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INTERNATIONAL STANDARD IEC 60747-14-1 First edition 2000-10 LICENSED TO MECON Limited - RANCHI/BANGALORE FOR INTERNAL USE AT THIS LOCATION ONLY, SUPPLIED BY BOOK SUPPLY BUREAU Semiconductor devices – Part 14-1: Semiconductor sensors – General and classification Dispositifs semiconducteurs – Partie 14-1: Capteurs semiconducteurs – Généralités et classification Reference number IEC 60747-14-1:2000(E) Publication numbering As from January 1997 all IEC publications are issued with a designation in the 60000 series For example, IEC 34-1 is now referred to as IEC 60034-1 Consolidated editions The IEC is now publishing consolidated versions of its publications For example, edition numbers 1.0, 1.1 and 1.2 refer, respectively, to the base publication, the base publication incorporating amendment and the base publication incorporating amendments and The technical content of IEC publications is kept under constant review by the IEC, thus ensuring that the content reflects current technology Information relating to this publication, including its validity, is available in the IEC Catalogue of publications (see below) in addition to new editions, amendments and corrigenda Information on the subjects under consideration and work in progress undertaken by the technical committee which has prepared this publication, as well as the list of publications issued, is also available from the following: • IEC Web Site (www.iec.ch) • Catalogue of IEC publications The on-line catalogue on the IEC web site (www.iec.ch/catlg-e.htm) enables you to search by a variety of criteria including text searches, technical committees and date of publication On-line information is also available on recently issued publications, withdrawn and replaced publications, as well as corrigenda • IEC Just Published This summary of recently issued publications (www.iec.ch/JP.htm) is also available by email Please contact the Customer Service Centre (see below) for further information • Customer Service Centre If you have any questions regarding this publication or need further assistance, please contact the Customer Service Centre: Email: custserv@iec.ch Tel: +41 22 919 02 11 Fax: +41 22 919 03 00 LICENSED TO MECON Limited - RANCHI/BANGALORE FOR INTERNAL USE AT THIS LOCATION ONLY, SUPPLIED BY BOOK SUPPLY BUREAU Further information on IEC publications INTERNATIONAL STANDARD IEC 60747-14-1 First edition 2000-10 LICENSED TO MECON Limited - RANCHI/BANGALORE FOR INTERNAL USE AT THIS LOCATION ONLY, SUPPLIED BY BOOK SUPPLY BUREAU Semiconductor devices – Part 14-1: Semiconductor sensors – General and classification Dispositifs semiconducteurs – Partie 14-1: Capteurs semiconducteurs – Généralités et classification IEC 2000 Copyright - all rights reserved No part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from the publisher International Electrotechnical Commission 3, rue de Varembé Geneva, Switzerland Telefax: +41 22 919 0300 e-mail: inmail@iec.ch IEC web site http://www.iec.ch Commission Electrotechnique Internationale International Electrotechnical Commission PRICE CODE K For price, see current catalogue –2– 60747-14-1 © IEC:2000(E) CONTENTS Page FOREWORD INTRODUCTION Clause Scope Normative references Definitions Semiconductor sensors Classification scheme for semiconductor sensors LICENSED TO MECON Limited - RANCHI/BANGALORE FOR INTERNAL USE AT THIS LOCATION ONLY, SUPPLIED BY BOOK SUPPLY BUREAU 60747-14-1 © IEC:2000(E) –3– INTERNATIONAL ELECTROTECHNICAL COMMISSION ––––––––––––– SEMICONDUCTOR DEVICES – Part 14-1: Semiconductor sensors – General and classification FOREWORD 2) The formal decisions or agreements of the IEC on technical matters express, as nearly as possible, an international consensus of opinion on the relevant subjects since each technical committee has representation from all interested National Committees 3) The documents produced have the form of recommendations for international use and are published in the form of standards, technical specifications, technical reports or guides and they are accepted by the National Committees in that sense 4) In order to promote international unification, IEC National Committees undertake to apply IEC International Standards transparently to the maximum extent possible in their national and regional standards Any divergence between the IEC Standard and the corresponding national or regional standard shall be clearly indicated in the latter 5) The IEC provides no marking procedure to indicate its approval and cannot be rendered responsible for any equipment declared to be in conformity with one of its standards 6) Attention is drawn to the possibility that some of the elements of this International Standard may be the subject of patent rights The IEC shall not be held responsible for identifying any or all such patent rights International Standard IEC 60747-14-1 has been prepared by subcommittee 47E: Discrete semiconductor devices, of IEC technical committee 47: Semiconductor devices The text of this standard is based on the following documents: FDIS Report on voting 47E/157/FDIS 47E/170/RVD Full information on the voting for the approval of this standard can be found in the report on voting indicated in the above table This publication has been drafted in accordance with the ISO/IEC Directives, Part The committee has decided that the contents of this publication remain unchanged until 2005 At this date, the publication will be • • • • reconfirmed; withdrawn; replaced by a revised edition, or amended A bilingual version of this standard may be issued at a later date LICENSED TO MECON Limited - RANCHI/BANGALORE FOR INTERNAL USE AT THIS LOCATION ONLY, SUPPLIED BY BOOK SUPPLY BUREAU 1) The IEC (International Electrotechnical Commission) is a worldwide organization for standardization comprising all national electrotechnical committees (IEC National Committees) The object of the IEC is to promote international co-operation on all questions concerning standardization in the electrical and electronic fields To this end and in addition to other activities, the IEC publishes International Standards Their preparation is entrusted to technical committees; any IEC National Committee interested in the subject dealt with may participate in this preparatory work International, governmental and non-governmental organizations liaising with the IEC also participate in this preparation The IEC collaborates closely with the International Organization for Standardization (ISO) in accordance with conditions determined by agreement between the two organizations –4– 60747-14-1 © IEC:2000(E) INTRODUCTION This part of IEC 60747 should be read in conjunction with IEC 60747-1 It provides basic information on semiconductor – terminology; – letter symbols; – essential ratings and characteristics; – measuring methods; – acceptance and reliability LICENSED TO MECON Limited - RANCHI/BANGALORE FOR INTERNAL USE AT THIS LOCATION ONLY, SUPPLIED BY BOOK SUPPLY BUREAU 60747-14-1 © IEC:2000(E) –5– SEMICONDUCTOR DEVICES – Part 14-1: Semiconductor sensors – General and classification Scope Normative references The following normative documents contain provisions which, through reference in this text, constitute provisions of this part of IEC 60747 For dated references, subsequent amendments to, or revisions of, any of these publictions not apply However, parties to agreements based on this part of IEC 60747 are encouraged to investigate the possibility of applying the most recent editions of the normative documents indicated below For undated references, the latest edition of the normative document referred to applies Members of ISO and IEC maintain registers of currently valid International Standards IEC 60721-2-1:1982, Classification of environmental conditions – Part 2: Environmental conditions appearing in nature – Temperature and humidity IEC 60721-3-0:1984, Classification of environmental conditions – Part 3: Classification of groups of environmental parameters and their severities – Introduction Amendment (1987) IEC 60747-1:1983, Semiconductor devices – Discrete devices – Part 1: General Definitions For the purpose of this International Standard, the following definitions apply This clause states terms and definitions with letter symbols used for sensors 3.1 ambient conditions allowed ambient conditions that may have serious effects on sensor operation such as temperature, acceleration, vibration, shock, ambient pressure (e.g high altitudes), moisture, corrosive materials, and electromagnetic field NOTE The allowed ambient conditions for a sensor should be specified so that the sensor can perform within its specified tolerance NOTE Refer to IEC 60721-2-1 and IEC 60721-3-0 for basic conditions 3.2 full scale span (FSS) the algebraic difference between the end-points of the output NOTE The upper limit of sensor output over the measuring range is called the full scale output (FSO) which is the sum of the offset signal plus the full scale span (see figure 1) LICENSED TO MECON Limited - RANCHI/BANGALORE FOR INTERNAL USE AT THIS LOCATION ONLY, SUPPLIED BY BOOK SUPPLY BUREAU This part of IEC 60747-14 describes general items concerning the specifications for sensors, which are the basis for specfications given in other parts of this series for various types of sensors Sensors described in this standard are basically made of semiconductor materials; however, the statements made in this standard are also applicable to sensors using materials other than semiconductor, for example dielectric and ferroelectric materials –6– 60747-14-1 © IEC:2000(E) Output (e.g voltage) Full scale span (FSS) Full scale output (FSO) Offset Measuring range 100 % Measurand (e.g pressure) IEC 1869/2000 Figure – Output-measurand relationship of a linear-output sensor with an offset 3.3 hysteresis the maximum difference in output, at any measurand value, within the measuring range when the value is approached first with an increasing and then decreasing measurand (see figure 2) NOTE Hysteresis is expressed in percent of FSO during one calibration cycle 3.4 linearity the closeness between the calibration curve and a specified straight line NOTE There are two basic methods for calculating linearity: end-point straight line fit or a least squares best line fit While a least squares fit gives the "best case" linearity error (lower numerical value), the calculations required are burdensome Conversely, an end-point fit will give the "worst case" error (often more desirable in error budget calculations) and the calculations are more straightforward The result is called the end-point or terminal linearity 3.5 measuring range the set of values for a measurand for which the error of a measuring instrument is intended to lie within specified limits (see figure 1) NOTE The upper and lower limits of the specified measuring range are sometimes called "maximum capacity" and "minimum capacity", respectively NOTE In some other fields of knowledge, "range" is used to mean the difference between the greatest and the smallest values LICENSED TO MECON Limited - RANCHI/BANGALORE FOR INTERNAL USE AT THIS LOCATION ONLY, SUPPLIED BY BOOK SUPPLY BUREAU 60747-14-1 © IEC:2000(E) –7– Output Repeatability Hysteresis Start Percent 100 Measurand IEC 1870/2000 Figure – Hysteresis and repeatability 3.6 offset the output of a sensor, under room-temperature condition, unless otherwise specified, with zero measurand applied (see figure 1) 3.7 operating life the minimum duration over which the sensor will operate, either continuously or over a number of on-off cycles whose duration is specified, without changing performance characteristics beyond specified tolerances 3.8 output quantity quantity, usually electrical and a function of the measurable, produced by a sensor NOTE The output format includes analogue output (e.g a continuous function of the measurand, such as voltage amplitude, voltage ratio, and changes in capacitance) NOTE Frequency output (i.e the number of cycles or pulses per second as a function of the measurand) and frequency-modulated output (i.e frequency deviation from a centre frequency) are also forms of analogue output NOTE Another output format is the digital output which represents the measurand in the form of discrete quantities coded in some system of notation (e.g binary code) 3.9 overload (or overrange) the maximum magnitude of measurand that can be applied to a sensor without causing a change in performance beyond specified tolerances NOTE A key parameter of the overload characteristics is the recovery time, which is the amount of time allowed to elapse after removal of an overload condition before the sensor performs again within the specified tolerances 3.10 repeatability the ability of a sensor to reproduce output readings at room temperature, unless otherwise specified, when the same measurand is applied to it consecutively, under the same conditions and in the same direction (see figure 2) NOTE It is expressed as the maximum difference between output readings as determined by two calibration cycles (see figure 2) It is usually stated as "within × % FSO" LICENSED TO MECON Limited - RANCHI/BANGALORE FOR INTERNAL USE AT THIS LOCATION ONLY, SUPPLIED BY BOOK SUPPLY BUREAU –8– 60747-14-1 © IEC:2000(E) 3.11 resolution the minimal change of the measurand value necessary to produce a detectable change at the output NOTE When the measurand increment is from zero, it is called the threshold 3.12 selectivity the ability of a sensor to measure one measurable (e.g one chemical component) in the presence of others 3.13 sensitivity the quotient of the change in sensor output to the change in the value of the measurable S( x a ) = dy dx x = x a NOTE It is desirable to have a high and, if possible, constant sensitivity For a sensor having y = k x +b, where k and b are constants, the sensitivity S is k for the entire measuring range For a sensor having y = k x +b, the sensitivity S is k x and changes from one point to another over the measuring range 3.14 sensor device which is affected by the measurand (stimulus) and provides an output quantity (response) 3.15 span modulus of the difference between the two limits of the range and applies to measurand and output 3.16 stability the ability of a sensor to maintain its performance characteristics for a certain period of time NOTE Unless otherwise stated, stability is the ability of a sensor to reproduce output readings, obtained during the original calibration, and under constant room conditions, for a specified period of time It is typically expressed as a percentage of FSO 3.17 time of response the time interval, with the apparatus in a warmed-up condition, between the time when an instantaneous variation in volume ratio is produced at the apparatus inlet and the time when the response reaches a stated percentage (x) of the final indication Semiconductor sensors The word "sensor" is derived from the Latin word sentire which means "to perceive" The word "sensor" has some connection with our human senses It may provide us with information about physical and chemical signals, which could not otherwise be directly perceived by our senses, by detecting an input signal (or energy) and converting it to another form of output signal (or energy) The Concise Oxford Dictionary states the word "sensor" as "a device that responds to a physical (or chemical) stimulus (such as heat, light, sound, pressure, magnetism, or particular motion) and transmits a resulting impulse (as for measurement or operating a control)" Semiconductor sensors are semiconductor devices in which the semiconductor materials are mainly responsible for sensing LICENSED TO MECON Limited - RANCHI/BANGALORE FOR INTERNAL USE AT THIS LOCATION ONLY, SUPPLIED BY BOOK SUPPLY BUREAU NOTE It is the slope of the calibration curve (see figure 1) For a sensor in which the output y is related to the measurand x by the equation y = f ( x ), the sensitivity S ( x a ), at point x a is: 60747-14-1 © IEC:2000(E) –9– Another term closely related to sensor is "transducer" which is derived from the Latin word transducere , meaning "to lead across" Signals as well as energy can be "lead across" a transducer, as it is a device that converts energy from one system to another in the same or in a different form The essential differences between sensors and transducers are not significant A sensor performs a transducing action and the transducer shall of course sense some signals of the surrounding environment Classification scheme for semiconductor sensors LICENSED TO MECON Limited - RANCHI/BANGALORE FOR INTERNAL USE AT THIS LOCATION ONLY, SUPPLIED BY BOOK SUPPLY BUREAU Table lists the measurands which are defined as the input quantities, properties, or conditions that are to be detected or measured by sensors For example, if the measurand is heat, it is measured by a thermal sensor; if it is pressure, it is measured by a pressure sensor The measurands, arranged in alphabetical order, are: acoustic, biological, chemical, electrical, magnetic, mechanical, optical, radiational, and thermal properties Each entry in table not only represents the measurand itself, but also its temporal or spatial distribution – 10 – 60747-14-1 © IEC:2000(E) Table – Measurands LICENSED TO MECON Limited - RANCHI/BANGALORE FOR INTERNAL USE AT THIS LOCATION ONLY, SUPPLIED BY BOOK SUPPLY BUREAU Acoustic 1.1 Wave amplitude, phase, polarization, spectrum 1.2 Wave velocity 1.3 Other (specify) Biological 2.1 Biomass (identities, concentrations, states) 2.2 Other (specify) Chemical 3.1 Components (identities, concentrations, states) 3.2 Other (specify) Electrical 4.1 Charge, current 4.2 Potential, potential difference 4.3 Electric field (amplitude, phase, polarization, spectrum) 4.4 Conductivity 4.5 Permittivity 4.6 Other (specify) Magnetic 5.1 Magnetic field (amplitude, phase, polarization, spectrum) 5.2 Magnetic flux 5.3 Other (specify) Mechanical 6.1 Position (linear, angular) 6.2 Velocity 6.3 Acceleration 6.4 Force 6.5 Stress, pressure 6.6 Strain 6.7 Mass, density 6.8 Moment, torque 6.9 Speed or flow, rate of mass transport 6.10 Shape, roughness, orientation 6.11 Stiffness, compliance 6.12 Viscosity 6.13 Crystallinity, structural integrity 6.14 Level (of liquid) 6.15 Other (specify) Optical 7.1 Wave amplitude, phase, polarization, spectrum 7.2 Wave velocity 7.3 Other (specify) Radiation 8.1 Type 8.2 Energy 8.3 Intensity 8.4 Other (specify) Thermal 9.1 Temperature 9.2 Flux 9.3 Specific heat 9.4 Thermal conductivity 9.5 Other (specify) 10 Humidity 10.1 Humidity, moisture 11 Other (specify) Standards Survey The IEC would like to offer you the best quality standards possible To make sure that we continue to meet your needs, your feedback is essential Would you please take a minute to answer the questions overleaf and fax them to us at +41 22 919 03 00 or mail them to the address below Thank you! 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