An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 10 potx

... 1991, pp. 310 317. [10] Jerman, H., and J. D. Grade, “A Mechanically-Balanced, DRIE Rotary Actuator for a High-Power Tunable Laser,” Tech. Digest Solid-State Sensor and Actuator Workshop, Hil - ton ... it remains an enabling technology and a means to an end. It is impera - tive to understand the final application in order to assess the importance and applicability o...

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... available in TO- type hermetic metal packages. How - ever, pressure to reduce manufacturing costs has led the company to adopt a stan - dard plastic dual-in-line (DIP) solution and establish first-level ... and electricity—voltage, current, and electrical resistance are dual to temperature, heat flux, and thermal resistance, respectively. A network of resistors is an...

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... 9000/QS 9000, 244 standards, 244–46 statistical methods in, 246–48 tests, 246 See also Failure(s); Quality control Resonators, 200–211 beam, 203–6 comb-drive, 201–3 coupled-resonator bandpass filter, ... 208–11 microelectromechanical, 200–211 See also RF MEMS RF MEMS, 189–214 devices, 189 losses, 190 low-resistivity metals, 190 microelectromechanical resonators, 200–211 microelectromechani...

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... student alike to an understanding of how MEMS are designed and fabricated. Dr. Maluf s book concentrates mostly on how to design and manufacture MEMS. This is to be expected of Dr. Maluf, who has ... affecting the validity of any trade - mark or service mark. International Standard Book Number: 1-5 805 3-5 9 0-9 109 87654321 To our families Tanya, Ella, and Jad...

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... Vector algebra (using a dot product) shows that the angles between {100 } and { 110} planes are 45º or 90º, and the angles between {100 } and {111} planes are 54.7º or 125.3º. Similarly, {111} and ... components for identify-friend-or-foe systems Head- and night-display systems Low-power, high-density mass data storage devices Embedded sensors and actuators for condition-based mai...

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... {100 } Wafers and Doping Levels Below 10 18 cm -3 π // (10 -1 1 m 2 /N) π ⊥ (10 -1 1 m 2 /N) p-type 107 ––1 In < ;100 > direction –172 –66 In < 110& gt; direction n-type 102 –53 In < ;100 > ... meaning lithography, elec - troplating, and molding. both PSG and BPSG soften and flow to conform with the underlying surface topog - raphy and to imp...

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... mask a 0.707a 54.74° {100 } {111} {100 } {111} Self-limiting etches Membrane < ;100 > { 110} Figure 3.6 Illustration of the anisotropic etching of cavities in {100 }-oriented silicon: (a) cavities, self-limiting pyramidal and V-shaped pits, and thin membranes; and (b) etching ... Wet etchants in aqueous solution offer the advantage of low-cost batch fabrication—25 to 50 100 -...

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... Benecke, and P. Lange, “TMAHW Etchants for Silicon Micromachining,” Proc. 1991 Int. Conf. on Solid-State Sensors and Actuators, San Fran- cisco, CA, June 24–27, 1991, pp. 815–818. [9] Ammar, E. S., and ... regularly produced. The cured material is resis - tant to most chemicals and is thermally stable. SU-8 has been used to form microflu - idic channels and optical waveg...

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... 9.81 m/s 2 ), sensitivity (V/G), reso - lution (G), bandwidth (Hz), cross-axis sensitivity, and immunity to shock. The range and bandwidth required vary significantly depending on the application. Accelerometers ... bottom handle wafer. Silicon-fusion bonding of a p-type top wafer with an n-type epixatial layer encapsulates and seals the cavity. Electrochemical etching or standa...

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... )]°⋅sHz ; bandwidth (Hz); resolution (º/s); and dynamic range (dB), the lat- ter two being functions of noise and bandwidth. Short- and long-term drift of the output, known as bias drift, is another ... dynamic and full of motion. If sen - sors extend our faculties of sight, hearing, smell, and touch, then actuators must be the extension to our hands and fingers. They give u...

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