Encyclopedia of Materials Characterization pdf

ENCYCLOPEDIA OF MATERIALS CHARACTERIZATION C. Richard Brundle Charles A. Evans, Jr. Shaun Wilson a MAT E R I A LS CHARACTER SERIES SURFACES, INTERFACES, THIN FILMS + Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com ENCYCLOPEDIA OF MATERIALS CHARACTERIZATION Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com MATERIALS CHARACTERIZATION SERIES Surfaces, Interfaces, Thin Films Series Editors: C. Richard Brundle and Charles A. Evans, Jr. Series Titles Encyclopedia of Materiah Characterization, C. Richard Brundle, Characterization of Mekth and Alloys, Paul. H. Holloway and P. N. Characterization of Ceramics, Ronald E. Loehman Characterimtion of Pobmers, Ned J. Chou, Stephen P. Kowalczyk, Characterization in Silicon Processing, Yale Strausser Characterization in Compound Semiconductor Processing, Yale Strausser Characterization of Integraed Circuit Packaging Materiah, Thomas M. Moore and Robert G. McKenna Characterization of Cadytic Materiah, Israel E. Wachs Characterization of Composite Materiah, Hatsuo Ishida Characterization of Optical Materiah, Gregory J. Exarhos Characterization of Tribological Materiah, William A. Glaeser Characterization of Organic Thin Films, Abraham Ulman Charles k Evans, Jr., and Shaun Wilson Vaidyanathan Ravi Sard, and Ho-Ming Tong Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com ENCYCLOPEDIA OF MLATERIALS CHARACTERIZATION Surfaces, Interfaces, Thin Films EDITORS C Ricbard Brundle Charles A. Evans, Jr. Sbaun Wihon MANAGING EDITOR Lee E. Fitzpatrick BUTTERWORTH-HEINEMANN Boston London Oxford Singapore Sydney Toronto Wellington MANNING Greenwich Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com This book was acquired, developed, and produced by Manning Publications Co. Copyright Q 1992 by Butxetworch-Heinemann, a division of Reed Publishing CUSA) Inc Au rights rad No parc of this publicarion may be reproduced, scored in a retried system, or transmitted, in any form or by means. electronic, mechanical, photocopying, or orherwise, without prior written permission of the publisher. Recognizing the importance of preserving what has been written, it is the policy of Butterworth-Heinemann and of Manning to have the books they publish printed on acid-free paper, and we exert our best &m to that end. Library of Congress Cataloging-in-Publication Data Brundle, C. R. Encyclopedia of materials characterization: surfaces, interfaces, thin films/C. Richard Brundle, Charles A. Evans, Jr., Sham Wilson. p. un (Materials characterization series) Indudes bibliographical refrrenoa and index. ISBN CL7506-9168-9 1. Surfaces (Tedmoology)-Tes~ I. Evans, Charlak 11. Wilson, Shaun. 111. Title. IV. Series. TA418.7.B73 I992 92-14999 620’.4Pdc20 CIP Butterworth-Heinemann 80 Montvale Avenue Stoneham, MA02180 Manning Publications Co. 3 his Street Greenwich, CT 06830 109 8 7 6 5 4 3 Printed in the Unired States ofAmerica Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com Contents Preface to Series ix Preface x Acronyms Glossary xi Contributors xvi INTRODUCTION AND SUMMARIES 1.0 Introduction I Technique Summaries 7-56 IMAGING TECHNIQUES (MICROSCOPY) 2.0 Introduction 57 2.1 Light Microscopy 60 2.2 Scanning Electron Microscopy, SEM 70 2.3 Scanning Tunneling Microscopy and 2.4 Transmission Electron Microscopy, TEM 99 Scanning Force Microscopy, STM and SFM 85 ELECTRON BEAM INSTRUMENTS 3.0 Introduction 117 3.1 Energy-Dispersive X-Ray Spectroscopy, EDS 120 3.2 Electron Energy-Loss Spectroscopy in the Transmission Electron Microscope, EELS 135 3.3 Cathodoluminescence, CL 149 3.4 Scanning Transmission Electron Microscopy, STEM 161 3.5 Electron Probe X-Ray Microanalysis, EPMA 175 V Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com STRUCTURE DETERMINATION BY DIFFRACTION AND SCATTERING 4.0 Introduction 193 4.1 X-Ray Diffraction, XRD 198 4.2 Extended X-Ray Absorption Fine Structure, EXAFS 214 4.3 Su&ce Extended X-Ray Absorption Fine Structure and Near Edge X-Ray Absorption Fine Structure, SEXAFS/NEXAFS Auger Electron Difiction, XPD and AED 227 4.4 X-Ray Photoelectron and 4.5 Low-Energy Electron Diffraction, LEED 252 4.6 Reflection High-Energy Electron Diffraction, WEED 264 240 ELECTRON EMISSION SPECTROSCOPIES 5.0 Introduction 279 5.1 X-Ray Photoelectron Spectroscopy, XPS 282 5.2 Ultraviolet Photoelectron Spectroscopy, UPS 300 5.3 Auger Electron Spectroscopy, AES 310 5.4 Reflected Electron Energy-loss Spectroscopy, REELS 324 X-RAY EMISION TECHNIQUES 6.0 Introduction 335 6.1 X-Ray Fluorescence, XRF 338 6.2 Total Reflection X-Ray Fluorescence Analysis, TXRF 349 6.3 Particle-Induced X-Ray Emission, PIXE 357 VISIBLE/W EMISSION, REFLECTION, AND ABSORPTION 7.0 Introduction 371 7.1 Photoluminescence, PL 373 7.2 Modulation Spectroscopy 385 7.3 Variable Angle Spectroscopic Ellipsometry, VASE 401 VIBRATIONAL SPECTROSCOPIES AND NMR 8.0 Introduction 413 8.1 Fourier Transform Infrared Spectroscopy, FTIR 416 8.2 RamanSpectroscopy 428 8.3 High-Resolution Electron Energy Loss Spectroscopy, HREELS 4-42 8.4 Solid State Nuclear Magnetic Resonance, NMR 460 vi Contents Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com ION SCATTERING TECHNIQUFS 9.0 Introduction 473 9.1 Rutherford Backscattering Spectrometry, RBS 476 9.2 Elastic Recoil Spectrometry, ERS 488 9.3 Medium-Energy Ion Scattering with Channeling and Blocking, MEIS 502 9.4 Ion scattering Spectroscopy, Iss 514 MASS AND OPTICAL SPECTROSCOPIES 10.0 10.1 10.2 10.3 10.4 10.5 10.6 10.7 10.8 10.9 Introduction 527 Dynamic Secondary Ion Mass Spectrometry, Dynamic SIMS Static Secondary Ion Mass Spectrometry, Static SIMS 549 Surfice Analysis by her Ionization, SAL1 Sputtered Neutral Mass Spectrometry, SNMS Laser Ionization Mass Spectrometry, LIMS Spark Source Mass Spectrometry, SSMS 598 Glow-Discharge Mass Spectrometry, GDMS 609 Inductively Coupled Plasma Mass Spectrometry, ICPMS Inductively Coupled Plasma-Optical Emission Spectroscopy, ICP-OES 633 532 559 586 571 624 NEUTRONANDNUCLEARTECHNIQUES 1'1.0 Introduction 645 1 1 .I Neutron Diffraction 648 11.2 Neutron Reflectivity 660 11.3 Neutron Activation Analysis, NAA 671 11.4 Nuclear Reaction Analysis, NRA 680 PHYSICAL AND MAGNETIC PROPERTIES 12.0 Introduction 695 12.1 Surface Roughness: Measurement, Formation by Sputtering, Impact on Depth Profiling 698 12.2 Optical Scatterometry 711 12.3 Magneto-optic Kerr Rotation, MOJSE 723 12.4 Physical and Chemical Adsorption Measurement of Solid Surface Areas 736 Contents vii Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com [...]... groupings of related techniques, a complete glossary of acronyms, and a tabular comparison of the major features of all 50 techniques The 10 volumes in the Series on characterization of particular materials classes include volumes on silicon processing, metals and alloys, catalytic materials, integrated circuit packaging, etc Characterization is approached from the materials user’s point of view Thus,...Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com Preface to Series This Materialj Characterization Series attempts to address the needs of the practical materials user, with an emphasis on the newer areas of surfice, interface, and thin film microcharacterization The Series is composed of the leading... of the leading volume, Enychpedia of Materialj Characterization, and a set of about 10 subsequent volumes concentrating on characterization of individual materials classes In the Encyclopedia, 50 brief articles (each 10-18 pages in length) are presented in a standard format designed for ease of reader access, with straightforward technique descriptions and examples of their practical use In addition... discussion with Marjan Bace of Manning Publications Comparly A gap exists between the way materials characterization is often presented and the needs of a large segment of the audience-the materials user, process engineer, manager, or student In our experience, when, at the end of talks or courses on analytical techniques, a question is asked on how a particular material (or processing) characterization problem... always probed more deeply than materials consisting of heavy elements 2 INTRODUCTION AND SUMMARIES Chapter 1 Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com Another confusing issue is that of “depth resolution.” It is a measurement of the technique’s ability to clearly distinguish a property as a function of depth For example a depth resolution of 20 A, quoted in an elemental... least 20 between them A depth profile is a record of the variation of a property (such as composition) as a function of depth Some of the techniques in this volume have essentially no intrinsic depth profiling capabilities; the signal is representative of the material integrated over a fived probing depth Most, however, can vary the depth probed by varying the condition of analysis, or by removing the... (i.e., luminescence spectra from selected areas of the sample are obtained) analysis of luminescent materials using electron probe instruments CL microscopy can be used for uniformity characterization (e.g., mapping of defects and impurity segregation studies), whereas CL spectroscopy provides information on various electronic properties of materials Range of elements Not element specific Chemical bonding... conditions depth resolutions of around 20 A can be achieved this way, but there are many artifacts to be aware of and the depth resolution usually degrades rapidly with depth Some aspects of sputter depth profiling are touched upon in the article “Surface Roughness” in Chapter 12, but for a more complete discussion of the capabilities and limitations of sputter depth profiling the reader is referred... for the characterization of solid materials, with emphasis on surfaces, intedices, thin films, and microanalytical approaches It is part of the Materzah CharacterizationSeries, copublished by Buttenvorth-Heinemann and Manning This volume can serve as a stand-alone reference as well as a companion to the other volumes in the Series which deal with individual materials classes Though authored by professional... a number of techniques specialize in this aspect In other cases a high degree of accuracy in measuring the presence of major components might be the issue Usually the techniques that are good fbr trace identification are not the same ones used to accurately quantify major components Most complete analyses require the use of 1 Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com multiple . Unregistered Version - http://www.simpopdf.com ENCYCLOPEDIA OF MATERIALS CHARACTERIZATION Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com MATERIALS CHARACTERIZATION SERIES Surfaces,. Series Titles Encyclopedia of Materiah Characterization, C. Richard Brundle, Characterization of Mekth and Alloys, Paul. H. Holloway and P. N. Characterization of Ceramics, Ronald. volume, Enychpedia of Materialj Characterization, and a set of about 10 subsequent vol- umes concentrating on characterization of individual materials classes. In the Encyclopedia, 50