development of novel micro-embossing methods and microfluidic designs for biomedical applications

217 401 0
development of novel micro-embossing methods and microfluidic designs for biomedical applications

Đang tải... (xem toàn văn)

Tài liệu hạn chế xem trước, để xem đầy đủ mời bạn chọn Tải xuống

Thông tin tài liệu

DEVELOPMENT OF NOVEL MICRO-EMBOSSING METHODS AND MICROFLUIDIC DESIGNS FOR BIOMEDICAL APPLICATIONS DISSERTATION Presented in Partial Fulfillment of the Requirements for the Degree Doctor of Philosophy in the Graduate School of the Ohio State University By Chunmeng Lu, M.S ***** The Ohio State University 2006 Dissertation Committee: Approved by Dr L James Lee, Adviser Dr Allen Yi _ Adviser Dr Avraham Benatar Chemical Engineering Graduate Program UMI Number: 3230881 UMI Microform 3230881 Copyright 2006 by ProQuest Information and Learning Company All rights reserved This microform edition is protected against unauthorized copying under Title 17, United States Code ProQuest Information and Learning Company 300 North Zeeb Road P.O Box 1346 Ann Arbor, MI 48106-1346 ABSTRACT The goal of this study is to develop novel microfabrication methods and microfluidic devices for BioMEMS applications The emphasis is on the development of new hot embossing techniques, the design of microfluidic functions and biocompatible packaging methods for polymeric microfluidic chips First, two unconventional hot embossing techniques were developed: laser assisted and sacrificial template based hot embossing In laser assisted embossing, localized micro patterning can be achieved on polymer surfaces with a cycle time of less than minute due to the localized heating, which is comparable with that of micro injection molding The sacrificial template based hot embossing solved the de-molding issue involved in conventional hot embossing especially for high aspect ratio microstructures Embossing of microstructures with aspect ratio of was demonstrated successfully and the possibility of laser assisted embossing in conjunction with sacrificial template embossing was investigated A fishbone microvalve was designed based on the concept of superhydrophobicity such that the valve function remains after protein blocking, a required step in some enzyme-linked immuno-sorbent assays (ELISA) applications to prevent non-specific binding Compared with another type of super-hydrophobic microvalve ii developed based on the micro-/nano structure formation by chemical synthesis, the fishbone valve can be easily incorporated into the microfluidic designs Polymer compact-disk (CD) microfluidic platform integrated with different fluidic features was designed and fabricated We have demonstrated successfully that flow sequencing can be achieved on a CD-like microfluidic platform For packaging microfluidic platforms, a new interstitial bonding technique has been developed, which bonds the polymer-based microfluidic platforms without introducing any alien materials in to microchannels This method can easily bond biochips with complex flow patterns, but in a relatively smaller size A multi-channel DNA sequencing chip was demonstrated experimentally Another bonding method, CO2 assisted bonding, was also demonstrated for bonding a 5-inch CD platform By applying a thin PLGA interlayer, the CD platform can be bonded at low temperature and low pressure to achieve a hermetic bonding ELISA tests showed that both bonding methods have no or little effect on the activity of preloaded proteins, which is essential for microfluidic designs that requires preloading of some regents such as proteins, antibody/antigen and cells iii Dedicated to my wife iv ACKNOWLEDGMENTS First I would like to express my sincere appreciations to my adviser, Professor L James Lee, for his invaluable guidance, discussions, supports and encouragements throughout my five years stay at The Ohio State University Many thanks to him for his frequent discussions with me about my general research directions and technical details which not only expanded my horizons but also stimulated my creativity and imagination I would also like to acknowledge Professor L James Lee for bringing me into this wonderful field and provide financial support to me I would like to thank Dr Avraham Benatar, Dr David Grewell, and Ms Miranda Marcus for their valuable discussion and generous help in my experiments related to laser heating Thanks go to Professors Allen Yi, Avarham Benatar, and John C Byrd for serving on my dissertation committee and for their invaluable comments and suggestions, to Paula and Stacy for proofreading all the manuscripts I submitted for publishing Thanks also go to my collaborators, Dr Hank Wu, Dr Chu-hua Chen, and all other friends in Ritek, Taiwan, on the CD-ELISA project To all the fellow graduate students in our lab, especially to those who collaborated with me (Yi-Je Juang, Chee-Guan Koh, Yong Yang, Jingjiao Guang, Shengnian Wang, Yubing Xie, Ling Li, Xia Cao, Hongyan He and etc.), I would say thank you very much v for your friendship and I cherish the moments we shared together very much! Experimental assistances from Dr Mark Ming-cheng Cheng and Derek Ditmer in MicroMD are greatly appreciated I also want to give my special thanks to Paul Green and Leigh Edward for their endless help on the machining and other supporting efforts in my experimental work Last but not least, I want to thank my family for their love and dedications for encouraging and supporting me Great appreciations to my wife, Chunyan, for her love, accompany, encouragement, and support through all these years vi VITA August 16, 1971 .Born in Xushui, Hebei, P.R China September 1989 - July 1993 B.S Mechanical Engineering, Beijing University of Chemical Tech Beijing, P.R China July 1993 - July 1998 Mechanical Engineer, Hebei Aika Packaging Materials Co Ltd Shijiazhuang, Hebei, P.R China Sept 1998 - June 2001 M.S Mechanical Engineering The Institute of Plastics Machiner and Engineering (IPME) in Beijing University of Chemical Tech Beijing, P.R China September 2001 – August 2002 University Fellowship Chemical and Biomolecular Engineering The Ohio State University Columbus, Ohio, USA September 2002 – Present Graduate Research Associate Chemical and Biomolecular Engineering The Ohio State University Columbus, Ohio, USA PUBLICATIONS Chunmeng Lu, Yi-Je Juang, L James Lee, David Grewell, Avraham Benatar, Analysis of laser/IR-assisted microembossing, Polymer Engineering & Science, 45(5), 661-668 (2005) vii Yi-Je Juang, Xin Hu, Shengnian Wang, L James Lee, Chunmeng Lu and Jingjiao Guan, Electrokenetic Interactions in Mcroscale Cross-slot Flow, Applied Physics Letters, 87, 244105-244105-3 (2005) David Grewell, Chunmeng Lu, Abbass Mokhtarzadeh, Avraham Benatar and L James Lee, Feasibility of selected methods for embossing micro-features in thermoplastics, (SPE 2003, Nashville) Chunmeng Lu and L James Lee, Numerical simulation of Laser/IR Assisted MicroEmbossing (SPE 2004, Chicago) David Grewell, Chunmeng Lu, L James Lee and Avraham Benatar, Infrared microembossing of thermoplastics (SPE 2004, Chicago) Chunmeng Lu, L James Lee, David Grewell and Avraham Benatar, Sacrificial material assisted laser welding of polymeric micro channels (SPE 2005, Boston) Hae Woon Choi, Chunmeng Lu, L James Lee and Dave Farson, Femtosecond laser micromachining of internal microfluidic channels in PMMA, (ASPE 2005, OSU) Chunmeng Lu, Yi-Je Juang and L James Lee, Numerical simulation of Laser/IRassisted Micro-Embossing in Polymer (Numiform 2004, OSU) Chunmeng Lu and L James Lee, Numerical simulation of Laser/IR-assisted MicroEmbossing in Polymer (PPS-20, Akron, USA) 10 Chunmeng Lu and L James Lee, Sacrificial mold embossing for high density/aspect ratio micro-/nano structures (PPS-22, Yamagata, Japan) 11 Michael W Bobem, Chunmeng Lu, Kurt W Koelling and L James Lee, Fundamental processing characteristics in polymer micro/nano molding (SPE 2006, Charlotte, USA) 12 Chunmeng Lu and L James Lee, Sacrificial mold embossing for high density, high aspect ratio micro/nano structures (SPE 2006, Charlotte, USA) 13 Chunmeng Lu and L James Lee, Micro-valve based on super-hydrophobicity (SPE 2006, Charlotte, USA) viii 14 Kittichai Sojiphan, Miranda Marcus, Hae Woon Choi, Chunmeng Lu, Avraham Benatar and L James Lee, Beam Shaping with Diffractive Optics for Laser MicroMachining of Plastics with a Femtosecond Laser (SPE 2006, Charlotte, USA) 15 L James Lee, Chunmeng Lu, Yi-Je Juang and Shang-Tian Yang, Interstitial bonding for plastic microfluidic chips, US Provisional Patent Application, 60/741,697, Dec 2, 2005 16 L James Lee, Chunmeng Lu, Yi.-Je Juang and Shang-Tian Yang, Design of superhydrophobic valve for plastic microfluidic chips, US Porvisional Patent Application, 60/738,096, Nov 18, 2005 FIELDS OF STUDY Major Field: Chemical Engineering Minor: Microfluidics and Polymer Microfabrication ix Elwenspoek M., Lammerink T S., Miyake J R., and Fluitman J H J., “Towards integrated microliquid handling systems,” J Micromech Microeng., 4, pp 227-245 (1994) Erbil H Y., Demirel A L., Avci Y and Mert O., “Transformation of a simple plastic into a superhydrophobic surface”, Science, 299, pp.1377-1380(2003) Esch M B., Kapur S., Irizarry G and Genova V., “Influence of master fabrication techniques on the characteristics of embossed microfluidic channels”, Lab Chip, 3, pp.121-127(2003) Evans J., Liepmann D and Pisano A P., “Planar laminar mixer,” Proceedings IEEE Micro Electro Mechanical Systems (MEMS), pp 96-101 (1997) Feng L., Li S., Li H., Zhai J., Song Y., Jiang L and Zhu D., “Super-hydrophobic surface of aligned polyacrylontrile nanofibers”, Angew Chem Int Ed 2002, 41, 1221 Fahrenberg J., Bier W., Mass D., Menz W., Rupercht R and Schomburg W K., “A microvalve system fabricated by thermoplastic molding”, J Micromech Microeng., 5, pp.169-171 (1995) Feng L., Li S., Li Y., Li H., Zhang L., Zhai J., Song Y., Liu B., Jiang L and Zhu D., “Super-hydrophobic surfaces: from natural to artificial”, Adv Mater, 14, pp.1857 (2002) Findlay J B., Atwood S., Bergmeyer M L., Chemelli J., Christy K., Cummins T., Donish W., Ekeze T., Falvo J., and Patterson D., “Automated closed-vessel system for in vitro diagnostics based on polymerase chain reaction,” Clin Chem., 39, pp 1927-1933 (1993) Fiorini G S., Jeffries G D., Lim D.S.W., Kuyper C L., and Chiu D T., “Fabrication of thermoset polyester microfluidic devices and embossing masters using rapid prototyped polydimethylsiloxane molds”, Lab on a Chip, 3(3), pp.158-63 (2003) Forrest J A and Dalnoki-Veress K., “The glass transition in thin polymer films”, Advances in Colloid and Interface Science, 94, pp.167-195 (2001) Freemantle M., “Downsizing chemistry”, Chemical Engineering & News, Feb 22, 27 (1999) Gale M T., “Replication techniques for diffractive optical elements”, Microelectronic Engineering, 34, pp.321-339 (1997) Genzer J and Efimenko K., “Creating long-lived superhydrophobic polymer surfaces through mechanically assembled monolayers”, Science, 290, pp.2130-3(2000) Glasgow I K., Beebee D J., and White V E., “Design rules for polyimide solvent bonding”, Sensors and Materials, 11(5), pp.269-278 (1999) 183 Goll C., Bacher W., Bustgens B., Maas D., Ruprecht R and Schomburg W K., “An electrostatically actuated polymer microvalve equipped with a movable membrane electrode”, J Micromech Microeng., 7, pp 224-226 (1997) Gottschalch F., Hoffmann T., Sotomayor Torres C M., Schulz H., and Sheer H C., “Polymer issues in nanoimprinting technique”, Solid State Electronics, 43, pp.1079 (1999) Gottschalch F., Hoffmann T., Sotomayor T C M., Schulz H and Scheer H-C, “Polymer issues in nanoimprinting technique”, Solid-State Electron., 43, pp 1079-1083 (1999) Gourgon C., Perret C., Micouin G., Lazzarino F., Tortai J H., Joubert O., and Grolier J.P E., “Influence of pattern density in nanoimprint lithography”, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 21(1), pp 98105(2003) Gravesen P., Branebjerg J., and Jensen O.S., “Microfluidic – a Review”, J Micromech Microeng., 3, pp 168-182 (1993) Grewell D, Jerew T and Benatar A., “Diode Laser Microwelding of Polycarbonate and Polystyrene,” Proceedings of the 60th Annual Technical Conference, Society of Plastics Engineers, Brookfield, CT, May 2002(b) Grewell D., “Laser Microwelding of Polycarbonate and Polystrene”, MS Thesis, The Ohio State University 2002 (a) Grewell D., “modeling of molecular healing for micro-laser welding of plastics with diffractive optical elements as spatial modulators”, PhD thesis, The Ohio State University (2005) Grewell D., Lu C., Lee L J., and Benater A., SPE ANTEC Proceedings, pp.1231 (2004) Grewell D., Mokhtarzadeh A., Benatar A., Lee L J., and Lu C., SPE ANTEC Proceedings, pp.1094 (2003) Goh C., Coakley K M., and McGehee M D., “Nanostructuring Titania by Embossing with Polymer molds made from Anodic Alumina Templates”, Nanoletters, 5(8), pp.15451549 (2005) G’Sell C and Jonas J J., “Determination of plastic behavior of solid polymers at constant true strain rate”, Journal of Materials Science, 14, pp.583 (1979) G’Sell C and Jonas J J., “Yield and transient effects during the plastic deformation of solid polymers”, Journal of Materials Science, 16, pp.1956-74 (1981) 184 G’Sell C., Boni S., and Shrivastava S., “Application of plane simple shear test for determination of the plastic behavior of solid polymers at larger strains”, Journal of Materials Science, 18, pp.903-18 (1983) G’Sell C and Gopez A J., “Plastic banding in glassy polycarbonate under plane simple shear”, Journal of Materials Science, 20, pp.3462-78 (1985) G’Sell C., Hiver J M., Dahoun A., and Souahi A., “Video-controlled tensile testing of polymers and metals beyond the necking point”, Journal of Materials Science, 27, pp.5031-9 (1992) G’Sell C., and Souahi A., “Influence of crosslinking on the plastic behavior of amorphous polymers at larger strains”, Journal of Engineering Materials and Technology, 119, pp.223-227 (1997) Jiang Y., Wang Z., Yu X., Shi F., Xu H., Zhang X., Smet M and Dehaen W., “Selfassembled monolayers of dendron thiols for electrodeposition of gold nanostructures: toward fabrication of superhydrophobic/superhydrophilic surfaces and pH-responsive surfaces”, Langmuir, 21, pp.1986-90 (2005) Gu Z Z., Uetsuka H., Takahashi K., Nakajima R., Onishi H., Fujishima A and Sato O., “Structural color and the lotus effect”, Angew Chem Int Ed., 42, pp.894-897 (2003) Haber, A., and Kamal, M R., “Experimental analysis of the thermoplastic film embossing process”, Advances in Polymer Technology, 11(3), pp.159-80 (1992) Handique K., Burke D.T., Mastrangelo C.H and Burns M.A., “Nanoliter liquid metering in microchannels using hydrophobic patterns,” Anal Chem., 72, pp 4100-4109 (2000) Harper C A., editor in chief, Modern Plastics Handbook/ Modern plastics, New York : McGraw-Hill, c2000 He B., Burke B J., Zhang X., Zhang R., and Regnier F E., “A Picoliter-Volume Mixer for Microf luidic Analytical Systems,” Analytical Chemistry, 73(9), pp 1942-1947 (2001) He B., Patankar N A and Lee J., “Multiple equilibrium droplet shapes and design criterion for rough hydrophobic surfaces”, Langmuir, 19, pp.4999-5003(2003) Heckele M., Bacher W and Muller K D., “Hot embossing-the molding technique for plastic microstructures”, Microsystem Technologies, 4, pp.122(1998) Henry V., Deutsch J and Gifford, L., “Enzyme immunoassay of theophylline with a centrifugal analyzer, and comparison with an ultraviolet method”, Clinical Chemistry, 24(3), pp.514 (1978) 185 Heyderman L J., Schift H., David C., Gobrecht J., and Schweizer T., “Flow behavior of thin polymer films used for hot embossing lithography”, Microelectronic Engineering, 54, pp.229-245 (2000) Hinsmann P., Frank J., Svasek P., Harasek M., and Lendl B., “Design, simulation and application of a new micromixing devices for time resolved infrared spectroscopy of chemical reactions in solution,” Lab on a Chip, 1, pp.16-21 (2001) Hirai Y., Fujiwara M., Okuno T., Tanaka Y., Endo M., and Irie S., “Study of the resist deformation in nanoimprint lithography”, J Vac Sci Tchnol., B19(6), pp.2811-2815 (2001) Horvath R., Lindvold L R and Larsen N B., “Fabrication of all-polymer freestanding waveguides”, J Micromech Microeng., 13, pp.419-424 (2003) Hozumi A and Takai O., “Ultra water-repellent films with controlled surfaces fabricated by microwave plasma-enhanced vapor deposition”, Hyoumenn-Gijyutsu, 49, pp.385-390 (1998) Hozumi A and Takai O., “Preparation of silicon oxide films having a water-repellent layer by multiple-step microwave plasma-enhanced chemical vapor deposition”, Thin Solid Films, 334, pp.54-59(1998) Hulme J P., Gwak J and Miyahara Y., “Biomolecular Embossing”, J AM CHEM SOC., 128, pp.390-391(2006) Ilinca F., Derdouri A., and Hetu J.-F., Polym Eng Sci., 40, pp.1682 (2000) Jacobson S C., Ermakov S V., and Ramsey J M., “Minimizing the number of voltage sources and fluid reservoirs for electrokinetic valving in microfluidic Devices,” Anal Chem., 71(15), pp 3273-3276 (1999) Jacobson S C., Hergenroder R., Koutny L B., and Ramsey J.M., “High-Speed Separations on a Microchip,” Anal Chem., 66(7), pp.1114-1118 (1994) Jaszewski R W., Schift H., Gobrecht, J and Smith, P “Hot embossing in polymers as a direct way to pattern resist”, Microelectronic Engineering, 41/42, pp.575-578 (1998) Jaszewski, R W., Schift, H., Schnyder, P., Schneuwly, A., and Groning, P., “The deposition of anti-adhesive ultra-thin teflon-like films and their interaction with polymers during hot embossing”, Applied Surface Science, 143, pp.301 (1999) Jaszewski R W., Schift H., Groning P and Margaritondo G., “Properties of thin antiadhesive films used for the replication of microstructures in polymers”, Microelectronics Engineering, 35, pp.381-384 (1997) 186 Juang Y.-J., Lee L J., and Koelling K W., “Hot Embossing in Microfabrication, Part I: Experimental”, Polymer Engineering and Science, 42(3), pp.539-550 (2002) Juang Y.-J., Lee L J., and Koelling K W., “Hot Embossing in Microfabrication, Part II: rheological characterization and process analysis”, Polymer Engineering and Science, 42(3), pp.551-536 (2002) Jun T K and Kim C-J, “Valveless pumping using traversing vapor bubbles in microchannels,” J Appl Phys., 83(11, Pt 1), pp 5658- 5664 (1998) Johnson Jr R E and Dettre R H., Adv Chem Ser., 43, pp.112 (1964) Kanai T and White J L., “Kinematics, dynamics and stability of the tubular film extrusion of various polyethylenes”, Polym Eng Sci., 24, pp.1185-201 (1984) Kaelble D H., Physical Chemistry of Adhesion, Wiley, New York, (1971) Kaetsu I., Uchida K., Shindo H., Gomi S., and Sutani K., “Intelligent type controlled release systems by radiation techniques” Radiation Phys Chem., 55, pp.193-201(1999) Keddie, J L., Jones, R A L & Cory, R A., “Size-dependent depression of the glass transition temperature in polymer films”, Europhysics Letters 27, pp.59-64 (1994) Kelly K W., Proceedings of Novel Microfabrication Options for BioMEMS Conference, Chapter 6, The Knowledge Foundation, San Francisco, CA, July (1999) Kimerling T E., Liu, W., Kim B H and Yao D., “Rapid hot embossing of polymer microfeatures”, Microsyst Technol, 12, pp.730-735(2006) Kim E., Xia Y and Whitesides G M., “Polymer microstructures formed by moulding in capillaries,”Nature, 376, pp 581-584 (1995) Kim E., Xia Y., Zhao X.-M., and Whitesides G M., “Solvent-assisted microcontact molding A convenient method for fabricating three-dimensional structures on surfaces of polymers”, Adv Mater., 9(8), pp.651-654(1997) Kim J and Xu X., “Laser Fabrication of Micro-Fluidic Devices”, ICALEO Conference Proceedings, Laser Institute of America 2001 Kim Y S., Lee H H., and Hommond P T., “High density nanostructure transfer in soft molding using polyurethane acrylate molds and polyelectrolyte multilayers”, Nanotechnology, 14, pp.1140-1144 (2003) Kim, Y S.; Suh, K Y.; Lee, Hong H., “Fabrication of three-dimensional microstructures by soft molding, Applied Physics Letters”, 79 (14), pp.2285-2287 (2001) 187 Klein H and Haberstroh E., SPE ANTEC Proceedings, pp.1046, (1999) Klumpp T., “Enzymic determination of serum antitrypsin activity by centrifugal analysis”, Annales de Biologie Clinique, 35(3), pp.221-226 (1977) Koch M., Chatelain D., Evans A G R., and Brunnschweiler A., “Two simple micromixers based on silicon,” J Micromech Microeng, 8, pp.123-126 (1998) Koerner T., Brown L., Xie R and Oleschuk R D., “Epoxy resins as stamp for hot embossing of microstructures and microfluidic channels”, Sensors and Actuators B, 107, pp.632-639(2005) Kontou, E., “Modeling of postyield behavior of glassy polymer”, Journal of Applied Polymer Science, 61, pp.2191-2195 (1996) Kopp M.U., Crabtree H.J and Manz A., “Developments in technology and applications of Microsystems”, Current Opinion in Chem Biol., 1, pp 410-419 (1997) Kopp M U., de Mello A J., and Manz A., “Chemical amplification: continuous-flow PCR on a chip,” Science, 280, pp 1046-1048 (1998) Kunigi Y., Nonaku T., Chong Y.-B and Watanabe N , J Electroanal Chem, 353, pp.209 (1993) Lai, S.; Cao X and Lee, J L., “A packaging technique for polymer microfluidic platforms”, Anal Chem., 76, pp.1175-1183 (2004) Lai S., “Design and fabrication of polymer-based microfluidic platforms for BioMEMS applications” Ph.D dissertation, The Ohio State University (2002) Lau K K S., Bico J., Teo K B K., Chhowalla M., Amaratunga G A J., Milne W I., McKinley G H and Gleason K K., “Superhydrophobic carbon nanotube forests”, Nano Lett., 3, pp.1701-1705 (2003) Lee, G B., Chen, S H., Huang, G R., Lin, Y H., and Sun, W C., “Microfabricated plastic chips by hot embossing methods and their application for DNA separation detection”, SPIE, 4177, pp.112 (2000) Lee G., Shen S., Huang G., Sung W and Lin Y., “Microfabricated plastic chips by hot embossing methods and their applications for DNA separation and detection”, Sensors and Actuators B 75, pp.142-148 (2001) Lee L J., Madou M J., Koelling K W., Daunert S., Lai S., Koh C G., Juang Y-J, Lu Y., and Yu L., “Design and fabrication of CD-like microfluidic platforms for diagnostics: microfabrication”, Biomedical Microdevice, 3, pp.339-351 (2001) 188 Lee J W and Colbrun W A., “Immunoassay techniques,” Drugs and the Pharmaceutical sciences, v117 (Handbook of Pharmaceutical analysis), edited by Ohannesian L and Streeter A J., pp 225-312 (2002) Lee L J., Madou M J., Koelling K W., Daunert S., Lai S., Koh C G., Juang Y-J, Lu Y., and Yu L., “Design and fabrication of CD-like microfluidic platforms for diagnostics: microfabrication,” Biomedical Microdevice, 3(4), pp 339-351 (2001) Lee Y-K, Deval J., Tabeling P., and Ho C-M., "Chaotic mixing in electrokinetically and pressure driven microflows," IEEE-MEMS, pp 483-486 (2001) Li H., Wang X., Song Y., Liu Y., Li Q., Jiang L and Zhu D., “Super-amphiphobic aligned carbon nanotube films”, Angew Chem Int Ed., 40, pp.1743-1746(2001) Lin C.R., Chen R.H., and Hung C., Int J Manuf Technol., 20, pp.230 (2002) Lin L-W, Chiu C-J, Bacher W and Heckele M., “Microfabrication using silicon mold inserts and hot embossing”, Seventh International Symposium on Micro Machine and Human Science, pp 67-71 (1996) Li S., Li H Wang X., Song Y., Liu Y., Jiang L and Zhu D., “Super-hydrophobicity of large-area honeycomb-like aligned carbon nanotubes”, J Phys Chem B, 106, pp.92749276(2002) Liu R.H., Yu Q., Bauer J.M., Moore J.S., and Beebe D.J., “Hydrogel Microvalves Fabricated Using in-situ Polymerization”, Solid-state Sensor & Actuator workshop, pp 222-225 (2000) Liu, S.-J and Dung, Y.-T., “Hot embossing precise structure onto plastic plates by ultrasonic vibration”, Polymer Engineering and Science, 45(7), pp.915-925 (2005) Li W., Tegenfeldt J O., Chen L., Austin R H., Chou S Y., Kohl P A., Krotine J and Sturm J C., Sacrificial polymers for nanofluidic channels for biological applications, Nanotechnology, 14, 578–583 (2003) Locascio, L E., Perso, C E., and Lee, C S., “Measurement of electroosmotic flow in plastic imprinted microfluidic devices and the effect of protein adsorption on flow rate”, Journal of Chromatography, A 857, pp.275-84 (1999) Lu C., Juang Y.-J., Lee L J., Grewell D., and Benatar A., "Analysis of Laser/IR-assisted Micro-embossing", Polymer Engineering and Science, 45(5), pp.661-668 (2005) Lum, P., and Greenstein, M., “Microfluidic structure assembly with mating microfeatures”, US005932315 (1999) 189 Lu X., Zhang C and Han Y., Macromol Rapid Commun 2004, 25, 1606 Madou, M., Fundamentals of Microfabrication, CRC Press, Boca Raton (1997) Madou M., Zoval J., Jia G., Kido H., Kim J., and Kim N., “Lab on a chip”, Annu Rev Biomed Eng., 8, pp.601-28 (2006) Madou M.J., Lee L.J., Koelling K.W., Lai S., Koh C G., Juang Y-J., Yu L and Lu Y., "Design and fabrication of polymer microfluidic platforms for biomedical application," Annu Tech Conf - Soc Plast Eng 59th (Vol 3), pp 2534-2538 (2001) Madou M.J., Lu Y., Lai S., Lee L J., and Daunert S., “A Centrifugal Microfluidic platform- A comparison”, Micro Total Analysis Systems, pp 565-570 (2000) Madou M.J., Lu Y., Lai S, Juang Y-J, Lee L.J., and Daunert S., “A Novel design on a CD disc for two-point calibration measurement”, Solid-state Sensor & Actuator workshop, pp 191-194 (2000) Madou M J and Kellogg G J., The LabCDTM: A centrifuge-based microfluidic platform for diagnostics Proc SPIE., 3259, pp.80-93 (1998) Madou M., Lee L.J., Daunert S., Lai S., Shih C-H., Design and fabrication of CD-like microfluidic platforms for diagnostics: microfluidic functions, Biomedical Microdevices, 3, 245-254 (2001) Madou M.J., Lee L.J., Koelling K.W., Lai S., Koh C G., Juang Y-J., Yu L and Lu Y., Design and fabrication of polymer microfluidic platforms for biomedical application, Annu Tech Conf - Soc Plast Eng 59th (Vol 3), pp.2534-2538, (2001) Madou M.J., Lu Y., Lai S, Juang Y-J, Lee L.J., Daunert S., A Novel design on a CD disc for two-point calibration measurement, Solid-state Sensor & Actuator workshop, pp.191194 (2000) Madou M.J., Lu Y., Lai S., Lee L J., and Daunert S., A Centrifugal Microfluidic platform- A comparison, Micro Total Analysis Systems, pp.565-570 (2000) Ma M., Hill R M., Lowery J L., Fridrikh S V and Rutledge G C., “Electrospun poly(styrene-block-dimethylsiloxane) block copolymer fibers exhibiting superhydrophobicity”, Langmuir,, 21, pp.5549-5554 (2005) Matsuoka, S., Relaxation Phenomena in Polymers, Hanser, New York (1992) McCormick R M., Nelson R J., Alonso-Amigo M G., Benvegnu D J., and Hooper H H., “Microchannel electrophoretic separations of DNA in injection-molded plastic substrates,” Anal Chem., 69, pp 2626-2630 (1997) 190 Miwa M., Nakajima A., Fujishima A., Hashimoto K and Watanabe T., “Effects of the surface roughness on sliding angles of water droplet on superhydrophobic surfaces”, Langmuir, 15, pp.5754-5760 (2000) Momma, C., Nolte, S., Chichkov, N., Alvensleben, B V., and Tunermann, F A., “Precise laser ablation with ultrashort pulses”, Applied Surface Science, 109/110, pp.15-19 (1997) Moroney R M., White R M., and Howe R T., “Fluid motion produced by ultrasonic lamb waves,” Ultrasonics Symposium Proceedings, 1, pp 355-358, Honolulu, HI (1990) Matsumoto Y and Ishida M., “The property of plasma-polymerized fluorocarbon film in relation to CH4/C4F8 and substrate temperature”, Sensors and Actuators, 83, pp.179-185 (2000) Morra M., Occhiello E and Garbassi F., “Contact angle hysteresis in oxygen plasma treated poly(tetrafluoroethylene)”, Langmuir, 5, pp.872-6(1989) Murase H., Nanishi K., Kogure H., Fujibayashi T., Tamura K., and Haruta N., “Interactions between heterogeneous surfaces of polymers and water”, J Appl Polym Sci, 54, pp.2051-62 (1994) Nagarajan G N and Campbell A., SPE ANTEC Proceedings, 162 (1995) Nakajima A., Abe K., Hashimoto K and Watabnabe T., “Preparation of hard superhydrophobic films with visible light transmission”, Thin Solid Films, 376, pp.140143(2000) Nakajima A., Fujishima A., Hashimoto K and Watanabe T., “Preparation of transparent superhydrophobic boehmite and silica films by sumlimation of alumnum acetylacetonate”, Adv Mater, 11, pp1365-1368 (1999) Nakajima A., Hashimoto K., Watanabe T., Takai, K., Yamauchi G and Fujishima A., “Transparent superhydrophobic thin films with self-cleaning properties”, Langmuir, 16, pp.7044-7047 (2000) Nakajima A., Hashimoto K., and Watanabe T., Monatshefte fur Chemie, 132, pp.31 (2001) Narasimhan J and Papautsky I., “Polymer embossing tools for rapid prototyping of plastic microfluidic devices”, J Micromech Microeng., 14, pp.96-103 (2004) Niino, H.; Ding, X.; Kurosaki, R.; Narazaki, A.; Sato, T and Kawaguchi, Y., Imprinting by hot embossing in polymer substrate using a template of silica glass surface-structured by the ablation of LIBWE method, Appl Phys A, 79, pp.827-828 (2004) Ogawa N., Soga M., Takada Y and Nakayama N., Jpn J Appl Phys, 32, 614 (1993) 191 Onda K., Tsukuba Research Consortium, 4, pp.56 (1997) Onda T., Shibuichi S., Satoh N and Tsujii K., “water repellent fractal surfaces”, Langmuir, 12, pp.2125-7 (1996) Onda T., The Transactions of the Institute of Electrical Engineers of Japan, 116-A, pp.1041 (1996) Ouellette J., “A New Wave of Microfluidic Devices”, The Industrial Physicist, August/September (2003) Pan L W., Lin, L W., and Ni, J., “Cylindrical plastic lens array fabricated by a micro intrusion process”, IEEE, pp.217 (1999) Park J.-S., Lee S.-H., Park S.-S., Cho J.-W., Jung S.-W., Han J.-H., and Kang S.-G., “Acoustic and electromechanical properties of 1–3 PZT composites for ultrasonic transducer arrays fabricated by sacrificial micro PMMA mold”, sensors and actuators A: physical, 108 (1-3), pp.206-211 (2003) Park S., Padeste C., Schift H and Gobrecht J., “Nanostructuring of anti-adhesive layers by hot embossing lithography”, Microelectronic Engineering, 67-68, pp.252-258 (2003) Paul P H., Garguilo M G., and Rakestraw D J., “Imaging of pressure- and electrokinetically driven flows through open capillaries,” Anal Chem., 70, pp 2459-2467 (1998) Piotter V., Benzler T., Hanemann T., Wollmer H., Ruprecht R and Haubelt J., "Innovative molding technologies for the fabrication of components for microsystems," Proc SPIE-The International Society for Optical Engineering, V3680, pp 456-463 (1999) Piotter, V., Hanemann, T., Ruprecht, R., and Hauelt, J., “Injection molding and related techniques for fabrication of microstructures”, Microsystem Technologies, pp.129 (1997) Qin D., Xia Y., Rogers J A., Jackman R J., Zhao X-M, and Whitesides G M., "Microfabrication, microstructures and microsystems," Topics in Current Chemistry, 194, pp.1-20 (1998) Ramos B L., Choquette S J and Nicholas F F., "Embossable Grating Couplers for Planar Waveguide Optical Sensors," Anal Chem., 68, pp.1245-1249 (1996) Roberts M A., Rossier J S., Bercier P., and Girault H., “UV laser machined polymer substrates for the development of microdiagnostic systems”, Analytical Chemistry, 69(11), pp.2035-2042 (1997) 192 Rode, M., and Hillerich, B., “Self-aligned positioning of microoptical components by precision prismatic grooves impressed into metals”, IEEE Journal of Microelectro Mechanical Systems, 8(1), pp.58 (1999) Rossier J S., Schwarz A., Reymond F., Ferrigno R., Bianchi F., and Girault H H., “Microchannel networks for electrophoretic separations,” Electrophoresis, 20, pp 727731 (1999) Rossier J S., Girault H H., “Enzyme linked immunosorbent assay on a microchip with electrochemical detection,” Lab on a Chip, 1(2), pp.153-157 (2001) Russek U A., “Laser Beam Welding of Polymers with High Power Diode Laser Joining Innovation for Micro and Macro Technology”, ICALEO Conference Proceedings, Laser Institute of America (2001) Salas-Vernis J L.; Jayachandran, J P.; Park S.; Kelleher H A.; Bidstrup Allen S.A.; Kohl P A., “Hydrophobic/hydrophilic surface modification within buried air channels”, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 22(3), pp.953-960 (2004) Sammarco T S and Burns M A., “Thermocapillary pumping of discrete drops in microfabricated analysis devices,” AIChE J., 45(2), pp.350-366 (1999) Sasaki H and Shouji M., “Control of hydrophobic character of super-water-repellent surface by UV radiation”, Chem Lett, 4, pp293-294 (1998) Sato K., Tokeshi M., Odake T., Kimura H., Ooi T., Nakao M., and Kitamori T., “Integration of an immunosorbent assay system: analysis of secretory human immunoglobulin A on polystyrene beads in a microchip,” Anal Chem., 72(6), pp.11441147 (2000) Sato K., Tokeshi M., Kimura H., and Kitamori T., “Determination of carcinoembryonic antigen in human sera by integrated bead-bed immunoassay in a microchip for cancer diagnosis” Anal Chem., 73(6), pp.1213-1218 (2001) Schmidt M A., “Wafer-to-wafer bonding for microstructure formation,” Proc IEEE, 86, pp.1575-1585 (1998) Schift H., Jaszewski R.W., David C and Gobrecht J., "Nanostructuring of polymers and fabrication of interdigitated electrodes by Hot Embossing Lithography," Microelectron Eng., 46(1-4), pp.121-124 (1999) Schift H., Hallbeisen M., Schutz U., Delahoche, B., Vogelsang K and Gobrecht J., “Surface structuring of textile fibers using roll embossing”, Microelectronic Engineering, 83, pp.855-858 (2006) 193 Schulz H., Wissen M., Bogdanski N., Scheer H.-C., Mattes K and Friedrich Ch., “Choice of the molecular weight of an imprint polymer for hot embossing lithography”, Microelectronic Engineering, 78-79, pp.625-632 (2005) Schwesinger N., Frank T., and Wurmus H., “A Modular Microfluidic System with an Integrated Micromixer,” J Micromech Microeng, 6(1), pp 99-102 (1996) Schaffer E., Thurn-Albrecht T., Russell T P and Steiner U., “Electrohydrodynamic instabilities in polymer films”, Europhys Lett., 53(4), pp.518-524 (2001) Scheer H.-C and Schulz H., Microelectronic Engineering, 56, pp.311 (2001) Schulz H., Wissen M., and Scheer H.-C., Microelectronic Engineering, 67–68, pp.657 (2003) Scott, C D and Burtis, C A., A miniature fast analyzer system, Anal Chem., 45(3), pp.327A-339A (1973) Seunarine, K.; Gadegaard, N.; Riehle, M.O and Wilkinson, C.D.W., Optical heating for short hot embossing cycle times, Microelectronic Engineering, 83, pp.859-863 (2006) Shen, Y K and Chien, H W., Optimization of the micro-injection molding process using grey relational analysis and moldflow analysis, Journal of reinforced plastics and composites, 23, pp.1799-1814 (2004) Shibuichi S., Onda T., Satoh N and Tsujii K., J Phys Chem., 100, pp.19512 (1996) Shibuichi S., Yamamoto T., Onda T and Tsujii K., J Colloid Interface Sci, 208, pp.287 (1998) Shi F., Wang Z and Zhang X., Adv Mater., 17, pp.1005 (2005) Shiu J., Kuo C., Chen P and Mou C., Chem Mater., 16, pp.561 (2004) Shouji M., Sasaki H and Kawashima K., J Chem Soc Jpn, 12, pp.837 (1998) Snyder, M R., “Micromolding technology extends sub-gram part fabrication capability”, Modern Plastics, 85-87, January (1999) Song X., Zhai J., Wang Y and Jiang L., J Phys Chem B, 109, pp.4048 (2005) Szaraz I and Forsling W., A spectroscopic study of the solvation of 1-vinyl-2pyrrolidone and poly(1-vinyl-2-pyrrolidone) in different solvents, Polymer, 41(13), pp.4831-4839 (2000) Tadanaga K., Katata N and Minami T., J Am Ceram Soc, 80, pp.1040 (1997) 194 Tadanaga K., Katata N, and Minami T., J Am Ceram Soc, 80, pp.3213 (1997) Takai K, Saito H, Yamauchi G., Proceedings of the Composites: Design for Performance.Lake Louise, Canada, pp.220 (1997) Tokuumi A., Hiromatsu K., Kumai S and Mihara H., Toso-to-Toryo, 571, pp.37 (1998) Tsujii T., Yamamoto T., Onda T and Shibuichi S., Angew Chem Int Ed Engl, 36, pp.1011 (1997) Warrington, R O., “An overview of micromechanical machining processes for BioMEMS”, Proceedings of Novel Microfabrication Opinions for BioMEMS Conference, The knowledge Foundation, San Francisco, CA, July (1999) Washo B D., Org Coat Appl Polym Sci Proc, 47, pp.69 (1982) Wenzel R N., “Resistance of solid surfaces to wetting by water”, Ind Eng Chem Res., 28, pp.988-94 (1936) Wild D., “The immunoassay handbook-products,” Stockton Press, New York (1994) Wimberger-Friedl, R., “Injection molding of sub-micron grating optical elements”, ANTEC, pp.476 (1999) Woias P., Hauser K., and Yacoub-George E., “An active silicon micromixer for µ-TAS applications” Micro Total Analysis Systems, pp 277-282 (2000) Woodward I., Schofield W C E., Roucoules V and Badyal J P S., Langmuir, 19, pp.3432 (2003) Worgull, M and Heckele, M., New aspects of simulation in hot embossing, Microsystem Technologies, 10, pp.432-437 (2004) Wroblewski D E., et al., “MEMS micro-valve arrays for fluidic control,” MEMS, ASME Proceedings, pp.145-151 (1998) Wyatt G.M., Lee H.A., Morgan M.R.A., “Immunoassays for Food-Poisoning Bacteria and Bacterial Toxins” Chapman & Hall (1992) Xia Y and Whitesides G M., Soft Lithography, Angewandte Chemie International Edition, 37(5), pp.550 – 575 (1998) Xia, Y.; Kim, E.; Whitesides, G M., “Microcontact printing of alkanethiols on silver and its application in microfabrication”, J Electrochem Soc., 143(3), pp.1070-1079 (1996) 195 Xia Y., Kim E., Zhao X-M, Rogers J A., Prentiss M and Whitesides G M., "Complex optical surfaces formed by replica molding against elastomeric masters," Science, 273, pp 347-349 (1996) Xia Y., McClelland J J., Gupta R., Qin D., Zhao X-M, Sohn L L., Celotta R J and Whitesides G M., "Replica molding using polymeric materials A practical step toward nanomanufacturing," Advanced Materials, 9, pp 147-149 (1997) Xia Y and Whitesides G.M., "Soft lithography," Angew Chem Int E., 37, pp 550-575 (1998) Xia, Y., Rogers, J A., Paul, K E., and Whitesides, G M., “Unconventional methods for fabricating and patterning nanostructures”, Chemical Reviews, 99, pp.1823 (1999) Xing R., Wang Z., and Han Y., J Vac Sci Technol B: Microelectronics and Nanometer Structures, 21(4), pp.1318 (2003) Xie Q., Xu J., Feng L., Tang W., Luo X., and Han C C., “Facile Creation of a SuperAmphiphobic Coating Surface with Bionic Microstructures”, Advanced materials, 16, (2004) Yamato, M., Kwon, O H., Hirose, M., Kikuchi, A., and Okano, T., “Novel patterned cell coculture utilizing thermally responsive grafted polymer surface”, Journal of Biomedical Materials Research, 55(1), pp.137-140 (2001) Yamauchi G., Miller J D., Saito H., Takai K., Ueda T., Takazawa H., Yamamoto H and Nishi S., Colloids Surf A,116, pp.125 (1996) Yamauchi G., Saito H and Takai K., Proceedings of the Surface Characterization of Adsorption and Interfacial Reactions II Keauhou-Kona, Hawaii, USA, pp.121 (1998) Yang, S.-Y.and Chang, J.-H., Development of fluid-based heating and pressing systems for micro hot embossing, Microsystem technologies, 11, pp.396-403 (2005) Yang, Y., Zeng, C., and Lee, L J., Three-dimensional assembly of polymer microstructures at low temperature, Advanced Materials, 16(6), pp.560-564 (2004) Yang, Y.; Zeng, C and Lee, L J., Three-dimensional assembly of polymer microstructures at low temperatures, 16(6), pp.560-564 (2004) Yao, D and Kim, B., Development of rapid heating and cooling systems for injection molding applications, Polymer Engineering and Science, 42, pp.2471-2481 (2002) Yao, D., and Virupaksha, V L., Study on squeezing flow during nonisothermal embossing of polymer microstructures, Polymer Engineering and Science, pp 652-660 (2005) 196 Youngblood J P and McCarthy T G., Macromolecules, 32, pp.6800 (2003) Yousefi A., Bendada A., and Diraddo R., SPE ANTEC Proceedings, 815, pp.2201 (1999) Zeng J., Banerjee D., Deshpande M., Gilbert J., Duffy D.C., and Kollogg G.J., “Design Analyses of Capillary Burst Valves in Centrifugal Microfluidics”, Micro Total Analysis Systems, pp 579-582 (2000) Zheng H J and Dasgupta P K., “Concentration and optical measurement of aqueous analytes in an organic solvent segmented capillary under high electric field,” Anal Chem., 66(22), pp 3997-4004 (1994) Zhao X.M., Xia Y and Whitesides G.M., Adv Mater, 8, pp.837-840 (1996) 197 ... devices for BioMEMS applications The emphasis is on the development of new hot embossing techniques, the design of microfluidic functions and biocompatible packaging methods for polymeric microfluidic. .. design and implementation of necessary microfluidic functions; integration of these functions with complete automation; and development of cost-effective manufacturing technology [Madou 2001] Microfluidics... platforms without denaturing the preloaded proteins and contaminating the microfluidic channels 1.3 Outline Chapter contains a comprehensive literature review of microfabrication and and microfluidics

Ngày đăng: 14/11/2014, 13:26

Từ khóa liên quan

Tài liệu cùng người dùng

  • Đang cập nhật ...

Tài liệu liên quan