MEMS Mechanical Sensors stephen beeby ppt

[...]... 1.3 Mechanical Transducers The market for micromachined mechanical transducers has, in the past, had the largest slice of the pie of the overall MEMS market This is likely to be the case in the immediate future as well The main emphasis of this text is on mechanical sensors, including pressure, force, acceleration, torque, inertial, and flow sensors Various types of actuation mechanism, relevant to MEMS, ... pressure sensors (Chapter 6), force and torque sensors (Chapter 7), inertial sensors (Chapter 8), and flow sensors (Chapter 9) These devices use many of the principles and techniques described in the earlier stages of the book Acknowledgments We authors express our thanks to all the contributing authors of this book They are all either present or former colleagues with whom we have worked on a variety of MEMS. .. United States, Asia, Europe, and Canada); SPIE hold many symposia on MEMS at worldwide locations In addition, there are several journals that cover the field of microsensors and sensor technologies, including: • • • • • • • • • • • Sensors and Actuators (A-Physical, B-Chemical); IEEE/ASME Journal of Microelectromechanical Systems (JMEMS); Journal of Micromechanics and Microengineering; Measurement,... These size limits turned out to be slightly too large and the motor was actually made using conventional mechanical engineering methods that did not require any new technological developments 1.2 What Are MEMS? MEMS means different things to different people The acronym MEMS stands for microelectromechanical systems and was coined in the United States in the late 1980s Around the same time the Europeans... micromachined mechanical sensors It also discusses ways to minimize unwanted interactions between the device and its packaging Chapter 5 presents some of the fundamental principles of mechanical transduction This chapter is largely intended for readers who might not have a background in mechanical engineering The remaining four chapters of the book are dedicated to describing specific mechanical microengineered... Steve Beeby Graham Ensell Michael Kraft Neil White Southampton, United Kingdom April 2004 CHAPTER 1 Introduction 1.1 Motivation for the Book As we move into the third millennium, the number of microsensors evident in everyday life continues to increase From automotive manifold pressure and air bag sensors to biomedical analysis, the range and variety are vast It is interesting to note that pressure sensors. .. studied for many years and are well understood and thoroughly documented Silicon also possesses many desirable mechanical properties that make it an excellent choice for many types of mechanical sensor Today there are many companies working in the field of microelectromechanical systems (MEMS) A quick search on the Internet in July 2003 revealed several hundred in the United States, Europe, and the... responds to the electrical signals generated within the circuit Both the sensor and the actuator could be MEMS devices in their own right For the purpose of this book, MEMS is an appropriate term as it specifically relates to mechanical (micro) devices and also includes wider areas such as chemical sensors, microoptical systems, and microanalysis systems There is also a wide variety of usage of terms... Transducers—International Conference on Solid-State Sensors and Actuators (held biennially and rotating location between Asia, North America, and Europe); Eurosensors (held annually in Europe); IEEE Sensors Conference (first held in 2002, annually United States and Canada); Micro Mechanics Europe—MME (held annually in Europe); 1 2 Introduction • • • • • IEEE International MEMS Conference (rotates annually between... of actuation mechanism, relevant to MEMS, will also be addressed together with examples of the fundamental techniques used for mechanical sensors The main methods of sensing mechanical measurands have been around for many years and are therefore directly applicable to microsensors There is, however, a significant effect that must be accounted for when considering mesoscale devices (i.e., those that . alt="" MEMS Mechanical Sensors For a listing of recent titles in the Artech House Microelectromechanical Systems (MEMS) Series, turn to the back of this book. MEMS Mechanical Sensors Stephen Beeby Graham. Publication Data Beeby, Stephen. MEMS mechanical sensors. — (Artech House MEMS library) 1. Microelectricalmechanical systems—Design and construction 2. Transducers I. Beeby, Stephen 621.3’81 ISBN. 129 6.5 MEMS Technology Pressure Sensors 130 6.5.1 Micromachined Silicon Diaphragms 130 6.5.2 Piezoresistive Pressure Sensors 132 6.5.3 Capacitive Pressure Sensors 137 6.5.4 Resonant Pressure Sensors