Springer handbook of nanotechnology - Part 1 potx

[...]... 1 Springer Handbook of Nanotechnology B Bhushan • ! Springer 2004 10 86 10 87 11 02 11 06 XXVII XXVIII Contents 37 MEMS Packaging and Thermal Issues in Reliability 37 .1 MEMS Packaging 37.2 Hermetic and Vacuum Packaging and Applications 37.3 Thermal Issues and Packaging Reliability 37.4 Future Trends and Summary References 11 11 111 1 11 16 11 22 11 28 11 29 Part. .. 11 53 11 55 11 71 118 9 Springer Handbook of Nanotechnology B Bhushan • ! Springer 2004 1 XXIX List of Tables Part A Nanostructures, Micro/Nanofabrication, and Micro/Nanodevices 3 Introduction to Carbon Nanotubes Table 3 .1 Table 3.2 Table 3.3 Table 3.4 Table 3.5 4 10 1 77 84 Typical dry etch chemistries Surface micromachined sacrificial/structural combinations 15 7 16 5 Materials Aspects of Micro-... 10 23 10 23 10 24 10 34 10 37 35 Thermo- and Electromechanics of Thin-Film Microstructures 35 .1 Thermomechanics of Multilayer Thin-Film Microstructures 35.2 Electromechanics of Thin-Film Microstructures 35.3 Summary and Mention of Topics not Covered References 10 39 10 41 10 61 1078 10 78 36 High Volume Manufacturing and Field Stability of MEMS Products 10 83 36 .1 Manufacturing... 285 288 307 315 317 Springer Handbook of Nanotechnology B Bhushan • ! Springer 2004 1 Contents Part B Scanning Probe Microscopy 11 Scanning Probe Microscopy – Principle of Operation, 11 .1 Scanning Tunneling Microscope 11 .2 Atomic Force Microscope 11 .3 AFM Instrumentation and Analyses References 325 327 3 31 347 364 12 Probes in Scanning Microscopies 12 .1 Atomic Force... Implication 38 Social and Ethical Implications of Nanotechnology 38 .1 Applications and Societal Impacts 38.2 Technological Convergence 38.3 Major Socio-technical Trends 38.4 Sources of Ethical Behavior 38.5 Public Opinion 38.6 A Research Agenda References 11 35 11 36 11 39 11 41 114 3 11 45 11 48 11 49 Acknowledgements About the Authors... 3-2 -1 Sakado, Takatsu-ku, Kawasaki-shi 21 3-0 012 Kanagawa, Japan e-mail: ryo@net.ksp.or.jp André Schirmeisen University of Münster Institute of Physics Whilhem-Klemm-Straße 10 4 814 9 Münster, Germany e-mail: schira@uni-muenster.de 1 Anisoara Socoliuc University of Basel Institute of Physics Klingelbergstraße 82 4056 Basel, Switzerland e-mail: A.Socoliuc@unibas.ch Yasuhiro Sugawara Osaka University Department... Techniques MEMS Fabrication Techniques Springer Handbook of Nanotechnology B Bhushan • ! Springer 2004 9 10 14 22 35 36 39 40 45 59 63 68 73 86 99 10 0 11 0 13 1 13 8 13 8 14 7 14 8 15 9 XXII Contents 5.3 Nanofabrication Techniques References 6 Stamping Techniques for Micro and Nanofabrication: Methods and Applications 6 .1 High Resolution Stamps 6.2 Microcontact... Columbus, OH 43 21 0 -1 002, USA e-mail: Lee@bme.ohio-state.edu Yunfeng Li University of California at Berkeley Department of Mechanical Engineering 512 1 Etcheverry Hall Berkeley, CA 9472 0 -1 740, USA e-mail: yunfeng@me.Berkeley.edu Liwei Lin University of California at Berkeley Mechanical Engineering Department 512 6 Etcheverry Berkeley, CA 9472 0 -1 740, USA e-mail: lwlin@me.berkeley.edu Yu-Ming Lin Massachusetts... 650 Harry Road San Jose, CA 9 512 0, USA e-mail: frommer@Almaden.ibm.com 1 Springer Handbook of Nanotechnology B Bhushan • ! Springer 2004 Jason H Hafner Rice University Department of Physics & Astronomy PO BOX 18 92 Houston, TX 7725 1- 1 892, USA e-mail: hafner@rice.edu Stefan Hengsberger University of Applied Science of Fribourg Bd de Pérolles 17 05 Fribourg, Switzerland e-mail: stefan.hengsberger@eif.ch... Microscopy – Principle of Operation, Instrumentation, and Probes Table 11 .1 Table 11 .2 Table 11 .3 Table 11 .4 Table 11 .5 1 Comparison of Various Conventional Microscopes with SPMs Relevant properties of materials used for cantilevers Measured vertical spring constants and natural frequencies of triangular (V-shaped) cantilevers made of PECVD Si3 N4 Vertical and torsional spring constants of rectangular cantilevers . and index ISBN 3-5 4 0-0 12 1 8-4 (alk. paper) 1. Nanotechnology Handbooks, manuals, etc. I. Bhushan, Bharat; 19 4 9- T174.7S67 2003 620  .5 dc22 2003064953 ISBN 3-5 4 0-0 12 1 8-4 Spinger-Verlag Berlin. Handbook of Nanotechnology B. Bhushan • ! Springer 2004 1 XII Springer Handbook of Nanotechnology B. Bhushan • ! Springer 2004 1 XIII List of Authors Chong H. Ahn University of Cincinnati Department. in the field. Springer Handbook of Nanotechnology B. Bhushan • ! Springer 2004 1 VIII Springer Handbook of Nanotechnology B. Bhushan • ! Springer 2004 1 IX Preface On December 29, 19 59 at the California