation: Mechanisms and Applications,J Appl Phys.,

Pulsed Laser Deposition of Thin Films,Appl Phys Lett.,

Appl Phys Lett.,

J Appl Phys.,Appl Phys Lett.,

Trang 119

Phys Rev Lett.,J Appl Phys.,

J Appl Phys.,

Appl Phys Lett.,J Appl Phys.,

Appl Surf Sci.,Laser Ablation: Mechanisms and Applications,

J Appl Phys.,Surface Science,

J Chem Phys.,

Appl Phys Lett.,Pulsed Laser Deposition of Thin Films,

Trang 120

μμ

Table 2 Excimer laser wavelengths

Trang 121

• Laser wavelength: μ• Laser spot size:

• Laser pulse energy:

• Laser pulse width:

• Laser fluence:

• Laser repetition rate:

• Substrate temperature:

• Ambient pressure:

J Vac Sci Tech.,

Appl Phys Lett.,

Trang 123

Appl Surf Sci.,SPIE Proceedings,

Appl Phys Lett.,

Nuclear Inst and Methods in Physics Research,Pulsed Laser Deposition of Thin Films,

MRS Bull.,

Appl Phys Lett.,Thin Solid Films,

• Cuprates:

Trang 124

c

o

μ

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• Perovskites:xx

• Nonperovskites:xx

≥

CRC Crit Rev Solid State Mat Sci.,Processing of Advance Materials,

Photochemical Processing of Electronic Materials,

Phys Rev Lett.,

MRS Bull.,

High TcSuperconducting Films,

Appl Phys Lett.,Appl Phys Lett.,

Trang 126

Appl Phys Lett.,Appl Phys Lett.,

Appl Phys Lett.,

Phys Rev Lett.,

Pulsed Laser Deposition of Thin Films,Appl Phys Lett.,Appl Phys Lett.,

Appl Phys Lett.,Thin Solid Films,

Appl Phys Lett.,

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when two linearly polarized waves with the same wavelength (or frequency) are combined in phase, the resultant wave is linearly polarized and lies in a plane

Trang 131

kkkFundamentals of Optics,Geometrical and Physical Optics,Optics,Optics,Light,Principles of Optics,

Ellipsometry and Polarized Light,A User's Guide to Ellipsometry,

Handbook of Optical Constants of Solids,Handbook

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ellipsometrypolarizeranalyzerDelPsi.DelPsi Deltan PsiDelPsiDelPsi.DelPsiNnk.DelPsiDel Psik

NDel PsiDel Psi

Del PsiDel Psi

Trang 134

Del PsiDel PsiDel PsiDel PsiDel PsiDel PsiDel PsiDel PsinDel.

Ellipsometry and Polarized Light,A User's Guide to Ellipsometry,

Wied Ann.,

Trang 138

tan ψcos ∆ ψ∆

Trang 140

J Appl Phys.,

Proc 4th International Symposium on SOI Technology and Devices,

Appl Phys Lett.,

Trang 141

ASM Materials Engineering Dictionary

CorrosionASM Handbook

Corrosion,ASM Handbook,Corrosion and Metal Finishing,

Modern Electrochemistry,Handbook on Corrosion Testing and Evaluation,

Trans Inst Metal Finish.,

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