... Tai2'Systems Mangement Engineering, Kansai University 3-3 -3 5, Yamate-cho, Suita, Osaka 56 4 -8 680 , JapanCalifornia Institute of Technology13 6-9 3, Pasadena, CA9112, USAABSTRACTPolymer material of Parylene ... University 3-3 -3 5, Yamate-cho, Suita, Osaka 56 4 -8 680 , JapanABSTRACTWe propose new type of spatial vector sensor based on the Fixed Stewart Platform. Since sixmeasuring units are arranged in periodic and ... Center,National Institute for Materials Science (NIMS), 1-2 -1 Sengen, Tsukuba, Ibaraki 30 5-0 047, JAPAN3 Robomachine Laboratory, FANLJC Ltd.,Oshino, Yamanashi 40 1-0 597, JAPAN4 Materials Fabrication...