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[...]... Oregon H.T Vierhaus Brandenburg University of Technology at Cottbus Cottbus, Germany Vojin Oklobdzija /Digital Design and Fabrication 0200_C000 Final Proof page xiv 19.10.2007 11:16pm Compositor Name: TSuresh Vojin Oklobdzija /Digital Design and Fabrication 0200_C000 Final Proof page xv 19.10.2007 11:16pm Compositor Name: TSuresh Contents SECTION I Fabrication and Technology 1 Trends and Projections for... Computer and Integrated Circuit Technology Processors Memory and Storage—The Memory Hierarchy Computer Systems—Small to Large Summary I-1 Vojin Oklobdzija /Digital Design and Fabrication 0200_S001 Final Proof page 2 26.9.2007 6:25pm Compositor Name: VBalamugundan Vojin Oklobdzija /Digital Design and Fabrication 0200_C001 Final Proof page 1 26.9.2007 5:05pm Compositor Name: VBalamugundan 1 Trends and Projections... 22-1 23 Scan Testing 24 Computer-Aided Analysis and Forecast of Integrated Circuit Yield ´ ´ Zoran Stamenkovic and N Stojadinovic 24-1 Chouki Aktouf 23-1 Index I-1 Vojin Oklobdzija /Digital Design and Fabrication 0200_C000 Final Proof page xviii 19.10.2007 11:17pm Compositor Name: TSuresh Vojin Oklobdzija /Digital Design and Fabrication 0200_S001 Final Proof page 1 26.9.2007... SECTION II Tadahiro Kuroda 3-1 Memory and Storage 5 Semiconductor Memory Circuits 6 Semiconductor Storage Devices in Computing and Consumer Applications Farzin Michael Jahed 6-1 SECTION III 7 Eugene John 5-1 Design Techniques Timing and Clocking 7.1 Design of High-Speed CMOS PLLs and DLLs John George Maneatis 7-1 xv Vojin Oklobdzija /Digital Design and Fabrication 0200_C000 Final Proof... [29–31,34–37] and HfO2 [28,32,34,36,38–40] become popular because their dielectric constant is relatively high and because ZrO2 and HfO2 were believed to be stable at the Si interface However, in reality, formation and growth of interfacial layer made of silicate (ZrSixOy, Vojin Oklobdzija /Digital Design and Fabrication 0200_C001 Final Proof page 14 26.9.2007 5:06pm Compositor Name: VBalamugundan 1-14 Digital Design. .. severe In order for a MOSFET Vojin Oklobdzija /Digital Design and Fabrication 0200_C001 Final Proof page 4 26.9.2007 5:05pm Compositor Name: VBalamugundan 1-4 FIGURE 1.3 Digital Design and Fabrication 1 kbit DRAM (TOSHIBA) to work as a component of an LSI, the capability of switching-off or the suppression of the short-channel effects is the first priority in the designing of the MOSFETs In other words, the... MOSFETs operate well by using simulation [6] In 1993 and 1995, epitaxial channel MOSFETs with buried [7] and surface [8] channels, respectively, were fabricated and high drain Vojin Oklobdzija /Digital Design and Fabrication 0200_C001 Final Proof page 9 26.9.2007 5:06pm Compositor Name: VBalamugundan Trends and Projections for the Future of Scaling and Future Integration Trends FIGURE 1.12 1-9 Cross-sectional... FIGURE 1.13 Epitaxial channel [9] NTRS’94, gate length was expected to stay at 180 nm Vojin Oklobdzija /Digital Design and Fabrication 0200_C001 Final Proof page 10 26.9.2007 5:06pm Compositor Name: VBalamugundan 1-10 Digital Design and Fabrication S4D MOSFETs June 1995 S4D (Silicided Silicon-Sidewall Source and Drain) Structure Low resistance with ultra-shallow junction Silicided Si-Sidewalll Si TiSi SiN... created by high positive bias applied on a 2nd gate electrode, which is placed to cover the 8-nm, 1st gate electrode and S=D extension area Vojin Oklobdzija /Digital Design and Fabrication 0200_C001 Final Proof page 12 26.9.2007 5:06pm Compositor Name: VBalamugundan 1-12 Digital Design and Fabrication Lg (mm) 8 6 2 1 0.1 0.022 100 Tox (nm) IBM’99 (SOI) 10 Intel’99 : outside of ITRS Toshiba’94 spec Toshiba’93... William Athas 20-1 Vojin Oklobdzija /Digital Design and Fabrication 0200_C000 Final Proof page xvii 19.10.2007 11:17pm Compositor Name: TSuresh xvii SECTION V Testing and Design for Testability 21 System-on-Chip (SoC) Testing: Current Practices and Challenges for Tomorrow R Chandramouli 21-1 22 Test Technology for Sequential Circuits H.T Vierhaus ´ and Zoran Stamenkovic 22-1 23 . The Computer Engineering Handbook Second Edition Edited by Vojin G. Oklobdzija Digital Design and Fabrication Digital Systems and Applications Vojin Oklobdzija /Digital Design and Fabrication 0200_C000. 19.10.2007 11:16pm Compositor Name: TSuresh DIGITAL DESIGN AND FABRICATION Edited by Vojin G. Oklobdzija University of Texas Vojin Oklobdzija /Digital Design and Fabrication 0200_C000 Final Proof page. Oregon Vojin Oklobdzija /Digital Design and Fabrication 0200_C000 Final Proof page ix 19.10.2007 11:16pm Compositor Name: TSuresh ix Vojin Oklobdzija /Digital Design and Fabrication 0200_C000 Final