PHUONG PHAP BOG BAY CHUM TIA DIEN j(S
3.3.Khao sat phd truyen qua va phan xa
Phd truyin qua va phd phan xa dugc do tren he quang pho ke JASCO-V 570/UV-VIS-NIR CO d Trudng DHCN, DHQGHN. Tuy thudc vung phd khao sat, mdt trong hai ngudn sang dugc diing la den co phd lien tuc vdi budc song trong viing kha kien hay trong vimg hdng ngoaị
Chum sang vdi pho lien tuc tir den dugc phan xa tren guong M tdi thiet bi loc sic. Sau khi qua thiet bi Igc sic chiim sang tdi each tir. Thiei bi Igc sic F va each tir
G tao ra tia vai do don sic nhat dinh. Tia nay phan xa tdi guong ban ma, mdt phan
truyin qua guong, phan con lai phan xa dugc dua dén miu chuan R va miu do S. Trong phep do do truyin qua, mdt tia truyin qua miu rdi tdi detector, chiim kia truyin qua miu chuin (dé thuy tinh chua co mang) rdi tdi detector. Cac detector D la ciing mdt loai photodiode Silic. Trong phep do do phan xa, cac chum tia dugc phan xa tuong iing tren miu va tren miu chuan. Trong trudng hgp nay miu chuan dugc diing la mdt guong co đ phan xa cao (guong ma nhdm hoac ma vang). Cac tin hieu quang tir hai chum tia dugc bien đi thanh tin hieu dien nhd cac detector va
dugc so sanh di cho do truyin qua hoac do phan xa tuong icng vdi phep do tai mdi
budc song trong viing pho khao sat nhd may tfnh. 3.4. Tinh chat dien
• Do dien trd be mat
Tren bl mat ciia mang, tao tiep xuc ohmic bing each bay hoi mdt ldp vang mdng lam thanh hai dai dien cue song song. Mang co dien tich mdt hinh vudng, canh d. Vdi t la chilu day ciia mang, dien trd suit ciia mang la p, thi dien trd bl mat RQ ciia mang dugc xac dinh theo cdng thiic :
Rr =pxl/S = p/t (3.2) Dien trd suit p ciia mang dugc xac dinh khi biet dien trd bl mat R va chilu
day t ciia mang bing cdng thiic:
P = RQX t (3.3)
Gia tri dien trd R- theo nhiet do ciia mang dugc xac dinh nhd he do gdm thiet bi dilu nhiet hoac mot bép hinh tru khep kin on nhiet (tu tao) de chiia miu, đng ho KIETHLEY va may tinh COMPAQ. Chieu day t ciia mang mdng do bing thiet bi Ellipsometer va phuong phap SEM d tren.
Nhu tren da trinh bay, mang mdng nhiet sic VO2 la đi tugng de nghien ciiu ly thuyet va iing dung rat co triln vgng. Tuy nhien, viec ché tao mang VO2 don pha lai la van de cdng nghe het siic kho khan, den miic co thi noi giai phap cdng nghe nay mang tinh bi quyei doi hdi su tim toi va nghien ciiu rat cdng phụ
Di dam bao do tin cay ciia cac sd lieu thuc nghiem, mot sd phep do tire
thi can dugc tien hanh tren cac he thiet bi ghep ndi hai hay nhilu may hoat đng đng thdị
TAI Ll£U THAM KHAO
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