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Mục lục
Thin Films - A Historical Perspective
Chapter 1: A Review of Materials Science
Chapter 2: Vacuum Science and Technology
2.1. Kinetic Theory of Gases
2.2. Gas Transport and Pumping
2.3. Vacuum Pumps and Systems
Chapter 3: Physical Vapor Deposition
3.2. The Physics and Chemistry of Evaporation
3.3. Film Thickness Uniformity and Purity
3.4. Evaporation Hardware and Techniques
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