An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 10 potx
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 10 potx
... 1991,
pp. 310 317.
[10] Jerman, H., and J. D. Grade, “A Mechanically-Balanced, DRIE Rotary Actuator for a
High-Power Tunable Laser,” Tech. Digest Solid-State Sensor and Actuator Workshop, Hil
-
ton ... it remains an enabling technology and a means to an end. It is impera
-
tive to understand the final application in order to assess the importance and
applicability o...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 13 potx
... available in TO- type hermetic metal packages. How
-
ever, pressure to reduce manufacturing costs has led the company to adopt a stan
-
dard plastic dual-in-line (DIP) solution and establish first-level ... and electricity—voltage, current, and
electrical resistance are dual to temperature, heat flux, and thermal resistance,
respectively. A network of resistors is an...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 16 potx
... 9000/QS 9000, 244
standards, 244–46
statistical methods in, 246–48
tests, 246
See also Failure(s); Quality control
Resonators, 200–211
beam, 203–6
comb-drive, 201–3
coupled-resonator bandpass filter, ... 208–11
microelectromechanical, 200–211
See also RF MEMS
RF MEMS, 189–214
devices, 189
losses, 190
low-resistivity metals, 190
microelectromechanical resonators,
200–211
microelectromechani...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 1 doc
... student alike to an understanding of how MEMS are
designed and fabricated. Dr. Maluf s book concentrates mostly on how to design
and manufacture MEMS. This is to be expected of Dr. Maluf, who has ... affecting the validity of any trade
-
mark or service mark.
International Standard Book Number: 1-5 805 3-5 9 0-9
109 87654321
To our families
Tanya, Ella, and Jad...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 2 pptx
... Vector
algebra (using a dot product) shows that the angles between {100 } and { 110} planes
are 45º or 90º, and the angles between {100 } and {111} planes are 54.7º or 125.3º.
Similarly, {111} and ... components for identify-friend-or-foe
systems
Head- and night-display systems
Low-power, high-density mass data storage devices
Embedded sensors and actuators for condition-based mai...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 3 pps
... {100 }
Wafers and Doping Levels Below 10
18
cm
-3
π
//
(10
-1 1
m
2
/N)
π
⊥
(10
-1 1
m
2
/N)
p-type 107 ––1 In < ;100 > direction
–172 –66 In < 110& gt; direction
n-type 102 –53 In < ;100 > ... meaning lithography, elec
-
troplating, and molding.
both PSG and BPSG soften and flow to conform with the underlying surface topog
-
raphy and to imp...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 4 pptx
... mask
a
0.707a
54.74°
{100 }
{111}
{100 }
{111}
Self-limiting
etches
Membrane
< ;100 >
{ 110}
Figure 3.6 Illustration of the anisotropic etching of cavities in {100 }-oriented silicon: (a) cavities,
self-limiting pyramidal and V-shaped pits, and thin membranes; and (b) etching ... Wet etchants in aqueous solution offer the advantage of low-cost batch
fabrication—25 to 50 100 -...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 5 doc
... Benecke, and P. Lange, “TMAHW Etchants for Silicon
Micromachining,” Proc. 1991 Int. Conf. on Solid-State Sensors and Actuators, San Fran-
cisco, CA, June 24–27, 1991, pp. 815–818.
[9] Ammar, E. S., and ... regularly produced. The cured material is resis
-
tant to most chemicals and is thermally stable. SU-8 has been used to form microflu
-
idic channels and optical waveg...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 6 pptx
... 9.81 m/s
2
), sensitivity (V/G), reso
-
lution (G), bandwidth (Hz), cross-axis sensitivity, and immunity to shock. The
range and bandwidth required vary significantly depending on the application.
Accelerometers ... bottom handle wafer. Silicon-fusion bonding of a p-type top wafer with
an n-type epixatial layer encapsulates and seals the cavity. Electrochemical etching
or standa...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 7 pot
... )]°⋅sHz
; bandwidth (Hz); resolution (º/s); and dynamic range (dB), the lat-
ter two being functions of noise and bandwidth. Short- and long-term drift of the
output, known as bias drift, is another ... dynamic and full of motion. If sen
-
sors extend our faculties of sight, hearing, smell, and touch, then actuators must be
the extension to our hands and fingers. They give u...
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