MANUFACTURING SYSTEM Edited by Faieza Abdul Aziz Manufacturing System Edited by Faieza Abdul Aziz Published by InTech Janeza Trdine 9, 51000 Rijeka, Croatia Copyright © 2012 InTech All chapters are Open Access distributed under the Creative Commons Attribution 3.0 license, which allows users to download, copy and build upon published articles even for commercial purposes, as long as the author and publisher are properly credited, which ensures maximum dissemination and a wider impact of our publications. After this work has been published by InTech, authors have the right to republish it, in whole or part, in any publication of which they are the author, and to make other personal use of the work. Any republication, referencing or personal use of the work must explicitly identify the original source. As for readers, this license allows users to download, copy and build upon published chapters even for commercial purposes, as long as the author and publisher are properly credited, which ensures maximum dissemination and a wider impact of our publications. Notice Statements and opinions expressed in the chapters are these of the individual contributors and not necessarily those of the editors or publisher. No responsibility is accepted for the accuracy of information contained in the published chapters. The publisher assumes no responsibility for any damage or injury to persons or property arising out of the use of any materials, instructions, methods or ideas contained in the book. Publishing Process Manager Marija Radja Technical Editor Teodora Smiljanic Cover Designer InTech Design Team First published April, 2012 Printed in Croatia A free online edition of this book is available at www.intechopen.com Additional hard copies can be obtained from orders@intechopen.com Manufacturing System, Edited by Faieza Abdul Aziz p. cm. ISBN 978-953-51-0530-5 Contents Preface IX Chapter 1 Particle Reduction at Metal Deposition Process in Wafer Fabrication 1 Faieza Abdul Aziz, Izham Hazizi Ahmad, Norzima Zulkifli and Rosnah Mohd. Yusuff Chapter 2 The Fundamentals of Global Outsourcing for Manufacturers 27 Aslı Aksoy and Nursel Öztürk Chapter 3 An Approach-Based on Response Surfaces Method and Ant Colony System for Multi-Objective Optimization: A Case Study 51 Barthélemy H. Ateme-Nguema, Félicia Etsinda-Mpiga, Thiên-My Dao and Victor Songmene Chapter 4 Reconfigurable Tooling by Using a Reconfigurable Material 69 Jorge Cortés, Ignacio Varela-Jiménez and Miguel Bueno-Vives Chapter 5 Adaptation of Manufacturing Systems in Dynamic Environment Based on Capability Description Method 93 Eeva Järvenpää, Pasi Luostarinen, Minna Lanz and Reijo Tuokko Chapter 6 Consideration of Human Operators in Designing Manufacturing Systems 119 Namhun Kim and Richard A. Wysk Chapter 7 Towards Adaptive Manufacturing Systems - Knowledge and Knowledge Management Systems 141 Minna Lanz, Eeva Jarvenpaa, Fernando Garcia, Pasi Luostarinen and Reijo Tuokko VI Contents Chapter 8 PLC-Based Implementation of Local Modular Supervisory Control for Manufacturing Systems 159 André B. Leal, Diogo L. L. da Cruz and Marcelo da S. Hounsell Chapter 9 Platform for Intelligent Manufacturing Systems with Elements of Knowledge Discovery 183 Tomasz Mączka and Tomasz Żabiński Chapter 10 Integrated Cellular Manufacturing System Design and Layout Using Group Genetic Algorithms 205 Michael Mutingi and Godfrey C. Onwubolu Chapter 11 Hybrid Manufacturing System Design and Development 223 Jacquelyn K. S. Nagel and Frank W. Liou Chapter 12 Environmental Burden Analyzer for Machine Tool Operations and Its Application 247 Hirohisa Narita Chapter 13 Digital Manufacturing Supporting Autonomy and Collaboration of Manufacturing Systems 261 Hasse Nylund and Paul H. Andersson Chapter 14 Modelling and Implementation of Supervisory Control Systems Using State Machines with Outputs 285 Moacyr Carlos Possan Junior and André Bittencourt Leal Chapter 15 Integrated Process Planning and Scheduling and Multimode Resource Constrained Project Scheduling: Ship Block Assembly Application 307 Raad Yahya Qassim Chapter 16 Reliability Evaluation of Manufacturing Systems: Methods and Applications 315 Alberto Regattieri Chapter 17 Migrating from Manual to Automated Assembly of a Product Family: Procedural Guidelines and a Case Study 331 Michael A. Saliba and Anthony Caruana Chapter 18 Stochastic Multi-Stage Manufacturing Supply Chain Design Considering Layered Mini-Cellular System Concept 361 Jing Huang and Gürsel A. Süer Contents VII Chapter 19 Stochastic Capacitated Cellular Manufacturing System Design with Hybrid Similarity Coefficient 381 Gökhan Eğilmez, Gürsel A. Süer and Orhan Özgüner Chapter 20 Facility Layout 405 Xiaohong Suo Chapter 21 Real-Time Petri Net Based Control System Design for Distributed Autonomous Robotic Manufacturing Systems 433 Gen’ichi Yasuda Preface This book attempts to bring together selected recent advances, tools, application and new ideas in manufacturing systems. Manufacturing system comprise of equipment, products, people, information, control and support functions for the competitive development to satisfy market needs. The book contains 21 chapters which covers the very latest developments and the most up-to-date techniques and systems in the following areas: Manufacturing Systems Design, Development and Operations Intelligent Manufacturing Systems Scheduling Systems Production Systems and Process Optimization Supply Chain Management and Logistics Digital Manufacturing Systems Control System Design Knowledge Management Systems Manufacturing Strategy Manufacturing System provides a comprehensive collection of papers on the latest fundamental and applied industrial research. The book will be of great interest to those involved in manufacturing engineering, systems and management and those involved in manufacturing research. Editor in Chief Engr. Dr. Faieza Abdul Aziz Universiti Putra Malaysia Co-Editors Dr. Azmah Hanim Mohamed Ariff, Universiti Putra Malaysia Dr. Azfanizam Ahmad, Universiti Putra Malaysia Ir.N.Jayaseelan, The Institution of Engineers, Malaysia Dr. Qaisar Ahsan, Center of Excellence for Science and Applied Technology, Islamabad, Pakistan X Preface Dr. Eng. Zakria Mahrousa, University of Aleppo, Syria Mohd Shukri Ibrahim, Universiti Putra Malaysia Awanis Romli, Universiti Malaysia Pahang [...]... nucleation, leaks into the system, contamination in gas source/flow lines and sputter off walls The particle may come from the gas phase nucleation, system leak or contaminated gas line Particle on the deposited film will cause film build-up on the chamber walls The source may come form the process chamber or from the wafer handling Fig 3 Particle under the deposited Film 6 Manufacturing System Fig 4 Particle... In-line monitoring and systematic machine excursion monitoring There are three methods of inspecting and measuring the particle, which are using production wafers through Systematic Machine Excursion Monitoring (STEM), production wafer that went to In-line monitoring process (ILM) flow and test wafers which is being used during machine qualification process 12 Manufacturing System In- line monitoring... can be obtained in process gas systems by using careful system design, high-quality compatible materials, minimum dead legs and leak rates, careful start-up and operating procedures, etc Low particle levels can also be obtained in gas cylinders through careful selection of cylinder materials, surface treatment and preparation, and through close attention to gas fill system design and operation (Hart,... the flowing distribution system Automatic regulators may produce increased particle levels (through regulator shedding, impurity nucleation, and condensational droplet formation) that are sometimes followed by system corrosion (Chowdhury, 1997) or suspended nonvolatile residue formation Gases are therefore filtered after pressure reduction and before entering the distribution system Ceramic, metal, or... gases to 0.003µm in large-volume gas systems Well-designed distribution systems should contribute a minimum of additional particulate contamination to the flowing gas As the particle may impact the wafer quality, which result in wafer scrap, corrective and preventive action must be made immediately to stop the particle contamination from becoming catastrophic Thus, a systematic problem solving method... semiconductor Deposition of aerosol particles on semiconductor wafers is a serious problem in the manufacturing of integrated circuits Particle deposition on the wafer surface can cause the circuit to malfunction, leading to a loss of yield With the circuit feature approaching 1 m in 4 Manufacturing System size of one-megabit memory chips, particle control is becoming increasingly more important (Benjamin... the Manufacturing Technicians are also capable to perform qualification job correctly based on the checklist The dedicated MT is summarized in table 2 Table 2 Manufacturing Technicians in-charged of Metal Deposition Machine 18 Manufacturing System 4.1.2 Inline monitoring (ILM) technician Based on the study, all shift ILM Technicians are also having more than two years of experience and capable to handle... deposition process, wafer will be cooled down in Chamber B and vented back into the atmosphere in the production pod at Load lock A or B Fig 9 Chamber Configuration of the Metal Deposition Machine 10 Manufacturing System 3 Cause and effect analysis diagram A case study has been conducted in one wafer fabrication company Downtime reduction at Metal Deposition process is being focused in this work In average,... (Grove, 1852; Faraday, 1857), up until the late 1960s evaporation was clearly the preferred film-deposition technique, owing to its higher deposition rates and general applicability to all types of 2 Manufacturing System materials Subsequently, the popularity of sputter deposition grew rapidly because of the need to fabricate thin films with good uniformity and good adhesion to the substrate surface (demand... defect in real time It is done in many ways, such as in line inspection, upon request from user, from production lots which go to ILM flow and also Systematic Machine Excursion Monitoring (STEM) lots Machine-related defect excursions are controlled by systematically checking process machines Production wafers are being used for STEM purpose Each of Metal Deposition machine need to do STEM activity . techniques and systems in the following areas: Manufacturing Systems Design, Development and Operations Intelligent Manufacturing Systems Scheduling Systems Production Systems and Process. Management and Logistics Digital Manufacturing Systems Control System Design Knowledge Management Systems Manufacturing Strategy Manufacturing System provides a comprehensive collection. Operators in Designing Manufacturing Systems 119 Namhun Kim and Richard A. Wysk Chapter 7 Towards Adaptive Manufacturing Systems - Knowledge and Knowledge Management Systems 141 Minna Lanz,