Dimension TM 3100 Manual Version 4.43B phần 10 pptx

Calibration 17-30 Dimension 3100 Manual Rev. B Measure Horizontally at 440 Scan Size continued 8. Multiply the quotient obtained above by the X fast sens value shown on the Scanner Calibration panel. 9. Enter the new value. The new value adjusts the scanner’s fast axis to more closely match calculated distances with actual feature distances. The new sensitivity setting takes effect as soon as it is entered. 10. To save it to the computer’s hard disk, click on OK. This closes the Scanner Calibration panel. 17.7.3 Measure Vertically at 440V Scan Size 1. Return to the image of the calibration reference. 2. Clear the horizontal line drawn earlier and click the right mouse button, or click on CLEAR. 3. Draw a vertical line between features. 4. Wait for at least three full scans to allow the piezo to stabilize then select two widely spaced features and draw a line connecting like portions of features (top edge-to-top edge, etc.). The SPM displays the calculated distance between features. 5. Verify that the microscope’s calculated distance agrees with the known vertical distance. If there is significant disagreement between the two, fine tuning is required; go to the next step. If the displayed distance agrees with the known distance, skip to Section 17.7.4. 6. Based upon the results from the step above, divide the known distance by the distance displayed next to the line drawn a few steps earlier. Known distance between features SPM-calculated distance between features Calibration 17-30 Dimension 3100 Manual Rev. B Measure Horizontally at 440 Scan Size continued 8. Multiply the quotient obtained above by the X fast sens value shown on the Scanner Calibration panel. 9. Enter the new value. The new value adjusts the scanner’s fast axis to more closely match calculated distances with actual feature distances. The new sensitivity setting takes effect as soon as it is entered. 10. To save it to the computer’s hard disk, click on OK. This closes the Scanner Calibration panel. 17.7.3 Measure Vertically at 440V Scan Size 1. Return to the image of the calibration reference. 2. Clear the horizontal line drawn earlier and click the right mouse button, or click on CLEAR. 3. Draw a vertical line between features. 4. Wait for at least three full scans to allow the piezo to stabilize then select two widely spaced features and draw a line connecting like portions of features (top edge-to-top edge, etc.). The SPM displays the calculated distance between features. 5. Verify that the microscope’s calculated distance agrees with the known vertical distance. If there is significant disagreement between the two, fine tuning is required; go to the next step. If the displayed distance agrees with the known distance, skip to Section 17.7.4. 6. Based upon the results from the step above, divide the known distance by the distance displayed next to the line drawn a few steps earlier. Known distance between features SPM-calculated distance between features . Calibration 17-30 Dimension 3100 Manual Rev. B Measure Horizontally at 44 0 Scan Size continued 8. Multiply the quotient obtained above by the. features SPM-calculated distance between features Calibration 17-30 Dimension 3100 Manual Rev. B Measure Horizontally at 44 0 Scan Size continued 8. Multiply the quotient obtained above by the. effect as soon as it is entered. 10. To save it to the computer’s hard disk, click on OK. This closes the Scanner Calibration panel. 17.7.3 Measure Vertically at 44 0V Scan Size 1. Return to the