(Đồ án hcmute) analysis and optimization design new 1 dof compliant stage based on additive manufacturing method with circular hinge for highly position accuracy

MINISTRY OF EDUCATION AND TRAINING HO CHI MINH CITY UNIVERSITY OF TECHNOLOGY AND EDUCATION FACULTY FOR HIGH QUALITY TRAINING GRADUATION PROJECT MAJOR MECHANICAL ENGINEERING TECHNOLOGY RESEARCH AND IMPLEMENTATION OPTIMIZATION DESIGN NEW 1-DOF COMPLIANT STAGE BASED ON ADDITIVE MANUFACTURING METHOD WITH CIRCULAR HINGE FOR HIGHLY POSITIONING ACCURACY ADVISOR: DR DANG MINH PHUNG STUDENT: NGUYEN QUOC HUY DO PHAN TUONG VY SKL009919 Ho Chi Minh city, February 2023 HO CHI MINH UNIVERSITY OF TECHNOLOGY AND EDUCATION FALCUTY FOR HIGH QUALITY TRAINING DEPARTMENT OF MACHINERY MANUFACTURING TECHNOLOGY BACHELOR THESIS RESEARCH AND IMPLEMENTATION OPTIMIZATION DESIGN NEW 1-DOF COMPLIANT STAGE BASED ON ADDITIVE MANUFACTURING METHOD WITH CIRCULAR HINGE FOR HIGHLY POSITIONING ACCURACY SUPER VISOR: M.E DANG MINH PHUNG STUDENT NAME: NGUYEN QUOC HUY DO PHAN TUONG VY STUDENT ID: 18144022 18144061 Ho Chi Minh City, February, 2023 HO CHI MINH UNIVERSITY OF TECHNOLOGY AND EDUCATION FALCUTY FOR HIGH QUALITY TRAINING DEPARTMENT OF MACHINERY MANUFACTURING TECHNOLOGY BACHELOR THESIS ANALYSIS AND OPTIMIZATION DESIGN NEW 1-DOF COMPLIANT STAGE BASED ON ADDITIVE MANUFACTURING METHOD WITH CIRCULAR HINGE FOR HIGHLY POSITIONING ACCURACY SUPER VISOR: M.E DANG MINH PHUNG STUDENT NAME: NGUYEN QUOC HUY DO PHAN TUONG VY STUDENT ID: 18144022 18144061 Ho Chi Minh City, February, 2023 CỘNG HOÀ XÃ HỘI CHỦ NGHĨA VIỆT NAM Độc lập - Tự – Hạnh phúc PHIẾU NHẬN XÉT ĐỒ ÁN TỐT NGHIỆP (Dành cho giảng viên hướng dẫn) Họ tên sinh viên: Nguyễn Quốc Huy MSSV:18144022 Hội đồng: 02 Họ tên sinh viên: Đỗ Phan Tường Vỹ MSSV:18144061 Hội đồng: 02 Tên đề tài: NGHIÊN CỨU THIẾT KẾ ĐỊNH VỊ 01 BẬC TỰ DO TÍCH HỢP CƠ CẤU KHUẾCH ĐẠI CHUYỂN VỊ SỬ DỤNG CƠ CẤU MỀM CHO HỆ THỐNG ĐỊNH VỊ CHÍNH XÁC Ngành đào tạo: Mechanical Engineering Technology Họ tên GV hướng dẫn: ThS Đặng Minh Phụng Ý KIẾN NHẬN XÉT Nhận xét tinh thần, thái độ làm việc sinh viên: Nhận xét kết thực ĐATN 2.1.Kết cấu, cách thức trình bày ĐATN: 2.2 Nội dung đồ án: (Cơ sở lý luận, tính thực tiễn khả ứng dụng đồ án, hướng nghiên cứu tiếp tục phát triển) 2.3.Kết đạt được: 2.4 Những tồn (nếu có): Đánh giá: Mục đánh giá TT Hình thức kết cấu ĐATN Điểm Điểm đạt tối đa 30 Đúng format với đầy đủ hình thức nội dung 10 mục Mục tiêu, nhiệm vụ, tổng quan đề tài 10 Tính cấp thiết đề tài 10 Nội dung ĐATN 50 Khả ứng dụng kiến thức toán học, khoa học kỹ thuật, khoa học xã hội… Khả thực hiện/phân tích/tổng hợp/đánh giá 10 Khả thiết kế chế tạo hệ thống, thành phần, 15 quy trình đáp ứng yêu cầu đưa với ràng buộc thực tế Khả cải tiến phát triển 15 Khả sử dụng công cụ kỹ thuật, phần mềm chuyên ngành… Đánh giá khả ứng dụng đề tài 10 Sản phẩm cụ thể ĐATN 10 Tổng điểm 100 Kết luận:  Được phép bảo vệ  Không phép bảo vệ TP.HCM, ngày tháng năm 2023 Giảng viên hướng dẫn ((Ký, ghi rõ họ tên) CỘNG HOÀ XÃ HỘI CHỦ NGHĨA VIỆT NAM Độc lập - Tự – Hạnh phúc PHIẾU NHẬN XÉT ĐỒ ÁN TỐT NGHIỆP (Dành cho giảng viên phản biện) Họ tên sinh viên: Nguyễn Quốc Huy MSSV:18144022 Hội đồng: 02 STT: 28 Họ tên sinh viên: Đỗ Phan Tường Vỹ MSSV:18144061 Hội đồng: 02 STT: 28 Tên đề tài: NGHIÊN CỨU THIẾT KẾ ĐỊNH VỊ 01 BẬC TỰ DO TÍCH HỢP CƠ CẤU KHUẾCH ĐẠI CHUYỂN VỊ SỬ DỤNG CƠ CẤU MỀM CHO HỆ THỐNG ĐỊNH VỊ CHÍNH XÁC Ngành đào tạo: Mechanical Engineering Technology Họ tên GV phản biện: PGS.TS Phạm Huy Tuân Ý KIẾN NHẬN XÉT Kết cấu, cách thức trình bày ĐATN: Nội dung đồ án: (Cơ sở lý luận, tính thực tiễn khả ứng dụng đồ án, hướng nghiên cứu tiếp tục phát triển) Kết đạt được: Những thiếu sót tồn ĐATN: Câu hỏi: Đánh giá: Mục đánh giá TT Hình thức kết cấu ĐATN Điểm Điểm đạt tối đa 30 Đúng format với đầy đủ hình thức nội dung 10 mục Mục tiêu, nhiệm vụ, tổng quan đề tài 10 Tính cấp thiết đề tài 10 Nội dung ĐATN Khả ứng dụng kiến thức toán học, khoa học kỹ thuật, khoa học xã hội… 50 Khả thực hiện/phân tích/tổng hợp/đánh giá 10 Khả thiết kế, chế tạo hệ thống, thành phần, 15 quy trình đáp ứng yêu cầu đưa với ràng buộc thực tế Khả cải tiến phát triển 15 Khả sử dụng công cụ kỹ thuật, phần mềm chuyên ngành… Đánh giá khả ứng dụng đề tài 10 Sản phẩm cụ thể ĐATN 10 Tổng điểm 100 Kết luận:  Được phép bảo vệ  Không phép bảo vệ TP.HCM, ngày tháng năm 2023 Giảng viên phản biện ((Ký, ghi rõ họ tên) ACKNOWLEDGMENT We would like to express my sincere gratitude for Dang Minh Phung, my guidance, through all his support on our academic journey His vast knowledge and expertise have inspired us to strive for excellence and have made a significant impact on my growth and development as a student We are grateful for the time and effort my advisor put into providing us with a challenging and stimulating learning experience His passion for the subject and his dedication to teaching have made the classes enjoyable and memorable Thank you for being a mentor, a role model and a source of inspiration Your encouragement and support have been invaluable and I am grateful to have had the opportunity to learn from my advisor, M.E Dang Minh Phung i a) Effect of S1 and S2 on safety factor b) Effect of S2 and S3 on safety factor 59 c) Effect of S3 and S4 on safety factor d) Effect of S4 and U on safety factor Figure Response simulation affected on safety factor 60 CHAPTER MANUFACTURING AND EXPERIMENT 5.1 Manufacturing method 5.1.1 Water jet cutting Water jet cutting is a cutting method that uses a high-velocity or high-pressure jet of water to cut materials The material remove process is a type of erosion caused by high pressure water flows with typical forces of Ib Abrasive powders are mixed with water to cut hard metals, stone, composites, and ceramics Pure water jets are significantly less powerful than abrasive power jets [36] Water jet cutting has the following advantages: • It can perform high precision cutting, beveling, piercing, etching, and slotting with accuracies of 0.005 • This technique can be used to cut a wide variety of materials • They, like laser cutting, eliminate distortions caused by heat or burning • The edges of the parts can be produced smooth • They can cut a variety of materials up to inches thick Figure Water Jet cutting 5.1.2 Wire cutting method Wire cutting method is a type of manufacturing process used for creating complex shapes from metal or other materials It involves the use of a wire-like tool, made of electrical 61 discharge machining (EDM), to remove material and create the desired shape The wire acts as an electrode and creates sparks that erode the material, forming the desired shape This method is commonly used in the production of molds and dies, and it is preferred for hard materials that are difficult to machine using traditional methods Advantages of wire cutting method are: ● High precision: The method is capable of producing precise and accurate shapes with tight tolerances ● No physical contact: The wire never touches the workpiece, eliminating wear and tear of the cutting tool and reducing the risk of damaging the material ● Wide material compatibility: Wire cutting can be used on a variety of materials including metals, ceramics, and composites ● Hard material machining: It is suitable for machining materials that are difficult to cut using traditional methods, such as heat-resistant alloys and high-hardness steels ● Complex shapes: The method is suitable for machining complex shapes and geometries, including deep cavities and internal features ● No thermal damage: Unlike traditional cutting methods, wire cutting does not generate heat that can cause thermal damage to the material Figure Wire cutting theory Because of the benefits of wire cutting, the compliant mechanism is cut using this technique Since the material is 7075 aluminum because the yield strength to young's modulus 62 ratio is high, allowing for greater deflection before failure [2] The DoF stage sample was machined using this method not only for its advantages, but also because it is more costeffective compared to water cutting 5.2 Experiment The sample of DoF stage can be found in Figure 5.3 the complete experimental setup is depicted in Figure 5.4 Once the components are manufactured and assembled, the experiments are conducted with a laser sensor, as shown in Figure 5.5, to observe the mechanism's behavior when the actuators are in operation The experiments are carried out by manually activate the displacement instrument The displacement of the 1-DOF stage is measured on sensor display A small dot displacement is applied at the LAM, as depicted in Figure 5.5, and the point of output is calculated from the camera images mounted on the laser sensor Figure Sample of DoF stage 63 The complete experimental setup is shown in Figure 5.5 After the parts are manufactured and the setup is assembled, the experiments shown in Figure 5.5 are performed to observe the behavior of the mechanism when the displacement instrument are activated Figure Setting up the experiment 64 Figure 5 Measuring the DoF stage 65 Table Measuring experiments data Number Input displacement Output displacement (μm) (μm) 59 790 58 782 58 777 59 791 57 771 57 769 58 781 59 791 59 788 10 58 779 Ave 58.2 781.9 Table Error comperasion Simulation Experiments Error Displacement ratio 13.9 13.43 3.4% A displacement ratio between simulation and real experiments error is acceptable However, it is important to consider the specific requirements and constraints of the system being analyzed, as well as the purpose of the simulation, when evaluating the acceptability of the displacement ratio In conclusion, the acceptability of a displacement ratio error is 3.4% between simulation and real-life measurements will depend on the specific requirements and constraints of the system being analyzed, as well as the purpose of the simulation It is important to consider these factors and evaluate the error in the context of the overall design and analysis process 66 CHAPTER CONCLUSION In this research have proposed and developed a micro-drive amplification system that operates with an improved level of precision and accuracy The system was designed to operate without the need for any additional force or displacement, which was achieved by using simulations and experiments to assess its dynamic performance, and motion The results of this study showed that the system had exceptional dynamic performance, and precise linear motion, which made it a highly desirable solution for various applications One of the key features of the system was its adjustable amplify ratio, which enabled it to be secure and accurate even in the absence of non-motion direction forces or displacement This feature was instrumental in ensuring that the system could operate effectively in a variety of different scenarios Furthermore, this research conducted a detailed analysis of the system's motion performance, including Finite Element Analysis based on Response Surface Method and experiments, which showed that the system had a maximum linearity of 14 Based on the results of this research, it suggest that future work could be undertaken to further improve the design and accuracy of the system This could include developing more advanced simulations and experiments, as well as exploring alternative materials and designs to improve its performance even further Ultimately, the goal is to make the micro-drive amplification system even more reliable, precise, and effective for various applications, which would make it an even more valuable tool for engineers and designers 67 REFERENCE [1] Lobontiu N., "Compliant Mechanisms design of flexure hinges", CRC Press, 2003 [2] Howell L L., "Compliant Mechanisms", John Wiley & Sons, 2001 [3] Speich J., Goldfarb M.,” A compliant mechanism based three degree of freedom manipulator for small scale manipulation”, Robotica, Vol 18, pp 95-104, 1999 [4] Shorya A., “Synthesis and Analysis of Parallel Kinematic XY Flexure Mechanisms”, Ph.D Thesis, Massachusetts Institute of Technology, Cambridge MA, 2003 [5] Smith S T and Chetwynd D G., "Foundations of Ultraprecision mechanism design", Gordon and Breach Science, 1992 [6] Baker M S, Howell L L., “On-Chip Actuation of an In-Plane Compliant Bistable Micromechanism”, IEEE Micro Electro Mechanical Systems (MEMS), 2002 [7] B D Jensen, L L Howell, and L G Salmon, “Design of two-link in-plane, bistable compliant micro-mechanisms,” ASME J Mechan Design, vol 121, pp 416–423, Sept 1999 [8] Clements D., Howell L L, Masters N and Weight B L “Floating Pin Joints Fabricated From Two Layers of Polysilicon at the Micro Level” [9] Nielson A J., “Demonstration of the Pseudo-Rigid-Body Model for Macro and Micro Compliant Pantographs” [10] Blideran M.M., Bertsche G., Henschel W and Kern D P., “A mechanically actuated silicon microgripper for handling micro- and nanoparticles”, Elsevier, February 2006 [11] Nah S K and Zhong Z W., “A microgripper using piezoelectric actuation for microobject manipulation”, Elsevier, February 2006.102 [12] Hohl M., Krevet B and Just E., “SMA microgripper system”, Elsevier, October 2001 [13] Belfiore N.P., Scaccia M., Di Vasta A., Ianniello F., “Dynamic Performance of MicroCompliant Platforms: Experimental Analysis”, Robotics in Alpe-AdriaDanube Region (RAAD), 2006 [14] Bergna S., Gorman J.J., Dagalakis N.G., November, ” Design and modeling thermally actuated mems nano positioners”, ASME, 2005 68 [15] Attoh-Okine, N., “Uncertainty Analysis in Surface Micromachined Force Gauges: Convex Model Approach”, ASCE, 2004 [16] Compliant Mechanisms, 2000, Retrieved May 2007 from http://techtransfer.byu.edu/techabstracts/compliantmech.htm [17] Compliant Mechanisms at BYU, 2004, Retrieved May 2007 from http://research.et.byu.edu/llhwww/ [18] Yang, M.; Zhang, X.; Zhang, C.; Wu, H.; Yang, Y Design and Performance Research of a Precision Micro-Drive Reduction System without Additional Motion Micromachines 2022 [19] Dang, M.P.; Le, H.G.; Tran, N.T.D.; Chau, N.L.; Dao, T.-P Optimal Design and Analysis for a New 1-DOF Compliant Stage Based on Additive Manufacturing Method for Testing Medical Specimens Symmetry 2022 [20] Shorya A., ”Synthesis and Analysis of Parallel Kinematic XY Flexure Mechanisms”, 2003 [21] Ryu J W., Gweon D., Monnt K S., “Optimal Design of a flexure hinge based XYθ wafer stage”, 1997 [22] Kang B.H., Wen J T., Dagalakis N.G.,Gorman J.J.,“Analysis and Design of Parallel Mechanisms with Flexure Joints” ,2005 [23] Culpepper M.L., Anderson G., “Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism”, 2003 [24] Slocum A H., “Presicion Machine Design”, Prentice Hall, 1992 [25] Culpepper M.L., Anderson G., Petri P., “HexFlex: a planar mechanism for six axis manipulation and alignment”, ASPE, November 2002 [26] Dwivedy S K., Eberhard P., “Dynamic analysis of flexible manipulators, a literature review”, Mechanism and Machine Theory, 2006 [27] R.J Theodore, A Ghosal, “Modeling of flexible-link manipulators with prismatic joints”, IEEE, (1997) 296–305 Transactions on Systems, Man, and Cybernetics, Part B: Cybernetics 27 (2) 69 [28] Nowak, J.D.; Rzepiejewska-Malyska, K.A.; Major, R.C.; Warren, O.L.; Michler, J Insitu nanoindentation in the SEM Mater Today 2010, 12, 44–45 [29] Ebenstein, D.M.; Pruitt, L.A Nanoindentation of biological materials Nano Today 2006, 1,26–33 [30] Alderete, N.; Zaheri, A.; Espinosa, H A Novel In Situ Experiment to Investigate Wear Mechanisms in Biomaterials Exp Mech 2019, 59, 659–667 [31] Hu, Z.; Lynne, K.J.; Markondapatnaikuni, S.P.; Delfanian, F Material elastic–plastic property characterization by nanoindentation testing coupled with computer modeling Mater Sci Eng A 2013, 587, 268–282 [32] O’Brien, W Long-range motion with nanometer precision Photonics Spectra 2005, 39, 80–81 [33] Rabe, R.; Breguet, J.-M.; Schwaller, P.; Stauss, S.; Haug, F.-J.; Patscheider, J.; Michler, J Observation of fracture and plastic deformation during indentation and scratching inside the scanning electron microscope Thin Solid Films 2004, 470, 206-213 [34] Ding, B.; Li, Y.; Xiao, X.; Tang, Y.; Li, B Design and analysis of a 3-DOF planar micromanipulation stage with large rotational displacement for micromanipulation system Mech Sci 2017, 8, 117–126 [35] Jiang, C.; Lu, H.; Zhang, H.; Shen, Y.; Lu, Y Recent Advances on In Situ SEM Mechanical and Electrical Characterization of Low-Dimensional Nanomaterials Scanning 2017, 2017, 1985149 [36] Gianola, D.S.; Sedlmayr, A.; Mönig, R.; Volkert, C.A.; Major, R.C.; Cyrankowski, E.; Asif, S.A.S.; Warren, O.L.; Kraft, O In situ nanomechanical testing in focused ion beam and scanning electron microscopes Rev Sci Instrum 2011, 82, 063901 [37] Haque, M.; Saif, M Application of MEMS force sensors for in situ mechanical characterization of nano-scale thin films in SEM and TEM Sens Actuators A Phys 2002, 97–98, 239–245 70 [38] Lu, Y.; Ganesan, Y.; Lou, J A Multi-step Method for In Situ Mechanical Characterization of 1-D Nanostructures Using a Novel Micromechanical Device Exp Mech 2009, 50, 47–54 [39] Xu, Q Design and testing of a novel multi-stroke micropositioning system with variable resolutions Rev Sci Instrum 2014, 85, 025002 [40] Lu, K.; Zhang, J.; Chen, W.; Jiang, J.; Chen, W A monolithic microgripper with high efficiency and high accuracy for optical fiber assembly In Proceedings of the 9th IEEE Conference on Industrial Electronics and Applications, Hangzhou, China, 9–11 June 2014; pp 1942–1947 [41] Putra, A.S.; Huang, S.; Tan, K.K.; Panda, S.K.; Lee, T.H Design, modeling, and control of piezoelectric actuators for intracytoplasmic sperm injection IEEE Trans Control Syst Technol 2007, 15, 879–890 [42] Huang, H.; Zhao, H.; Mi, J.; Yang, J.; Wan, S.; Xu, L.; Ma, Z A novel and compact nanoindentation device for in situ nanoindentation tests inside the scanning electron microscope AIP Adv 2012, 2, 012104 [43] Huang, H.; Zhao, H.; Mi, J.; Yang, J.; Wan, S.; Yang, Z.; Yan, J.; Ma, Z.; Geng, C Experimental research on a modular miniaturization nanoindentation device Rev Sci Instrum 2011, 82, 095101 [44] Zhao, H.; Huang, H.; Fan, Z.; Yang, Z.; Ma, Z Design, Analysis and Experiments of a Novel in situ SEM Indentation Device In Nanoindentation in Materials Science; IntechOpen: London, UK, 2012 [45] Dang, M.P.; Le, H.G.; Le Chau, N.; Dao, T.-P A multi-objective optimization design for a new linear compliant mechanism Optim Eng 2019, 21, 673–705 [46] Wang, P.; Xu, Q Design of a flexure-based constant-force XY precision positioning stage Mech Mach Theory 2017, 108, 1–13 Symmetry 2022, 14, 1234 22 of 22 [47] Fan, S.; Liu, H.; Fan, D Design and development of a novel monolithic compliant XY stage with centimeter travel range and high payload capacity Mech Sci 2018, 9, 161–176 71 [48] Wadikhaye, S.; Yong, Y.; Moheimani, S Design of a compact serial-kinematic scanner for high-speed atomic force microscopy: An analytical approach Micro Nano Lett 2012, 7, 309–313 [49] Gauthier, M.; Piat, E Control of a particular micro-macro positioning system applied to cell micromanipulation IEEE Trans Autom Sci Eng 2006, 3, 264–271 [50] Ding, B.; Yang, Z.-X.; Zhang, G.; Xiao, X Optimum design and analysis of flexurebased mechanism for non-circular diamond turning operation Adv Mech Eng 2017, 9, 1687814017743353 [51] Ding, B.; Yang, Z.-X.; Xiao, X.; Zhang, G.; Yangd, Z.-X Design of ReconFigureurable Planar Micro-Positioning Stages Based on Function Modules IEEE Access 2019, 7, 15102– 15112 [52] Ding, B.; Zhao, J.; Li, Y Design of a spatial constant-force end-effector for polishing/deburring operations Int J Adv Manuf Technol 2021, 116, 3507–3515 [53] Deng, L.; Ling, M Design and integrated stroke sensing of a high-response piezoelectric direct-drive valve enhanced by push–pull compliant mechanisms Rev Sci Instrum 2022, 93, 035008 [54] Kim, H.-Y.; Ahn, D.-H.; Gweon, D.-G Development of a novel 3-degrees of freedom flexure based positioning system Rev Sci Instrum 2012, 83, 055114 [55] Wang, F.; Liang, C.; Tian, Y.; Zhao, X.; Zhang, D Design and Control of a Compliant Microgripper With a Large Amplification Ratio for High-Speed Micro Manipulation IEEE/ASME Trans Mechatron 2016, 21, 1262–1271 [56] Chang, S.H.; Du, B.C A precision piezodriven micropositioner mechanism with large travel range Rev Sci Instrum 1998, 69, 1785–1791 [57] Ling, M.; Howell, L.L.; Cao, J.; Chen, G Kinetostatic and Dynamic Modeling of Flexure-Based Compliant Mechanisms: A Survey Appl Mech Rev 2020, 72, 030802 [58] Le Chau, N.; Tran, N.T.; Dao, T.-P Topology and size optimization for a flexure hinge using an integration of SIMP, deep artificial neural network, and water cycle algorithm Appl Soft Comput 2021, 113, 108031 72 [59] Dang, M.P.; Le, H.G.; Le, N.N.T.; Le Chau, N.; Dao, T.-P Multiresponse Optimization for a Novel Compliant Z-Stage by a Hybridization of Response Surface Method and Whale Optimization Algorithm Math Probl Eng 2021, 2021, 9974230 [60] Dang, M.P.; Le, H.G.; Le Chau, N.; Dao, T.-P Optimization for a Flexure Hinge Using an Effective Hybrid Approach of Fuzzy Logic and Moth-Flame Optimization Algorithm Math Probl Eng 2021, 2021, 6622655 [61] Nguyen, D N., Ho, N L., Dao, T.-P., & Le Chau, N (2019) Multi-objective optimization design for a sand crab-inspired compliant microgripper Microsystem Technologies [62] Yildiz, A.R Hybrid Taguchi-differential evolution algorithm for optimization of multipass turning operations Appl Soft Comput 2013, 13, 1433–1439 [63] Dinh, V.B.; Le Chau, N.; Le, N.T.P.; Dao, T.-P Topology-based geometry optimization for a new compliant mechanism using improved adaptive neuro-fuzzy inference system and neural network algorithm Eng Comput 2021, 1–30 [64] Xu, Q Design, testing and precision control of a novel long-stroke flexure micropositioning system Mech Mach Theory 2013, 70, 209–224 [65] Li, X.; Tian, Y The design and new controller of a 1-DOF precision positioning platform In Proceedings of the 2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, Suzhou, China, 26–30 August 2013; pp 190–194 [66] Le Chau, N.; Tran, N.T.; Dao, T.-P An Optimal Design Method for Compliant Mechanisms Math Probl Eng 2021, 2021, 5599624 [67] Li, Xiaofeng; Li, Yangmin (2013) [IEEE 2013 IEEE 13th International Conference on Nanotechnology (IEEE-NANO) - Beijing, China (2013.08.5-2013.08.8)] 2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013) - Design and analysis of a 2-DOF micro-motion stage based on differential amplifier [68] Huang, S.-C., & Dao, T.-P (2016) Design and computational optimization of a flexurebased XY positioning platform using FEA-based response surface methodology International Journal of Precision Engineering and Manufacturing, 17(8), 1035–1048 doi:10.1007/s12541016-0126-5 73