Bio-MEMS Technologies and Applications potx

[...]... 1.1 Main Contents and Organization of the Book The contents in this book can be generally divided into three basic sections: 1 Basic Bio-MEMS Fabrication Technologies (Chapters 2, 3, 4, and 5); 2 Microfluidic Devices and Components for Bio-MEMS (Chapters 6, 7, 8, and 9); 3 Sensing Technologies and Bio-MEMS Applications (Chapters 10, 11, 12, 13, 14, 15, and 16) 1.1.1 Microfabrication Technologies In this... of design and fabrication technologies of MEMS devices and systems Most of these books have focused on silicon-based technologies, such as surface micromachining, and wet and dry etching technologies (RIE and DRIE processes) As bio-MEMS technologies develop and many educational institutions begin to offer courses on this subject matter, textbooks covering both the fundamental fabrication technologies. .. Tuesday, November 14, 2006 10:41 AM 2 Bio-MEMS: Technologies and Applications of such systems are the microvolumes of biological or biomedical samples that can be delivered and processed for testing and analysis in an integrated fashion, therefore dramatically reducing the required human involvement in many steps of sample handling and processing, and improving data quality and quantitative capabilities This... cytometry and a review of the state-of-the-art in this field 1.1.3 Sensing Technologies and Bio-MEMS Applications (Chapters 10, 11, 12, 13, 14, 15, and 16) Because of the enormous variations in biological and biomedical samples, the processing and detection principles required for the analysis of targets are often completely different There have been numerous bio-MEMS either in commercial applications. .. monochromatic source waves, r and r0 stand for positions of a point on the aperture relative to the screen and the source, respectively, (n, r) and (n, r0) © 2007 by Taylor & Francis Group, LLC DK532X_book.fm Page 16 Tuesday, November 14, 2006 10:41 AM 16 Bio-MEMS: Technologies and Applications denote the angles between the vectors and the normal to the surface of integration, and ds represents the integration... LLC DK532X_book.fm Page 1 Tuesday, November 14, 2006 10:41 AM 1 Introduction Wanjun Wang and Steven A Soper CONTENTS 1.1 Main Contents and Organization of the Book 4 1.1.1 Microfabrication Technologies 4 1.1.2 Microfluidic Devices and Components for Bio-MEMS 5 1.1.3 Sensing Technologies and Bio-MEMS Applications 6 1.2 Suggestions for Using This Book as a Textbook 7 The last decade... technologies and interested readers can always refer to these books Secondly, the current trends in bio-MEMS seem to be in the direction of using nonsilicon-based fabrication technologies and materials Because biologists and chemists have long used nonsilicon materials, such as glasses and polymers (PMMA, polycarbonate, etc.), various surface treatment technologies have been developed and processes... analog world in which we live For example, various sensors and actuators may be produced using MEMS technologies, and these sensors and actuators can then be used as interfaces between computers and the physical environment for the purposes of information processing and intelligent control In recent years, one of the most exciting progresses in MEMS applications is the rapid evolution of biological-microelectromechanical... to the basic lithography processing steps and optimal processing conditions, example applications in microfluidic devices and micro-optic devices are also presented Chapter 3 provides a very detailed presentation on the LIGA process Applications of LIGA technologies in fabricating polymer bio-MEMS are also introduced Nanoimprint lithography (NIL) is a low cost and flexible patterning technique particularly... 6 Tuesday, November 14, 2006 10:41 AM 6 Bio-MEMS: Technologies and Applications it is necessary to integrate all of the components for sample preparation (including sample extraction, sample preconcentration, and sample derivatization), sample introduction, separation, and detection onto a single microchip made from either glass, silica, or polymers In most bio-MEMS, the sample usually undergoes some . AM Basic Bio-MEMS Fabrication Technologies (Chapters 2, 3, 4, and 5); Microfluidic Devices and Components for Bio-MEMS (Chapters 6, 7, 8, and 9); Sensing Technologies and Bio-MEMS Applications. Microfluidic Devices and Components for Bio-MEMS 3. Sensing Technologies and Bio-MEMS Applications The book targets audiences in the basic sciences and engineering, both indus- trial engineers and academic. fabrication technologies of MEMS devices and systems. Most of these books have focused on silicon-based technologies, such as surface micromachining, and wet and dry etching technologies (RIE and DRIE