ChiTOTig 2: CAC PHlTOfNG PHAP THV'C NGHlfM
2.1.1. Phun xa nguon mgt chieu
Trong budng chan khdng, di mlu dugc dat đi difn vdi bia cd dang dia trdn. Sau khi hut chan khdng dat din ap suit --lÓ^mmHg, khi Ar dugc dua vao tdi ip suit cd 10'^ ^ lÓ^mmHg. Hieu dien thi mot chiiu dugc dat vao di mlu (+) va bia (-). Cic ion khi dugc gia tdc bdi dien trudng giira hai dien cue bin pha be mat bia va lam but ra cic
nguyin tu vat lifu cua biạ Cic nguyin tu bj phim xa chuyin dgng vi phia di mau va ling dgng hinh thinh mang nhu da md ti d trin. Ngoii vifc lim bat ra khdi cathode nhimg nguyin tu, cac ion duong khi bin phi cathode con lam bat ra ci mgt sd difn hi, ggi li difn tu thu d p . Cic difn tu thu d p niy lai dugc ting tdc vi phia anode, va cham vdi cic phan tu khi Ar trin dudng di vi ion hda chung thinh cic ion duong Ar . Cac ion duong niy lai dugc gia tdc vi phia cathodẹ.. Nhu v|y, gin cathode cd mft khoang khdng gian chua nhihig hat mang difn vdi mat dg cao, ggi la viing plasmạ Do d^c diim cd sy phat sing trong qua Oinh ion hda vi kit hgp nin qui trinh nay dugc ggi la qui Uinh phdng difn phit sang. Sy phdng diin phit sang dugc duy tri khi thi mgt chiiu cd gii trj cao ban difn thi ngudng. Vi cic difn eye phai din difn di duy tri đng
difn mgt chiiu, nin sy phiin x^ mgt chiiu chi dugc su dyng de phun x? cic v§t lifu din
difn nhu kim loai, hgp kim.
Anode High Voltage ^^ Vacuum pump Vacuum chamber <:«tfaode shield Citfaode (source matenal) "Âi^Hs. ArgOQ Inlet
Hinh 2.3. Sa do he phun xg ngudn mgt chiiu
Viing phat sang chua cac ion khi tich difn duong, cic difn tu va cic nguyin tir trung hda chua bi ion hda la vimg plasma, con vimg khdng phat sing d gin anode (gii đ de mau) dugc gpi la viing tdị Di sy phun xa cua cathode đng nhlt, khoang cich tir cathode den anode chi nen Idn han dp day viing tdi tu hai din bdn lln. Khoing cich nay ti le \di ap suat khị Neu ling ap suat khi di giam kich thudc viing tdi thi tdc dp
ling dgng cham hon va đng ning ciia cac nguyin tu phiin xa se giim do nguyen td phun x^ bj tin xa nhieu lln hon trudc khi din dugc di mlụTdc dg ling dpng tdi iru d
khoing lOOmTorr.