DSpace at VNU: Sensing microgripper with pid control systems

Sensing microgripper with pid control systems Phan Hữu Phú Trường Đại học Công nghệ Ngành: Kỹ thuật điện tử; Mã số: 60 52 70 Người hướng dẫn: TS Chử Đức Trình Năm bảo vệ: 2012 Abstract: Recently, MEMS and NANO are considered very importance technologies in 21th century that play a key role for the development of modern electronic devices It was only in the early 90s of previous century that significant work in the field of microelectro-mechanical systems (MEMS) began At present, there is still a lack of tools for manipulation of microstructures that are not directly accessible by the existing machines or robots that handle macro objects Therefore, the development of micro-tools for handling and manipulating particles or small components (sized in the micrometer range) with the applications envisioned in microassembly, microrobotics, single cell manipulation and positioning, cell separation, minimally invasive and living cell surgery continues to be a great technological challenge The sensing microgripper is capable of providing large jaw displacement and output sensing voltage is presented in [4] This device is able to monitor the jaw displacement and the resulting applied force The device is made on SOI silicon wafers with a fabrication process compatible with CMOS technology However, to commercialization this device, some additions research and development need to be continued such as reducing the operation temperature for living cell applications, improvement of accuracy in modeling, and its control system This thesis will be focused in designing, and simulation a control system for the sensing microgripper based on a standard Bi-CMOS process The target is built up a fully closeloop control manipulation system which is integrated on chip with the sensing microgripper Keywords: Hệ thống vi điện; Hệ thống điều khiển; Microgrippe cảm biến; Kỹ thuật điện tử Content TABLE OF CONTENTS DECLARATION ACKNOWLEDGEMENTS ABSTRACT LIST OF ABBREVIATIONS CHAPTER INTRODUCTION 1.1 MANIPULATION IN MICRO-WORLD 1.2 MICRO-GRIPER FOR MICRO-MANIPULATION 1.2.1 Electrostatic microgripper 1.2.2 Piezoelectric microgripper 1.2.3 Electrothermal microgripper 1.2.4 Polymeric electrothermal microgripper .10 1.3 MICRO-MANIPULATION WITH A FEEDBACK SYSTEM 11 1.3.1 Force sensor .11 1.3.2 Sensing microgripper 14 CHAPTER SENSING MICROGRIPPER .17 2.1 INTRODUCTION 17 2.2 FORCE-SENSING CANTILEVER 17 2.3 SILICON-POLYMER ELECTROTHERMAL MICROGRIPPER 18 2.4 SENSING MICROGRIPPER 20 2.5 THE SENSING MICROGRIPPER CHARACTERISTICS 22 2.5.1 Electrothermal actuator characteristics 22 2.5.2 Sensing cantilever beam characteristics 25 2.5.3 Response frequency of the sensing microgripper .27 CHAPTER BUILDING PID CONTROL FUNCTION 29 3.1 FEEDBACK LOOP CONTROL 29 3.2 BUILDING A PID TRANSFER FUNCTION FOR THE SENSING MICROGRIPPER SYSTEM 30 3.2.1 Transfer function of sensing microgripper 30 3.2.2 Transfer function of driver circuit 30 3.2.3 Open-loop control 31 3.2.4 Proportional control 32 3.2.5 Proportional – Integral control 32 3.2.6 Proportional – Derivative control 33 3.2.7 Proportional – Derivative – Integral control .34 CHAPTER ELECTRICAL DESIGN .35 4.1 INTRODUCTION 35 4.2 PROCESS SELECTION AND SIMULATION .35 4.2.1 Process selection 35 4.2.2 Device modeling 36 4.2.3 Silicon-level simulation 36 4.2.4 Analog-only simulation 38 4.2.5 Mixed Analog/Digital simulation .38 4.3 SYSTEM BLOCK DIAGRAM 39 4.4 CELLS DESIGN .40 4.4.1 Voltage reference generator .40 4.4.2 Internal regulator .45 4.4.2.1 The regulator: 45 4.4.2.2 The high temperature detector: 46 4.4.2.3 The UVLO 47 4.4.2.4 Bias current generator 47 4.4.3 Digital to Analog converter (DAC) 52 4.4.4 Buffer 56 4.4.5 PID Controller 56 4.4.6 Other cells 60 4.5 FULLY SCHEMATIC OF SYSTEM AND SIMULATION RESULTS 62 4.5.1 Schematic 62 4.5.2 Simulation results .62 CHAPTER PHYSICAL DESIGN .65 5.1 INTRODUCTION OF LAYOUT 65 5.1.1 Matching concepts 65 5.1.2 MOS transistor layout 66 5.1.3 Resistor layout 68 5.1.4 Capacitor layout .69 5.1.5 Layout rules 70 5.2 SYSTEM FLOOR PLAN 71 5.3 SYSTEM LAYOUT 72 5.3.1 Sensing microgripper 72 5.3.2 Electrical circuits .72 CHAPTER CONCLUSION & FUTURE WORKS .74 6.1 CONCLUSION .74 6.2 FUTURE WORKS 74 6.2.1 Finishing the system layout 74 6.2.2 Process establishment 74 6.2.3 Layout verification .75 6.2.4 Sample fabrication .75 6.2.5 Characterization .75 BIBLIOGRAPHY 76 76 Bibliography [1] Alan Hastings, “The art of Analog layout,” Prentice Hall, 1st ed., 2000 [2] Bang S Lee, “Understanding the stable range of equivalent series resistace of an LDO regulator” [3] C.J Kim, A.P Pissano, and R.S Muller, “Silicon-processed overhanging microgripper,” J Microelectromech Syst., vol 1, no 1, 1992 [4] Chu Duc Trinh, “Sensing Microgripper for Micropartical handling”, Ph.D Thesis Delf University of Technology, 2008 [5] D.H Kim, M.G Lee, B Kim, and Y Sun, “A superrelastic alloy microgripper with embedded electromagnetic actuators and piezoelectric force sensors a numerical and experimenantal 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Microgrippers with the S100,” Zyvex application note 9703,... .10 1.3 MICRO-MANIPULATION WITH A FEEDBACK SYSTEM 11 1.3.1 Force sensor .11 1.3.2 Sensing microgripper 14 CHAPTER SENSING MICROGRIPPER .17... 17 2.2 FORCE -SENSING CANTILEVER 17 2.3 SILICON-POLYMER ELECTROTHERMAL MICROGRIPPER 18 2.4 SENSING MICROGRIPPER 20 2.5 THE SENSING MICROGRIPPER CHARACTERISTICS