Azores Operating Specification

Document Owner: Release Date: Updated 02/072013 EH Adding 06/10/13 sa 10/9/13 sa FLEXIBLE DISPLAY CENTER Document Title: AZORES STEPPER Document No: FDC-OP-0000000000 Document Rev: 01 SPECIFICATION FORMAT: EQUIPMENT MANUFACTURER: Rudolph Technologies (formerly Azores) EQUIPMENT MODEL: Azores 5200 Panel Printer ASU ASSIGNED TOOL ID NUMBER: 6148168 APPLICATION PROGRAM(S) AND REVISION: Microsoft Word 2003 SIGNATURES FOR RELEASE OR HISTORY ON FILE IN PRODUCT SPECIFICATIONS Confidential Proprietary ORIGINATOR: Susan Allen The information contained in this document is the property of the Flexible Display Center at Arizona State University No information contained in this document may be disclosed outside of the Flexible Display Center at Arizona State University at any time RESPONSIBLE ENGINEER: Scott Ageno DIRECTOR OF OPERATIONS: Shawn O’Rourke Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page of 45 Table of Contents Table of Contents List of Figures 1.0 SCOPE .3 2.0 EQUIPMENT AND SUPPLIES 3.0 SAFETY 4.0 OPERATING PROCEDURES 5.0 LOG SHEETS + SEPARATE DOCUMENTS 6.0 ROUTINE MAINTANENCE 10 7.0 ILLUSTRATIONS AND PHOTOS .30 8.0 ADDITIONAL REFERENCE SPECIFICATIONS/MATERIAL 33 9.0 TROUBLESHOOTING/ERRORS 35 List of Figures Figure 6.1 Blank Page for Illustration #1 Figure 6.2 Blank Page for Illustration #2 Figure 6.3 Blank Page for Illustration #3 Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page of 45 1.0 SCOPE 1.1 Definitions 1.2 Documents and Manuals Referenced 2.0 EQUIPMENT AND SUPPLIES 2.1 Test Equipment 2.2 Standard Product + Supplies 2.3 2.2.1 Black Pen 2.2.2 Scotch Brite Parts and Consumables List (Supplier Information) 2.3.1 Lamps 3.0 SAFETY 3.1 Additional Reference Specification 3.1.1 MSDS (located 3.1.2 FDC Safety Specification # 4.0 OPERATING PROCEDURES NOTE: This tool runs G-Line wavelength Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page of 45 4.1 Start up Procedure 4.2 Turn on Lights – located at the top front in the center of the tool on the top control panel 4.3 Open all Doors (refer to step 4.2) 4.4 Check in the tool for plates and pins and chucks, IPH is close to front 4.5 To Open / Close Doors 4.6 Press peddle on the floor with your foot to open Bottom and Top doors 4.7 The Left Green Square Button when pushed opens the Upper Top Left Door 4.8 The Right Green Square Button when pushed opens the Top Right Door 4.9 The Center top door opens manually – lift up 4.10 The Bottom Right Door opens manually by opening the top door and then pushing the release button located to the left inside and push the door downward To close the door lift up until the window locks in place 4.11 The Left Red Square Button closes all of the doors Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page of 45 4.12 Do Daily checks at the beginning of the shift – 4.13 Auto Cal (refer to step _) this is done first thing in the morning 4.14 Best Focus (refer to step ) this is done when needed 4.15 Reticle Check Best Position (refer to step _) this is done when needed 4.16 Get Cassettes Ready (at touch screen) 4.17 Load Plate in Cassette with notch on panel to the front right hand side – top - standing in front of the cassette with metal rails facing you 4.18 Load slots 1-10 ONLY 4.19 Place cassette on wheel track – sender 4.20 Unload receiver cassette 4.21 Place cassette so that the metal bar goes in notch in cassette 4.22 To Check Reticles and Barcodes NOT DONE VERY OFTEN skip to 4.37 4.23 On touch screen from the Main menu 4.24 Press Reticle Library 4.25 NOTE: DO NOT PRESS VERIFY RETICLES unless you have a long time to wait 4.26 Press Verify 4.27 Check Barcodes 4.28 Enter Box # 4.29 Press Done 4.30 To See What Is On The Reticle Wheel 4.31 On the computer on the sheltool-/bin/ash screen 4.32 Type show_rets 4.33 Press Return 4.34 Unload Reticle 4.35 On the touch screen go back to Main 4.36 Manual Ops 4.37 Reticle 4.38 Reticle Library 4.39 If more than one Reticle is on the wheel press Utilities and then Auto Unload 4.40 If only one Reticle is on the wheel press Unload Wheel 4.41 Load Reticle NOTE: Can be loaded from the computer type in - ld_chuck 0,3 (0 is the camera and is the wheel slot) Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page of 45 4.42 4.41.1 On the touch screen 4.41.2 Touch Manual Ops 4.41.3 Touch Reticle 4.41.4 Reticle Library 4.41.5 Load Wheel 4.41.6 Enter # Reticle box (example 19 is the PTR reticle) 4.41.7 Done 4.41.8 Type # of slot on wheel to load onto (example is for the PTR reticle) 4.41.9 Type Name of Reticle (example: PTR) 4.41.10 Done Continue Getting Cassettes Ready To Run (at touch screen) NOTE: Turn screen on by Touching the Corner of the Display Screen 4.42.1 Press Stop – if it hasn’t been pressed 4.42.2 Edit Cassette 4.42.3 Make Full 4.42.4 Click on slots where no plates are present to run on the load side 4.42.5 Press Unload side 4.42.6 Press Make Empty 4.42.7 Place empty cassette on receiver side 4.42.8 Press Done – Verify screen for correct count Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page of 45 4.43 Load Job / Select Program to run (at touch screen) 4.43.1 Touch lower right corner to wake up monitor 4.43.2 Touch Job Execution 4.43.3 Touch Load Job 4.43.4 Type in Job Name 4.43.5 Press Done 4.43.6 Press Set Params 4.43.7 Press Set # of Plts 4.43.8 Type in # running 4.43.9 Press Done 4.43.10 Press Back 4.43.11 Open Doors – check pins, for panels, forks facing inward (refer to steps 4.2_) 4.43.12 Close Doors (refer to step 4.2_) 4.43.13 Run Job 4.43.14 TEMP problem – = No Initial, Quit, Run Job again 4.43.15 screen At the Handler screen - Verify slots that have panels loaded to what is on the 4.43.16 Operate 4.43.17 Yes – even if job has not been selected 4.43.18 Watch the Alignment marks on the monitor in chamber if Aligning Note: If a plate does not run for any reason it will be rejected into the receiver cassette and a red line will appear showing which panel did not expose on the Handler screen 4.43.19 When All plates have been exposed and in the receiver cassette press OK 4.44 4.43.20 Press Stop 4.43.21 Remove the Receiver cassette 4.43.22 Unload the panels 4.43.23 Develop the panels (refer to Develop Spec # ) Load / Remove Reticle Manually in Reticle Box NOTE: Green Indicator lights show reticles present and Red Indicator lights show no reticle present IMPORTANT: In Slot #3 the PTR Reticle is kept – used for tests Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page of 45 4.44.1 At the touch screen Press Main 4.44.2 Press Manual Ops 4.44.3 Press Reticles 4.44.4 Press Reticle Library 4.44.5 Press Unload Box 4.44.6 Press # wanting to remove 4.44.7 Press Done NOTE; Once reticle loader moves out of the way green light flashes 4.44.8 Push Black Button Down by # wanted to remove or Add 4.44.9 in Remove or Add Reticle by pulling out the reticle stack or pushing the reticle stack 4.44.10 Want reticle stack to be lit green or red – the following if it is not: 4.44.11 Status 4.44.12 Stack Status 4.44.13 Quit 4.44.14 Press Main NOTE: In Reticle Directory you can Verify, Unload In Utilities you can get a list of reticles loaded 4.45 To Print 4.45.1 Double left Click on Camera icon at the bottom of the screen 4.45.2 Click on Snap 4.45.3 Click on Discard snapshot 4.45.4 Move the arrow to the window with the data and click on the screen 4.45.5 Click on Print to print the data on the screen 4.45.6 Click on Close 4.45.7 Press Return – to get prompt Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page of 45 4.46 Shut down for the Night 4.46.1 4.47 Turn Lights Off on the top control panel 4.46.2 Turn Off the monitor on the computer Fix Loose Reticle on Wheel 4.47.1 On the touch screen go to Main Menu 4.47.2 Manual Ops 4.47.3 Reticles 4.47.4 Manual Operations 4.47.5 #_ slot 4.47.6 Type in PTR 4.47.7 Done 4.47.8 Type PTR 4.47.9 Done 4.47.10 Hold Reticle in position – push Reticle against the wheel VERY CARFULLY (can break Pelical membrane) 4.47.11 Touch Continue - the orange box on screen while holding the Reticle in place 4.47.12 Once Vacuum is set the screen will display 4.47.13 Unload Reticle and Reload (refer to steps 4.5 and 4.6) 5.0 LOG SHEETS + SEPARATE DOCUMENTS 5.1 Data Entry 5.1.1 At the computer - Log In 5.1.2 Open AZORES Control Charts 5.1.3 Enter Uniformity, DAC, Auto Focus (don’t enter negative sign) 5.1.4 Go to Summary when done 5.1.5 Click Here to Update 5.1.6 Click on plots and verify in spec Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page of 45 6.0 ROUTINE MAINTANENCE 6.1 Morning Checks 6.1.1 Check the temperature of the Chamber (temp should be 21 – upper temp actual) This is located on the top front of the tool 6.2 Clean Tool - Weekly Checks (Done when Needed – not often can create problems) 6.2.1 At the touch screen from the Main Menu press Stage Position 6.2.2 Press Hand Load to move stage front for easy access 6.2.3 (?get to XY stage Move Options) 6.2.4 Wipe the Banking Pins (push the brass bearings toward the outer edge) on the Plate Stage use Acetone and Q-Tip 6.2.5 At the computer type in no hold_all 6.2.6 Using a soft wipe and IPA wipe down the following: Temperature plate, Vacuum Pucks on Paddles (Do not clean Pucks on Handlers, if these pucks get dirty clean with DI water only) 6.2.7 Using a soft wipe and IPA wipe down the following: , Granite, All flat surfaces (be careful not to touch the Mirror (white strip) 6.3 6.2.8 In back of tool remove doors 6.2.9 Wipe down using soft wipe and IPA _ 6.2.10 Vacuum Pucks Verify What Reticles are on the wheel 6.3.1 On the computer on the sheltool-/bin/csh screen 6.3.2 Type show_rets 6.3.3 Press Return Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page 10 of 45 7.2 Stitching location - Horizontal (LEFT DIE) located on the right side of the die down ½ way Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page 31 of 45 7.3 Overlay reading locations (RIGHT DIE) – located at the top in the middle Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page 32 of 45 8.0 ADDITIONAL REFERENCE SPECIFICATIONS/MATERIAL 8.1.1 Exposure Programs List (what they are used for) ALL-TEST (not-used) ASU-1-UP (Test pattern large array – for show – display on screen only) Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page 33 of 45 ASU-LAYER1 (Test pattern arrays – for show – display on screen only) ASU-LAYER2 (Test pattern arrays 2nd layer – for show – display on screen only) CYCLE (Azores program – not used) CYCLE1 (Azores program – not used) EXP-ALL (exposes all of the plate to remove all resist in the developer) FDC-PROMO (Flexible Display Center – resist everywhere except letters) FDC-PROMO-CLEAR (Flexible Display Center – resist only where letters are) 10 INT-TEST (not-used) 11 LIFE-TEST (not-used) 12 LIFE-TEST2 (not-used) 13 MSR-AXIS (not-used) 14 MSR17FOC (not-used) 15 MSR9FOC (not-used) 16 PR-THICK-DOSE (Different Dose – resist process set-up) 17 PR-THICKNESS (Same Dose everywhere – Linewidth /Resist Thk /Uniformity) 18 PS-ALL (not-used) 19 PSO-L1 (Precision + Stitching) 20 PSO-L2 (Overlay) 21 PTR1 (not-used) 22 PTR1-380X320 (not-used) 23 PTR1-PRETEST (not-used) 24 RAS1 (not-used) 25 RAS2 (not-used) 26 RAS2-380-320 (not-used) 27 RAS2-ALL (2nd level for Alignment and Stitching - not used now) 28 RAS23-370-470 (not-used) 29 RAS2A (Alignment + Stitching) not used now 30 RAS2B (not-used) 31 RAS2C (not-used) 32 RAS2D (not-used) 33 RAS2E (not-used) 34 RAS2F (not-used) 35 RAS3 (not-used) 36 REVERSE (Reverses the plates in the cassette ready for develop – corner in right position) 37 TPUT1 (not-used) 38 TPUT1-230 (not-used) 39 TPUT1-250 (not-used) 40 TPUT2-230 (not-used) 41 TPUT2-230A (not-used) 42 Z-TEST (not-used) 43 EDGE-REMOVAL (Exposes resist around the edge of the panel) 44 DIST-BASELINE (Distortion test for alignment keys) 45 DIST-L1-01 (Distortion test for alignment keys) 46 DIST-L2-0 (Distortion test for alignment keys) 47 Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page 34 of 45 9.0 TROUBLESHOOTING/ERRORS 9.1 9.2 9.3 bin/csh isn’t at the bottom of the screen: 9.1.1 Right click and hold on the blue background (off of windows opened) 9.1.2 Highlight and release on UNIX 9.1.3 Place the arrow on the Sheltool screen 9.1.4 Type cd $cdat 9.1.5 Press Return 9.1.6 Type PWD – this should be in cj data If is not on the screen (sheltool-/bin/csh) (Scroll Script Folder) 9.2.1 Right click on the Blue Background on the screen 9.2.2 Click on MRS Panel/Printer Operation Tools 9.2.3 Click on MRS Script 9.2.4 Type in tip stepper 9.2.5 Press Return 9.2.6 Press Return Grid Mismatch Error NOTE: grippers on Reticle robot inside (middle) and grippers on Reticle Box all should be closed 9.3.1 On the computer type grip 9.4 9.3.2 Press Return 9.3.3 Type ungrip (Make sure no Reticle in on) 9.3.4 Press Return 9.3.5 Type rl_rob_stat (Reticle Robot Status) 9.3.6 Press Return 9.3.7 Check Wrist, Door, Reticle, Gripper, and Banker If Beam is broken NOTE: Stage will float ADD INFO HERE HOW TO FIX Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page 35 of 45 9.5 Check Error Log 9.5.1 On the computer Right click on Blue part of the Screen 9.5.2 Open sheltool 9.5.3 type cd $cdat/ /he 9.5.4 Press Return 9.5.5 Type ls (list all error files) 9.5.6 Type dcbn he_log.rial ………… 9.5.7 Press Return 9.5.8 Shift G – 9.5.9 Press the letter U to scroll up the screen, Press the Space Bar to skip page to page, Or Press the Return key to go down error by error 9.6 Error – No Carrier – Transceiver Cable Problem? Appears on screen (this error comes on when the log gets full) NOTE: This whole procedure must be completed in seconds or redo all steps again 9.7 9.6.1 Right Click on Blue Background on the screen 9.6.2 Highlight UNIX TOOLS 9.6.3 Highlight CONSOLE 9.6.4 Close out All windows on the Screen 9.6.5 Open RMI Program 9.6.6 Open shel/bin/csh program To Center the Cross in Monitor and Focus NOTE: Done during PM every months or if Auto Calib Fails 9.7.1 In Calibration … 9.7.2 Type #4 - Ras Set-Up 9.7.3 Type #1 – Course Ras Baseliine + Focus Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page 36 of 45 9.8 9.9 9.10 No Camera Box on the Screen 9.8.1 Right click in the Blue background on the screen 9.8.2 Click on Unix Tools 9.8.3 Drag to Snap Shot (open) If RMI is not on the screen 9.9.1 Right click on the blue background on the screen 9.9.2 Left click and hold on MRS Panel Printer RMI 9.9.3 Highlight and release mouse button on CALIBRATION If RMI is locked up 9.10.1 Close the program by clicking on the left corner of the folder 9.10.2 Repeat steps in 9.9 9.11 If you have to remove the panel from the Azores when started – need to clear the job 9.11.1 Press Stop 9.11.2 Press Abort 9.11.3 Press Quit 9.11.4 On the Sun computer type i Press Return 9.11.6 The list will come up look for je_exec # (of the error # 27, 28 etc) Type td 0x (the error # found from 9.11.6) example: td 0x28 9.11.7 Press Enter 9.11.8 Retype i and check for je_exec (error # again) 9.12 For Error log screen 9.12.1 Right Click Background 9.12.2 Highlight Application Engineering tool 9.12.2 Highlight Error Tool 9.13 To Clean Error log screen Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page 37 of 45 9.13.1 Close out the screen and reopen or control C, return, return 9.14 If bin/csh not working reopen 9.14.1 Close out the screen 9.14.2 Type cd $cdat 9.14.3 Press Return 9.15 If the Sun computer locks up – reboot 9.15.1 In the cabinet behind the Sun Computer in large cabinet press the reset button (little red button) on the top panel 9.15.2 Wait 20 minutes 9.16 If reticle retrieving arm gets stuck in the reticle box 9.16.1 At the Sun Computer type in ungrip 9.16.2 Type rl_rob_stat 9.16.3 Type rl_y_nohold 9.16.4 Manually pull arm out of the box – no reticle should be attached be very careful 9.16.5 Type rl_originate_y 9.16.6 return 9.16.7 Type rl_move_door 9.16.8 return 9.16.9 type rl_powerup 9.16.10 Type rl_move_x 9.16.11 type rl_originate_wrist (if the wrist is not horizontal or vertical – off) 9.16.12 If still not working call Azores service Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page 38 of 45 9.17 If job quits during run 9.17.1 Press Abort on the touch screen 9.17.2 Quit on the touch screen 9.17.3 Auto unload reticles 9.17.4 Check for any job running on Sun system 9.17.5 On the Sun type cm_stat (this checks the wheel, chuck and camera) (check vacuum – all off) should have wheel out and blade out 9.17.6 Type show rets 9.17.7Return (should have no vacuum) 9.17.8 Calibrate Wheel type in rw_originate 9.17.9 Return (make sure wheel moves) (should have 0=0x0 on screen when done) 9.17.10 Calibrate the Z type in rw_originate_z 9.17.11 Return (watch the wheel goes in and out very slight movement) (should have 0=0x0 when done) 9.17.12 Calibrate the Camera type cm_originate 9.17.13 Return (moves up and down) (should have 0=0x0 on screen when done NOTE: if a # comes up – not good) 9.17.14 Repeat type in cm_originate (if # still comes up have to hard reboot tool – turn off breakers) NOTE: make sure all reticles and panels are off the machine before rebooting 9.18 If job stops running during PSO-L1 JOB 9.18.1 Press Abort 9.18.2 Press Quit 9.18.3 Auto Unload reticles 9.18.4 Type in cm stat (checks the wheel/chuck/camera) Note: should have the wheel and blade out / check the vacuum on all should be off 9.18.5 Press Return 9.18.6 Type in show rets Note: should show none no vacuum 9.18.7 Press Return 9.18.8 Calibrate the wheel by typing in rw_originate (make sure wheel moves) 9.18.9 Press Return (should have 0=0x0 prompt) 9.18.10 Calibrate the Z - type in rw_originate_z 9.18.11 Press Return (watch will go in and out – may be very slight movement) 9.18.13 Calibrate the Camera – type in cm_originate 9.18.14 Press Return (moves up and down will have 0=0x0 prompt when corrected if a # comes up it is not correct) Note: If a # comes up repeat step from 9.18.13 if a # still comes up hard reboot 9.19 If Reticle is not set on wheel – no vacuum (CHECK THIS SEQUENCE BEFORE USING – Sue did this on the phone with service rep may have missed some things) 9.19.1 Press Quit 9.19.2 On the Sun type cm_stat 9.19.3 Try to set the reticle Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page 39 of 45 9.19.4 If no vacuum check the hoses 9.19.5 Type rw_vac 0,0,1 9.19.6 Press reticle on wheel – check vacuum 9.19.7 Type rw_vac 0,0,0 9.19.8 When set type rw_rotate 0,3 9.19.9 Return 9.19.10 Type cm_stat 9.19.11 Type rw_rotate 0,0 9.19.12 Type cm_stat 9.19.13 Type rw_rotate 0,3 9.19.14 Type cm_stat 9.20 Calibrate / Originate the Wheel when reticle does not mount correctly 9.20.1 Type rw_originate_z (originate wheel in/out) 9.20.2 Press Return 9.20.3 Type show_rets 9.20.4 Press Return 9.21 If Send Cassette computer screens is off or needs to be rebooted: 9.21.1 Open the front panel - turn the computer off 9.21.2 Turn the computer on 9.21.3 Type in Engineer on the screen 9.21.4 Type in x 9.21.5 Click on Initilize 9.22 Gripping Problem 9.22.1 Type ungrip 9.22.2 Press Return 9.22.3 Type grip 9.22.4 Press Return 9.22.5 Type ungrip 9.22.6 Press Return 9.22.7 Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page 40 of 45 Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page 41 of 45 Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page 42 of 45 Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page 43 of 45 Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page 44 of 45 Arizona State University – Flexible Display Center confidential information Hardcopy may not be current document Page 45 of 45 ... Information) 2.3.1 Lamps 3.0 SAFETY 3.1 Additional Reference Specification 3.1.1 MSDS (located 3.1.2 FDC Safety Specification # 4.0 OPERATING PROCEDURES NOTE: This tool runs G-Line wavelength... ASU-LAYER2 (Test pattern arrays 2nd layer – for show – display on screen only) CYCLE (Azores program – not used) CYCLE1 (Azores program – not used) EXP-ALL (exposes all of the plate to remove all resist... SCOPE .3 2.0 EQUIPMENT AND SUPPLIES 3.0 SAFETY 4.0 OPERATING PROCEDURES 5.0 LOG SHEETS + SEPARATE DOCUMENTS 6.0 ROUTINE MAINTANENCE