Thermal processing in lithography equipment design, control and metrology
Thermal processing in lithography equipment design, control and metrology
... the prossing control system in lithography requires careful consideration, including advanced process control techniques, equipment design and process monitoring In this thesis we will investigate ... requires in- situ measurement CD metrology plays a key role enabling productivity gains made through APC in lithography The continuing decreasing of CD size has also led to smaller process control windows ... quench in lithography The system integrates the baking and chilling processes of the lithography sequence, and thus eliminates the undesirable and uncontrollable temperature fluctuations during the...
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In situ measurement and control of photoresist processing in lithography
... run in open-loop with very little real-time process control utilizing in situ sensors In this thesis, in- situ measurement and real-time control is applied to some aspects of lithography including ... Real-time control requires in- situ measurement [6, 15] The shift of metrology from off-line towards in- situ sensors, provides in- time data for active process control and the elimination of wafer misprocessing ... the wafer in the baking process of lithography The noticeable trends of developing integrated circuits nowadays, in particular decreasing the size of elements and increasing the diameter of the...
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Control of resist processing in lithography
... importance of controlling develop step since it is one of the crucial steps in lithography that determines the final CD Their efforts include determining the best time to switch from developing to rinsing ... medium instead of air Morton et al (1999) has mentioned the difficulty of estimating film thickness during dissolution of photoresist in developer solution In general, dissolution of photoresist often ... this process often suffer gain variations 1.2 Contributions The main focus of this thesis is in reducing CD variation by applying control strategy in lithography process and the use of advanced...
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Thermal transport in low dimensional graded structures and silicon nanowires
... of Figures ix Introduction 1.1 Thermal Transport in Low- Dimensional Systems 1.1.1 Thermal Transport in 1D Chains 1.1.2 Thermal Transport in Quasi-1D Nano -Structures ... THERMAL TRANSPORT IN LOW DIMENSIONAL GRADED STRUCTURES AND SILICON NANOWIRES YANG NUO B.S (UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA) 2000 M.ENG (CHINESE ACADEMY OF SCIENCE) ... the length scale of nanometers In the following search, the ther- 1.1 Thermal Transport in Low- Dimensional Systems mal transport in bulk and nano -structures are introduced firstly Secondly, the...
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Design, control, and application of piezoelectric actuator external sensing and self sensing actuator
... DESIGN, CONTROL, AND APPLICATION OF PIEZOELECTRIC ACTUATOR External- Sensing and Self -Sensing Actuator ANDI SUDJANA PUTRA (B.Eng., Brawijaya University, M.T.D., National University of Singapore) ... discusses the design, modeling, and control of piezoelectric actuator Two major contributions are reported in the thesis: design of external- sensing actuator and design of self -sensing actuator The ... especially in the face of the high nonlinearity of piezoelectric actuators The first major portions of this thesis are the design, modeling, and control of external- sensing actuator, with application in...
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Multiplexed MPC for mutli zone thermal processing in semiconductor manufacturing
... Chapter Introduction problem for SMPC to give fair basis for comparison with MMPC Appendix B derives stabilizing terminal weight for infinite horizon MMPC Chapter Bake Plate Thermal Modeling The ... Constraints for MMPC can be formulated following the same procedure with SMPC 3.3.2 MMPC Design for 3-zones Bake Plate Design of MMPC controller can be made following the same procedure with SMPC ... modeling In this chapter, a theoretical model of bake plate is constructed using heat transfer law In Chapter 3, standard formulation of SMPC and MMPC problems is given for both finite and infinite...
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CRITICAL DIMENSION AND TEMPERATURE CONTROL IN MULTI ZONE THERMAL PROCESSING 2
... 133.7 128 .5 128 .5 128 .5 change to 129 .6 128 .5 change to 129 .5 2. 12 2. 12 1. 52 1.53 1.98 1.98 1.70 1.71 401 398 400 399 400 400 399 400 1 128 .2 128 .2 128 .2 128 .2 126 .6 126 .6 126 .6 126 .6 23 140 120 ... to 133.6 130 130 128 .5 128 .5 change to 129 .6 2. 13 1.54 2. 12 1.54 1.98 1.73 1.98 1.70 399 3 62 399 400 422 408 400 401 23 46 1 128 .1 125 .4 128 .2 128 .2 128 .0 126 .9 126 .6 126 .6 11 12 Flat Flat Warp ... Tp2 (∞) = Ra2 1 Tw1 (∞) − Tw2 (∞) RT Rw 12 1 Tw2 (∞) − Tw1 (∞) RT Rw 12 (2. 7) (2. 8) 19 where Rw1 Ra1 Rw 12 Ra1 Rw 12 + Rw1 Rw 12 + Rw1 Ra1 Rw2 Ra2 Rw 12 = Ra2 Rw 12 + Rw2 Rw 12 + Rw2 Ra2 RT = RT The thermal...
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Temperature sensing and control in multi zone semiconductor thermal processing
... very sensitive to thermal processing temperature, requirement is increasingly stringent on temperature sensing and control in multi- zone semiconductor thermal processing Resistance Temperature Detectors ... Estimation for Multi- Zone Semiconductor Thermal Processing 2.1 Introduction Thermal processing of semiconductor wafers is common and critical in semiconductor manufacturing [18, 19, 20] Temperature ... in Multi- Zone Semiconductor Thermal Processing and Estimator Performance Analysis As has been discussed in Section 1.1.1, an array of RTD’s are installed in the multizone bake-plate for semiconductor...
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Tài liệu Thermal Processing of Foods : Control and Automation ppt
... and processed at high sterilization temperatures (Larousse and Brown, 1997), and cans of 41 1:5 7:0 0 1:4 9:4 0 1:5 3:2 0 1:4 2:2 0 1:4 6:0 0 1:3 8:4 0 Process run time 2:0 8:0 0 2:0 4:2 0 2:0 0:4 0 1:3 5:0 0 1:3 1:2 0 ... 1:3 1:2 0 1:2 7:4 0 1:2 4:0 0 1:2 0:2 0 1:1 3:0 0 1:1 6:4 0 1:0 9:2 0 1:0 5:4 0 1:0 2:0 0 Figure 3.1 Pressure differential in a semi-rigid container in a retort 50 100 Come up time Pressure cool 2:3 0:0 0 2:2 2:4 0 2:2 6:2 0 ... proper control of thermal processes Thermal Processing of Foods: Control and Automation Edited by K.P Sandeep © 2011 Blackwell Publishing Ltd and the Institute of Food Technologists ISBN: 978-0-813-81007-2...
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Báo cáo hóa học: " Technology-assisted training of arm-hand skills in stroke: concepts on reacquisition of motor control and therapist guidelines for rehabilitation technology design" ppt
... Therapy", "Movement", "Upper Extremity", "Exercise", "Motor Skills" or "Motor Skill Disorders", "Biomedical Technology" or "Technology" , "Automation", "Feedback", "Knowledge of results", "Tele -rehabilitation" ... arm training [27] Task-oriented training stands for a repetitive training of functional (= skill-related) tasks Task-oriented training has been clinically tested mostly for training locomotion ... used in several combinations: "Cerebrovascular Accident" not "Cerebral Palsy", "Exercise Therapy", "Rehabilitation" , "Physical Therapy" not "Electric Stimulation Therapy", "Occupational Therapy",...
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Real time monitoring and control of critical dimensions in lithography
... the concept of the real- time photoresist properties monitoring and control through the lithography process is introduced and developed by researchers An exploration of the real- time control system ... ideal for the next incoming wafers To solve this problem, the in- situ real- time control technologies are necessary 1.2.3 Real- time control The essence of real- time control is to integrate the metrology ... cosine signatures for in- situ real- time control through the PEB process with spin coating at 5500 rpm 99 4.26 SEM results of the real- time temperature control for 125 sec with spin coating...
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Control and signal processing for lithography
... equipment and process control (Moynes, 2006; Miyagi et al., 2006) This thesis will investigate the application of advanced control and signal processing to meet some stringent requirements for CD control ... resist thickness and CD uniformity by real-time control of post-apply bake processing 1.2 Contributions In this thesis, the application of advanced metrology, control and signal processing algorithms ... thickness control in the post-apply bake and 3) optimal feedforward control for thermal processing of wafers to improve repeatability 1.2.1 CD Uniformity Improvement by Real-Time Temperature Control...
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Neospora caninum INFECTION IN CATTLE - ECONOMIC LOSS, PREVENTION AND CONTROL
... that in the dairy cows inseminated with dairy 635 Neospora caninum infection in cattle - Economic loss, prevention and control bull semen Among of all groups, proportion of fetal loss is lowest in ... vaccine against N caninum infection in cattle This Bovilis-Neoguard vaccine used to be sold at price of 3.5 USD per dose in America The vaccination appears to be reasonably expensive and labour-intensive, ... for the control of Neospora caninum in dairy cattle in Switzerland Prev Vet Med 77, 23 0-5 3 Hernandez, J., C Risco, and A Donovan (2001) Association between exposure to Neospora caninum and milk...
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