Advanced gate stack for sub 0 1 (mu)m CMOS technology

... 1. 2 -1. 6 0. 9 -1. 3 0. 8 -1. 2 0. 7 -1. 1 Gate leakage at 10 0 oC for high performance (A/cm2) 2 70 4 ,00 0 17 ,00 0 54 ,00 0 1 10 , 000 Gate leakage at 10 0 oC for lowoperating-power (A/cm2) 0. 57 2 .19 4.55 18 .75 90. 9 Gate ... 22 16 11 EOT for high-performance (nm) 0. 9 -1. 4 0. 6 -1. 1 0. 5 -0. 8 0. 4 -0. 6 0. 4 -0. 5 EOT for low-operating-power (nm) 1....

Ngày tải lên: 15/09/2015, 21:16

... Metal gate/ SiO2 stack (b) Metal gate/ high-k stack Metal gate High-k dielectric SiO2 Si substrate SiO2 Si substrate Fig 1.3 An illustration of (a) metal gate/ SiO2 and (b) metal gate/ high-k stacks formed ... Typical gate leakage and (b) breakdown voltage showed better characteristics for NiSi gate stack incorporating a YIL and a TbIL A RTA at 950ºC was conducted before FUS...

Ngày tải lên: 11/09/2015, 16:01

... mask effect on gate stacks of metal electrode / high- K dielectric should be investigated and understood for successful implementation of hard mask in the gate stack 1.3.4 Challenges of Metal Electrode ... replace current SiO2 dielectric and poly-Si electrode for continuous success of CMOS technology The study on the formation of advanced gate stacks usin...

Ngày tải lên: 12/09/2015, 08:16

... FABRICATION OF ULTRA- SHALLOW JUNCTIONS AND ADVANCED GATE STACKS FOR ULSI TECHNOLOGIES USING LASER THERMAL PROCESSING CHONG YUNG FU (B A Sc (First Class Hons.), NTU) A THESIS SUBMITTED FOR ... fabricate ultra- shallow p+/n junctions and advanced poly-Si gate stacks for ultra- large scale integration technologies LTP of ultra- shallow ju...

Ngày tải lên: 12/09/2015, 11:29

... ADVANCED GATE STACKS FOR NANO- SCALE CMOS TECHNOLOGY WANG XIN PENG (M Eng., Tsinghua University; B Eng., Tsinghua University) A THESIS SUBMITTED FOR THE DEGREE OF DOCTOR ... Developments in Advanced Gate Stacks Involving High-k Dielectrics and Metal Gates Chapter Developments in Advanced Gate Stacks Involving High-k Dielectrics and Metal Gates 2.1 High-k Gate Di...

Ngày tải lên: 15/09/2015, 21:16

... SECURITY TARGET FOR THE SECURELOGIX CORPORATION® ENTERPRISE TELEPHONY MANAGEMENT (ETM™) PLATFORM VERSION 3.0.1 Document No 1404-002-D001 Version 2.9, 14 February 2002 ... Page ii of ii ETM™ Platform v3.0.1 Security Target 1.1 INTRODUCTION IDENTIFICATION This document details the Security Target (ST) for the SecureLogix Corporation® ETM™ Platf...

Ngày tải lên: 23/03/2014, 23:21

Ngày tải lên: 21/07/2014, 21:21

... 12 16 12 16 12 19 12 24 12 25 12 48 12 49 12 51 12 51 12 55 12 63 12 70 12 72 12 72 12 78 12 78 12 80 12 81 12 83 12 83 12 84 12 87 12 88 12 94 12 97 13 02 13 03 13 04 25 .14 Solutions ... 10 25 10 27 10 27 10 29 10 32 10 34 10 35 10 41 10 41 10 43 10 45 10 46 10 48 10 50 10 52 10 59 10 59 10 61 10 65 10 65 10 68 10 71 10 74 10 74 1...

Ngày tải lên: 06/08/2014, 01:21

... = 10 9 = x0 11 10 = x0 x0 = 10 9 At 7:00 pm the number of bacteria is 10 11 10 60 = 11 60 ≈ 3.04 × 10 11 51 10 At 3:00 pm the number of bacteria was 10 9 11 10 18 0 = 18 10 189 ≈ 35.4 11 180 Figure 1. 13: ... b2 (−i) = (a2 b3 − a3 b2 )i − (a1 b3 − a3 b1 )j + (a1 b2 − a2 b1 )k Next we evaluate the determinant i j k a a a a a a a1 a2 a3 = i − j + k b2 b3 b1 b3 b1 b2 b1 b2 b3 =...

Ngày tải lên: 06/08/2014, 01:21

... = ( 1) n 1 (n − 1) !, for n ≥ By Taylor’s theorem of the mean we have, ln x = (x − 1) − (x − 1) 2 (x − 1) 3 (x − 1) 4 (x − 1) n (x − 1) n +1 + − + · · · + ( 1) n 1 + ( 1) n n n + ξ n +1 72 -1 0.5 1. 5 2.5 ... 6! (2(n − 1) )! (2n)! Here are graphs of the one, two, three and four term approximations 0.5 0.5 -3 -2 -1 -0.5 -1 -3 -2 -1 -0.5 -1 0.5 -3 -2 -1 -0.5 -1 0.5...

Ngày tải lên: 06/08/2014, 01:21

... approximate sin (1) , 13 15 1 + ≈ 0.8 41 6 67 12 0 10 7 To see that this has the required accuracy, sin (1) ≈ 0.8 41 4 71 Solution 3 .19 Expanding the terms in the approximation in Taylor series, ∆x3 ∆x4 ∆x2 f ... Example 4. 4 .1 Consider the partial fraction expansion of + x + x2 (x − 1) 3 The expansion has the form a0 a1 a2 + + (x − 1) (x − 1) x 1 127 The coefficients are (1 + x...

Ngày tải lên: 06/08/2014, 01:21

... 87 − 6 1/ 3 1/ 3 6−2/3 + √ 2/3 87 √ + 87 , 0, − 6 1/ 3   ≈ (0 .58 9 755 , 0, 0.347 81) 1/ 3 The closest point is shown graphically in Figure 5 .10 1- 1 -0 .5 0 .5 -1 -0 .5 0 0 .5 1. 5 0 .5 Figure 5 .10 : Paraboloid, ... dx2 = (1 + 2x) x= 1 = 1 x= 1 = x= 1 (2) x= 1 =1 Then we can the integration + x + x2 dx = (x + 1) 3 1 − + (x + 1) (x + 1) x +1 1 + + ln |x + 1|...

Ngày tải lên: 06/08/2014, 01:21

... values For instance, (12 ) 11 /2 = 1 and 11 /2 = ( 1) 2 = Example 6. 6.2 Consider 21/ 5 , (1 + ı )1/ 3 and (2 + ı)5 /6 √ 21/ 5 = eı2πk/5 , for k = 0, 1, 2, 3, 19 9 = √ (1 + ı )1/ 3 = = (2 + ı)5 /6 = √ √ ... 0, z and z + ζ Hint 6 .12 Hint 6 .13 Hint 6 .14 Hint 6 .15 Hint 6 . 16 Polar Form Hint 6 .17 Find the Taylor series of eıθ , cos θ and sin θ Note that ı2n...

Ngày tải lên: 06/08/2014, 01:21

... 6 .16 225 -1 -1 Figure 6 .15 : ( 1) −3/4 Solution 6 .13 ( 1) 1/ 4 = (( 1) 1 )1/ 4 = ( 1) 1/4 = (eıπ )1/ 4 = eıπ/4 11 /4 = eıπ/4 eıkπ/2 , k = 0, 1, 2, = eıπ/4 , eı3π/4 , eı5π/4 , e 7 /4 + ı 1 + ı 1 − ı − ... Cartesian form √ 1+ ı 1 = √ 1+ ı √ −2 + ı2 1 = √ −2 + ı2 √ −2 + ı2 √ −8 − ı8 1 = = √ −2 + ı2 √ 12 8 + 12 8 10 √ 1+ ı √ = − 512 − ı 512 1 1 √ 512 + ı √ 1 − ı √ √ = 512 + ı −...

Ngày tải lên: 06/08/2014, 01:21

... , and draw a 2 71 -1 -2 y -1 y -1 -1 x -1 -2 -1 x -2 -2 -1 -2 01 x -2 -1 y -1 -2 01 x -1 -2 12 10-2 -1 y -1 -1 y -1 1 210 -2 -1 y Figure 7.24: Plots of x -1 -2 -1 z 1/ 2 (left) and 272 x -1 -2 z 1/ 2 ... arguments: log( 1) = log 1 = log (1) − log( 1) = − log( 1) , therefore, log( 1) = = 11 /2 = (( 1) ( 1) )1/ 2 = ( 1) 1/2 ( 1) 1/2 = ıı = 1, therefore, = 1 Hint,...

Ngày tải lên: 06/08/2014, 01:21