!"#$%&'!" ()*!&&+,*!&-$+.,! /012323 45,!"678&9 !":1#$&*-)!":1;28"3 17 "19&*-)<=!":16 ;2>? @ 3 ABCDE!6&B,&+,!&F-)&8&)!&1- 7 A,"19:1#$5-!""1!68&9 !"GDEB()*!&&+,23 7 H!DI!"J!,#K98&)!"6&B()*!&5*?9 7 H!DI!"J!,#KL!M6&B()*!&5*?9 7 E!N&!&)O?-P&PQ!"#,)O?-P!R 7 A,S!"?-P,51T#$5-!""1!8&!6&=)!":1J!,#M6 ?-R51 A,5PJ!5,!"(HR<!";&E,U8&V;!"&61;!W!)CDE!;!"X-; S!"?-P;)O?-P5P1<!" YG,5!";M#O&J!E!&!"&=5L- @ZA 7.2.1. Hiệu ứng áp điện: L-S!")OL!?(-P&L!O&H!L!&1R&1RNO&H!L!G65,!"# &PL![!&W!2&&1!&;-11!;\3 ,]L![!&H!,2&&1!&N!"& O;?-^1;\3 &&_!"D*DE!<!"&,)<=!"6&F-!&P*!& L-S!")OL!6V!&&P&$!!"&*& 7 4&-$!&1DC!6=L! )OW!&1]9<L!:1O&E!)O L!Q!"&)<=!"W!@DC!B`OO&E!)OL!&a5W!@DC! (-P&L!)L!V&5)<P-L-L!&E"b1@DC!cL#K`O !"M!")!"&a&L-L!&E8&[!"d!!b1 )OL!!R&,O&`O,)<=!"e!"!&,) !"#$%"HR51) !""9!"!&;&f!"&!)O?-P;"19;5-!" 7 "&*&POL!)O#,@DC!;L!5'!""b1&1DC! , 51#<K)!":1L!5'!"!R;O&E!)OL!D*DE!<!"#5,!"F- 8L!&V&& O;O&E!)OL!6&B65!"&)!"&T!"U&g4V!&&P!R ?h<=!"B&E,)R?W-H;Dg&1RDF-8&B!<1,!" 7.2.2. CÊu t¹o và nguyªn lý ho¹t ®éng: CDE!)OL!&,!"<15W!!"-RW!%:1&L-S!")OL! Z&J!hUDC!:1CDE!)OL!6P-,U!"=L! &E,DI!" )&O&:&1DC!W!&1]9<L!:1O&E!#$L-)OL!Q!"i$L-)OL! &'!"<j!"&&1!&#a!66V!&N!*!&#kS!"1,4-R!&W!&L!!1R#$L-"9 2#V<="9Zl43<,6-BDF!#k!&R1,;L!<-!"K!;V&*-C!&&T!":1 L!5'!"8%?!&;<m?C!(-P#k")&!&&E,&POe!" ?h<=!")!"8B A]5!"#$%:1?9#$L-)OL! 5a!&DR5W!DC!"n n YK)<=!":1U&g;P)OL!D*DE!<!";(-P&L!5W!&1DC!) L!V&5)<P-L-L!&E(-P&L!"b1&1DC!oL#K)<=!" )DE!<!"UDC!()*!&&Ep#L:1DC!)OL!45W!&a!&#qDB-<m!)DE! <!"UDC!:1DC!)OL! 45,!"!&F-5'!"& O)DC!)OL! "&`O&!&D&+,)&"&`O!9EO&,]?,!" ?,!" 45-'!"& O"&`O?,!"?,!"&1DC!)OL!2&a!&13;L!<-!":1CDE!r!""PO[?, #K5-'!"& ODC!)OL!&"&`O!9EO2&a!&D3L!)O&TT8&)!"5,!" r!""PO[!&!"L!<-!""C(-9!"d!!h1&b!"!"-RW!s5W!)O<=!"&,C 5'!"& O"&`O!&F-DC!)OL!#K!&1-!&DB-<m!5W!&a!& 7.2.3. Cảm biến thạch anh kiểu vòng đệm )CDE!&&1!&8B-#d!"L6P-,!&&a!&#q;&_!""t n@ )O&E!s&a!&#d!"L"&`O#K!&1-#&o!&R#K!`!)<=!"<g &+,5= 3)#d!"L;@3)PE;u3AJ-!9 K&!5W!:1<C,O&=&-#,<L!V&DF]:1)#d!"L;kM#82#K '!"8V!&v3E!wu82#K'!"8V!&vw3 "'1e!"6&B<j!"CDE!,!RB,8`,DI!")&,!`!]5K 2<j!")D-[!"(E&])#d!"L3;8&68`, ,!&??="C:1!`! 4-R!&W!;8&6!&R"Cx7wy 7.2.4. Cảm biến thạch anh nhiều thành phần 45,!"CDE!,!R;)#d!"L&&1!& s&+,)&K!"8&)!&1-;8&6 &_!"&o!&R#K&K!"()*!&:1 138%&L-)5=13)O&E!s]DL;3CDE!D1&!&O&J!#-[!""6 4&&1!&6!r&L?9L!)O<;<@;<z;<@x;<@n;<,6#d!"Ls&+, O&U!":15={&o!&R#K!`!2#a6<3;)8%?!&)!"&+,!&DW!F- 8&[!""HR!W!&L-S!"#K#d!"L#)S!"&L-S!":1&_!"W!|-1!E!<@; <z?q8&[!"6]4U!"!&#$R;#d!"Ls&+,O&U!"}&o!&R#Ks &+,DF<R2#a6<@n3#DI!")&sO"&`O& O%6&B,5M&L-S!":1)S!"W! |-1!E!<@x2s&+,]31]s]DL!RDB-<m!5W!&a!&nzD;&_!" ?h <=!"B&E,)CDE!&&1!&!&F-&!&O&J!45W!&a!&DB-<m!CDE! D1&!&O&J!#-[!""6"tD1]O#d!"5d!"&`O#K!&1-;]O!&R#K!`!/(;&1 ]d!!&R#Ks/R#/~#-[!""6#K/( 7.2.2. Sơ đồ mạch đo: a) Sơ đồ tương đương của cảm biến: nu 45,!"<C&[!"5!";CDE!U!"U!"#K!"-t!<d!"s?,!"?,!"#K5T8&)!" 5,!"2"tD1!&)!&3:1CDE!2&a!&13&)!&•;€;•]5!"&,!"&T!"L!U &S!&PTJ!?91,!I!",<C&[!":1CDE!AL!5T5,!"‚"L!5T)&L! :1#$L-)OL!;8&TJ!?9&PO!65T&!&5T8&)!"5,!":1CDE!4=L!" L!<-!":1!"-t!O&)L!V&;8&TJ!?95-!"Da!,!65T&!&5T8&)!":1 CDE!45W!&ET<C&[!"&'!"?h<=!";!"'1<j!"&U!"U!"DB-<m! T&a!&D &!9CDE!#K&!",DI!")O<X!;5T8&)!":1)O<X!U!"U!"L!5T ‚#=L!s?,!"?,!"#KCDE!;8&6&U!"U!"6<!"&a!& b) Sơ đồ khuếch đại điện áp 45T8&)!"#,:1D8&-E&L!)OU!"U!"#KL!5T‚+s?,!"?,!"#K =+;8&6&U!"U!"6<!"&a!& AL!)OT9#,:18&-E&()*!&DT[!"&S c) Sơ đồ khuếch đại điện tích: 45,!"&8&-E&L!V&;?<&-RB!:1L!V&T9#,?q"HR!W!T951 L!)OoL#KL!V&J-#,8&-E&L!V&"tDDE!NL!V&7L! )OJ-#,;J!"&-ƒ!!&R;Dg5-!""1!#?9J!"8&-E&TJ-51 B-!"POV!&L-512&a!&13 „Ut&"&`O!9CDE!#KD&-RB!NL!)O7L!V&5a!&DR5W!&a!&D nz 13„Ut8&9D3„Ut"&`O!9CDE!#,D&-RB!NL!V&7L!)O 7.3. Cảm biến từ giảo 7.3.1. Hiệu ứng từ giảo YK)!":1M5'!";?9#$L-?sM&1RNV!&&P&a!&&g&,]V!&&P U&g2&L?9},-!"3L! !"!R "g&L-S!"M"C,&6)<=!":1U &g"HR51S!"5,!"#$L-?sM&1RN'!",!"M&,):1&_!";8&6<1 #,?&1RN:1M&ƒ&,]M<6&B()*!& K!:1)<=!"AHR &L-S!"M"C,!"&*& - Cơ chế từ hoá&&_!"1GDE5,!"#$L-?sM;…!"-RW!h ]5!"DT [+!MAB"C&B-!r!" !"N!"!";,+!M:1)!"-RW!h5,!"j!" F!M&,)!&W!2<,+!3O&C&K!"&+,&K!"&-!"K!"&-!"!R*!& &K!"&+,?9&K!"-W!:1!"!&&B"g&K!"<mM&,)K!":1) [+!M5,!")<,+!!&!&1-8&[!"5j!"!&1- &6M5'!"!",)!";?*!&&K!":1[+!M5,!"<,+!&+, &K!"&-!"r!"<J!&!&Q;)#)&<,+!M<*&&-RB!#8V&&K:1)<,+! M6&K!"M&,)&-$! 5j!"#K&K!":1M5'!"DW!!",r!"W!&M5'!" !",r!"W!E!S!,6(CR51&L! !"C,&K!":1)<,+!&+,&K!"M 5'!"!",&M5'!"!",:!&?q|-1R&K!"<mM&,):1)<,+!M&+, &K!"M5'!"!",<X!E!DC,&,2&!&13 - Hiện tượng từ trể„1-8&M&,)J!J-E!DC,&,203;!E-#X!"b!"-RW!O&U!"M 5'!"#&&L!&-5a!&8&`O8V!2;w;7;w31!&$! '!",!"M&,)!& &a!&D"g'!",!"M5B#KM<58&)!"M nx 134M&,)J!J-D3&-5a!&M5m 3„DE!<!":1'!",!"M&,) <K)<=!":18`, &5,!"#$L-?sM6S!";8V&&K!"!&&B&1RN;)&K!"<mM&,)&1R N<X!E!&1RN*!&&K!":1)<,+!L! !"!R"g&L-S!"M"C, !"&*&45W!&a!&n†DB-<m!C!&&T!":1S!"E!'!",!"M&,):1O+51,R n‡2n‡y;u@y/+3 7.3.2. Cảm biến từ thẩm biến thiên P-,:1CDE!"t-!<HR6ˆM& O#K8&-!"?sM,&!&& M8V!2&a!&nw3YK)<=!":1/;ˆMD*DE!<!"8`,&+,?&1RNM&ƒ p;&,M5T&M&1RN<,6C:1-!<HRe!"&1RN„&1RN U!"9:1;‚&,]poL#KS!"‰;S#KJ!,/ nn 7.3.3. Cảm biến từ dư biến thiên: Z&J!hUDC!:1CDE!M<DE!&W!ˆMDI!"!&8&E1,;6M <5YK)<=!":1J!,;&V<=!`!2<‰Šw3;5r!"W! „&1RN:1M&[!"?q(-P&L!5,!"-!<HR?-PL!!"oL#K<5>< B-&S:1L!)O&T&6<!" 45,!"6&L?9oL#K?9#d!"<HR#E<L!#d!"<HR 7.4. Cảm biến xúc giác: Z&J!&V!&:1CDE!E)&L!5W!66K<X!L!2&a!&n13 ]<KL!)OiKL!"t&1&L&9!"<HR<X!2{;{@;3#2};}@;3#-[!" "6#K!&1-,&!&!&b!"[#-[!"!&Q;…[#-[!"!&QF-6L! )& L!#K<HR<X!:1KD1,|-1!&!6;)L!!R!9#KP&[!"|-1&,<d!" ]5W!:1&L&9!" O&:1,?-6O&1)&<X!L!&6!`!)<=!"W! 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CẢM BIẾN LỰC – LOAD CELLS x,1<+? x&)!L#!"-RW!%&,!" x,1<+"a‹ ,1<+&ED*L!<j!"B&-RB!N&!&V!&L-L! x@"-RW!%&,!" ,!"<15W!!"-RW!%J-L!5TH!DI!"Œ&+1?,!+)5*)<=!"oL#K ?&1RNL!5TCS!"5,!"J-L!5T;#<,6 5C#FV!&L-L!)OoL x@Z&H!, 6&BO&H!,,1<+?&+, 7Z&H!,,1<+&+,)!"&*-8`,2?&+15,1<+3;&*-!`!2,O5+??,! ,1<+3;<!"-9!2D+!<!"3;&*-(,s!24+!?,!,1<+?3 7Z&H!,&+,&a!&<!"<!"•1;<!"&1!&;<!"5=;<!"J-;<!"&b„\ xu,1<+?U!"#,1<+??9 45KHR;&J-&E)&ED*H!5,!"[!"!"&LO?h<=!",1<+CDE!?S r!";DE!N&!&V!&L-L!2"g,1<+U!"34V!&L-!R &-RB!&!& &[!"!&b-V&!&')&ED*,'!"!&D&o&* &L&9!"H!<j!",1<+U!"B!&a!&&[!"&'!"D1,"t&,] #,1<+!9?,!"?,!"#K!&1-|-1&O!92Ž-!,!,(3!&&a!&#q n‡ 7„Ut&L&9!"H!<j!",1<+U!"B!&a!& …,1<+CJ-51$O;&'!"E!ui>iAJ-518E& O N!" & O<15W!8E|-C:1J-51M!",1<+)&ED*,'!"&,]D&B!&* 8&-RE&V!&L-L!1#F;|-1&-RB!N•Y;#(h%#KO&J!FV&& O?•! &&L!V!&,)!&o!&*!E|-Cg W!!&a!&A1O&J!)&ED* &1RD&B!&*&L!F-&,O&`O"1,EO#K)&ED*!",8&)!&)RV!&&,] )R!‘-B&V!&:1[!"!"&L!R(-PO&)MRW-J-&E;#K!&b!"&1 ?9()*!&5K;?q6)?C!O&ƒ&E8EO&j& O&,M!"S!"<=!":1!"'<j!"’ 6)O&J!hCS!"68V&&K#&a!&<!"8&)!&1-O&j& O#KRW-J-:1S!" <=!")<!"O&NDE!<!"8`,2?&+153;<!"-9!2D+!<!"3;<!"!`!2,O5+??,!3\ 4-R!&W!;8&68&r!"]OO&C!"1RMD-NJ-:1)&L&9!"!RV!&L-L!)OJ- 51:1,1<+5P!&Q2&'!"8&[!"|-)uwi3&b!"V!&L-!&Q!&#$R<m<!"D* C!&&T!":1!&F-,!&m-5,!"[!"!"&LO!&&m-L!M?!&51DT|-)5a!& 5-RF!O&))V!&L-L!5,!"[5'!"(-!"|-1!&;5-RF!O&)V!&L-#[-RE! 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"C!e!"1!"5,!"!6P-5_8&)O&SO4&S!&P;O&C6,1<+UDC! #K&V!&();N!<*!&C!r!"]O5P1,5,!"gF-8L!#L4&S &1;O&C6D&-RB!NU!"7?92•Y3nE!@wD91,B&-RB!N V!&L-L!U!"?1!"<!"?94&SD1;O&C6&L#&(h%B&&L!F- 8&B!,!D|-)5a!&&-RB!NMV!&L-, &!&<bL-?9&B&L!5-!" &!&P#"1,EO#K)&ED*8&)B51,N&[!"!4&18&C,P-5_ ,1<+?95W!&a!&7@4V!&L-L!)OMJ-L!5T:1,1<+&V!&()1, 1E!J-#,:1&V&& O?•!;D1,"tCO&J!8&-RE&;D"CF-&E; •Y91,@wD#Dg?9CDE!!&LV&& O?•! ?h<=!"B, !&L&:1,1<+O&=#=&,#LDj?1?9<,!&LYbL-M•Y;CDE! !&Lj!"#K)&-$,)!5,!"O&J!F#?9O&J!S!"DN?-!"V&& O?•! 6&S!r!"9-&61(h%)?1?9<,8&[!"-RE!V!&;Dj?1'!"]V!&;8&C !r!"O&=&t5!"&)#C!&&T!":1!&L\ #(h%91,(h%YbL- 8E|-CJ-51 5-RF!(1|-1N!""1,EO&+,"1,&S!&P*!&) ,<-+L!h!R6&B ]!"1R5,!",1<+;,1<+1D+&,]5,!"&O ”-!,!D,()]V!&K&!:1M!",1<+ ]5,!"••Z‚–!I5,!" ,<-+:1,1<+6;F-6e!"6!"&•1‹g#P!F(h%?1?9 &&L! !"1R,1<+;#K&V!&,1<+6;e!"6!"&•1O&`ODj?1?9 &&L!8&)5LB w [...]... như mV/V là gì, tín hiệu vào ra, tầm sử dụng tải… - Cấu tạo Loadcell, thụ động (thuần trở) hay tích cực (bán dẫn), độ ổn định, chịu nhiệt, chịu nước, chống nhiễu - Kết cấu của ứng dụng, lưc tập trung, lực phân bố, tải trọng tỉnh, tải trọng động - Phương pháp cân: chất lỏng chất rắn, cân kiểm tra, cân định lượng, cân phân loại, cân gián tiếp liên tục (cân băng tải) - Thiết bị đọc tín hiệu: Indicator, . !"!R"g&L-S!"M"C, !"&*&45W!&a!&n†DB-<m!C!&&T!":1S!"E!'!",!"M&,):1O+51,R n‡2n‡y;u@y/+3 7.3.2. Cảm biến từ thẩm biến thiên P-,:1CDE!"t-!<HR6ˆM& O#K8&-!"?sM,&!&& M8V!2&a!&nw3YK)<=!":1/;ˆMD*DE!<!"8`,&+,?&1RNM&ƒ p;&,M5T&M&1RN<,6C:1-!<HRe!"&1RN„&1RN U!"9:1;‚&,]poL#KS!"‰;S#KJ!,/ nn 7.3.3 O#K8&-!"?sM,&!&& M8V!2&a!&nw3YK)<=!":1/;ˆMD*DE!<!"8`,&+,?&1RNM&ƒ p;&,M5T&M&1RN<,6C:1-!<HRe!"&1RN„&1RN U!"9:1;‚&,]poL#KS!"‰;S#KJ!,/ nn 7.3.3. Cảm biến từ dư biến thiên: Z&J!hUDC!:1CDE!M<DE!&W!ˆMDI!"!&8&E1,;6M <5YK)<=!":1J!,;&V<=!`!2<‰Šw3;5r!"W! „&1RN:1M&[!"?q(-P&L!5,!"-!<HR?-PL!!"oL#K<5>< B-&S:1L!)O&T&6<!" 45,!"6&L?9oL#K?9#d!"<HR#E<L!#d!"<HR 7.4 O&:1,?-6O&1)&<X!L!&6!`!)<=!"W! O&J!!,6:1P1,?-;8&,C!")&"b1)&<X!L!TO&J!6!"s!;L!5T"C (-9!";<d!"L!r!"W!2&a!&nD34,:1#j!"6<d!"L!r!"W!?q()*!&#*5V :1)<=!"#")5*:1!6()*!&")5*:1 n 7.5. 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