Home Search Collections Journals About Contact us My IOPscience Multi-Axis Inertial Energy Harvester Based on Piezoelectric Crab-Legs with Partitioned Electrodes This content has been downloaded from IOPscience Please scroll down to see the full text 2016 J Phys.: Conf Ser 773 012002 (http://iopscience.iop.org/1742-6596/773/1/012002) View the table of contents for this issue, or go to the journal homepage for more Download details: IP Address: 80.82.77.83 This content was downloaded on 28/02/2017 at 14:19 Please note that terms and conditions apply You may also be interested in: Development of a non-contact multi-axis reverse engineering measurement system for small complex objects F J Shiou and Y C Lai VISAR 'cross-hairs': Simultaneous perpendicular line-imaging VISAR John B R Winters, Simon N Bland, Samuel J P Stafford et al Optical implementation of multifocal programmable lens with single and multiple axes Lenny A Romero, María S Millán and Elisabet Pérez-Cabré Nanometer-level axis of rotation metrology for a high-precision macromolecular X-ray diffractometer B Knapp, E Marsh, F Cipriani et al Three-axis capacitive accelerometer with uniform axial sensitivities T Mineta, S Kobayashi, Y Watanabe et al Engineering and implementation of the new diffractometer – D3 – for the macromolecular crystallography beamlines of the Swiss Light Source S Maag, U Frommherz, G Kotrle et al Design and calibration of a MEMS sensor for measuring the force and torque Felix Beyeler, Simon Muntwyler, Zoltan Nagy et al A PM FBG interrogation system Chen-Chun Ye, Stephen E Staines, Stephen W James et al PowerMEMS 2016 Journal of Physics: Conference Series 773 (2016) 012002 IOP Publishing doi:10.1088/1742-6596/773/1/012002 Multi-Axis Inertial Energy Harvester Based on Piezoelectric Crab-Legs with Partitioned Electrodes E E Aktakka, K Najafi Center for Wireless Integrated MicroSensing & Systems (WIMS2) EECS Department, University of Michigan, Ann Arbor, MI 48104, USA E-mail: aktakka@umich.edu Abstract This paper reports a microfabricated piezoelectric MEMS inertial energy harvester that can scavenge high-frequency mechanical vibrations in all three dimensions with an active inner volume of only 55 mm3 The device can generate 0.1 to 10.5 μW from out-of-plane vibrations (365-465 Hz), and 0.1 to 3.2 μW from in-plane vibrations (680-930 Hz) at 0.5 g acceleration input The reported harvester is demonstrated to be effective for multi-axis operation, with a favorable power density of 0.2-2.2 mW/cm3/g2 (at 0.1-0.5 g) with respect to previously reported microfabricated multi-axis vibration harvesters Introduction Harvesting vibrational energy from all spatial directions can both enable higher power output from an energy scavenger, and also extend its practical applications in real-life situations Previously, threedegrees-of-freedom energy harvesting in a single transducer has been reported only with electrostatic and electromagnetic devices [4-5], but with limited power density (