Microfluidic sensor based on aln vertical saw structure

TABLE OF CONTENT

GLOSSARY

LISTS OF TABLES

LISTS OF FIGURES

Chapter 1 Introduction

1.1 Motivation and Objectives

1.2 Organization of Thesis

Chapter 2 Theoretical nalysis of the AIN -based Microfluidic Sensor

2.1 Introduction

2.2 Surface Acoustic Waves

2.2.1 Shear Horizontal Surface Acoustic Waves (SH-SAWs)

2.2.2 Rayleigh Surface Acoustic Waves (R-SAWs)

2.3 Propagation of Acoustic Waves in contact with a Liquid Medium

2.3.1 Boundary Conditions

2.3.2 Standing and Linear Motion Medium

2.3.3 Moving Liquid Medium

2.4 Equivalent Circuit Model of SAW Devices

2.4.1 Model Implementation

2.4.2 Frequency Response

2.4.3 Attenuation

2.5 Conclusion

Chapter 3 3-D Design of AIN-based Microfluidic Sensor

3.1 General Description

3.2 Design Principles

3.3 FEM Simulation for AlN-based Microfluidic Sensor

3.3.1 General Configuration

3.3.2 Lithium Niobate

3.3.3 Aluminium Nitride

3.4 Masks designed

Chapter 4 Results and Discussion

4.1 General Description

4.2 Density and viscosity

4.2.1 Lithium Niobate Crystal

4.2.2 Aluminium Nitride Crystal

4.3 Sensing Liquid Status

4.3.1 Constant Velocity

4.3.2 Non-constant Velocity

4.4 Conclusion

Chapter 5 Conclusions and Future Work

5.1 Conclusions

5.2 Future work

Reference

Appendix