Microfluidic sensor based on aln vertical saw structure

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Ngày đăng: 20/07/2021, 11:26

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Mục lục

2.2.1 Shear Horizontal Surface Acoustic Waves (SH-SAWs)

2.2.2 Rayleigh Surface Acoustic Waves (R-SAWs)

2.3.2 Standing and Linear Motion Medium

2.4 Equivalent Circuit Model of SAW Devices

3.3 FEM Simulation for AlN-based Microfluidic Sensor

Chapter 4 Results and Discussion

Chapter 5 Conclusions and Future Work

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