51 Trang 8 LIST OF FIGURES Figure 1.1: Lycurgus cup 1 Figure 1.2: Number of papers 2 Figure 1.3: SPPs at single interface 4 Figure 1.4: SPP on Three-layer system 6 Figure 1.5: Sche
MINISTRY OF EDUCATION AND TRAINING HANOI UNIVERSITY OF SCIENCE AND TECHNOLOGY INTERNATIONAL TRAINING INSTITUTE FOR MATERIALS SCIENCE - NGUYEN VAN CHINH STUDY AND FABRICATION OF SURFACE PLASMON POLARITON WAVEGUIDES MASTER THESIS OF MATERIALS SCIENCE ITIMS BATCHS 2014 Hanoi - 2016 Tai ngay!!! Ban co the xoa dong chu nay!!! 17051113936011000000 MINISTRY OF EDUCATION AND TRAINING HANOI UNIVERSITY OF SCIENCE AND TECHNOLOGY INTERNATIONAL TRAINING INSTITUTE FOR MATERIALS SCIENCE - NGUYEN VAN CHINH STUDY AND FABRICATION OF SURFACE PLASMON POLARITON WAVEGUIDES Specialized: Science and Engineering of Electronic Materials MASTER THESIS OF MATERIALS SCIENCE ITIMS BATCHS 2014 SUPERVISOR: Dr CHU MANH HOANG Hanoi - 2016 ACKNOWLEDGEMENT Firstly, I would like to thank my supervisor, Dr Chu Manh Hoang who has supervised and encouraged me during my stay at ITIMS Acknowledgement would be also sent to all the members of Micro-nano systems and sensors technology Laboratory International Training Institute for Materials Science (ITIMS) Finally, thanks should also be given to my family and friends, who always supported me in my study LIST OF PUBLICATIONS Nguyen Van Chinh, Nguyen Thanh Huong, and Chu Manh Hoang (2015), 9th Vietnam National Conference of Solid Physics and Materials Science , pp 314317, 2015, ISBN: 978-604-938-722-7 Nguyen Van Chinh, Nguyen Thanh Huong, Vu Ngoc Hung, Chu Manh Hoang (2015) -shaped plasmonic wave International Conference on Applied & E Physics, pp 124-127, 2015, ISBN: 978-604-913-232-2 Nguyen Van Chinh, Nguyen Thanh Huong, Vu Ngoc Hung, Chu Manh Hoang (2016)- 3rd International Conference on Advanced Materials and Nanotechnology, pp 111114, 2016, ISBN: 978-604-95-0010-7 STATEMENT OF ORIGINAL AUTHORSHIP I hereby declare that the results presented in the thesis are performed by the author The research contained in this thesis has not been previously submitted to meet requirements for an award at this or any higher education institution Date: Signature: 30/09/2016 CONTENTS CHAPTER FUNDAMENTALS OF PLASMONICS 1.1 History of development 1.2 Fundamentals of Surface Plasmon Polaritons 1.3 Wedge surface plasmon polariton waveguides 1.3.1 Conventional wedge waveguides 1.3.2 Hybrid wedge waveguides 1.3.3 Fabrication of wedge waveguides 11 1.3.4 Exciting surface plasmon polariton mode in the wedge waveguide 13 1.3.5 Applications of wedge waveguides 15 Purpose of this thesis 19 CHAPTER DESIGN AND SIMULATION OF WAVEGUIDE 20 2.1 Basic theory for the simulation of waveguides 20 2.2 Triangular Waveguide 21 2.2.1 Structure of triangular waveguide 21 2.2.2 Meshing 22 2.2.3 The thickness of metal layer 23 2.2.4 The tip angle of triangular waveguide 28 2.2.5 Height of triangular waveguide 30 2.2.6 The refractive index of cladding medium 32 2.3 Trapezoidal waveguide 34 2.3.1 Model of the waveguides 34 2.3.2 Results and discussion 35 CHAPTER FABRICATION OF WAVEGUIDE 40 3.1 Process of fabrication 40 3.1.1 Oxidation of SOI wafer 42 3.1.2 Photolithography 43 3.1.3 Isotropic wet–etching in buffered Hydrofluoric acid solution 45 3.1.4 Anisotropic etching in Potassium Hydroxide 46 3.1.5 Sputtering metal layer 47 3.2 Results of the fabrication of waveguide 48 CONCLUSIONS 51 SUGGESTED FURTURE WORKS 51 REFERENCES 52 LIST OF FIGURES Figure 1.1: Lycurgus cup Figure 1.2: Number of papers Figure 1.3: SPPs at single interface Figure 1.4: SPP on Three-layer system Figure 1.5: Schematic of conventional wedge waveguide Figure 1.6: Typical hybrid wedge waveguides 10 Figure 1.7: Fabrication steps of wedge waveguide 11 Figure 1.8: Schematic of 2PP technique 12 Figure 1.9: Prism coupling 13 Figure 1.10: Waveguide coupling 14 Figure 1.11: Grating coupling 15 Figure 1.12 Wedge ring - type hybrid microresonator 16 Figure 1.13 Plasmon nanolaser 18 Figure 2.1: Schematic of triangular waveguide 21 Figure 2.2: Distribution of mesh 22 Figure 2.3: Electric field depending on meshing 23 Figure 2.4: Electric field depending on the thickness of metal 25 Figure 2.5: The influence of metal on transmission characteristics 27 Figure 2.6: Electric field at the thickness of 20nm 28 Figure 2.7: Electric field at various wedge angles 29 Figure 2.8: Transmission properties at various wedge angles 30 Figure 2.9: Electric field at different heights 31 Figure 2.10: Propagation characteristic at different heights 32 Figure 2.11: WPP mode depend ing on surrounding medium 33 Figure 2.12: Sketch of trapezoidal waveguide 34 Figure 2.13: Distribution of hybrid WPP mode 35 Figure 2.14: Electric field at the top surface 36 Figure 2.15: y and z components of electric field 37 Figure 2.16: The confinement and attenuation of WPP mode 38 Figure 2.17: Characteristic of waveguide 39 Figure 3.1: Schematic of fabrication process 41 Figure 3.2: Array of mask 43 Figure 3.3: Coating photoresist 44 Figure 3.4: Double-Side Align System PEM-800 45 Figure 3.5: The sputtering system 47 Figure 3.6: Silicon dioxide mask line 48 Figure 3.7: Silicon dioxide mask line after under - etching 49 Figure 3.8: Silicon waveguide 50 GLOSSARY OF TERMS AND ABBREVIATIONS SPP Surface Plasmon Polariton WPP Wedge Plasmon Polariton CPP Chanel Plasmon Polariton 2PP Two Photon Polymerization TM Transverse Magnetic 2D Two Dimensional FIB Focus Ion Beam ATR Attenuated Total Reflectance SOI Silicon on - Insulator MEMS BHF Microelectromechanical Systems Buffered Hydrofluoric Acid RF Radio frequency DC Direction Current SEM Scanning Electron Microscope