NANOINDENTATION IN MATERIALS SCIENCE Edited by Jiří Němeček Nanoindentation in Materials Science http://dx.doi.org/10.5772/2829 Edited by Jiří Němeček Contributors Qing Peng, Li Ma, Lyle Levine, Ron Dixson, Douglas Smith, David Bahr, Jaroslav Menčík, Jiří Němeček, L. Zhang, T. Ohmura , K. Tsuzaki, Bruno A. Latella, Michael V. Swain, Michel Ignat, Ksenia Shcherbakova, Akiko Hatakeyama, Yosuke Amemiya, Nobuo Shimamoto, Bruno B. Lopes, Rita C.C. Rangel, César A. Antonio, Steven F. Durrant, Nilson C. Cruz, Elidiane C. Rangel, Mamadou Diobet, Vasarla Nagendra Sekhar, Ondřej Jiroušek, Hongwei Zhao, Hu Huang, Zunqiang Fan, Zhaojun Yang, Zhichao Ma Published by InTech Janeza Trdine 9, 51000 Rijeka, Croatia Copyright © 2012 InTech All chapters are Open Access distributed under the Creative Commons Attribution 3.0 license, which allows users to download, copy and build upon published articles even for commercial purposes, as long as the author and publisher are properly credited, which ensures maximum dissemination and a wider impact of our publications. After this work has been published by InTech, authors have the right to republish it, in whole or part, in any publication of which they are the author, and to make other personal use of the work. Any republication, referencing or personal use of the work must explicitly identify the original source. Notice Statements and opinions expressed in the chapters are these of the individual contributors and not necessarily those of the editors or publisher. No responsibility is accepted for the accuracy of information contained in the published chapters. The publisher assumes no responsibility for any damage or injury to persons or property arising out of the use of any materials, instructions, methods or ideas contained in the book. Publishing Process Manager Oliver Kurelic Typesetting InTech Prepress, Novi Sad Cover InTech Design Team First published October, 2012 Printed in Croatia A free online edition of this book is available at www.intechopen.com Additional hard copies can be obtained from orders@intechopen.com Nanoindentation in Materials Science, Edited by Jiří Němeček p. cm. ISBN 978-953-51-0802-3 Contents Preface IX Section 1 Testing Methodologies, Principles, Sources of Errors and Uncertainties 1 Chapter 1 First-Principles Quantum Simulations 3 Qing Peng Chapter 2 Effect of the Spherical Indenter Tip Assumption on the Initial Plastic Yield Stress 25 Li Ma, Lyle Levine, Ron Dixson, Douglas Smith and David Bahr Chapter 3 Uncertainties and Errors in Nanoindentation 53 Jaroslav Menčík Section 2 Nanomechanical Performance of Composite Materials 87 Chapter 4 Nanoindentation Based Analysis of Heterogeneous Structural Materials 89 Jiří Němeček Chapter 5 Application of Nanoindentation Technique in Martensitic Structures 109 L. Zhang, T. Ohmura and K. Tsuzaki Section 3 Nanoindentation on Thin Layers and Films 131 Chapter 6 Indentation and Fracture of Hybrid Sol-Gel Silica Films 133 Bruno A. Latella, Michael V. Swain and Michel Ignat Chapter 7 Nanoindentation as a Tool to Clarify the Mechanism Causing Variable Stiffness of a Silane Layer on Diamond 161 Ksenia Shcherbakova, Akiko Hatakeyama, Yosuke Amemiya and Nobuo Shimamoto VI Contents Chapter 8 Mechanical and Tribological Properties of Plasma Deposited a-C:H:Si:O Films 179 Bruno B. Lopes, Rita C.C. Rangel, César A. Antonio, Steven F. Durrant, Nilson C. Cruz, Elidiane C. Rangel Section 4 Characterization of Microdevices and Integrated Circuits 203 Chapter 9 Characterization of Microdevices by Nanoindentation 205 Mamadou Diobet Chapter 10 Mechanical Characterization of Black Diamond (Low-k) Structures for 3D Integrated Circuit and Packaging Applications 229 Vasarla Nagendra Sekhar Section 5 Nanoindentation on Biological Materials 257 Chapter 11 Nanoindentation of Human Trabecular Bone – Tissue Mechanical Properties Compared to Standard Engineering Test Methods 259 Ondřej Jiroušek Section 6 Design of New Nanoindentation Devices 285 Chapter 12 Design, Analysis and Experiments of a Novel in situ SEM Indentation Device 287 Hongwei Zhao, Hu Huang, Zunqiang Fan, Zhaojun Yang and Zhichao Ma Preface The book "Nanoindentation in Materials Science" is dedicated to the widespread audience ranging from students to scientists and industrial researchers to help them with orientation in a variety of up-to-date topics related to the field of nanoindentation. Nanoindentation, as a universal experimental technique for measuring mechanical properties in small volumes, has attracted strong attention between the material scientists. Nowadays, nanoindentation that was formerly dedicated to pure homogeneous materials has infiltrated to quite distant areas (e.g. textile composites, cement industry, electronics, biomechanics and others). Everyday, it helps researches to study intrinsic properties of low level material units. The variety of potential topics is reflected also in this book where multiple phenomena are discussed. The book contains twelve chapters divided into six sections. Each chapter gives the reader basic overview of the solved problem and relevant information about the topic. The subject is elaborated in details and contains original author's ideas and new solutions. The first section, which is devoted to testing methodologies, principles, sources of errors and uncertainties, contains a contribution about the first principles of quantum simulations, a chapter on theoretical aspects, basic deformation mechanisms and evaluation of results in spherical indentation and a valuable chapter about the critical aspects in data evaluation, limitations in measurements and extensive review of error sources. The second section deals with nanomechanical properties of composite materials. Their heterogeneity is in focus and different approaches how to solve this problem is proposed in the contributions that find applications in structural materials (e.g. cement, gypsum and metals). The third section contains contributions from the area of thin layers and films. Novel hybrid sol-gel silica films are investigated and a biomolecular layer (aminosilane) formed on diamond surfaces with a potential use in nanomachines is studied. The section is complemented by a contribution about plasma sprayed films. X Preface The fourth section solves problems in characterization of microdevices (e.g. MEMS) and integrated circuits. The fifth section is devoted to nanoindentation applied in the study of human trabecular bone linking –up the micro and meso-material scales. Finally, the sixth section deals with the development of a novel in-situ device, its design, performance and calibration aspects. Hopefully, the book will be inspiring source of information for the readers which will help them to improve their own research in their fields of study. Jiří Němeček Faculty of Civil Engineering, Czech Technical University in Prague, Czech Republic . NANOINDENTATION IN MATERIALS SCIENCE Edited by Jiří Němeček Nanoindentation in Materials Science http://dx.doi.org/10.5772/2829 Edited by Jiří Němeček Contributors Qing. on 4 Nanoindentation in Materials Science First-Principles Quantum Simulations of Nanoindentation 3 the coordinates R of the surrounding repatoms. Rather than depending on the positions of neighboring atoms,. should 5 First-Principles Quantum Simulations of Nanoindentation 4 Nanoindentation include the interaction energy between the nonlocal atoms and neighboring local atoms. In the original QC framework,