... compositions of thin films were analyzed by SIMS Žsecondary ion mass spectroscopy Results and discussion The spin coated thin films were preheated at 40 08C in wet air and fired at 40 08C–5508C under ... of 40 08C–5508C In contrast, the gas sensitivity to 1000 ppm H greatly depended on the firing temperature The sensitivity became the maximum on the film fired at 45 08C The thinfilm fired at 45 08C ... Actuators B 67 (2000) 270–2 74 272 Table Relative resistance of the thinfilm fired in different atmosphere Žmeasured at 2008C Number Firing atmosphere Kind of thinfilm Kind of measuring gas Relative...
... (1999) 47 8 48 5 [45 ] P Montmeat, R Lalauze, J.-P Viricelle, G Tournier, C Pijolat, Model of the thickness effect of SnO2 thick film on the detection properties, Sens Actuator B 103 (20 04) 84 90 [46 ] ... Carbon 41 (2003) 247 1– 247 6 [43 ] K Seo, K.A Park, C Kim, S Han, B Kim, Y.H Lee, Chirality- and diameter-dependent reactivity of NO2 on carbon nanotube walls, J Am Chem Soc 127 (2005) 157 24 15729 ... dioxide coated carbon nanotubes, Thin Solid Films 49 7 (2006) 355–360 [21] L Zhao, L Gao, Filling of multi-walled carbon nanotubes with tin(IV) oxide, Carbon 42 (20 04) 3251–3272 [22] B.-Y Wei, M.-C...
... properties of WO3 semiconductor material, Solid State Electron 45 (2001) 639– 644 [10] V.V Kissine, V.V Sysoev, S.A Voroshilov, Conductivity of SnO2 thin films in presence of surface adsorbed species, Sens ... O2 , O2 − , O or O− at 47 3 K and O or O− at 573 and 673 K) and ionized covering rate θ − (due to species O2 − or O− at 47 3 K and O− at 573 and 673 K) are given in Fig 4a and b, respectively We ... 1–16 [4] S.Z Karazhanov, Y Zhang, A Mascarenhas, S Deb, L.W Wang, Oxygen vacancies in cubic WO3 studied by first-principles pseudopotential calculation, Solid State Ionics 165 (2003) 43 49 [5]...
... 0.103 0.0 0.0 0 .46 3 0.303 0 .43 7 0.332 0.3 84 0 .44 9 Fig AFM surface morphology of WO3 thin films without interruption (a), one (b) and three (c) interruptions of the deposition process 3 .4 Discussion ... and 4, the sputtering process was interrupted once, two and three times, respectively A shutter was used to interrupt the deposition process The total deposition time was 40 , 40 .5, 41 and 41 .5 ... sensors, Sens Actuators 12 (1987) 42 5 44 0 [2] G Sberveglieri, S Groppelli, P Nell, V Lantto, H Torvela, P Romppainen, S Lepp¨ vuori, Response to nitric oxide of thin and thick a SnO2 films containing...
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... of WO3 thin films Thin films of WO3 could be derived from the WO3 ·2H2 O sol added with PEG (2 wt.%) by one time spin coating and calcination at 300 ◦ C for h Fig shows SEM images of the thin films ... dry air for WO3 thin film devices, derived from WO3 ·2H2 O sols different in PEG content and calcined at 300 ◦ C (a) and 40 0 ◦ C (b) PEG content in mass%: (1) 2, (2) 7, (3) 15 and (4) 20 of the thick ... using a thick film of gold-loaded tungsten oxide, Chem Lett (19 94) 335 [4] G Sberveglieri, L Depero, S Groppelli, P Nelli, WO3 sputtered thin film for NOx monitoring, Sens Actuators B 26/27 (1995)...
... He, Thin Solid Films 3 04 (1997) 13 [7] T Mochida, K Kikuchi, T Kondo, H Ueno, Y Matsuura, Sensors and Actuators B 24/ 25 (1995) 43 3 [8] S Manorama, G Sarala Devi, V.J Rao, Appl Phys Lett 64 (19 94) ... survey scan spectrum of the sample is shown in Fig 2(a) The peaks of tungsten 4p1/2 , 4p3/2 , 4d3/2 , 4d5/2 , 4f5/2 , 4f7/2 and oxygen 1s (O 1s) can be detected in the spectrum The photoelectron ... 10 (1993) 229 [4] G Sberveglieri, P Benussi, G Coccoli, S Groppelli, P Nelli, Thin Solid Films 186 (1990) 349 [5] L Bruno, C Pijolat, R Lalauze, Sensors and Actuators B 18/19 (19 94) 195 [6] C.H...
... data analysis: measured versus calculated quantities, Thin Solid Films 3133 14 (1998) 33 [6] R Swanepoel, Ellipsometry data for some thinfilm samples, J Phys E: Sci Instrum., 16 (1983) 1215 [7] ... single film on the surface By regularly increasing complexity, we have constructed more complicated model, for instant, increasing the amount of possible films or the possible elements exist in film ... coefficient k on wavelength of ZnO film, illustrated in Fig 10 The ZnO film refractive indices in the wavelength range of 500 nm – 1100 nm were found to be from 1. 94 to 1.85 The extinction coefficient...