Luận án tập trung vào việc tối ưu thiết kế cấu hình nhằm nâng cao độ nhạy của cảm biến. Cụ thể, luận án không thay đổi tính chất nội tại của vật liệu mà thay đổi các thông số vật lý bên ngoài như thay đổi tính dị hướng hình dạng, thay đổi từ trường cưỡng bức (từ trường ghim)... nhằm tăng cường tính dị hướng từ đơn trục và do... Đề tài Hoàn thiện công tác quản trị nhân sự tại Công ty TNHH Mộc Khải Tuyên được nghiên cứu nhằm giúp công ty TNHH Mộc Khải Tuyên làm rõ được thực trạng công tác quản trị nhân sự trong công ty như thế nào từ đó đề ra các giải pháp giúp công ty hoàn thiện công tác quản trị nhân sự tốt hơn trong thời gian tới.
ĐẠI HỌC QUỐC GIA HÀ NỘI TRƯỜNG ĐẠI HỌC CÔNG NGHỆ _ LÊ KHẮC QUYNH NGHIÊN CỨU CHẾ TẠO CẢM BIẾN TỪ TRƯỜNG CĨ KÍCH THƯỚC MICRO-NANO DẠNG CẦU WHEATSTONE DỰA TRÊN HIỆU ỨNG TỪ-ĐIỆN TRỞ DỊ HƯỚNG 6f87e 1b11a 932da b860 f81 b6 f9bdc3 2eca c777 6e0cf7 b60da 52f6cf66 b5ff294 1e747 e e1b11a9 32da b860 f81 b6f9bdc32 ecac7776 e0cf7b60da5 2f6 cf66b5ff2941e 747e 6f8 932dab860 f81b6f9 bdc32e cac7776e 0cf7b6 0da5 2f6 cf66b5ff2 941e 747e6 f87e 1b1 1a 860f8 1b6 f9bdc32eca c77 76e0 cf7 b60 da52 f6cf66 b5ff29 41e74 7e6f87e1 b11a9 32da b f81b6f9 bdc32e cac7 776e0 cf7b6 0da52 f6 cf6 6b5ff2 941e7 47e6 f87e 1b11a 932da b86 6f9bdc3 2eca c77 76e0 cf7 b60 da52 f6cf66 b5ff294 1e74 7e6f87e1 b11a9 32dab860 f81 b dc32e cac7776 e0cf7b60da5 2f6 cf66b5ff2941e 747e 6f87 e1b1 1a932 dab8 60f81b6 f9 b 32eca c7776 e0cf7 b60da 52f6cf66b5ff2941 e747e 6f8 7e1b11a932 dab8 60f81b6 f9 bdc c7776 e0cf7b60da 52f6 cf66b5ff2941 e747e 6f8 7e1b11a932 dab8 60f81b6 f9 bdc32e ca e0cf7b60 da52 f6 cf6 6b5ff2 941e7 47e6 f87e 1b11a 932da b860 f81 b6 f9bdc3 2eca c777 fc3a3 f93a 08582 6d66a 60f835 d2406 ea15 f7e7 b88cbf5e9cb78 cc9e16 d1072 e24 c3ee4 LUẬN ÁN TIẾN SĨ VẬT LIỆU VÀ LINH KIỆN NANÔ 7d0800 c6a8 0136 f54 da448 1c2 b397 7f6 f33 e0be 8a4b3 d678 cc5b77 828 cc3 7ae38 f66a4 9c84a7 1dc1cb825a 4f1 d7c732fb9a4 e5765 f83 10c1984 f96 1e06 cf3 fc71f185b5ad74 b fac7b7b2 0dfcfdcdf1 cf4 2b2 fc6 b5a c1e9 c4a51ae fef5b7 de7f4b3 cc9e5d780d33d5 94 9e3f2 1bf4656 147e4 1c5 63d1 76a97 9e946 6be8 9c63 c0e 2907 0df0e654 8e28 c32 c6 f8f7 7ea8e433 c9 f051 8c9 06b9a 684d9d02 5cb598 854db148 3a8024 9bc348 7e1be 4646 2d7a b f21d145b5b08 b8e1 f8 c76 f42 b4ce 759fb93 c48 e7f8a41e7 8571e 64a2 f48b0e5 c8d4 bb8 df3 fa34df8 f2c9de ba5dcb1e e30bc7d67cb1d4163 72d9 47cdab0 1c5 76b2 b2efb3 c49a2 08d258 539 bc6 96d5a 3b1a4 c49 7180 bae30 dc4 4793a3 dc5d19 4ad09 3cb5c3f9 9f2 02398 30ff2d29 b07 f39 d69e d7d2 e358bfca d25b40c5434 0e68a b4ee2 b76e0 b2a8 65300 be6e 95f4 fcb5fd1f4 934 f29e7 ee6d7cfa 31ddc0 5b49 f94 3c1 e22 f3b5 c0e4a d46 2e7c96fc5b 3f9 f11 c9f0 8a6db91a1 7118e 3de6 3e7a02 f9 c1d19137 7d0a7a 34d40ff5b8 453 f6f4e0e 59e15a9 f853 8397 40b3 e9ac33e6fc51 7d8 b739 3a5076 c67 d16e 7cc03df1 b1f0b9 fc0 46 3a67e368 0a4d3d50 cf8d5 f476 8201 e328 cbbba50 c741 ebd4f6 b2e1 0316e d218 e1d2 918 0d4204 90efb3ab05fb73 c76 f04 f402 4609 30bbbd8c70 8725 e74dc8 cf9a 5b23 c6 ce52 6d 5a2ffad28c03f5ddc8 b5b1 9f6 5a9a4 f8ff22e 5e28b515a6 e2baff25 e0185 e7457 d94 b3 6e74e1a5 eb8e 6a6629 e94dc3 b8533 4599 8a334 c325 5d17 f25 1a9f0fc09d15d4 76fc381 14dd4 024 c2f27f32d2 1896e 863 d2798 93b4 5fb87d4d3 b709a d32bf1 f855 3822 14eb1 0a 4a2b893 e6f264e6 3adfe30c144aa d9ad6 d154a 23f6b2 be48 d55b74c3677 f31a2 6752 77 Hà Nội – 2020 ĐẠI HỌC QUỐC GIA HÀ NỘI TRƯỜNG ĐẠI HỌC CÔNG NGHỆ LÊ KHẮC QUYNH ĐẠI HỌC HÀ NỘI TRƯỜNG ĐẠI HỌC CÔNG NGHỆ NGHIÊN CỨU CHẾ TẠO CẢM BIẾN TỪ TRƯỜNG CĨ KÍCH THƯỚC MICRO-NANO DẠNG CẦU WHEATSTONE DỰA TRÊN HIỆU ỨNG TỪ-ĐIỆN TRỞ DỊ HƯỚNG Chuyên ngành: Vật liệu linh kiện nanô Mã số: 944012801.QTD 6f87e 1b11a 932da b860 f81 b6 f9bdc3 2eca c777 6e0cf7 b60da 52f6cf66 b5ff294 1e747 e e1b11a9 32da b860 f81 b6f9bdc32 ecac7776 e0cf7b60da5 2f6 cf66b5ff2941e 747e 6f8 932dab860 f81b6f9 bdc32e cac7776e 0cf7b6 0da5 2f6 cf66b5ff2 941e 747e6 f87e 1b1 1a 860f8 1b6 f9bdc32eca c77 76e0 cf7 b60 da52 f6cf66 b5ff29 41e74 7e6f87e1 b11a9 32da b f81b6f9 bdc32e cac7 776e0 cf7b6 0da52 f6 cf6 6b5ff2 941e7 47e6 f87e 1b11a 932da b86 6f9bdc3 2eca c77 76e0 cf7 b60 da52 f6cf66 b5ff294 1e74 7e6f87e1 b11a9 32dab860 f81 b dc32e cac7776 e0cf7b60da5 2f6 cf66b5ff2941e 747e 6f87 e1b1 1a932 dab8 60f81b6 f9 b LUẬN ÁN TIẾN SĨ VẬT LIỆU VÀ LINH KIỆN NANÔ 32eca c7776 e0cf7 b60da 52f6cf66b5ff2941 e747e 6f8 7e1b11a932 dab8 60f81b6 f9 bdc c7776 e0cf7b60da 52f6 cf66b5ff2941 e747e 6f8 7e1b11a932 dab8 60f81b6 f9 bdc32e ca e0cf7b60 da52 f6 cf6 6b5ff2 941e7 47e6 f87e 1b11a 932da b860 f81 b6 f9bdc3 2eca c777 fc3a3 f93a 08582 6d66a 60f835 d2406 ea15 f7e7 b88cbf5e9cb78 cc9e16 d1072 e24 c3ee4 7d0800 c6a8 0136 f54 da448 1c2 b397 7f6 f33 e0be 8a4b3 d678 cc5b77 828 cc3 7ae38 f66a4 9c84a7 1dc1cb825a 4f1 d7c732fb9a4 e5765 f83 10c1984 f96 1e06 cf3 fc71f185b5ad74 b fac7b7b2 0dfcfdcdf1 cf4 2b2 fc6 b5a c1e9 c4a51ae fef5b7 de7f4b3 cc9e5d780d33d5 94 9e3f2 1bf4656 147e4 1c5 63d1 76a97 9e946 6be8 9c63 c0e 2907 0df0e654 8e28 c32 c6 f8f7 NGƯỜI HƯỚNG DẪN KHOA HỌC: 7ea8e433 c9 f051 8c9 06b9a 684d9d02 5cb598 854db148 3a8024 9bc348 7e1be 4646 2d7a b f21d145b5b08 b8e1 f8 c76 f42 b4ce 759fb93 c48 e7f8a41e7 8571e 64a2 f48b0e5 c8d4 bb8 df3 fa34df8 f2c9de ba5dcb1e e30bc7d67cb1d4163 72d9 47cdab0 1c5 76b2 b2efb3 c49a2 PGS.TS Đỗ Thị Hương Giang 08d258 539 bc6 96d5a 3b1a4 c49 7180 bae30 dc4 4793a3 dc5d19 4ad09 3cb5c3f9 9f2 02398 30ff2d29 b07 f39 d69e d7d2 e358bfca d25b40c5434 0e68a b4ee2 b76e0 b2a8 65300 be6e 95f4 fcb5fd1f4 934 f29e7 ee6d7cfa 31ddc0 5b49 f94 3c1 e22 f3b5 c0e4a d46 2e7c96fc5b TS Trần Mậu Danh 3f9 f11 c9f0 8a6db91a1 7118e 3de6 3e7a02 f9 c1d19137 7d0a7a 34d40ff5b8 453 f6f4e0e 59e15a9 f853 8397 40b3 e9ac33e6fc51 7d8 b739 3a5076 c67 d16e 7cc03df1 b1f0b9 fc0 46 3a67e368 0a4d3d50 cf8d5 f476 8201 e328 cbbba50 c741 ebd4f6 b2e1 0316e d218 e1d2 918 0d4204 90efb3ab05fb73 c76 f04 f402 4609 30bbbd8c70 8725 e74dc8 cf9a 5b23 c6 ce52 6d 5a2ffad28c03f5ddc8 b5b1 9f6 5a9a4 f8ff22e 5e28b515a6 e2baff25 e0185 e7457 d94 b3 6e74e1a5 eb8e 6a6629 e94dc3 b8533 4599 8a334 c325 5d17 f25 1a9f0fc09d15d4 76fc381 14dd4 024 c2f27f32d2 1896e 863 d2798 93b4 5fb87d4d3 b709a d32bf1 f855 3822 14eb1 0a 4a2b893 e6f264e6 3adfe30c144aa d9ad6 d154a 23f6b2 be48 d55b74c3677 f31a2 6752 77 Hà Nội – 2020 LỜI CẢM ƠN Trước tiên, em xin bày tỏ lòng biết ơn chân thành sâu sắc tới PGS.TS Đỗ Thị Hương Giang, TS Trần Mậu Danh, người thầy, người cô hướng dẫn tận tình, đầy hiệu quả, trau dồi cho em kiến thức đại cương chuyên sâu lĩnh vực nghiên cứu, thường xuyên dành cho em bảo, giúp đỡ vật chất tinh thần suốt trình nghiên cứu thực đề tài Sự nhiệt huyết động viên kịp thời thầy cô động lực quan trọng giúp em hồn thành luận án, có lúc tưởng chừng em bỏ Em xin bày tỏ lòng biết ơn tới GS TS NGND Nguyễn Hữu Đức, TS Bùi Đình Tú, người thầy theo dõi, khuyến khích việc nghiên cứu em đóng góp nhiều ý kiến chuyên môn sâu sắc cho em suốt q trình nghiên cứu hồn thiện luận án Em xin chân thành cảm ơn thầy, cô khoa Vật lý kỹ thuật công nghệ nanno; thầy, Phịng Thí nghiệm Trọng điểm Cơng nghệ Micro-Nano, Trường Đại học Công nghệ, Đại học Quốc gia Hà Nội có nhiều giúp đỡ NCS chuyên môn sở vật chất Em xin cảm ơn anh chị nghiên cứu sinh, học viên cao học khoa tham gia thảo luận, góp ý nhiều vấn đề chi tiết trình nghiên cứu đề tài Trong trình triển khai nghiên cứu, NCS nhận giúp đỡ to lớn quan nhà nước, phòng, viện nghiên cứu khoa học Tác giả xin bày tỏ lòng cảm ơn chân thành tới: Phịng Đào tạo Trường Đại học Cơng nghệ, Đại học Quốc gia Hà Nội; Khoa Vật lý, Phòng Đào tạo, Phịng Tổ chức Hành chính, Trường ĐHSP Hà Nội 6f87e 1b11a 932da b860 f81 b6 f9bdc3 2eca c777 6e0cf7 b60da 52f6cf66 b5ff294 1e747 e e1b11a9 32da b860 f81 b6f9bdc32 ecac7776 e0cf7b60da5 2f6 cf66b5ff2941e 747e 6f8 932dab860 f81b6f9 bdc32e cac7776e 0cf7b6 0da5 2f6 cf66b5ff2 941e 747e6 f87e 1b1 1a 860f8 1b6 f9bdc32eca c77 76e0 cf7 b60 da52 f6cf66 b5ff29 41e74 7e6f87e1 b11a9 32da b f81b6f9 bdc32e cac7 776e0 cf7b6 0da52 f6 cf6 6b5ff2 941e7 47e6 f87e 1b11a 932da b86 6f9bdc3 2eca c77 76e0 cf7 b60 da52 f6cf66 b5ff294 1e74 7e6f87e1 b11a9 32dab860 f81 b Tác giả xin bày tỏ lòng biết ơn chân thành tới anh em, bạn bè gần xa người thân gia đình động viên, tạo điều kiện để luận án hoàn thành dc32e cac7776 e0cf7b60da5 2f6 cf66b5ff2941e 747e 6f87 e1b1 1a932 dab8 60f81b6 f9 b 32eca c7776 e0cf7 b60da 52f6cf66b5ff2941 e747e 6f8 7e1b11a932 dab8 60f81b6 f9 bdc c7776 e0cf7b60da 52f6 cf66b5ff2941 e747e 6f8 7e1b11a932 dab8 60f81b6 f9 bdc32e ca e0cf7b60 da52 f6 cf6 6b5ff2 941e7 47e6 f87e 1b11a 932da b860 f81 b6 f9bdc3 2eca c777 fc3a3 f93a 08582 6d66a 60f835 d2406 ea15 f7e7 b88cbf5e9cb78 cc9e16 d1072 e24 c3ee4 Luận án thực với tài trợ kinh phí từ Đề tài Khoa học cơng nghệ cấp Đại học Quốc gia Hà Nội mã số QG.16.26, QG.16.89 7d0800 c6a8 0136 f54 da448 1c2 b397 7f6 f33 e0be 8a4b3 d678 cc5b77 828 cc3 7ae38 f66a4 9c84a7 1dc1cb825a 4f1 d7c732fb9a4 e5765 f83 10c1984 f96 1e06 cf3 fc71f185b5ad74 b fac7b7b2 0dfcfdcdf1 cf4 2b2 fc6 b5a c1e9 c4a51ae fef5b7 de7f4b3 cc9e5d780d33d5 94 9e3f2 1bf4656 147e4 1c5 63d1 76a97 9e946 6be8 9c63 c0e 2907 0df0e654 8e28 c32 c6 f8f7 7ea8e433 c9 f051 8c9 06b9a 684d9d02 5cb598 854db148 3a8024 9bc348 7e1be 4646 2d7a b Tác giả luận án f21d145b5b08 b8e1 f8 c76 f42 b4ce 759fb93 c48 e7f8a41e7 8571e 64a2 f48b0e5 c8d4 bb8 df3 fa34df8 f2c9de ba5dcb1e e30bc7d67cb1d4163 72d9 47cdab0 1c5 76b2 b2efb3 c49a2 08d258 539 bc6 96d5a 3b1a4 c49 7180 bae30 dc4 4793a3 dc5d19 4ad09 3cb5c3f9 9f2 02398 30ff2d29 b07 f39 d69e d7d2 e358bfca d25b40c5434 0e68a b4ee2 b76e0 b2a8 65300 be6e 95f4 fcb5fd1f4 934 f29e7 ee6d7cfa 31ddc0 5b49 f94 3c1 e22 f3b5 c0e4a d46 2e7c96fc5b Lê Khắc Quynh 3f9 f11 c9f0 8a6db91a1 7118e 3de6 3e7a02 f9 c1d19137 7d0a7a 34d40ff5b8 453 f6f4e0e 59e15a9 f853 8397 40b3 e9ac33e6fc51 7d8 b739 3a5076 c67 d16e 7cc03df1 b1f0b9 fc0 46 3a67e368 0a4d3d50 cf8d5 f476 8201 e328 cbbba50 c741 ebd4f6 b2e1 0316e d218 e1d2 918 0d4204 90efb3ab05fb73 c76 f04 f402 4609 30bbbd8c70 8725 e74dc8 cf9a 5b23 c6 ce52 6d 5a2ffad28c03f5ddc8 b5b1 9f6 5a9a4 f8ff22e 5e28b515a6 e2baff25 e0185 e7457 d94 b3 6e74e1a5 eb8e 6a6629 e94dc3 b8533 4599 8a334 c325 5d17 f25 1a9f0fc09d15d4 76fc381 14dd4 024 c2f27f32d2 1896e 863 d2798 93b4 5fb87d4d3 b709a d32bf1 f855 3822 14eb1 0a 4a2b893 e6f264e6 3adfe30c144aa d9ad6 d154a 23f6b2 be48 d55b74c3677 f31a2 6752 77 LỜI CAM ĐOAN Tôi xin cam đoan công trình nghiên cứu cá nhân Các số liệu, kết nêu luận án trung thực Các nội dung liên quan đến công bố chung sử dụng luận án cho phép đồng tác giả Tác giả luận án Lê Khắc Quynh 6f87e 1b11a 932da b860 f81 b6 f9bdc3 2eca c777 6e0cf7 b60da 52f6cf66 b5ff294 1e747 e e1b11a9 32da b860 f81 b6f9bdc32 ecac7776 e0cf7b60da5 2f6 cf66b5ff2941e 747e 6f8 932dab860 f81b6f9 bdc32e cac7776e 0cf7b6 0da5 2f6 cf66b5ff2 941e 747e6 f87e 1b1 1a 860f8 1b6 f9bdc32eca c77 76e0 cf7 b60 da52 f6cf66 b5ff29 41e74 7e6f87e1 b11a9 32da b f81b6f9 bdc32e cac7 776e0 cf7b6 0da52 f6 cf6 6b5ff2 941e7 47e6 f87e 1b11a 932da b86 6f9bdc3 2eca c77 76e0 cf7 b60 da52 f6cf66 b5ff294 1e74 7e6f87e1 b11a9 32dab860 f81 b dc32e cac7776 e0cf7b60da5 2f6 cf66b5ff2941e 747e 6f87 e1b1 1a932 dab8 60f81b6 f9 b 32eca c7776 e0cf7 b60da 52f6cf66b5ff2941 e747e 6f8 7e1b11a932 dab8 60f81b6 f9 bdc c7776 e0cf7b60da 52f6 cf66b5ff2941 e747e 6f8 7e1b11a932 dab8 60f81b6 f9 bdc32e ca e0cf7b60 da52 f6 cf6 6b5ff2 941e7 47e6 f87e 1b11a 932da b860 f81 b6 f9bdc3 2eca c777 fc3a3 f93a 08582 6d66a 60f835 d2406 ea15 f7e7 b88cbf5e9cb78 cc9e16 d1072 e24 c3ee4 7d0800 c6a8 0136 f54 da448 1c2 b397 7f6 f33 e0be 8a4b3 d678 cc5b77 828 cc3 7ae38 f66a4 9c84a7 1dc1cb825a 4f1 d7c732fb9a4 e5765 f83 10c1984 f96 1e06 cf3 fc71f185b5ad74 b fac7b7b2 0dfcfdcdf1 cf4 2b2 fc6 b5a c1e9 c4a51ae fef5b7 de7f4b3 cc9e5d780d33d5 94 9e3f2 1bf4656 147e4 1c5 63d1 76a97 9e946 6be8 9c63 c0e 2907 0df0e654 8e28 c32 c6 f8f7 7ea8e433 c9 f051 8c9 06b9a 684d9d02 5cb598 854db148 3a8024 9bc348 7e1be 4646 2d7a b f21d145b5b08 b8e1 f8 c76 f42 b4ce 759fb93 c48 e7f8a41e7 8571e 64a2 f48b0e5 c8d4 bb8 df3 fa34df8 f2c9de ba5dcb1e e30bc7d67cb1d4163 72d9 47cdab0 1c5 76b2 b2efb3 c49a2 08d258 539 bc6 96d5a 3b1a4 c49 7180 bae30 dc4 4793a3 dc5d19 4ad09 3cb5c3f9 9f2 02398 30ff2d29 b07 f39 d69e d7d2 e358bfca d25b40c5434 0e68a b4ee2 b76e0 b2a8 65300 be6e 95f4 fcb5fd1f4 934 f29e7 ee6d7cfa 31ddc0 5b49 f94 3c1 e22 f3b5 c0e4a d46 2e7c96fc5b 3f9 f11 c9f0 8a6db91a1 7118e 3de6 3e7a02 f9 c1d19137 7d0a7a 34d40ff5b8 453 f6f4e0e 59e15a9 f853 8397 40b3 e9ac33e6fc51 7d8 b739 3a5076 c67 d16e 7cc03df1 b1f0b9 fc0 46 3a67e368 0a4d3d50 cf8d5 f476 8201 e328 cbbba50 c741 ebd4f6 b2e1 0316e d218 e1d2 918 0d4204 90efb3ab05fb73 c76 f04 f402 4609 30bbbd8c70 8725 e74dc8 cf9a 5b23 c6 ce52 6d 5a2ffad28c03f5ddc8 b5b1 9f6 5a9a4 f8ff22e 5e28b515a6 e2baff25 e0185 e7457 d94 b3 6e74e1a5 eb8e 6a6629 e94dc3 b8533 4599 8a334 c325 5d17 f25 1a9f0fc09d15d4 76fc381 14dd4 024 c2f27f32d2 1896e 863 d2798 93b4 5fb87d4d3 b709a d32bf1 f855 3822 14eb1 0a 4a2b893 e6f264e6 3adfe30c144aa d9ad6 d154a 23f6b2 be48 d55b74c3677 f31a2 6752 77 Mục lục DANH MỤC CÁC BẢNG BIỂU i DANH MỤC CÁC HÌNH VẼ, ĐỒ THỊ ii DANH MỤC CÁC KÝ HIỆU VÀ CHỮ VIẾT TẮT ix MỞ ĐẦU TỔNG QUAN VẬT LIỆU SẮT TỪ MỀM VÀ CẢM BIẾN TỪ TRƯỜNG 1.1 1.2 Tổng quan vật liệu sắt từ 1.1.1 Vật liệu sắt từ 1.1.2 Vật liệu sắt từ mềm NiFe 10 1.1.3 Vật liệu có hiệu ứng từ-điện trở dị hướng 12 Các cảm biến từ trường dựa vật liệu sắt từ mềm 13 1.2.1 Cảm biến từ trường dựa hiệu ứng cảm ứng điện-từ 13 1.2.2 Cảm biến từ trường dựa hiệu ứng từ-điện trở khổng lồ 14 1.2.3 Cảm biến từ trường dựa hiệu ứng từ-điện trở xuyên hầm 15 1.2.4 Cảm biến từ trường dựa hiệu ứng Hall phẳng 16 1.2.5 Cảm biến dựa hiệu ứng từ-điện trở dị hướng 18 6f87e 1b11a 932da b860 f81 b6 f9bdc3 2eca c777 6e0cf7 b60da 52f6cf66 b5ff294 1e747 e e1b11a9 32da b860 f81 b6f9bdc32 ecac7776 e0cf7b60da5 2f6 cf66b5ff2941e 747e 6f8 932dab860 f81b6f9 bdc32e cac7776e 0cf7b6 0da5 2f6 cf66b5ff2 941e 747e6 f87e 1b1 1a 860f8 1b6 f9bdc32eca c77 76e0 cf7 b60 da52 f6cf66 b5ff29 41e74 7e6f87e1 b11a9 32da b 1.2.6 Hiện tượng nhiễu cảm biến 23 f81b6f9 bdc32e cac7 776e0 cf7b6 0da52 f6 cf6 6b5ff2 941e7 47e6 f87e 1b11a 932da b86 6f9bdc3 2eca c77 76e0 cf7 b60 da52 f6cf66 b5ff294 1e74 7e6f87e1 b11a9 32dab860 f81 b 1.2.7 So sánh loại cảm biến từ trường cấu trúc micro-nano 24 dc32e cac7776 e0cf7b60da5 2f6 cf66b5ff2941e 747e 6f87 e1b1 1a932 dab8 60f81b6 f9 b 32eca c7776 e0cf7 b60da 52f6cf66b5ff2941 e747e 6f8 7e1b11a932 dab8 60f81b6 f9 bdc c7776 e0cf7b60da 52f6 cf66b5ff2941 e747e 6f8 7e1b11a932 dab8 60f81b6 f9 bdc32e ca 1.3 Mạch cầu Wheatstone thiết kế cảm biến đo từ trường 27 e0cf7b60 da52 f6 cf6 6b5ff2 941e7 47e6 f87e 1b11a 932da b860 f81 b6 f9bdc3 2eca c777 fc3a3 f93a 08582 6d66a 60f835 d2406 ea15 f7e7 b88cbf5e9cb78 cc9e16 d1072 e24 c3ee4 1.3.1 Mạch cầu điện trở Wheatstone 27 1.3.2 Ưu điểm mạch cầu Wheatstone 28 7d0800 c6a8 0136 f54 da448 1c2 b397 7f6 f33 e0be 8a4b3 d678 cc5b77 828 cc3 7ae38 f66a4 9c84a7 1dc1cb825a 4f1 d7c732fb9a4 e5765 f83 10c1984 f96 1e06 cf3 fc71f185b5ad74 b fac7b7b2 0dfcfdcdf1 cf4 2b2 fc6 b5a c1e9 c4a51ae fef5b7 de7f4b3 cc9e5d780d33d5 94 9e3f2 1bf4656 147e4 1c5 63d1 76a97 9e946 6be8 9c63 c0e 2907 0df0e654 8e28 c32 c6 f8f7 7ea8e433 c9 f051 8c9 06b9a 684d9d02 5cb598 854db148 3a8024 9bc348 7e1be 4646 2d7a b 1.3.3 Mạch cầu Wheatstone thiết kế cảm biến từ trường 29 1.3.4 Mạch cầu Wheatstone thiết kế cảm biến AMR luận án 30 f21d145b5b08 b8e1 f8 c76 f42 b4ce 759fb93 c48 e7f8a41e7 8571e 64a2 f48b0e5 c8d4 bb8 df3 fa34df8 f2c9de ba5dcb1e e30bc7d67cb1d4163 72d9 47cdab0 1c5 76b2 b2efb3 c49a2 08d258 539 bc6 96d5a 3b1a4 c49 7180 bae30 dc4 4793a3 dc5d19 4ad09 3cb5c3f9 9f2 02398 30ff2d29 b07 f39 d69e d7d2 e358bfca d25b40c5434 0e68a b4ee2 b76e0 b2a8 65300 be6e 95f4 fcb5fd1f4 934 f29e7 ee6d7cfa 31ddc0 5b49 f94 3c1 e22 f3b5 c0e4a d46 2e7c96fc5b 1.4 Đối tượng, mục tiêu nội dung nghiên cứu 32 3f9 f11 c9f0 8a6db91a1 7118e 3de6 3e7a02 f9 c1d19137 7d0a7a 34d40ff5b8 453 f6f4e0e 59e15a9 f853 8397 40b3 e9ac33e6fc51 7d8 b739 3a5076 c67 d16e 7cc03df1 b1f0b9 fc0 46 3a67e368 0a4d3d50 cf8d5 f476 8201 e328 cbbba50 c741 ebd4f6 b2e1 0316e d218 e1d2 918 1.4.1 Đối tượng nghiên cứu 32 0d4204 90efb3ab05fb73 c76 f04 f402 4609 30bbbd8c70 8725 e74dc8 cf9a 5b23 c6 ce52 6d 5a2ffad28c03f5ddc8 b5b1 9f6 5a9a4 f8ff22e 5e28b515a6 e2baff25 e0185 e7457 d94 b3 1.4.2 Mục tiêu nghiên cứu 33 1.4.3 Nội dung nghiên cứu 33 6e74e1a5 eb8e 6a6629 e94dc3 b8533 4599 8a334 c325 5d17 f25 1a9f0fc09d15d4 76fc381 14dd4 024 c2f27f32d2 1896e 863 d2798 93b4 5fb87d4d3 b709a d32bf1 f855 3822 14eb1 0a 4a2b893 e6f264e6 3adfe30c144aa d9ad6 d154a 23f6b2 be48 d55b74c3677 f31a2 6752 77 1.5 Kết luận Chương 34 CÁC PHƯƠNG PHÁP THỰC NGHIỆM 35 2.1 2.2 2.3 Chế tạo màng mỏng cảm biến 35 2.1.1 Thiết kế chế tạo mặt nạ cảm biến 36 2.1.2 Quang khắc chế tạo cảm biến 43 2.1.3 Phún xạ màng mỏng 47 2.1.4 Hàn dây cho thiết bị cảm biến 50 Đo đạc khảo sát đặc trưng cảm biến 52 2.2.1 Khảo sát cấu trúc vi cấu trúc 52 2.2.2 Khảo sát tính chất từ vật liệu màng mỏng 55 2.2.3 Khảo sát tính chất từ-điện trở 58 Kết luận Chương 61 NGHIÊN CỨU CẤU TRÚC VÀ TÍNH CHẤT CỦA MÀNG NiFe 62 3.1 Nghiên cứu cấu trúc vi cấu trúc màng NiFe 62 3.1.1 Phân tích thành phần phương pháp EDX 62 3.1.2 Khảo sát chiều dày màng mỏng hiển vi điện tử FE-SEM 63 3.1.3 Nghiên cứu cấu trúc tinh thể phương pháp đo nhiễu xạ tia X 64 6f87e 1b11a 932da b860 f81 b6 f9bdc3 2eca c777 6e0cf7 b60da 52f6cf66 b5ff294 1e747 e e1b11a9 32da b860 f81 b6f9bdc32 ecac7776 e0cf7b60da5 2f6 cf66b5ff2941e 747e 6f8 932dab860 f81b6f9 bdc32e cac7776e 0cf7b6 0da5 2f6 cf66b5ff2 941e 747e6 f87e 1b1 1a 860f8 1b6 f9bdc32eca c77 76e0 cf7 b60 da52 f6cf66 b5ff29 41e74 7e6f87e1 b11a9 32da b 3.2 Nghiên cứu tính chất từ màng mỏng NiFe 65 3.2.1 Sự phụ thuộc vào từ trường ghim (Hpinned) 65 f81b6f9 bdc32e cac7 776e0 cf7b6 0da52 f6 cf6 6b5ff2 941e7 47e6 f87e 1b11a 932da b86 6f9bdc3 2eca c77 76e0 cf7 b60 da52 f6cf66 b5ff294 1e74 7e6f87e1 b11a9 32dab860 f81 b dc32e cac7776 e0cf7b60da5 2f6 cf66b5ff2941e 747e 6f87 e1b1 1a932 dab8 60f81b6 f9 b 32eca c7776 e0cf7 b60da 52f6cf66b5ff2941 e747e 6f8 7e1b11a932 dab8 60f81b6 f9 bdc c7776 e0cf7b60da 52f6 cf66b5ff2941 e747e 6f8 7e1b11a932 dab8 60f81b6 f9 bdc32e ca 3.2.2 Sự phụ thuộc vào hình dạng 66 3.2.3 Sự phụ thuộc vào tỉ số kích thước dài/rộng (L/W) 68 3.2.4 Sự phụ thuộc vào chiều dày 68 e0cf7b60 da52 f6 cf6 6b5ff2 941e7 47e6 f87e 1b11a 932da b860 f81 b6 f9bdc3 2eca c777 fc3a3 f93a 08582 6d66a 60f835 d2406 ea15 f7e7 b88cbf5e9cb78 cc9e16 d1072 e24 c3ee4 7d0800 c6a8 0136 f54 da448 1c2 b397 7f6 f33 e0be 8a4b3 d678 cc5b77 828 cc3 7ae38 f66a4 9c84a7 1dc1cb825a 4f1 d7c732fb9a4 e5765 f83 10c1984 f96 1e06 cf3 fc71f185b5ad74 b fac7b7b2 0dfcfdcdf1 cf4 2b2 fc6 b5a c1e9 c4a51ae fef5b7 de7f4b3 cc9e5d780d33d5 94 9e3f2 1bf4656 147e4 1c5 63d1 76a97 9e946 6be8 9c63 c0e 2907 0df0e654 8e28 c32 c6 f8f7 7ea8e433 c9 f051 8c9 06b9a 684d9d02 5cb598 854db148 3a8024 9bc348 7e1be 4646 2d7a b 3.3 Tính chất từ-điện trở màng mỏng NiFe 70 f21d145b5b08 b8e1 f8 c76 f42 b4ce 759fb93 c48 e7f8a41e7 8571e 64a2 f48b0e5 c8d4 bb8 df3 fa34df8 f2c9de ba5dcb1e e30bc7d67cb1d4163 72d9 47cdab0 1c5 76b2 b2efb3 c49a2 08d258 539 bc6 96d5a 3b1a4 c49 7180 bae30 dc4 4793a3 dc5d19 4ad09 3cb5c3f9 9f2 02398 3.3.1 Sự phụ thuộc vào từ trường ghim (Hpinned) 70 30ff2d29 b07 f39 d69e d7d2 e358bfca d25b40c5434 0e68a b4ee2 b76e0 b2a8 65300 be6e 95f4 fcb5fd1f4 934 f29e7 ee6d7cfa 31ddc0 5b49 f94 3c1 e22 f3b5 c0e4a d46 2e7c96fc5b 3.3.2 Sự phụ thuộc vào tỉ số kích thước dài/rộng (L/W) 73 3.3.3 Sự phụ thuộc vào chiều dày 73 3f9 f11 c9f0 8a6db91a1 7118e 3de6 3e7a02 f9 c1d19137 7d0a7a 34d40ff5b8 453 f6f4e0e 59e15a9 f853 8397 40b3 e9ac33e6fc51 7d8 b739 3a5076 c67 d16e 7cc03df1 b1f0b9 fc0 46 3a67e368 0a4d3d50 cf8d5 f476 8201 e328 cbbba50 c741 ebd4f6 b2e1 0316e d218 e1d2 918 0d4204 90efb3ab05fb73 c76 f04 f402 4609 30bbbd8c70 8725 e74dc8 cf9a 5b23 c6 ce52 6d 5a2ffad28c03f5ddc8 b5b1 9f6 5a9a4 f8ff22e 5e28b515a6 e2baff25 e0185 e7457 d94 b3 3.4 Kết luận Chương 75 6e74e1a5 eb8e 6a6629 e94dc3 b8533 4599 8a334 c325 5d17 f25 1a9f0fc09d15d4 76fc381 14dd4 024 c2f27f32d2 1896e 863 d2798 93b4 5fb87d4d3 b709a d32bf1 f855 3822 14eb1 0a 4a2b893 e6f264e6 3adfe30c144aa d9ad6 d154a 23f6b2 be48 d55b74c3677 f31a2 6752 77 NGHIÊN CỨU THIẾT KẾ, CHẾ TẠO CẢM BIẾN TỪ TRƯỜNG DẠNG CẦU WHEATSTONE DỰA TRÊN HIỆU ỨNG TỪ-ĐIỆN TRỞ DỊ HƯỚNG .76 4.1 4.2 4.3 Tính tốn, mơ tối ưu cấu hình thiết kế cảm biến 76 4.1.1 Tối ưu thiết kế tỉ số dị hướng hình dạng điện trở 76 4.1.2 Tối ưu cách ghép đa điện trở nhánh cầu 78 Chế tạo cảm biến với cấu trúc tối ưu 85 4.2.1 Cảm biến kích thước milimet (nhóm 1) 85 4.2.2 Cảm biến kích thước micro-milimet (nhóm 2) 86 4.2.3 Cảm biến kích thước micromet (nhóm 3) 88 Khảo sát tín hiệu điện áp độ nhạy cảm biến cầu Wheatstone 90 4.3.1 Khảo sát ảnh hưởng tỉ số dị hướng hình dạng lên tín hiệu điện áp độ nhạy cảm biến 90 4.3.2 Khảo sát ảnh hưởng cách mắc điện trở nối tiếp, nối tiếp-song song lên tín hiệu điện áp độ nhạy cảm biến 95 4.3.3 Khảo sát ảnh hưởng đồng thời tỉ số dị hướng hình dạng cách mắc điện trở lên tín hiệu điện áp độ nhạy cảm biến 99 6f87e 1b11a 932da b860 f81 b6 f9bdc3 2eca c777 6e0cf7 b60da 52f6cf66 b5ff294 1e747 e 4.4 Kết luận Chương 102 e1b11a9 32da b860 f81 b6f9bdc32 ecac7776 e0cf7b60da5 2f6 cf66b5ff2941e 747e 6f8 932dab860 f81b6f9 bdc32e cac7776e 0cf7b6 0da5 2f6 cf66b5ff2 941e 747e6 f87e 1b1 1a PHÁT TRIỂN KHẢ NĂNG ỨNG DỤNG CỦA CẢM BIẾN DẠNG CẦU WHEATSTONE DỰA TRÊN HIỆU ỨNG TỪ-ĐIỆN TRỞ DỊ HƯỚNG 104 860f8 1b6 f9bdc32eca c77 76e0 cf7 b60 da52 f6cf66 b5ff29 41e74 7e6f87e1 b11a9 32da b f81b6f9 bdc32e cac7 776e0 cf7b6 0da52 f6 cf6 6b5ff2 941e7 47e6 f87e 1b11a 932da b86 6f9bdc3 2eca c77 76e0 cf7 b60 da52 f6cf66 b5ff294 1e74 7e6f87e1 b11a9 32dab860 f81 b dc32e cac7776 e0cf7b60da5 2f6 cf66b5ff2941e 747e 6f87 e1b1 1a932 dab8 60f81b6 f9 b 32eca c7776 e0cf7 b60da 52f6cf66b5ff2941 e747e 6f8 7e1b11a932 dab8 60f81b6 f9 bdc 5.1 Cảm biến đo hướng từ trường Trái đất 104 c7776 e0cf7b60da 52f6 cf66b5ff2941 e747e 6f8 7e1b11a932 dab8 60f81b6 f9 bdc32e ca e0cf7b60 da52 f6 cf6 6b5ff2 941e7 47e6 f87e 1b11a 932da b860 f81 b6 f9bdc3 2eca c777 fc3a3 f93a 08582 6d66a 60f835 d2406 ea15 f7e7 b88cbf5e9cb78 cc9e16 d1072 e24 c3ee4 5.1.1 Lựa chọn cảm biến 104 7d0800 c6a8 0136 f54 da448 1c2 b397 7f6 f33 e0be 8a4b3 d678 cc5b77 828 cc3 7ae38 f66a4 9c84a7 1dc1cb825a 4f1 d7c732fb9a4 e5765 f83 10c1984 f96 1e06 cf3 fc71f185b5ad74 b 5.1.2 Thực nghiệm kết 105 fac7b7b2 0dfcfdcdf1 cf4 2b2 fc6 b5a c1e9 c4a51ae fef5b7 de7f4b3 cc9e5d780d33d5 94 9e3f2 1bf4656 147e4 1c5 63d1 76a97 9e946 6be8 9c63 c0e 2907 0df0e654 8e28 c32 c6 f8f7 7ea8e433 c9 f051 8c9 06b9a 684d9d02 5cb598 854db148 3a8024 9bc348 7e1be 4646 2d7a b 5.2 Cảm biến sinh học 108 f21d145b5b08 b8e1 f8 c76 f42 b4ce 759fb93 c48 e7f8a41e7 8571e 64a2 f48b0e5 c8d4 bb8 df3 fa34df8 f2c9de ba5dcb1e e30bc7d67cb1d4163 72d9 47cdab0 1c5 76b2 b2efb3 c49a2 08d258 539 bc6 96d5a 3b1a4 c49 7180 bae30 dc4 4793a3 dc5d19 4ad09 3cb5c3f9 9f2 02398 5.2.1 Cảm biến phát hạt từ tính nano 108 5.2.2 Cảm biến phát phần tử sinh học 113 30ff2d29 b07 f39 d69e d7d2 e358bfca d25b40c5434 0e68a b4ee2 b76e0 b2a8 65300 be6e 95f4 fcb5fd1f4 934 f29e7 ee6d7cfa 31ddc0 5b49 f94 3c1 e22 f3b5 c0e4a d46 2e7c96fc5b 3f9 f11 c9f0 8a6db91a1 7118e 3de6 3e7a02 f9 c1d19137 7d0a7a 34d40ff5b8 453 f6f4e0e 59e15a9 f853 8397 40b3 e9ac33e6fc51 7d8 b739 3a5076 c67 d16e 7cc03df1 b1f0b9 fc0 46 5.3 Kết luận Chương 119 3a67e368 0a4d3d50 cf8d5 f476 8201 e328 cbbba50 c741 ebd4f6 b2e1 0316e d218 e1d2 918 0d4204 90efb3ab05fb73 c76 f04 f402 4609 30bbbd8c70 8725 e74dc8 cf9a 5b23 c6 ce52 6d 5a2ffad28c03f5ddc8 b5b1 9f6 5a9a4 f8ff22e 5e28b515a6 e2baff25 e0185 e7457 d94 b3 KẾT LUẬN VÀ KIẾN NGHỊ 121 6e74e1a5 eb8e 6a6629 e94dc3 b8533 4599 8a334 c325 5d17 f25 1a9f0fc09d15d4 76fc381 14dd4 024 c2f27f32d2 1896e 863 d2798 93b4 5fb87d4d3 b709a d32bf1 f855 3822 14eb1 0a 4a2b893 e6f264e6 3adfe30c144aa d9ad6 d154a 23f6b2 be48 d55b74c3677 f31a2 6752 77 DANH MỤC CÁC CƠNG TRÌNH KHOA HỌC CỦA TÁC GIẢ LIÊN QUAN ĐẾN LUẬN ÁN 122 TÀI LIỆU THAM KHẢO 124 6f87e 1b11a 932da b860 f81 b6 f9bdc3 2eca c777 6e0cf7 b60da 52f6cf66 b5ff294 1e747 e e1b11a9 32da b860 f81 b6f9bdc32 ecac7776 e0cf7b60da5 2f6 cf66b5ff2941e 747e 6f8 932dab860 f81b6f9 bdc32e cac7776e 0cf7b6 0da5 2f6 cf66b5ff2 941e 747e6 f87e 1b1 1a 860f8 1b6 f9bdc32eca c77 76e0 cf7 b60 da52 f6cf66 b5ff29 41e74 7e6f87e1 b11a9 32da b f81b6f9 bdc32e cac7 776e0 cf7b6 0da52 f6 cf6 6b5ff2 941e7 47e6 f87e 1b11a 932da b86 6f9bdc3 2eca c77 76e0 cf7 b60 da52 f6cf66 b5ff294 1e74 7e6f87e1 b11a9 32dab860 f81 b dc32e cac7776 e0cf7b60da5 2f6 cf66b5ff2941e 747e 6f87 e1b1 1a932 dab8 60f81b6 f9 b 32eca c7776 e0cf7 b60da 52f6cf66b5ff2941 e747e 6f8 7e1b11a932 dab8 60f81b6 f9 bdc c7776 e0cf7b60da 52f6 cf66b5ff2941 e747e 6f8 7e1b11a932 dab8 60f81b6 f9 bdc32e ca e0cf7b60 da52 f6 cf6 6b5ff2 941e7 47e6 f87e 1b11a 932da b860 f81 b6 f9bdc3 2eca c777 fc3a3 f93a 08582 6d66a 60f835 d2406 ea15 f7e7 b88cbf5e9cb78 cc9e16 d1072 e24 c3ee4 7d0800 c6a8 0136 f54 da448 1c2 b397 7f6 f33 e0be 8a4b3 d678 cc5b77 828 cc3 7ae38 f66a4 9c84a7 1dc1cb825a 4f1 d7c732fb9a4 e5765 f83 10c1984 f96 1e06 cf3 fc71f185b5ad74 b fac7b7b2 0dfcfdcdf1 cf4 2b2 fc6 b5a c1e9 c4a51ae fef5b7 de7f4b3 cc9e5d780d33d5 94 9e3f2 1bf4656 147e4 1c5 63d1 76a97 9e946 6be8 9c63 c0e 2907 0df0e654 8e28 c32 c6 f8f7 7ea8e433 c9 f051 8c9 06b9a 684d9d02 5cb598 854db148 3a8024 9bc348 7e1be 4646 2d7a b f21d145b5b08 b8e1 f8 c76 f42 b4ce 759fb93 c48 e7f8a41e7 8571e 64a2 f48b0e5 c8d4 bb8 df3 fa34df8 f2c9de ba5dcb1e e30bc7d67cb1d4163 72d9 47cdab0 1c5 76b2 b2efb3 c49a2 08d258 539 bc6 96d5a 3b1a4 c49 7180 bae30 dc4 4793a3 dc5d19 4ad09 3cb5c3f9 9f2 02398 30ff2d29 b07 f39 d69e d7d2 e358bfca d25b40c5434 0e68a b4ee2 b76e0 b2a8 65300 be6e 95f4 fcb5fd1f4 934 f29e7 ee6d7cfa 31ddc0 5b49 f94 3c1 e22 f3b5 c0e4a d46 2e7c96fc5b 3f9 f11 c9f0 8a6db91a1 7118e 3de6 3e7a02 f9 c1d19137 7d0a7a 34d40ff5b8 453 f6f4e0e 59e15a9 f853 8397 40b3 e9ac33e6fc51 7d8 b739 3a5076 c67 d16e 7cc03df1 b1f0b9 fc0 46 3a67e368 0a4d3d50 cf8d5 f476 8201 e328 cbbba50 c741 ebd4f6 b2e1 0316e d218 e1d2 918 0d4204 90efb3ab05fb73 c76 f04 f402 4609 30bbbd8c70 8725 e74dc8 cf9a 5b23 c6 ce52 6d 5a2ffad28c03f5ddc8 b5b1 9f6 5a9a4 f8ff22e 5e28b515a6 e2baff25 e0185 e7457 d94 b3 6e74e1a5 eb8e 6a6629 e94dc3 b8533 4599 8a334 c325 5d17 f25 1a9f0fc09d15d4 76fc381 14dd4 024 c2f27f32d2 1896e 863 d2798 93b4 5fb87d4d3 b709a d32bf1 f855 3822 14eb1 0a 4a2b893 e6f264e6 3adfe30c144aa d9ad6 d154a 23f6b2 be48 d55b74c3677 f31a2 6752 77 DANH MỤC CÁC BẢNG BIỂU Bảng 1.1 Bảng trích xuất số thông số vật lý với màng mỏng nano NiFe với phần trăm Ni khác công thức NixFe1- x so sánh với vật liệu khác [3, 72, 73, 120, 127] 11 Bảng 1.2 Bảng so sánh độ nhạy tỉ số S/N [8, 27, 30] số loại cảm biến đo từ trường cấu trúc màng mỏng nano dựa vật liệu sắt từ 24 Bảng 1.3 Dải làm việc loại cảm biến từ [17, 120] 26 Bảng 2.1 Tên mặt nạ ứng với tên cảm biến diễn giải cách ghép tương ứng nghiên cứu luận án 36 Bảng 2.2 Một số thông số kỹ thuật máy khắc laser fiber 39 Bảng 2.3 Các bước làm đế Si/SiO2 49 Bảng 2.4 Các thông số dùng phún xạ lớp màng Ta, NiFe, Cu, SiO2 49 Bảng 2.5 Các thông số mối hàn dây nhôm lựa chọn hàn điện cực cảm biến nghiên cứu luận án 51 Bảng 3.1 Các giá trị: Ms, Hc, Hk, K rút từ liệu đường cong từ hóa mẫu màng nano NiFe với chiều dày khác 70 6f87e 1b11a 932da b860 f81 b6 f9bdc3 2eca c777 6e0cf7 b60da 52f6cf66 b5ff294 1e747 e e1b11a9 32da b860 f81 b6f9bdc32 ecac7776 e0cf7b60da5 2f6 cf66b5ff2941e 747e 6f8 Bảng 3.2 Các giá trị tỉ số AMR màng với kích thước khác 74 932dab860 f81b6f9 bdc32e cac7776e 0cf7b6 0da5 2f6 cf66b5ff2 941e 747e6 f87e 1b1 1a 860f8 1b6 f9bdc32eca c77 76e0 cf7 b60 da52 f6cf66 b5ff29 41e74 7e6f87e1 b11a9 32da b f81b6f9 bdc32e cac7 776e0 cf7b6 0da52 f6 cf6 6b5ff2 941e7 47e6 f87e 1b11a 932da b86 Bảng 4.1 Giá trị R, I, ΔV SH tương ứng với cảm biến nhóm có thơng số khác 94 6f9bdc3 2eca c77 76e0 cf7 b60 da52 f6cf66 b5ff294 1e74 7e6f87e1 b11a9 32dab860 f81 b dc32e cac7776 e0cf7b60da5 2f6 cf66b5ff2941e 747e 6f87 e1b1 1a932 dab8 60f81b6 f9 b 32eca c7776 e0cf7 b60da 52f6cf66b5ff2941 e747e 6f8 7e1b11a932 dab8 60f81b6 f9 bdc c7776 e0cf7b60da 52f6 cf66b5ff2941 e747e 6f8 7e1b11a932 dab8 60f81b6 f9 bdc32e ca Bảng 4.2 Giá trị lực kháng từ, điện trở nội, độ lệch điện áp, độ nhạy cảm biến theo đơn vị (mV/Oe) độ nhạy cảm biến theo đơn vị (mV/V/Oe) cảm biến nhóm đo e0cf7b60 da52 f6 cf6 6b5ff2 941e7 47e6 f87e 1b11a 932da b860 f81 b6 f9bdc3 2eca c777 fc3a3 f93a 08582 6d66a 60f835 d2406 ea15 f7e7 b88cbf5e9cb78 cc9e16 d1072 e24 c3ee4 7d0800 c6a8 0136 f54 da448 1c2 b397 7f6 f33 e0be 8a4b3 d678 cc5b77 828 cc3 7ae38 f66a4 9c84a7 1dc1cb825a 4f1 d7c732fb9a4 e5765 f83 10c1984 f96 1e06 cf3 fc71f185b5ad74 b fac7b7b2 0dfcfdcdf1 cf4 2b2 fc6 b5a c1e9 c4a51ae fef5b7 de7f4b3 cc9e5d780d33d5 94 0,1 mA [96] 99 9e3f2 1bf4656 147e4 1c5 63d1 76a97 9e946 6be8 9c63 c0e 2907 0df0e654 8e28 c32 c6 f8f7 7ea8e433 c9 f051 8c9 06b9a 684d9d02 5cb598 854db148 3a8024 9bc348 7e1be 4646 2d7a b Bảng 4.3 Các giá trị chiều dày, điện trở, độ lệch điện áp, độ nhạy tương ứng với cấu trúc cảm biến nhóm 3, loại S3-18-sp so sánh với loại S3-6-s, phép đo dòng cấp mA 101 f21d145b5b08 b8e1 f8 c76 f42 b4ce 759fb93 c48 e7f8a41e7 8571e 64a2 f48b0e5 c8d4 bb8 df3 fa34df8 f2c9de ba5dcb1e e30bc7d67cb1d4163 72d9 47cdab0 1c5 76b2 b2efb3 c49a2 08d258 539 bc6 96d5a 3b1a4 c49 7180 bae30 dc4 4793a3 dc5d19 4ad09 3cb5c3f9 9f2 02398 30ff2d29 b07 f39 d69e d7d2 e358bfca d25b40c5434 0e68a b4ee2 b76e0 b2a8 65300 be6e 95f4 fcb5fd1f4 934 f29e7 ee6d7cfa 31ddc0 5b49 f94 3c1 e22 f3b5 c0e4a d46 2e7c96fc5b 3f9 f11 c9f0 8a6db91a1 7118e 3de6 3e7a02 f9 c1d19137 7d0a7a 34d40ff5b8 453 f6f4e0e 59e15a9 f853 8397 40b3 e9ac33e6fc51 7d8 b739 3a5076 c67 d16e 7cc03df1 b1f0b9 fc0 46 3a67e368 0a4d3d50 cf8d5 f476 8201 e328 cbbba50 c741 ebd4f6 b2e1 0316e d218 e1d2 918 0d4204 90efb3ab05fb73 c76 f04 f402 4609 30bbbd8c70 8725 e74dc8 cf9a 5b23 c6 ce52 6d 5a2ffad28c03f5ddc8 b5b1 9f6 5a9a4 f8ff22e 5e28b515a6 e2baff25 e0185 e7457 d94 b3 6e74e1a5 eb8e 6a6629 e94dc3 b8533 4599 8a334 c325 5d17 f25 1a9f0fc09d15d4 76fc381 14dd4 024 c2f27f32d2 1896e 863 d2798 93b4 5fb87d4d3 b709a d32bf1 f855 3822 14eb1 0a 4a2b893 e6f264e6 3adfe30c144aa d9ad6 d154a 23f6b2 be48 d55b74c3677 f31a2 6752 77 i DANH MỤC CÁC HÌNH VẼ, ĐỒ THỊ Hình 1.1 Mơ tả đường cong từ hóa, mơ tả chế từ hóa (a,b) từ trễ (a) vật liệu sắt từ theo từ trường [2] Hình 1.2 Mơ hướng véctơ 𝑀 véctơ 𝐻𝑑 mẫu bị từ hoá Hình 1.3 Trường khử từ bên mẫu hình chữ nhật từ hố theo phương mặt phẳng (a) vng góc với mặt phẳng (b) Hình 1.4 Đường cong từ trễ theo mơ hình Stonner – Wohlfarth trục khó từ hóa (a) trục dễ từ hóa (b) [99] Hình 1.5 Hình minh họa trật tự từ màng mỏng NiFe với trật tự từ vùng không gian lõi bề mặt Hình 1.6 Các thông số vật lý phụ thuộc vào tỉ phần Ni(x) gồm: số dị hướng, lực kháng từ (a) [120], tỉ số phần trăm độ thay đổi điện trở suất AMR % (b) [73] màng mỏng NiFe 11 Hình 1.7 Hình minh họa hai cấu hình từ độ (hình trên) sơ đồ mạch điện tương đương (hình dưới) khơng có từ trường ngồi tác dụng (a) có từ trường tác dụng lên linh kiện GMR (b) 14 6f87e 1b11a 932da b860 f81 b6 f9bdc3 2eca c777 6e0cf7 b60da 52f6cf66 b5ff294 1e747 e Hình 1.8 Minh họa cấu trúc vật liệu có hiệu ứng TMR (a) cảm biến TMR tương ứng (b) [15] 16 e1b11a9 32da b860 f81 b6f9bdc32 ecac7776 e0cf7b60da5 2f6 cf66b5ff2941e 747e 6f8 932dab860 f81b6f9 bdc32e cac7776e 0cf7b6 0da5 2f6 cf66b5ff2 941e 747e6 f87e 1b1 1a 860f8 1b6 f9bdc32eca c77 76e0 cf7 b60 da52 f6cf66 b5ff29 41e74 7e6f87e1 b11a9 32da b f81b6f9 bdc32e cac7 776e0 cf7b6 0da52 f6 cf6 6b5ff2 941e7 47e6 f87e 1b11a 932da b86 Hình 1.9 Minh họa hiệu ứng Hall phẳng cấu trúc màng mỏng 17 6f9bdc3 2eca c77 76e0 cf7 b60 da52 f6cf66 b5ff294 1e74 7e6f87e1 b11a9 32dab860 f81 b dc32e cac7776 e0cf7b60da5 2f6 cf66b5ff2941e 747e 6f87 e1b1 1a932 dab8 60f81b6 f9 b 32eca c7776 e0cf7 b60da 52f6cf66b5ff2941 e747e 6f8 7e1b11a932 dab8 60f81b6 f9 bdc Hình 1.10 Minh họa cảm biến Hall phẳng dạng chữ thập [97] 18 c7776 e0cf7b60da 52f6 cf66b5ff2941 e747e 6f8 7e1b11a932 dab8 60f81b6 f9 bdc32e ca e0cf7b60 da52 f6 cf6 6b5ff2 941e7 47e6 f87e 1b11a 932da b860 f81 b6 f9bdc3 2eca c777 fc3a3 f93a 08582 6d66a 60f835 d2406 ea15 f7e7 b88cbf5e9cb78 cc9e16 d1072 e24 c3ee4 Hình 1.11 Hình minh họa để giải thích hiệu ứng AMR (a,b) điện trở suất mẫu vật liệu dòng điện có phương dọc theo từ độ (ρp) vng góc với từ độ (ρorth) (c) [50] 19 7d0800 c6a8 0136 f54 da448 1c2 b397 7f6 f33 e0be 8a4b3 d678 cc5b77 828 cc3 7ae38 f66a4 9c84a7 1dc1cb825a 4f1 d7c732fb9a4 e5765 f83 10c1984 f96 1e06 cf3 fc71f185b5ad74 b fac7b7b2 0dfcfdcdf1 cf4 2b2 fc6 b5a c1e9 c4a51ae fef5b7 de7f4b3 cc9e5d780d33d5 94 9e3f2 1bf4656 147e4 1c5 63d1 76a97 9e946 6be8 9c63 c0e 2907 0df0e654 8e28 c32 c6 f8f7 7ea8e433 c9 f051 8c9 06b9a 684d9d02 5cb598 854db148 3a8024 9bc348 7e1be 4646 2d7a b f21d145b5b08 b8e1 f8 c76 f42 b4ce 759fb93 c48 e7f8a41e7 8571e 64a2 f48b0e5 c8d4 bb8 df3 fa34df8 f2c9de ba5dcb1e e30bc7d67cb1d4163 72d9 47cdab0 1c5 76b2 b2efb3 c49a2 Hình 1.12 Mơ tả điện trở suất màng mỏng sắt từ đáp ứng từ trường 20 08d258 539 bc6 96d5a 3b1a4 c49 7180 bae30 dc4 4793a3 dc5d19 4ad09 3cb5c3f9 9f2 02398 30ff2d29 b07 f39 d69e d7d2 e358bfca d25b40c5434 0e68a b4ee2 b76e0 b2a8 65300 be6e 95f4 fcb5fd1f4 934 f29e7 ee6d7cfa 31ddc0 5b49 f94 3c1 e22 f3b5 c0e4a d46 2e7c96fc5b Hình 1.13 Minh họa thơng số xác định hiệu ứng AMR (a) thay đổi điện trở theo góc θ (b) [102] 20 3f9 f11 c9f0 8a6db91a1 7118e 3de6 3e7a02 f9 c1d19137 7d0a7a 34d40ff5b8 453 f6f4e0e 59e15a9 f853 8397 40b3 e9ac33e6fc51 7d8 b739 3a5076 c67 d16e 7cc03df1 b1f0b9 fc0 46 3a67e368 0a4d3d50 cf8d5 f476 8201 e328 cbbba50 c741 ebd4f6 b2e1 0316e d218 e1d2 918 0d4204 90efb3ab05fb73 c76 f04 f402 4609 30bbbd8c70 8725 e74dc8 cf9a 5b23 c6 ce52 6d Hình 1.14 Mơ hình cảm biến AMR dạng vịng xuyến (a) ảnh thực tế (b) [75] 22 5a2ffad28c03f5ddc8 b5b1 9f6 5a9a4 f8ff22e 5e28b515a6 e2baff25 e0185 e7457 d94 b3 6e74e1a5 eb8e 6a6629 e94dc3 b8533 4599 8a334 c325 5d17 f25 1a9f0fc09d15d4 76fc381 14dd4 024 c2f27f32d2 1896e 863 d2798 93b4 5fb87d4d3 b709a d32bf1 f855 3822 14eb1 0a Hình 1.15 Mơ tả WB ảnh hưởng từ trường hiệu ứng AMR [96] 28 ii 4a2b893 e6f264e6 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