... derive the next formulas for CF CF O 23 ,,ϑϑϑ: CF 2 CF 2 CF 3 F 6 O CF 22 2 2 CF 1,CF 2, CF 22 21,CF 1 CF 3 F 6 O 4 F 5 CF 7 O 23 3 2, CF 3 F 6 O O F 2 =/( ),=,=( )/( ),=( )/;sssssss ss ... enabling Micro Electronic and Mechanical Systems 190 twelve products of dissociation and recombination processes - F, F 2 , CF 2 , CF3, CF4, C 2 F6, O, O 2 , CO, CO 2 , COF, COF 2 are ... 11 2 FFF,kvMM+→ ++ (19) 133CF CF ( ),kss→ (20 ) 2 22 CF CF ( ),kss→ (21 ) 3 23 FCF () CF,kss+→ (22 ) 434FCF () CF,kss+→ (23 ) 533 26 CF CF ( ) C F ,kss+→ (24 )...