An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 13 potx

... available in TO- type hermetic metal packages. How - ever, pressure to reduce manufacturing costs has led the company to adopt a stan - dard plastic dual-in-line (DIP) solution and establish first-level ... and electricity—voltage, current, and electrical resistance are dual to temperature, heat flux, and thermal resistance, respectively. A network of resistors is an...

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... 310–317. [10] Jerman, H., and J. D. Grade, “A Mechanically-Balanced, DRIE Rotary Actuator for a High-Power Tunable Laser,” Tech. Digest Solid-State Sensor and Actuator Workshop, Hil - ton Head Island, SC, ... it remains an enabling technology and a means to an end. It is impera - tive to understand the final application in order to assess the importance and applicabi...

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... 9000/QS 9000, 244 standards, 244–46 statistical methods in, 246–48 tests, 246 See also Failure(s); Quality control Resonators, 200–211 beam, 203–6 comb-drive, 201–3 coupled-resonator bandpass filter, ... technologies (SMT), 217 Switches, 211–14 cantilever, 212, 213 14 desirable parameters, 211 membrane, 212, 213 prototypes, 211 See also RF MEMS T Tape peel test, 253 TaqMan tagging, 175, 17...

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... student alike to an understanding of how MEMS are designed and fabricated. Dr. Maluf s book concentrates mostly on how to design and manufacture MEMS. This is to be expected of Dr. Maluf, who has ... of Morrison and Foerster. Evan Green and Carter Hand of New Focus were kind enough to review portions of the manuscript. Thanks go to our editor, Mark Walsh, for his unwa...

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... components for identify-friend-or-foe systems Head- and night-display systems Low-power, high-density mass data storage devices Embedded sensors and actuators for condition-based maintenance Integrated ... products. Ongoing efforts at many companies and laboratories throughout the world promise to deliver, in the not-too-distant future, new and sophisticated miniature components an...

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... meaning lithography, elec - troplating, and molding. both PSG and BPSG soften and flow to conform with the underlying surface topog - raphy and to improve step coverage. LTO films are used for passivation ... Zorman, C. A., and M. Mehregany, “Materials for Microelectromechanical Systems,” in The MEMS Handbook, Chapter 15, M. Gad-el-Hak (ed.), Boca Raton, FL: CRC Press,...

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... the anisotropic etching of cavities in {100}-oriented silicon: (a) cavities, self-limiting pyramidal and V-shaped pits, and thin membranes; and (b) etching from both sides of the wafer can yield ... uniform and controlled etch depths. Some applications, such as bulk-micromachined pressure sensors, demand a thin ( 5- to 2 0- m) silicon mem - brane with dimensional thickness...

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... regularly produced. The cured material is resis - tant to most chemicals and is thermally stable. SU-8 has been used to form microflu - idic channels and optical waveguides. It has also been used ... Bibliography Chang, C. Y., and S. M. Sze (eds.), ULSI Technology, New York: McGraw-Hill, 1996. Flamm, D. L., and G. K. Herb, “Plasma Etching Technology,” in Plasma Etching: A...

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... orientation-dependent etching of grooves, wafer bonding, and dicing [8], and (b) nozzle formed by DRIE and wafer bonding. (After: [9].) Mandrel Photoresist 1. Make mandrel, pattern photoresist Metal 2. ... 9.81 m/s 2 ), sensitivity (V/G), reso - lution (G), bandwidth (Hz), cross-axis sensitivity, and immunity to shock. The range and bandwidth required vary significantly depend...

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... )]°⋅sHz ; bandwidth (Hz); resolution (º/s); and dynamic range (dB), the lat- ter two being functions of noise and bandwidth. Short- and long-term drift of the output, known as bias drift, is another ... dioxide insulator TaAl resistor Al conductor 1. Grow oxide for insulator, sputter TaAl and Al, pattern Al and TaAl, pattern Al again to form resistor and conductive trace. 2. PEC...

Ngày tải lên: 10/08/2014, 01:22