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Cấu trúc

  • PowerPoint Presentation

  • Slide 2

  • Electrostatic energy and force

  • Electrostatic forces in facing electrodes

  • Slide 5

  • Parallel-plate electrostatic actuator

  • Force balancing for parallel-plate electrostatic actuator

  • 1/3 instability and pull-in voltage

  • Slide 9

  • Comb-drive actuator

  • Comb drive actuator

  • Comb-drive

  • Comb-drive actuators

  • Flexure design

  • Slide 15

  • RF MEMS vs. PIN/FET SW: performances

  • Types of RF MEMS SWs

  • Series SW & shunt SW

  • How does the RF MEMS SW work?

  • Slide 20

  • Slide 21

  • SW example 1: Raytheon cap. shunt SW

  • SW example 2: Rockwell contact series SW

  • SW example 3: Radant MEMS series SW

  • SW example 4: MIT Lincoln Lab series SW

  • SW example 5: ASU magnetic SW

  • Slide 27

  • Electrostatic actuation

  • Slide 29

  • Slide 30

  • Low spring constant for low voltage?

  • Slide 32

  • Electrostatic actuation: dynamic analysis

  • Dynamic Mechanical Model

  • Slide 35

  • How to build RF MEMS SW?

  • Why are there holes on the membrane?

  • Slide 38

  • RF MEMS SW reliability

  • Failure mechanisms of DC contact SW

  • Contact resistance vs. contact forces

  • How to solve contact failure problems?

  • Reliability of capacitive shunt SW

  • Signal power handling capabilities

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