Introduction tem 2017 09

Introduction: Basics of Transmission Electron Microscopy Vietnam National University-HCMC Ho Chi Minh City University of Technology Faculty of Materials Technology Introduction: Basics of Transmission Electron Microscopy (TEM) HCMUT Faculty of Materials Technology, Ho Chi Minh City University of Technology 268 Ly Thuong Kiet street, Ward 14, District 10, Ho Chi Minh City, Viet Nam Tell: 38661320; Fax: 38661843 Copyright(c) 2000 All rights reserved Introduction: Basics of Transmission Electron Microscopy Vietnam National University-HCMC Ho Chi Minh City University of Technology Faculty of Materials Technology Outline _ History What is microcopy Why we use electrons as a probe Electron-matter interactions in a thin sample Components of the TEM TEM imaging modes HCMUT Faculty of Materials Technology, Ho Chi Minh City University of Technology 268 Ly Thuong Kiet street, Ward 14, District 10, Ho Chi Minh City, Viet Nam Tell: 38661320; Fax: 38661843 Copyright(c) 2000 All rights reserved Introduction: Basics of Transmission Electron Microscopy HCMUT Faculty of Materials Technology, Ho Chi Minh City University of Technology 268 Ly Thuong Kiet street, Ward 14, District 10, Ho Chi Minh City, Viet Nam Tell: 38661320; Fax: 38661843 Copyright(c) 2000 All rights reserved Vietnam National University-HCMC Ho Chi Minh City University of Technology Faculty of Materials Technology Introduction: Basics of Transmission Electron Microscopy HCMUT Faculty of Materials Technology, Ho Chi Minh City University of Technology 268 Ly Thuong Kiet street, Ward 14, District 10, Ho Chi Minh City, Viet Nam Tell: 38661320; Fax: 38661843 Copyright(c) 2000 All rights reserved Vietnam National University-HCMC Ho Chi Minh City University of Technology Faculty of Materials Technology Introduction: Basics of Transmission Electron Microscopy An extremely brief history HCMUT Faculty of Materials Technology, Ho Chi Minh City University of Technology 268 Ly Thuong Kiet street, Ward 14, District 10, Ho Chi Minh City, Viet Nam Tell: 38661320; Fax: 38661843 Copyright(c) 2000 All rights reserved Vietnam National University-HCMC Ho Chi Minh City University of Technology Faculty of Materials Technology Introduction: Basics of Transmission Electron Microscopy Vietnam National University-HCMC Ho Chi Minh City University of Technology Faculty of Materials Technology (A) JEM 1.25 MeV HVEM Note the size of the instrument; often the high-voltage tank is in another room above the column (B) Zeiss HRTEM with a Cs corrector and an in-column energy filter HCMUT Faculty of Materials Technology, Ho Chi Minh City University of Technology 268 Ly Thuong Kiet street, Ward 14, District 10, Ho Chi Minh City, Viet Nam Tell: 38661320; Fax: 38661843 Copyright(c) 2000 All rights reserved Introduction: Basics of Transmission Electron Microscopy Vietnam National University-HCMC Ho Chi Minh City University of Technology Faculty of Materials Technology (C) Hitachi 200 keV dedicated STEM; note the absence of a viewing chamber Such instruments are often designed to aid failure analysis for the semiconductor device manufacturers Specimens thinned from wafers on the production line can be easily transferred and examined (D) JEOL 200 keV TEM/STEM; note also the absence of a viewing chamber HCMUT Faculty of Materials Technology, Ho Chi Minh City University of Technology 268 Ly Thuong Kiet street, Ward 14, District 10, Ho Chi Minh City, Viet Nam Tell: 38661320; Fax: 38661843 Copyright(c) 2000 All rights reserved Introduction: Basics of Transmission Electron Microscopy Vietnam National University-HCMC Ho Chi Minh City University of Technology Faculty of Materials Technology E) Nion 200 keV ultrahigh vacuumSuperSTEM; the only US-manufactured (S)TEM and current holder of the world record image resolution (F) FEI Titan Comparison with Ruska’s instrument (Figure 1.1), which is 70–80 years older than these instruments, is instructive HCMUT Faculty of Materials Technology, Ho Chi Minh City University of Technology 268 Ly Thuong Kiet street, Ward 14, District 10, Ho Chi Minh City, Viet Nam Tell: 38661320; Fax: 38661843 Copyright(c) 2000 All rights reserved Introduction: Basics of Transmission Electron Microscopy Vietnam National University-HCMC Ho Chi Minh City University of Technology Faculty of Materials Technology What is Microscopy ? _ Wikipedia defines it: Microscopy is the technical field of using microscopes to view objects and areas of objects that cannot be seen with the naked eye (objects that are not within the resolution range of the normal eye) HCMUT Faculty of Materials Technology, Ho Chi Minh City University of Technology 268 Ly Thuong Kiet street, Ward 14, District 10, Ho Chi Minh City, Viet Nam Tell: 38661320; Fax: 38661843 Copyright(c) 2000 All rights reserved Introduction: Basics of Transmission Electron Microscopy Vietnam National University-HCMC Ho Chi Minh City University of Technology Faculty of Materials Technology THERE ARE FOUR BASIC TYPES OF MICROSCOPIES: Optical microscopes: Bright field microscope, Dark field microscope, Phase contrast microscope, Fluorescent microscope… Electron microscopes: SEM, TEM… Scanning probe microscopes: AFM, NSOM, STM Ion microscopes: FIB… HCMUT Faculty of Materials Technology, Ho Chi Minh City University of Technology 268 Ly Thuong Kiet street, Ward 14, District 10, Ho Chi Minh City, Viet Nam Tell: 38661320; Fax: 38661843 Copyright(c) 2000 All rights reserved