Principles and Applications of NanoMEMS Physics docx

[...]... context, NanoMEMS- based applications will be predicated upon a multitude of physical phenomena, e.g., electrical, optical, mechanical, magnetic, fluidic, quantum effects and mixed domain Principles and Applications of NanoMEMS Physics contains five chapters Chapter 1 provides a comprehensive presentation of the fundamentals and limitations of nanotechnology and MEMS fabrication techniques Chapters 2 and. .. cursory in nature and only aims at providing an understanding of the fundamentals and issues of present and future NanoMEMS fabrication technologies 1.2.1 Conventional IC Fabrication Processes Conventional IC processes are based on photolithography and chemical etching, and are synthesized by the iterative application to a wafer of a cyclic sequence of steps, namely: Spin-casting and patterning, material... physical concepts and techniques, such as quantum information, second quantization, Lüttinger liquids, bosonization, and superconductivity It is also hoped that the book will be useful to faculty developing/teaching courses emphasizing physics and applications of nanotechnology, and to Nanotechnology researchers engaged in analyzing, modeling, and designing NanoMEMS- based devices, circuits and systems ACKNOWLEDGMENTS... areas of science and technology, thus giving rise to an unlimited amount of technical applications Since high technology fuels the prosperity of the world’s most developed nations, it is easy to see why the stakes are so high Progress in the field of miniaturization benefited from the advent of the semiconductor industry in the 1960s, and its race to increase profits through the downscaling of circuit... both pose a limit on the packing density of NEMS devices, as well as on the performance of RF MEMS devices [22] In the balance of this chapter, we present the fundamentals of the fabrication techniques which form the core of NanoMEMS devices, circuits and systems 1 2 NanoMEMS Fabrication Technologies NanoMEMS fabrication technologies extend the capabilities of conventional integrated circuit (IC) processes,... operations of forming precise patterns of metallization and doping (the controlled introduction of atomic impurities) onto and within the surface and bulk regions of a semiconductor wafer, respectively, with the performance of the resulting devices depending on the fidelity with which these operations are effected Excellent books on IC fabrication, giving in-depth coverage of the topic, already exist [23] and. .. Treatment of Spinless Electrons in One-Dimensional Wire 239 References 241 Index 253 PREFACE This book presents a unified exposition of the physical principles at the heart of NanoMEMS- based devices and applications NanoMEMS exploits the convergence between nanotechnology and microelectromechanical systems (MEMS) brought about by advances in the ability to fabricate nanometer-scale electronic and mechanical... conception of a number of atomic-level deposition and manipulation techniques, in particular, molecular beam epitaxy (MBE), originally exploited to construct laboratory devices in which the physics of electrons might be probed and explored, following the discovery of electron tunnelling in heavily-doped pn-junctions [3] Nanoelectronics did produce interesting physics, for instance, the discovery of Coulomb... example of this technique is illustrated by the creation of a cavity, shown in Figure 1.14 As suggested, the aspect ratio of the cavity or pit is determined by the etching properties of the atomic planes which, in turn, are function of the crystallographic properties and orientation of the wafer, in particular, the greater the number of atoms on a given plane, the slower its etching rate To understand... (HBTs), and high-electron mobility transistors (HEMTs), which exploit the conduction band discontinuities germane to heterostructures, and modulation doping to create 2-D electron confinement and quantization, respectively, and render devices superior to their silicon counterparts for GHz-frequency microwave and low-transistorcount digital circuit applications [9-14] The commercial success of the semiconductor . effects and mixed domain. Principles and Applications of NanoMEMS Physics contains five chapters. Chapter 1 provides a comprehensive presentation of the fundamentals and limitations of nanotechnology. alt="" Principles and Applications of NanoMEMS Physics Editorial Board Roger T. Howe, University of California, Berkeley D. Jed Harrison, University of Alberta Hiroyuki Fujita, University of Tokyo Jan-Ake. presents a unified exposition of the physical principles at the heart of NanoMEMS- based devices and applications. NanoMEMS exploits the convergence between nanotechnology and microelectromechanical