A CRC title, part of the Taylor & Francis imprint, a member of the Taylor & Francis Group, the academic division of T&F Informa plc. MEMS and Microstructures in Aerospace Applications Edited by Robert Osiander M. Ann Garrison Darrin John L. Champion Boca Raton London New York © 2006 by Taylor & Francis Group, LLC Published in 2006 by CRC Press Taylor & Francis Group 6000 Broken Sound Parkway NW, Suite 300 Boca Raton, FL 33487-2742 © 2006 by Taylor & Francis Group, LLC CRC Press is an imprint of Taylor & Francis Group No claim to original U.S. Government works Printed in the United States of America on acid-free paper 10987654321 International Standard Book Number-10: 0-8247-2637-5 (Hardcover) International Standard Book Number-13: 978-0-8247-2637-9 (Hardcover) Library of Congress Card Number 2005010800 This book contains information obtained from authentic and highly regarded sources. Reprinted material is quoted with permission, and sources are indicated. 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For organizations that have been granted a photocopy license by the CCC, a separate system of payment has been arranged. Trademark Notice: Product or corporate names may be trademarks or registered trademarks, and are used only for identification and explanation without intent to infringe. Library of Congress Cataloging-in-Publication Data Osiander, Robert. MEMS and microstructures in aerospace applications / Robert Osiander, M. Ann Garrison Darrin, John Champion. p. cm. ISBN 0-8247-2637-5 1. Aeronautical instruments. 2. Aerospace engineering Equipment and supplies. 3. Microelectromechanical systems. I. Darrin, M. Ann Garrison. II. Champion, John. III. Title. TL589.O85 2005 629.135 dc22 2005010800 Visit the Taylor & Francis Web site at http://www.taylorandfrancis.com and the CRC Press Web site at http://www.crcpress.com Taylor & Francis Group is the Academic Division of T&F Informa plc. © 2006 by Taylor & Francis Group, LLC Preface MEMS and Microstructures in Aerospace Applications is written from a program- matic requirements perspective. MEMS is an interdisciplinary field requiring knowledge in electronics, micromechanisms, processing, physics, fluidics, pack- aging, and materials, just to name a few of the skills. As a corollary, space missions require an even broader range of disciplines. It is for this broad group and especially for the system engineer that this book is written. The material is designed for the systems engineer, flight assurance manager, project lead, technologist, program management, subsystem leads and others, including the scientist searching for new instrumentation capabilities, as a practical guide to MEMS in aerospace applications. The objective of this book is to provide the reader with enough background and specific information to envision and support the insertion of MEMS in future flight missions. In order to nurture the vision of using MEMS in microspacecraft — or even in spacecraft — we try to give an overview of some of the applications of MEMS in space to date, as well as the different applications which have been developed so far to support space missions. Most of these applications are at low-technology readiness levels, and the expected next step is to develop space qualified hardware. However, the field is still lacking a heritage database to solicit prescriptive requirements for the next generation of MEMS demonstrations. (Some may argue that that is a benefit.) The second objective of this book is to provide guidelines and materials for the end user to draw upon to integrate and qualify MEMS devices and instruments for future space missions. Osiander / MEMS and microstructures in Aerospace applications DK3181_prelims Final Proof page iii 1.9.2005 8:59pm © 2006 by Taylor & Francis Group, LLC Editors Robert Osiander received his Ph.D. at the Technical University in Munich, Germany, in 1991. Since then he has worked at JHU/APL’s Research and Tech- nology Development Center, where he became assistant supervisor for the sensor science group in 2003, and a member of the principal professional staff in 2004. Dr. Osiander’s current research interests include microelectromechanical systems (MEMS), nanotechnology, and Terahertz imaging and technology for applications in sensors, communications, thermal control, and space. He is the principal inves- tigator on ‘‘MEMS Shutters for Spacecraft Thermal Control,’’ which is one of NASA’s New Millenium Space Technology Missions, to be launched in 2005. Dr. Osiander has also developed a research program to develop carbon nanotube (CNT)-based thermal control coatings. M. Ann Garrison Darrin is a member of the principal professional staff and is a program manager for the Research and Technology Development Center at The Johns Hopkins University Applied Physics Laboratory. She has over 20 years experience in both government (NASA, DoD) and private industry in particular with technology development, application, transfer, and insertion into space flight missions. She holds an M.S. in technology management and has authored several papers on technology insertion along with coauthoring several patents. Ms. Darrin was the division chief at NASA’s GSFC for Electronic Parts, Packaging and Material Sciences from 1993 to 1998. She has extensive background in aerospace engineering management, microelectronics and semiconductors, packaging, and advanced miniaturization. Ms. Darrin co-chairs the MEMS Alliance of the Mid Atlantic. John L. Champion is a program manager at The Johns Hopkins University Applied Physics Laboratory (JHU/APL) in the Research and Technology Development Center (RTDC). He received his Ph.D. from The Johns Hopkins University, De- partment of Materials Science, in 1996. Dr. Champion’s research interests include design, fabrication, and characterization of MEMS systems for defense and space applications. He was involved in the development of the JHU/APL Lorentz force xylophone bar magnetometer and the design of the MEMS-based variable reflect- ivity concept for spacecraft thermal control. This collaboration with NASA–GSFC was selected as a demonstration technique on one of the three nanosatellites for the New Millennium Program’s Space Technology-5 (ST5) mission. Dr. Champion’s graduate research investigated thermally induced deformations in layered struc- tures. He has published and presented numerous papers in his field. Osiander / MEMS and microstructures in Aerospace applications DK3181_prelims Final Proof page v 1.9.2005 8:59pm © 2006 by Taylor & Francis Group, LLC Contributors James J. Allen Sandia National Laboratory Albuquerque, New Mexico Bradley G. Boone The Johns Hopkins University Applied Physics Laboratory Laurel, Maryland Stephen P. Buchner NASA Goddard Space Flight Center Greenbelt, Maryland Philip T. Chen NASA Goddard Space Flight Center Greenbelt, Maryland M. Ann Garrison Darrin The Johns Hopkins University Applied Physics Laboratory Laurel, Maryland Cornelius J. Dennehy NASA Goddard Space Flight Center Greenbelt, Maryland Dawnielle Farrar The Johns Hopkins University Applied Physics Laboratory Laurel, Maryland Samara L. Firebaugh United States Naval Academy Annapolis, Maryland Thomas George Jet Propulsion Laboratory Pasadena, California R. David Gerke Jet Propulsion Laboratory Pasadena, California Brian Jamieson NASA Goddard Space Flight Center Greenbelt, Maryland Robert Osiander The Johns Hopkins University Applied Physics Laboratory Laurel, Maryland Robert Powers Jet Propulsion Laboratory Pasadena, California Keith J. Rebello The Johns Hopkins University Applied Physics Laboratory Laurel, Maryland Jochen Schein Lawrence Livermore National Laboratory Livermore, California Theodore D. Swanson NASA Goddard Space Flight Center Greenbelt, Maryland Danielle M. Wesolek The Johns Hopkins University Applied Physics Laboratory Laurel, Maryland Osiander / MEMS and microstructures in Aerospace applications DK3181_prelims Final Proof page vii 1.9.2005 8:59pm © 2006 by Taylor & Francis Group, LLC Acknowledgments Without technology champions, the hurdles of uncertainty and risk vie with cer- tainty and programmatic pressure to prevent new technology insertions in space- craft. A key role for these champions is to prevent obstacles from bringing development and innovation to a sheer halt. The editors have been fortunate to work with the New Millennium Program (NMP) Team for Space Technology 5 (ST5) at the NASA Goddard Space Flight Center (GSFC). In particular, Ted Swanson, as technology champion, and Donya Douglas, as technology leader, created an environment that balanced certainty, uncertainties, risks and pressures for ST5, micron-scale machines open and close to vary the emissivity on the surface of a microsatellite radiator. These ‘‘VARI-E’’ microelectromechanical systems (MEMS) are a result of collaboration between NASA, Sandia National Laboratories, and The Johns Hopkins University Applied Physics Laboratory (JHU/APL). Special thanks also to other NASA ‘‘tech cham- pions’’ Matt Moran (Glenn Research Center) and Fred Herrera (GSFC) to name a few! Working with technology champions inspired us to realize the vast potential of ‘‘small’’ in space applications. A debt of gratitude goes to our management team Dick Benson, Bill D’Amico, John Sommerer, and Joe Suter and to the Johns Hopkins University Applied Physics Laboratory for its support through the Janney Program. Our thanks are due to all the authors and reviewers, especially Phil Chen, NASA, in residency for a year at the laboratory. Thanks for sharing in the pain. There is one person for whom we are indentured servants for life, Patricia M. Prettyman, whose skills and abilities were and are invaluable. Osiander / MEMS and microstructures in Aerospace applications DK3181_prelims Final Proof page ix 1.9.2005 8:59pm © 2006 by Taylor & Francis Group, LLC Contents Chapter 1 Overview of Microelectromechanical Systems and Microstructures in Aerospace Applications 1 Robert Osiander and M. Ann Garrison Darrin Chapter 2 Vision for Microtechnology Space Missions 13 Cornelius J. Dennehy Chapter 3 MEMS Fabrication 35 James J. Allen Chapter 4 Impact of Space Environmental Factors on Microtechnologies 67 M. Ann Garrison Darrin Chapter 5 Space Radiation Effects and Microelectromechanical Systems 83 Stephen P. Buchner Chapter 6 Microtechnologies for Space Systems 111 Thomas George and Robert Powers Chapter 7 Microtechnologies for Science Instrumentation Applications 127 Brian Jamieson and Robert Osiander Chapter 8 Microelectromechanical Systems for Spacecraft Communications 149 Bradley Gilbert Boone and Samara Firebaugh Chapter 9 Microsystems in Spacecraft Thermal Control 183 Theodore D. Swanson and Philip T. Chen Osiander / MEMS and microstructures in Aerospace applications DK3181_prelims Final Proof page xi 1.9.2005 8:59pm © 2006 by Taylor & Francis Group, LLC Chapter 10 Microsystems in Spacecraft Guidance, Navigation, and Control 203 Cornelius J. Dennehy and Robert Osiander Chapter 11 Micropropulsion Technologies 229 Jochen Schein Chapter 12 MEMS Packaging for Space Applications 269 R. David Gerke and Danielle M. Wesolek Chapter 13 Handling and Contamination Control Considerations for Critical Space Applications 289 Philip T. Chen and R. David Gerke Chapter 14 Material Selection for Applications of MEMS 309 Keith J. Rebello Chapter 15 Reliability Practices for Design and Application of Space-Based MEMS 327 Robert Osiander and M. Ann Garrison Darrin Chapter 16 Assurance Practices for Microelectromechanical Systems and Microstructures in Aerospace 347 M. Ann Garrison Darrin and Dawnielle Farrar Osiander / MEMS and microstructures in Aerospace applications DK3181_prelims Final Proof page xii 1.9.2005 8:59pm © 2006 by Taylor & Francis Group, LLC 1 Overview of Microelectromechanical Systems and Microstructures in Aerospace Applications Robert Osiander and M. Ann Garrison Darrin CONTENTS 1.1 Introduction 1 1.2 Implications of MEMS and Microsystems in Aerospace 2 1.3 MEMS in Space 4 1.3.1 Digital Micro-Propulsion Program STS-93 4 1.3.2 Picosatellite Mission 5 1.3.3 Scorpius Sub-Orbital Demonstration 5 1.3.4 MEPSI 5 1.3.5 Missiles and Munitions — Inertial Measurement Units 6 1.3.6 OPAL, SAPPHIRE, and Emerald 6 1.3.7 International Examples 6 1.4 Microelectromechanical Systems and Microstructures in Aerospace Applications 6 1.4.1 An Understanding of MEMS and the MEMS Vision 7 1.4.2 MEMS in Space Systems and Instrumentation 8 1.4.3 MEMS in Satellite Subsystems 9 1.4.4 Technical Insertion of MEMS in Aerospace Applications 10 1.5 Conclusion 11 References 12 The machine does not isolate man from the great problems of nature but plunges him more deeply into them. Saint-Exupe ´ ry, Wind, Sand, and Stars, 1939 1.1 INTRODUCTION To piece together a book on microelectromechanical systems (MEMS) and micro- structures for aerospace applications is perhaps foolhardy as we are still in the Osiander / MEMS and microstructures in Aerospace applications DK3181_c001 Final Proof page 1 1.9.2005 11:41am 1 © 2006 by Taylor & Francis Group, LLC infancy of micron-scale machines in space flight. To move from the infancy of a technology to maturity takes years and many awkward periods. For example, we did not truly attain the age of flight until the late 1940s, when flying became accessible to many individuals. The insertion or adoption period, from the infancy of flight, began with the Wright Brothers in 1903 and took more than 50 years until it was popularized. Similarly, the birth of MEMS began in 1969 with a resonant gate field-effect transistor designed by Westinghouse. During the next decade, manufacturers began using bulk- etched silicon wafers to produce pressure sensors, and experimentation continued into the early 1980s to create surface-micromachined polysilicon actuators that were used in disc drive heads. By the late 1980s, the potential of MEMS devices was embraced, and widespread design and implementation grew in the microelectronics and biomedical industries. In 25 years, MEMS moved from the technical curiosity realm to the commercial potential world. In the 1990s, the U.S. Government and relevant agencies had large-scale MEMS support and projects underway. The Air Force Office of Scientific Research (AFOSR) was supporting basic research in materials while the Defense Advanced Research Projects Agency (DARPA) initiated its foundry service in 1993. Additionally, the National Institute of Standards and Technology (NIST) began supporting commercial foundries. In the late 1990s, early demonstrations of MEMS in aerospace applications began to be presented. Insertions have included Mighty Sat 1, Shuttle Orbiter STS-93, the DARPA-led consortium of the flight of OPAL, and the suborbital ride on Scorpius 1 (Microcosm). These early entry points will be discussed as a foundation for the next generation of MEMS in space. Several early applications emerged in the academic and amateur satellite fields. In less than a 10-year time frame, MEMS advanced to a full, regimented, space-grade technology. Quick insertion into aerospace systems from this point can be predicted to become widespread in the next 10 years. This book is presented to assist in ushering in the next generation of MEMS that will be fully integrated into critical space-flight systems. It is designed to be used by the systems engineer presented with the ever-daunting task of assuring the mitiga- tion of risk when inserting new technologies into space systems. To return to the quote above from Saint Exupe ´ ry, the application of MEMS and microsystems to space travel takes us deeper into the realm of interactions with environments. Three environments to be specific: on Earth, at launch, and in orbit. Understanding theimpacts of theseenvironments on micron-scale devices isessential, and this topic is covered at length in order to present a springboard for future gener- ations. 1.2 IMPLICATIONS OF MEMS AND MICROSYSTEMS IN AEROSPACE The starting point for microengineering could be set, depending on the standards, sometime in the 15th century, when the first watchmakers started to make pocket watches, devices micromachined after their macroscopic counterparts. With the introduction of quartz for timekeeping purposes around 1960, watches became the first true MEMS device. Osiander / MEMS and microstructures in Aerospace applications DK3181_c001 Final Proof page 2 1.9.2005 11:41am 2 MEMS and Microstructures in Aerospace Applications © 2006 by Taylor & Francis Group, LLC [...]... devoted to handling and contamination controls for MEMS in space applications due to the importance of the topic area © 2006 by Taylor & Francis Group, LLC Osiander / MEMS and microstructures in Aerospace applications DK3181_c001 Final Proof page 11 1.9.2005 11:41am Microelectromechanical Systems and Microstructures in Aerospace Applications 11 to final mission success Handling and contamination control... Group, LLC Osiander / MEMS and microstructures in Aerospace applications DK3181_c002 Final Proof page 14 1.9.2005 11:49am 14 MEMS and Microstructures in Aerospace Applications Recently dramatic progress has been occurring in the development of ultraminiature, ultralow power, and highly integrated MEMS- based microsystems that can sense their environment, process incoming information, and respond in a precisely... in the NASA Technology Inventory, this is over a 40% increase in MEMS tasks It is almost a 90% increase relative to GFY01 where 59 MEMS R&D tasks were identified The MEMS technologies included in the NASA inventory are: © 2006 by Taylor & Francis Group, LLC Osiander / MEMS and microstructures in Aerospace applications DK3181_c002 Final Proof page 24 1.9.2005 11:49am 24 MEMS and Microstructures in Aerospace. .. introduction, and should be used in conjunction with the sections of this book covering reliability, packaging, contamination, and handling concerns © 2006 by Taylor & Francis Group, LLC Osiander / MEMS and microstructures in Aerospace applications DK3181_c001 Final Proof page 8 1.9.2005 11:41am 8 MEMS and Microstructures in Aerospace Applications An entire chapter, Chapter 5, deals with radiation-induced...Osiander / MEMS and microstructures in Aerospace applications DK3181_c001 Final Proof page 3 1.9.2005 11:41am Microelectromechanical Systems and Microstructures in Aerospace Applications 3 When we think of MEMS or micromachining, wrist and pocket watches do not necessarily come to our mind While these devices often are a watchmaker’s piece of art, they are a piece of their own, handcrafted in single... into the following four sections: © 2006 by Taylor & Francis Group, LLC Osiander / MEMS and microstructures in Aerospace applications DK3181_c001 Final Proof page 7 1.9.2005 11:41am Microelectromechanical Systems and Microstructures in Aerospace Applications 7 1.4.1 AN UNDERSTANDING OF MEMS AND THE MEMS VISION It is exciting to contemplate the various space mission applications that MEMS technology... LLC Osiander / MEMS and microstructures in Aerospace applications DK3181_c001 Final Proof page 12 1.9.2005 11:41am 12 MEMS and Microstructures in Aerospace Applications As for the future, your task is not to foresee it, but to enable it ´ Antoine de Saint-Exupery, The Wisdom of the Sands REFERENCES 1 Implications of Emerging Micro- and Nanotechnologies Committee on Implications of Emerging Micro- and. .. as described in the following section on exploration applications for MEMS © 2006 by Taylor & Francis Group, LLC Osiander / MEMS and microstructures in Aerospace applications DK3181_c002 Final Proof page 28 1.9.2005 11:50am 28 MEMS and Microstructures in Aerospace Applications 2.3.4 EXPLORATION APPLICATIONS There are a vast number of potential application areas for MEMS technology within the context... the current significant trend to integrate more and more components and subsystems into fewer and fewer chips, enabling increased functionality in ever-smaller packages MEMS and other sensors and actuator technologies allow for the possibility of miniaturizing and integrating entire systems and platforms This combination of reduced size, weight, and cost per unit with increased functionality has significant... shuttle flight during the STS-113 mission and will not need to be requalified.5 © 2006 by Taylor & Francis Group, LLC Osiander / MEMS and microstructures in Aerospace applications DK3181_c001 Final Proof page 6 1.9.2005 11:41am 6 MEMS and Microstructures in Aerospace Applications 1.3.5 MISSILES AND MUNITIONS — INERTIAL MEASUREMENT UNITS On June 17, 2002, the success of the first MEMS- based inertial measurement . An Understanding of MEMS and the MEMS Vision 7 1.4.2 MEMS in Space Systems and Instrumentation 8 1.4.3 MEMS in Satellite Subsystems 9 1.4.4 Technical Insertion of MEMS in Aerospace Applications. of Microelectromechanical Systems and Microstructures in Aerospace Applications Robert Osiander and M. Ann Garrison Darrin CONTENTS 1.1 Introduction 1 1.2 Implications of MEMS and Microsystems in Aerospace 2 1.3 MEMS in Space. satellites with micromachined Osiander / MEMS and microstructures in Aerospace applications DK3181_c001 Final Proof page 8 1.9.2005 11:41am 8 MEMS and Microstructures in Aerospace Applications © 2006