[...]... systems (MEMS): nanoscience and technology, carbon nanotubes, microstereolithography smart materials and structures; sonar, radar, microwave, and optically absorbing composite media; EMI, RFI, EMP, and EMF shielding materials; piezoelectric, chiral, ferrite, and polymer composites and conducting polymers; and UV conformal coatings, tunable ceramics materials and substrates, and electronically steerable... of Wave-Material Interaction and the Editor-in-Chief of the Journal of Smart Materials and Structures published by the Institute of Physics, UK He has authored more than 400 technical papers and six books He has eight patents pertinent to conducting polymers, smart structures and smart antennas, and phase shifters Osama O Awadelkarim is a Professor of Engineering Science and Mechanics at the Pennsylvania... Planning Corporation Market Survey (1999) Devices and applications 1996 Ink-jet printers, mass-flow sensors, biolab chips: microfluidics 400-500 Pressure sensors: automotive, medical, and industrial 390-760 350-540 Accelerometers and gyroscopes: automotive and aerospace 25-40 Optical switches and displays: photonics and communications 510-1050 Other devices such as microrelays, sensors, disk heads TOTAL... communication link and the size of its 'battery pack!' The road to practicable micromachines appears to be long and hard but the first steps toward microsensors and MEMS devices have been taken, and this book provides an overview of these initial steps REFERENCES Campbell, S A (1996) Science and Engineering of Microelectronic Fabrication, Oxford University Press, Oxford, p 536 Fatikow, S and Rembold, U... passivation to protect devices from impurities, moisture, and scratches Poly-Si is used as a gate electrode in metal oxide semiconductor (MOS) devices, as a conductive material for multilevel metallisation, and as a contact material for devices with shallow junctions Metal films are used to form low-resistance ohmic connections, both to heavily doped n+/p+ regions and to poly-Si layers, and rectifying (nonohmic)... part of this book concentrates on the materials and processes required to make different kinds of microsensors and MEMS devices The book aims to make the reader familiar with these processes and technologies Of course, most of these technologies have been derived from those currently employed in the semiconductor industry and so we also review the standard microelectronics technologies used today to... glasses and plastics, and we are now seeing the emergence of chips in biotechnology that include microfluidic systems (Chapter 15), which can truly be regarded as MEMS devices 1.4 EMERGENCE OF MICROMACHINES Natural evolution will then lead to MEMS devices that move around by themselves Such chips are commonly referred to as micromachines and the concepts of microplanes, microrobots, microcars, and microsubmarines... certain acoustic microsensors, and INTRODUCTION -10 -9 -8 Dimension of object – 7 - 6 - 5 - 4 -3 -2 A Urn IR Visible -1 0 mm cm m Radio waves • H Ultrasound H Sensors Nano- Micromachines k Inm k, 1mm 1m Figure 1.10 Dimensions of microsensors, MEMS, and micromachines; they are compared with some everyday objects The horizontal axis has a logarithmic scale Modified from Gardner (1994) MEMS devices are described... the key abbreviations and terms used in the book, provide suggestions for further reading, give tables of the properties of materials important in microsensors and MEMS, and finally provide a list of the web sites of major journals and active institutions in this field In addition, this book is aimed to be a valuable reference text for anyone interested in the field of microsensors and MEMS (whether they... topic of interdigitated transducers (IDTs) and their use in microsensors and MEMS devices The present MEMS market is relatively staid and mainly consists of some simple optical switches for the communications industry, pressure sensors, and inertia! sensors for the automotive industry, as shown in Figure 1.9 This current staidness contrasts with the potential for MEMS, which is enormous Table 1.1 is taken . • Singapore • Toronto Microsensors, MEMS, and Smart Devices Copyright © 2001 John Wiley & Sons Ltd Baffins Lane, Chichester West Sussex, PO19 1UD, England National 01243 779777 International. Data Gardner, J. W. (Julian W.), 1958- Microsensors, MEMS, and smart devices / Julian W. Gardner, Vijay K. Varadan. p. cm. Includes bibliographical references and index. ISBN 0-471-86109-X LMicroelectromechanical. Magnetoresistive Devices 274 8.5.3 Magnetodiodes and Magnetotransistors 275 8.5.4 Acoustic Devices and SQUIDs 277 8.6 Bio(chemical) Sensors 280 8.6.1 Conductimetric Devices 282 8.6.2